U.S. patent number 3,912,462 [Application Number 05/436,589] was granted by the patent office on 1975-10-14 for selective dimensional control of fine wire mesh.
This patent grant is currently assigned to Westinghouse Electric Corporation. Invention is credited to David L. Balthis, Frank A. Lindberg.
United States Patent |
3,912,462 |
Balthis , et al. |
October 14, 1975 |
Selective dimensional control of fine wire mesh
Abstract
A method of selectively increasing or building up the thickness
of a fine wire or wire mesh by means of an electron beam
evaporation and deposition process. The resultant fine wire has a
generally elongated rectangular cross-section. The cross-sectional
dimension of the resultant fine wire or mesh along the major axis
substantially exceeds the dimension along the minor axis.
Inventors: |
Balthis; David L. (Ellicott
City, MD), Lindberg; Frank A. (Baltimore, MD) |
Assignee: |
Westinghouse Electric
Corporation (Pittsburgh, PA)
|
Family
ID: |
23733036 |
Appl.
No.: |
05/436,589 |
Filed: |
January 25, 1974 |
Current U.S.
Class: |
428/608; 427/118;
427/124; 427/597; 428/637; 428/680; 428/938; 427/120; 427/247;
428/607; 428/662; 428/923 |
Current CPC
Class: |
B21C
37/04 (20130101); H01J 37/3053 (20130101); C23C
14/30 (20130101); Y10T 428/12944 (20150115); Y10S
428/938 (20130101); Y10S 428/923 (20130101); Y10T
428/12819 (20150115); Y10T 428/12438 (20150115); Y10T
428/12444 (20150115); Y10T 428/12646 (20150115) |
Current International
Class: |
C23C
14/30 (20060101); C23C 14/28 (20060101); B21C
37/00 (20060101); H01J 37/305 (20060101); B21C
37/04 (20060101); B21C 037/04 (); B23P
003/10 () |
Field of
Search: |
;117/227,231,107,128,16R,93.3 ;29/193.5,191.6,198 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Weinblatt; Mayer
Attorney, Agent or Firm: Sutcliff; W. G.
Claims
We claim:
1. Method of producing fine wire having an elongated generally
rectangular cross-section, which wire has a cross-section which in
a first direction is of a predetermined dimension, and in a second
direction normal to the first direction has a significantly greater
dimension, which method comprises:
a. disposing a wire within an evacuated chamber which is maintained
at less than about 8 .times. 10.sup.-.sup.6 Torr pressure, with the
wire disposed above an evaporable source of material disposed
within said chamber;
b. heating said wire to promote adherence of the later deposited
material;
c. directing an electron beam onto said source of material to
evaporate said material and deposit said material upon the heated
wire surface exposed to the source of material so that the
dimension in the direction normal to the surface exposed to said
material source is increased.
2. The method specified in claim 1, wherein said wire comprises a
generally planar fine wire mesh.
3. The method specified in claim 1, wherein the wire is preferably
nickel of from 0.1 to 1 mil thick, and a first tantalum layer is
electron beam evaporated and deposited thereon, after which nickel
is electron beam evaporated and deposited on the tantalum.
4. The method specified in claim 3, wherein the fine wire is
initially approximately from 0.1 to 1 mil in thickness and the
deposition increase is substantially only in the wire
thickness.
5. The method specified in claim 1 wherein successive layers of
different material are sequentially evaporated by electron beam
heating and deposited upon the heated wire surface.
6. The method specified in claim 5, wherein for a nickel wire
starting material, tantalum is first evaporated and deposited upon
the nickel wire, and thereafter nickel is evaporated and deposited
atop the tantalum.
7. The method specified in claim 1 wherein the electron beam power
is up to about 10,000 watts.
8. The method specified in claim 1, wherein the wire is heated at a
power input of about 500-1500 watts for about 45 minutes prior to
the electron beam evaporation deposition process.
9. The method specified in claim 1 wherein the wire comprises a
fine mesh, with the wire thickness being between 0.1 to 1 mil, and
the mesh has up to about 2000 wires per inch.
10. Fine wire of selected conductive material having an elongated
generally rectangular cross-section produced by the method of:
a. disposing a uniform cross-section wire mesh within an evacuated
chamber which is maintained at less than about 8 .times.
10.sup.-.sup.6 Torr pressure, with the wire mesh being disposed
above an evaporable source of material disposed within said
chamber;
b. heating said wire mesh to promote adherence of the later
deposited material;
c. directing an electron beam onto said source of material to
evaporate said material and deposit said material upon the heated
wire surface exposed to the source of material so that the wire
dimension in the direction normal to the surface exposed to said
material source is increased.
11. Method of producing a generally planar fine conductive mesh
which has a generally rectangular cross-section, with the
cross-section dimension in the direction normal to the plane of the
mesh being substantially greater than the other cross-section
dimension, which method comprises;
a. disposing a uniform cross-section conductive mesh within an
evacuated chamber which is maintained at less than about
8.times.10.sup.-.sup.6 Torr pressure, with the mesh disposed in a
plane generally normal to the path between the mesh and an
evaporable compatible conductive metal;
b. heating the mesh to promote adherence of the later deposited
compatible conductive metal;
c. directing an electron beam onto the compatible conductive metal
to evaporate same, and thereby deposit same, upon the heated mesh
surface exposed to the evaporated compatible conductive metal, so
that the mesh cross-section dimension in the direction normal to
the exposed surface and the plane of the mesh is increased, while
the mesh cross-section dimension in the other direction is
substantially unchanged.
Description
BACKGROUND OF THE INVENTION
The present invention relates to the manufacture of fine conductive
wire and of providing such wire with an elongated generally
rectangular cross-section. Fine conductive wire, and more
particularly meshes constructed of such fine wire, are used as
grids in electronic vidicon camera tubes, electron storage tubes,
and other such electron devices. By fine mesh is meant a mesh
wherein the wire dimension is between about 0.1 mil. to several
mils in diameter. Such fine mesh is typically formed from a thin
plate-like member which has a plurality of symmetrical apertures
through the member. Such apertures can be provided by forming the
member by an electroplating process, or by a etching process. The
transmission area of the mesh, that is the percentage of open area,
can vary from for example about 20 to 90% transmission, with the
number of wires varying for example from about 50 to 2,000 wires
per inch. Such mesh is very fragile and requires very careful
handling in order to avoid tearing or stretching. Such mesh is also
subjected to significant electrical stress due to the high
electrical fields in an operating device which can tend to deform
the mesh. A present method of increasing the mechanical strength of
such fine wire meshes is to increase the cross-sectional area of
the wires of the mesh. Such meshes are usually formed by an etching
or electro-forming or plating process. All such prior art
techniques increase the wire cross-section uniformly so that the
resultant wire remains substantially uniform in cross-section with
the width equal to the thickness, and this results in a reduction
in mesh transmission. This reduction in mesh transmission is
undesirable and limits usage of the wire, or limits the increase in
cross-sectional area for a given application.
SUMMARY OF THE PRESENT INVENTION
A method of producing fine wire or wire mesh in which the wire has
an elongated, generally rectangular cross-section is detailed. An
initially uniform cross-section wire is unidirectionally built up
by an electron beam evaporation process to significantly strengthen
the wire or mesh without reducing the transmission of the formed
mesh. The electron beam evaporation chamber is maintained at below
about 8 .times. 10.sup.-.sup.6 Torr to insure that a substantially
unidirectional build-up occurs.
In this way fine wire or mesh of selected conductive material can
be provided which has an elongated generally oval cross-section.
The wire typically has an approximate dimension of from 0.1 to 1
mil, in a first direction, and a dimension in a second direction
normal to the first direction which exceeds the first direction
dimension by greater than about a 2 to 1 ratio.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematical representation of a system for practicing
the present invention.
FIG. 2 is an enlarged side elevational view of a fine wire mesh of
the present invention.
FIG. 3 is a sectional view taken along lines III--III of FIG.
2.
DESCRIPTION OF THE PREFERRED EMBODIMENT
The present invention can be best understood by reference to the
exemplary embodiments shown in the drawings. In FIG. 1, an electron
beam evaporation chamber 10 is schematically represented. The
electron beam evaporation chamber 10 is connected by an inlet
manifold 12 via valve 14 to a high vacuum system 16 which permits
evacuation of the chamber 10 and maintenance of the chamber 10 at a
relatively low pressure of below about 8 .times. 10.sup.-.sup.6
Torr and preferably about 10.sup.-.sup.6 Torr.
A four pocket water cooled copper crucible 18 is disposed within
the chamber 10 and is incorporated with the electron beam source
22. The electron beam source 22 is connected by high voltage input
line 24 to an externally disposed high voltage power supply 26. The
electron beam is focused and deflected through a 270.degree.
deflection angle by magnetic focusing and deflection coils, which
are not shown. Such electron beam evaporation systems are well
known and are commercially available from Airco Temescal Company of
Berkeley, California. The electron beam is focused onto the surface
of the conductive metal 28 which is disposed within the proper
pocket of the multiple crucible 18. The evaporable metal 28 is
typically nickel which is supplied as evaporation grade or 99.999%
purity nickel shot, which has an average diameter of from about
one-eighth to one-quarter inch. The metal pieces melt and flow
together to form one large slug in the crucible when heated by the
electron beam. A thin shell or skull of metal in contact with the
water cooled crucible remains frozen or solid.
The generally planar fine mesh 30, seen in FIG. 2 in greater
detail, is disposed within chamber 10 above the crucible 18 and
spaced therefrom by a distance of about 6 to 8 inches. The planar
mesh is disposed in a plane perpendicular to a line normal to the
crucible. The fine mesh is supported above the crucible by means
32. An infrared heater means 34 is provided within the chamber 10
disposed above the mesh 30 and spaced therefrom, by for example
about 4 inches. The heater 34 is connected to an appropriate power
supply disposed outside of the chamber 10.
The fine mesh 30 is by way of example a generally planar member
which is about 0.16 mils thick and has a plurality of apertures
therethrough, so that the structural grids are spaced at about 500
grids per inch.
In practicing the present invention the chamber 10 is evacuated to
a low pressure of about 10.sup.-.sup.6 Torr and the valve 14 is
open during the evaporation process. The infrared heaters are
operated at a power input of about 1,500 watts for about 45 minutes
prior to the evaporation to heat the mesh 30 to promote adherence
of the later deposited material thereon. The electron beam is
thereafter initiated, typically at about 5 to 10 kilowatts electron
beam power, to heat and evaporate the nickel disposed within the
crucible 18. The evaporated nickel will be deposited upon the mesh
disposed above the crucible 18 and more particularly upon the mesh
surface facing the crucible. The evaporated metal will be
unidirectionally deposited upon the exposed surface of the planar
mesh, and a significant build up in this direction will occur. The
metal deposited in this manner builds up thickness in the direction
of the source of the material without a corresponding increase in
width of the deposited material or of the mesh. In this way, the
thickness of the mesh can be selectively increased without
significantly reducing the mesh transmission. The resultant
dimension along the direction of build up for the wire described
above is to provide a wire which is about 1.6 mils thick. This
provides a significant increase in the dimension of the wire in the
direction of deposition. There is a slight increase in the width of
the wire in the direction normal to the thickness build up, but
this is typically of the order of about a 15% increase in the
width. This relatively small increase in the width of the wire of
the mesh thus minimizes the reduction in transmission of the mesh.
The thickness of the resultant wire exceeds the width by about a 10
to 1 ratio.
The wire described above as nickel can be other conductive metals
such as copper, aluminum, gold, titanium, and similar conductive
elements and alloys. The evaporable metal may be the same metal as
the wire substrate or can be another compatible metal. Thus the
evaporable metal may by way of example be gold, nickel, tantalum,
or silver.
It is sometimes desirable in depositing a selected metal upon the
wire substrate to first deposit a thin layer of an adherence
promoting metal. For a nickel wire substrate, it is desirable to
first electron beam evaporate and deposit a tantalum layer of about
1000 Angstroms thickness, again upon the surface of the wire or
mesh exposed to or facing the crucible. A plurality of crucibles
are provided within the chamber in practicing this embodiment. The
crucibles are movable into the position indicated in FIG. 1 where
the electron beam is focused onto the metal surface within the
crucible. The evaporated tantalum will deposit on the nickel
substrate and actually tend to embed itself in the nickel wire
surface. The nickel containing crucible is then moved to the beam
focus point to permit evaporation and deposition of nickel onto the
freshly deposited tantalum. The rate of deposition of the metal
upon the wire mesh is a function of the electron beam power input
and for example for nickel with an electron beam power input of 5KW
approximately 1.5 mils. is deposited in about 10 minutes. The
thickness of metal deposited is observed by means of a crystal
monitor. The sensor of which is disposed within the chamber so that
as the metal is deposited upon the crystal surface the resonant
frequency of the crystal changes as a function of the metal
thickness. The thickness of the film is shown on a digital
display.
It should be apparent that the wire or mesh substrate may be an
insulator as well as being a conductive substrate. In the same way,
the deposited material may be other than a conductive metal. The
basis for producing the unidirectional build-up will work with any
material that is evaporable at the low chamber pressure of less
than about 8 .times. 10.sup.-.sup.6 Torr.
The structural members provided by the present invention have
improved mechanical rigidity which broadens their application in
electronic devices.
* * * * *