U.S. patent number 3,883,679 [Application Number 05/466,996] was granted by the patent office on 1975-05-13 for vapor source assembly.
This patent grant is currently assigned to Airco, Inc.. Invention is credited to Robert L. Shrader, Kazumi N. Tsujimoto.
United States Patent |
3,883,679 |
Shrader , et al. |
May 13, 1975 |
Vapor source assembly
Abstract
A vapor source assembly is described which incorporates a
magnetic shield for preventing at least some of the lines of force
in a magnetic field from passing through the crucible.
Inventors: |
Shrader; Robert L. (Castro
Valley, CA), Tsujimoto; Kazumi N. (El Cerrito, CA) |
Assignee: |
Airco, Inc. (Montvale,
NJ)
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Family
ID: |
27011452 |
Appl.
No.: |
05/466,996 |
Filed: |
May 6, 1974 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
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386489 |
Aug 8, 1973 |
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Current U.S.
Class: |
373/13 |
Current CPC
Class: |
C23C
14/30 (20130101); H01J 37/3053 (20130101) |
Current International
Class: |
C23C
14/30 (20060101); C23C 14/28 (20060101); H01J
37/305 (20060101); H01j 037/14 () |
Field of
Search: |
;13/31 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Envall, Jr.; R. N.
Attorney, Agent or Firm: Fitch, Even, Tabin &
Luedeka
Parent Case Text
This application is a continuation-in-part of application Ser. No.
386,489 filed Aug. 8, l973, now abandoned.
Claims
What is claimed is:
1. A vapor source assembly comprising means forming a crucible for
containing material to be vaporized, an electron beam gun for
producing an electron beam, deflecting means for producing at least
one magnetic field having lines of force extending transversely of
the path of the electron beam to deflect the electron beam through
an arcuate path from said electron beam gun to said crucible, said
deflecting means including a pair of pole members positioned on
opposite sides of said crucible and between which the lines of
force of the magnetic field extend, and magnetic shield means
positioned between said pole members and said crucible for
preventing at least some of the lines of force extending between
said pole members from passing through said crucible.
2. A vapor source assembly according to claim 1 wherein said
magnetic shield means comprise a wall of magnetic material
coaxially of said crucible.
3. A vapor source assembly according to claim 2 wherein said
crucible is of circular cross section and wherein said wall is
cylindrical.
4. A vapor source assembly according to claim 1 wherein said
deflecting means include means for steering the electron beam to
vary the position of impact thereof on material contained in said
crucible.
Description
This invention relates to the vaporization of materials under high
vacuum and, more particularly, to a vapor source assembly for use
in a vacuum deposition system.
High vacuum deposition systems often employ electron beams for
heating the material to be vaporized. Typically, the material is
contained within a crucible or equivalent structure and is
bombarded by one or more electron beams to heat the material in the
crucible to a sufficiently high temperature to vaporize.
Vaporization may occur through evaporation or sublimation,
depending on the material. The vapor then moves from the crucible
to a substrate positioned at an appropriate location, upon which
the vapor condenses to form a desired coating.
Vapor source assemblies are often used in high vacuum evaporation
and deposition systems as replaceable units. A vapor source
assembly typically comprises a crucible for containing material to
be vaporized, an electron beam gun for heating the material in the
crucible, and a suitable supporting structure. The vapor source
assembly may have means for producing one or more magnetic fields
to direct the electron beam through a desired path onto the surface
of the material in the crucible and to focus the beam to a desired
concentration and thereby control the size of the impact area on
the surface of the target.
Electron beam guns for use in vapor source assemblies generally
comprise an electron emissive filament or other element for
emitting electrons, and means for focusing the electrons into a
beam. The beam of electrons is accelerated along an initial path by
a suitable accelerating anode.
One type of vapor source assembly of particular advantage utilizes
an electron beam gun positioned beneath the level of the crucible
and such that the initial path of the electron beam is directed
away from the material in the crucible (i.e. not directly at the
target). A magnetic field or magnetic fields having lines of force
extending transversely to the direction of travel of the electrons
in the electron beam is used to deflect the beam of electrons
through a curving path onto the target. Deflection of the beam by
such so-called transverse fields enables the electron emissive
filament to be positioned out of a line of sight of the target.
Thus the filament is not directly exposed to materials vaporized
from the target, and evolved condensible materials do not readily
contact the surfaces of the filament. A substantial decrease in
erosion of the electron emissive filament and a resulting longer
life of the filament is achieved. Moreover, the tendency for
negative ions and secondary electrons to be trapped in the electron
beam is substantially reduced by the use of transverse fields. This
reduces space charge build up which can detrimentally affect
focusing and deflection. A successful electron beam assembly of
this type is shown and described in U.S. Pat. No. 3,177,535.
As shown in the cited patent, vapor source assemblies often employ
an upright crucible. Under some circumstances, spalling of
condensed materials from cooled surfaces of the vacuum enclosure,
and splashing and splattering of molten material from the upright
crucible, constitute a potential impairment to satisfactory
operation of an electron beam gun as described in the cited patent.
Where these facts are a problem, they may be alleviated by
positioning the electron emissive filament underneath the crucible
and by deflecting the electron beam through a curving path of
approximately 270.degree.. In such a case, the electron emissive
filament is protected from splashing, splattering and spalling.
In operating a vapor source assembly of the foregoing described
type, it may be desirable to provide a transverse field produced by
pole members positioned on opposite sides of the crucible. Because
the crucible is positioned between the pole members or pole pieces
extending on opposite sides thereof, the transverse magnetic field
for directing the beam through its arcuate path extends through the
crucible. As a result, even within the crucible itself, the
influence of the magnetic field will continue to bend the beam.
If the beam continues to curve within the crucible for the reason
described above, the position of the impact region of the beam on
the surface of the target material contained in the crucible will
be dependent upon the level of that surface within the crucible.
Thus, in the case of a molten pool contained within the crucible,
variations in the level of the pool required constant monitoring
and magnetic field changes in order to keep the same impact
position on the surface of the target. In some cases, the level of
the material within the crucible may lower to an extent where the
beam may curve around too far and cause uneven heating in the
crucible. With molten materials, this causes a stirring action
which in some cases leads to severe crucible erosion. In extreme
cases, the beam may completely curve around 360.degree. and emerge
from the vapor area and cause damage to surrounding components.
This not only is a dangerous condition, but it limits the amount of
useful material that can be evaporated.
When working with materials that sublimate, if the beam continues
to bend back after striking the surface of the target, the beam has
a tendency to tunnel into the material at an angle and give poor
coating distribution patterns. Ideally, the beam should strike the
target material perpendicular to the surface and continue in a
straight line to the bottom of the crucible.
It is an object of the present invention to provide an improved
vapor source assembly.
Another object of the invention is to provide a vapor source
assembly in which variations in the level of the target surface do
not result in variations in beam impact position.
A further object of the invention is to provide a vapor source
assembly wherein the electron beam strikes the target material
perpendicular to the surface and continues in a straight line to
the bottom of the crucible regardless of target surface level.
Other objects of the invention will become apparent to those
skilled in the art from the following description, taken in
connection with the accompanying drawing wherein the sole FIGURE is
a side view, partially in section, of a vapor source assembly
constructed in accordance with the invention.
Very generally, the vapor source assembly of the invention
comprises means 11 forming a crucible 12 for containing material 13
to be vaporized. An electron beam gun 14 produces an electron beam
15, and the beam is deflected through an arcuate path to the
crucible by a transverse magnetic field having lines of force
extending transversely of the path of the electron beam. The
transverse field is produced between a pair of pole members 16 and
17 positioned on opposite sides of the crucible. Magnetic shield
means 19 are positioned between the pole members and the crucible
for preventing at least some of the lines of force extending
between the pole members from passing through the crucible.
Referring now more particularly to the drawing, the crucible
forming means 11 comprise a copper block. A recess 21 is formed in
the block on the underside at one end thereof extending across the
entire width of the block. An annular recess 23 is machined on the
underside of the block coaxially with the crucible 12. A recess 25
is formed in the block at the end opposite the recess 21. The
crucible 12 is formed with frustoconical walls. A second
frustoconical section 27 extends from the upper rim 29 of the
crucible 12 to the upper surface of the block 11 and forms an upper
cone or hopper for the crucible. This protects the pole pieces 16
and 17 from condensation of vapor thereon, and provides a hopper
for melting loosely compacted material. The block 11 is cooled by
coolant passages 31 bored therein and suitable coolant conduits 33
communicate with the passages 31 for conducting flowing coolant,
such as water, to and from the passages. Suitable coolant
connections 35 are provided for the conduits 33.
A generally horizontal U-shaped recess 37 is formed in the block 11
just below the upper surface thereof to leave two generally
horizontal shelves 39 and 41 extending therefrom above the recess
25. An opening 43 is formed in the block 11 extending from the
upper surface thereof to the lower surface of the lower shelf 41 in
the recess 25. The opening 43 also partially intercepts the
frustoconical surface 27, extending downwardly about half way from
the upper surface of the block 11 to the upper rim 29 of the
crucible 12. The opening 43 and the recess 37 thus leave a vertical
wall 45 separating the opening 43 from the recess 37 and extending
between the shelves 39 and 41.
Support for the vapor source assembly includes a generally
rectangular base plate 47 of non-magnetic material having a support
block 51 supported thereon and secured thereto by any suitable
means, such as by welding. A permanent magnet 53 in rectangular
block form is supported between the base plate 47 and the block 11
by bolts, not shown, which extend through the magnet and into the
block. The crucible forming means or block 11 rests upon the block
51 and upon the magnet 53, with the magnet 53 fitting within the
recess 21 in the block 11.
The deflecting means comprise a pair of parallel pole plates 16 and
17 which are polarized by the magnet 53. The pole plates 16 and 17
are generally rectangular in shape except for chamfers 57 formed in
the lower edges toward one end. This provides the plates with a
slight taper. The lower edge of each of the plates 16 and 17 rests
upon the upper surface of the base plate 47 and the facing sides of
the plates 16 and 17 abut the adjacent sides of the block 51. The
same faces of the plates 16 and 17 also abut opposite sides of the
crucible forming block 11. Suitable screws, not shown, are provided
for attaching the plates 16 and 17 to the base plate 47 and the
block 11 to form a rigid assembly.
The permanent magnet 53 thus polarizes the pole plates 16 and 17 so
that the main magnetic field is established between the pole
plates. The main magnetic field will, of course, have some
variation in its strength with distance from the magnet. The taper
prevents the strength from falling off excessively, and for all
practical purposes, the main magnetic field is of substantially
uniform strength, the variation in strength being negligible.
The electron beam gun 14 is mounted to the block 51 just above the
base plate 47 and in the region between the pole plates 16 and 17.
The electron beam gun 20 may be of any suitable construction. In
the illustrated embodiment, however, the electron beam gun includes
an electron emitting filament 61 formed generally in the shape of
an inverted U. The filament may have the transverse section of the
U formed in a coil, as is known in the art, to provide a large
emissive area. The filament is formed of tungsten or other suitable
emissive material.
The filament is clamped in an upright position at each of its
parallel legs by clamping blocks 63. The clamping blocks 63 are
held by bolts 65 and clamp the filament against one of two cathode
blocks 69. The clamping blocks are formed with a suitable notch,
not shown, for accommodating the filament legs. The cathode blocks
are made out of molybdenum and are mounted adjacent each other and
formed with a central beam forming opening 71 therein which the
transverse portion of the filament 61 spans. The blocks are
electrically separated so that a suitable heating current can be
passed through the filament superimposed on the high voltage,
described below, for heating the filament to an emissive
temperature.
Each of the cathode blocks is provided with a recess 75 in the back
side in which the clamping blocks 63 seat. Filament current and
high negative voltage are supplied to the cathode blocks 69 by
means of high voltage straps 79, suitably bolted to the cathode
blocks. Bolts 85 secure the high voltage straps to the cathode
blocks, passing into a non-magnetic steel bar 86 on the opposite
side of the cathode blocks. A beam former plate 81 extends up the
back of and over the top of the cathode blocks 69. The plate 81 is
electrically connected in such a way as to prevent electrical
shorting of the filament current. The beam former plate 81 closes
the top of the opening 71 defined by the cathode blocks 69, and
forms a back for the opening. Thus, in effect, the filament is
disposed in a recess in a beam forming block maintained at a very
high negative potential.
An anode plate 91 is provided folded over the top of the beam
former plate 81 and spaced a distance therefrom. The anode plate is
supported on a suitably shaped support bracket 93 spaced from and
insulated from the bar 86. The anode plate 91 is held at ground
potential during the operation of the electron beam gun 14.
When properly energized, the electron beam gun 14 produces a stream
of electrons in the form of the electron beam 15 which initially
issues from the opening 71 in a direction generally away from the
target. This initial direction is substantially horizontal and to
the right in the drawing. Because of the transverse magnetic field
set up between the pole plates 16 and 17, and because the direction
of the lines of force in such fields is appropriately selected in
accordance with the right hand rule, the electrons of the electron
beam are deflected upwardly and then around through an arcuate path
for a change in direction of approximately 270.degree. to the top
surface of the material 13 in the crucible 12.
Sweeping means 18 are provided for moving the beam over the target
surface. These comprise three solenoidally wound coils, one of
which 103 is shown. The unshown coils have generally parallel axes
and the coil is supported extending transversely of the unshown
coils at one end thereof to form a generally U-shaped structure.
The coils are suitably supported within a U-shaped housing 107 of
generally square cross sectional configuration. Electrical
connection is provided on the housing for the coils by means of
terminals 111.
By applying currents of variable strength and direction to the
various coils through the terminals 111, a magnetic field may be
established within the region bounded by the coils. This magnetic
field has lines of force of variable or controllable orientation.
As the beam passes through this region, it may be deflected
according to the orientation of the lines of force therein. By
appropriate control of the direction and strength of the lines of
force, the beam may be moved or swept across the surface of the
target material within the crucible 12.
In operating the device, suitable attachment is made to provide a
high voltage negative potential on the cathode blocks 69 and on the
beam former plate 81, and also to provide a heating current for the
filament 61. The beam thus formed is deflected around through the
main magnetic field, passing through the region defined by the
sweep means 18. By suitably controlling the sweep means, a
repetitive impact pattern may be produced on the surface of the
melt at a very high frequency. Vapor thus produced moves to the
substrate, not shown, to thereby coat the substrate.
Under some circumstances, evaporation of certain materials (e.g.
aluminum) is carried out more efficiently with a diffuse beam
rather than a narrow, highly focused beam. To this end, small
plates 113 may be attached to the edges of the pole plates 16 and
17 by bolts 117. The plates 113 extend inwardly from the pole
plates 16 and 17. The wider the plates, the greater the beam
diffusion which results. The plates are of sufficient length to
exceed the width of the central section of the housing 107.
In the illustrated embodiment, the crucible is frustoconical in
shape, therefore having a circular cross section. The illustrated
magnetic shield means 19 comprise a mild steel annulus or
cylindrical wall which fits in the recess 23 surrounding the base
of the crucible and which is held therein by a set screw 121. The
mild steel cylinder operates to shunt the magnetic field in the
region of the crucible. This prevents at least some of the magnetic
lines of force from passing through the crucible and therefore
eliminates the previously mentioned undesirable characteristics
which are sometimes associated with many existing transverse field
electron beam vapor source assemblies. Any suitable shape and
material may be used for the magnetic shield.
As may be seen in the illustrated embodiment, it may not be
necessary that the shield 19 extend the full height of the crucible
12. In the embodiment shown, the shield not only blocks lines of
force at its level, but sufficiently inhibits field strength
directly above the shield level so as to produce the desired
results. In fact, it may be preferable to use a shield of a size as
small as possible consistent with the desired results, since the
larger the shield, the stronger the magnets producing the field
need to be to maintain a given field strength.
The vapor source assembly of the invention provides more uniform
heating because of the avoidance of undesired variation of beam
spot position on the surface of the target. This minimizes the
chance of erosion by preferential heating adjacent one side of the
crucible. In addition, longer runs per crucible charge are possible
because of the minimized effect of variation in the level of
material within the crucible. In a vapor source assembly of the
invention, the crucible can typically be depleted to less than
one-third full. In the case of evaporating an aluminum charge of 12
kilowatts, such result provides over one hour of continuous
running, which is a substantial improvement over that previously
possible. Since the beam impact position is not affected by the
level of the evaporant material, constant adjusting of the beam
position with variations in material height is unnecessary.
Moreover, the danger of the beam completely flipping out of the
crucible as a result of extremely low pool level is eliminated. In
the case of sublimating materials, erosion takes place vertically
rather than tunneling back at an angle, providing a better and more
predictable coating distribution. Because of its simplicity, the
magnetic shield is relatively low in cost.
The precise height of the magnetic shield may be selected in
accordance with the desired characteristics of the system. It has
been found that with a crucible depth of one inch, an axial height
of the magnetic shield 19 of 1/2 inch provides satisfactory
operation. Its thickness should be enough to provide sufficient
blockage of the magnetic lines of force.
It may therefore be seen that the invention provides an improved
electron beam vapor source assembly. Crucible erosion is reduced,
and beam position remains constant with changes in pool or target
level. Better coating uniformity is attainable in the case of
sublimating materials, and the ability to evaporate more material
per run is provided.
Various modifications of the invention in addition to those shown
and described herein will become apparent to those skilled in the
art from the foregoing description and accompanying drawing. Such
modifications are intended to fall within the scope of the appended
claims.
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