U.S. patent number 3,870,477 [Application Number 05/269,985] was granted by the patent office on 1975-03-11 for optical control of crystal growth.
This patent grant is currently assigned to Tyco Laboratories, Inc.. Invention is credited to Harold E. Labelle, Jr..
United States Patent |
3,870,477 |
Labelle, Jr. |
March 11, 1975 |
**Please see images for:
( Certificate of Correction ) ** |
Optical control of crystal growth
Abstract
The invention is a method of improving production of shaped
crystalline bodies according to the processes described in U.S.
Pat. Nos. 3,591,348 and 3,471,266. It consists of optically
monitoring the height of a vertical liquid meniscus in the region
of the growth zone and adjusting the rate of heating or the rate of
crystal pulling to maintain the height of the liquid meniscus
between selected limits, with the result that outside dimensions of
the crystalline product, e.g. the outside diameter of a sapphire
tube, will be substantially unvarying and will meet preset
tolerances.
Inventors: |
Labelle, Jr.; Harold E.
(Quincy, MA) |
Assignee: |
Tyco Laboratories, Inc.
(Waltham, MA)
|
Family
ID: |
23029412 |
Appl.
No.: |
05/269,985 |
Filed: |
July 10, 1972 |
Current U.S.
Class: |
117/16; 117/202;
117/210; 117/920; 117/950 |
Current CPC
Class: |
C30B
15/34 (20130101); Y10T 117/1008 (20150115); Y10T
117/104 (20150115) |
Current International
Class: |
C30B
15/34 (20060101); B01j 017/00 () |
Field of
Search: |
;23/273SP,31SP |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Yudkoff; Norman
Assistant Examiner: Sever; Frank
Attorney, Agent or Firm: Schiller & Pandiscio
Claims
What is claimed is:
1. In a method of growing a crystalline body of a selected material
so that said body has a selected cross-sectional shape for an
indefinite distance along its length, said method comprising
growing and pulling said crystalline body from a growth pool of
melt which is replenished via a capillary member by action of
capillary rise from a reservoir supply of melt, said growth pool of
melt also being characterized by a vertical meniscus which extends
between the interface thereof with said crystalline body and an
edge of said capillary member, the improvement comprising:
optically monitoring and measuring the height of said meniscus;
and
adjusting as required the speed at which said body is being pulled
or the temperature of said growth pool of melt so as to maintain
the height of said meniscus within predetermined limits, whereby to
cause said body to grow with a cross-section of substantially
constant size.
2. A method according to claim 1 wherein said growth pool of melt
has an edge configuration that corresponds to said selected
cross-sectional shape.
3. A method according to claim 2 wherein said capillary member has
substantially horizontally extending top end surface with an edge
configuration corresponding to said selected cross-sectional shape,
and further wherein said growth pool of melt is a film that
overlies said top end surface and said meniscus constitutes an edge
of said film.
4. A method according to claim 1 wherein said growth pool of melt
is a continuation of a column of melt in said capillary member.
5. A method according to claim 4 wherein said capillary member has
a substantially horizontal top end surface and said growth pool of
melt is a film overlying said top end surface.
6. A method according to claim 4 wherein said capillary member
comprises a single capillary filled with said column of melt and
said growth pool of melt has substantially the same cross-sectional
shape as said capillary.
7. A method of growing a crystalline body of a selected material
comprising establishing a growth pool of melt from a reservoir
supply of melt by means of a capillary member having at least one
capillary whose bottom end is positioned so that melt will fill
said capillary by action of capillary rise from said reservoir
supply, growing a substantially monocrystalline body from said
growth pool of melt and pulling said body from said growth pool of
melt as growth occurs thereon, said growth pool of melt being an
extension of a column of melt in said at least one capillary and
being bounded by a meniscus that extends from the interface thereof
with said growing body down to an edge of said capillary member,
optically monitoring and measuring the height of said meniscus,
holding substantially constant the rate at which said growing body
is pulled from said growth pool of melt, and adjusting the
temperature of said growth pool of melt as required to maintain the
height of said meniscus substantially constant within predetermined
limits.
8. In the process of growing a crystalline body of a selected
material from the upper end of a column of a melt of said material
in a heated capillary member having a bottom end that is connected
to a reservoir pool of said melt, said column being formed by
action of capillary rise from said reservoir pool and the interface
of said body and said column of melt being characterized by a
vertical meniscus formed by said melt above said capillary member,
the improvement comprising:
optically monitoring said meniscus to determine changes in the
height thereof; and
adjusting the rate at which heat is supplied to said capillary
member so as to maintain the height of said meniscus substantially
constant within predetermined limits.
9. A method of growing a substantially monocrystalline body of a
selected material so that said body has a controlled
cross-sectional size comprising:
establishing a growth pool of a melt of said material at the upper
end of a vertically-extending capillary formed in a member that is
disposed so that the bottom end of said capillary is in direct
communication with a reservoir pool of melt of said material;
growing and pulling a substantially monocrystalline body of said
material from said growth pool of melt with the surface tension of
the melt of said growth pool causing it to adhere to said body and
to form a vertical meniscus that extends between an upper end edge
of said member and said growing body;
replenishing the melt in said growth pool by inflow from said
reservoir pool via said capillary as said body is grown and
pulled;
optically monitoring and measuring the height of said meniscus;
and
adjusting the temperature of said growth pool of melt so as to
maintain the height of said meniscus substantially constant between
predetermined limits, whereby said growing body has a controlled
substantially constant cross-sectional size.
10. In a method of simultaneously growing two or more crystalline
bodies of a selected material so that each of said bodies has a
selected cross-sectional shape and size for an indefinite distance
along its length with the cross-sectional size of each body being
within prescribed maximum and minimum limits, said method
comprising growing and pulling said crystalline bodies from
individual growth pools of melt which are replenished via capillary
members from a reservoir supply of melt, said growth pools of melt
each having a vertical meniscus which extends between the interface
thereof with one of said bodies and an edge of one of said
capillary members, the improvement comprising:
pulling all of said bodies at the same pulling rate and maintaining
said pulling rate substantially constant;
optically monitoring and measuring the height of a single meniscus;
and
adjusting as required the rate of heating of said growth pools of
melt so as to maintain the height of the monitored meniscus
substantially constant at a level at which the body associated with
the monitored meniscus will grow to a cross-sectional size
substantially half-way between said maximum and minimum limits.
Description
This invention pertains to growth of crystalline bodies having a
predetermined cross-section and more particularly to improvements
in the processes described in my U.S. Pat. No. 3,591,348, issued
July 6, 1971 for Method of Growing Crystalline Materials and my
U.S. Pat. No. 3,471,266, issued Oct. 7, 1969 for Growth of
Inorganic Filaments.
My U.S. Pat. No. 3,,591,348 describes how to grow crystalline
bodies according to what is called the edge-defined, film-fed
growth technique (also now known as the EFG process). In the EPG
process the shape of the crystalline body is determined by the
external or edge configuration of the end surface of a forming
member which for want of a better name is called a die. The process
involves growth on a seed from a liquid film of feed material
sandwiched between the growing body and the end surface of the die,
with the liquid in the film being continuously replenished from a
suitable melt reservoir via one or more capillaries in the die
member. By appropriately controlling the pulling speed of the
growing body and the temperature of the liquid film, the film can
be made to spread (under the influence of the surface tension at
its periphery) across the full expanse of the end surface of the
die until it reaches the perimeter or perimeters thereof formed by
intersection of that surface with the side surface or surfaces of
the die. The angle of intersection of the aforesaid surfaces of the
die is such relative to the contact angle of the liquid film that
the liquid's surface tension will prevent it from overrunning the
edge or edges of the die's end surface. Preferably the angle of
intersection is a right angle whch is simplest to achieve and thus
most practical to have. The growing body grows to the shape of the
film which conforms to the edge configuration of the die's end
surface. Since the liquid film has no way of discriminating between
an outside edge and an inside edge of the die's end surface, a
continuous hole may be grown in the crystalline body by providing
in that surface a blind hole of the same shape as the hole desired
in the growing body, provided however, that any such hole in the
die's end surface is made large enough so that surface tension will
not cause the film around the hole to fill in over the hole.
The process described in said U.S. Pat. No. 3,471,266 employs a
forming member that defines a capillary which contains a column of
melt from which a crystal body is grown and pulled. Depending upon
the cross-sectional configuration of the capillary and by
appropriate control of the thermal conditions in the upper end of
the column of melt contained in the capillary, it is possible to
grow crystal bodies of selected materials having arbitrary selected
cross-sectional shapes. Thus, by employing a forming member having
a capillary in the shape of an annulus, it is possible to grow a
hollow tube. Similarly, if the capillary is circular in
cross-section, it is possible to grow a round rod or filament. The
forming member is mounted so that the capillary is connected to a
reservoir pool of melt, whereby the capillary is self-filling.
Accordingly, the process is sometimes known as the SFT method, the
term SFT being an abbreviation of the phrase "self-filling tube"
used to denote the forming member used to grow rods or
filaments.
Both of the foregoing processes are useful in growing hollow tubes
of alpha-alumina for use as envelopes in the manufacture of high
temperature sodium vapor lamps. For the latter purpose it is
essential (for several reasons, including minimizing problems in
sealing off the ends of the tubes) that the outer diameters of the
tubes be held to relatively close tolerances. Thus, for example, a
typical requirement is for the tubes to have an outer diameter
(o.d.) of 0.375 .+-. 0.003 inch.
In both of the above-described processes, substantial changes,
within limits, in the pulling speed and the temperature of the
growth interface are possible without terminating growth or causing
any substantial change in the cross-sectional configuration of the
growing body. However, changes in pulling speed and growth
interface temperature can affect the cross-sectional size of the
growing body. It is a relatively easy matter to hold the pulling
speed constant. Thus the usual practice, once the crystalline body
is growing to the desired shape, is to fix the pulling speed at a
suitable rate and to adjust the growth interface temperature (by
adjusting the rate of heating) so that the body will grow to the
desired size. However, there exists a problem in monitoring the
growing body and keeping it within the prescribed tolerance limits.
In growing an alpha-alumina tube for use as a lamp envelope, there
is also a tendency for the outside diameter to go slightly out of
round, so that the tube is slightly oval and is characterized by a
maximum and a minimum diameter. Although the differential between
the maximum and minimum diameter is relatively small, typically no
more than about 1 mil for a tube with a 0.375 inch o.d., it
increases the need to precisely control the operating parameters --
notably adjusting the growth interface temperature -- to minimize
variations in tube size. However, obtaining a precise measurement
of the temperature at the solid-liquid interface by means which do
not interfere with the growth process is difficult to achieve. An
obvious choice of temperature measuring instrument is an optical
pyrometer, but because of the disposition and relatively small size
of the growth interface, the emissivity of the forming member and
any radiation shields that may be associated with the forming
member tends to cause the pyrometer to yield an erroneous reading.
However, even if the pyrometer accurately measures the temperature
of the melt in the region of the growth interface, a change in
temperature does not necessarily means that the o.d. of a growing
tube has changed (a change in pulling speed may offset a change in
temperature enough so that no change in tube o.d. will result).
Furthermore, even knowing the exact temperature of the growth
interface and the pulling speed, it is impossible for the operator
to as certain precisely whether the o.d. of the growing tube is
within the tolerance limits or exceeds the lower or upper limit,
and hence the operator does not know whether the temperature needs
to be adjusted, or in what direction and by how much. If the growth
interface temperature is too hot, the tube will grow to a smaller
diameter, while if it is too cold, stress and grain boundaries may
occur in the product and the melt may start to solidify to the
forming member. The problem is complicated when several like
crystalline bodies are being pulled simultaneously at the same
speed from different die members fed by a common melt supply.
Measuring the growth interface temperature at one die member, even
if it could be done accurately, does not suffice as a measurement
of the growth temperatures at all of the dies since one die may be
at a higher or lower temperature than the others.
Accordingly, the primary object of this invention is to provide a
method of monitoring and controlling crystal growth so that the
outside dimensions of the growing body, notably the o.d. of a
tubular body, is within prescribed limits.
A further object is to improve upon the methods described and
claimed in said U.S. Pat. Nos. 3,591,348 and 3,471,266 by providing
a method of monitoring the crystal growth and maintaining the
cross-sectional size of the growing body substantially
constant.
These and other objects of the invention are achieved by optically
monitoring the height (thickness) of a selected portion of the melt
in the region of the growth zone and adjusting the operating
conditions, notably the rate of heating and thereby the growth
interface temperature so as to maintain said height substantially
constant. Other features and specific details of this invention are
set forth in the following description which is to be considered
together with the drawings wherein:
FIG. 1 is a sectional view in elevation of a crucible and die
assembly and illustrates growth of a crystalline tube according to
the EFG process;
FIG. 2 is a view like FIG. 1 but on a reduced scale of a crucible
and die assembly for growing a crystalline tube according to the
SFT process;
FIG. 3 is a fragmentary enlargement of the apparatus of FIG. 2 and
shows growth of a crystalline tube according to the SFT
process;
FIG. 4 is a fragmentary sectional view in elevation showing an
optical apparatus associated with a crystal-growing furnace for
monitoring crystal growth according to this invention; and
FIG. 5 is a plan view of the crucible and die used in arrangement
embodying four dies of the type shown in FIG. 1, as used in the
apparatus of FIG. 4.
Like numerals are used to indicate like parts in the several
figures.
The processes described in said U.S. Pat. Nos. 3,591,348 and
3,471,266 are both characterized by the presence of a meniscus of
melt extending between an edge of the die or forming member and the
growth interface. If a solid body such as a rod or filament is
being grown, the process is characterized by a single meniscus. If
a hollow body such as a round tube is being grown the process is
characterized by two menisci; one at the outside and one at the
inside as hereinafter described. I have determined that the height
(and also the degree of concavity) of the meniscus can change with
changes in the operating conditions. More importantly, the height
of the meniscus is affected by the temperature of the melt in the
region of the growth interface and the pulling speed, and I have
determined that, within limits, the outer diameter of a hollow tube
or a solid rod will decrease as the outer meniscus height increases
(an increase in the same diameters occurs if the outer meniscus
height decreases). It is to be noted also that the inner diameter
of a hollow tube will increase or decrease as the outer meniscus
height increases or decreases respectively. I have also determined
that a relatively small change in the outer diameter of a tube or
rod is reflected by a relatively large percentage change in
meniscus height. Thus the essence of the invention is to directly
measure the height of the meniscus, rather than the melt
temperature at the growth interface, and to use that measurement as
a basis for determining how to vary the rate of heating to achieve
a substantially constant outside diameter for a hollow tube or a
solid rod. The same technique may be used to grow other shapes,
e.g., flat ribbons, to prescribed sizes. Other features of the
invention are described below.
FIG. 1 shows a crucible-die assembly for use in growing a tubular
body according to the process of my U.S. Pat. No. 3,591,348. The
assembly comprises a crucible 2 containing a die assembly or
forming member 4 which consists of a round rod 6 that has a coaxial
cavity or blind hole 8 of circular cross-section at its top end so
that its substantially flat top and surface 10 is annular. Rod 6 is
made of a material that is wetted by and will not react with or
dissolve in the melt material. Hole 8 must have a diameter large
enough so that the film 20 (described below) will not close over
its upper end. As an alternative measure, hole 8 may be made so
that it extends for the full length of rod 6, i.e., so that its
bottom end is open to the melt in the crucible. If such is the
case, its diameter must be large enough so that it cannot fill with
melt by action of capillary rise.
The round rod 6 also has a plurality of small diameter of
longitudinally extending bores 12 (only two of which are visible in
FIG. 1) that are spaced substantially uniformly about its axis,
bores 12, are sized to function as capillaries for the melt 14
contained in the crucible. Rod 6 is affixed to a plate 16 that
rests on a shoulder 18 formed at the top end of the crucible. Rod 6
is mounted in a center hole in plate 16 and projects slightly above
its top surface. The bottom end of rod 6 is spaced from the bottom
of the crucible.
The apparatus of FIG. 1 is mounted in a suitable crystal growing
furnace, e.g. of the type disclosed in my aforesaid U.S. patents,
and a charge of material to be grown is placed in the crucible and
melted. The molten liquid will flow up into the capillaries 12 by
action of capillary rise. Essentially each capillary contains a
column of melt. The cross-sectional sizes of the capillaries 12 and
the length of rod 6 are preferably set so that for a given melt
material, e.g. alumina, the capillary action is sufficient to cause
the melt to fully fill the capillaries so long as the level of the
melt supply in the crucible is high enough to trap the bottom end
of the rod, i.e., high enough for the bottom end of the rod to be
immersed in the melt supply.
The choice of materials used to form the crucible and die assembly
depends upon the composition of the melt. By way of example, if the
melt is alumina, the crucible and die assembly are preferably made
of molybdenum or tungsten.
In practicing the process described in my U.S. Pat. No. 3,591,348,
a film of melt is established on the upper end surface 10 of the
forming member, as shown at 20. The film 20 overlies and conforms
to the configuration of the end surface 10 (the orifices of
capillaries 12 are ignored in determining the configuration of
surface 10). The film may be formed by bringing a seed crystal into
contact with melt in one of the capillaries and adjusting the
temperature of the melt in the capillaries and also the pulling
speed of the crystal so that crystal growth will occur on the seed
and so that, as the seed is withdrawn, surface tension will cause
the melt in contact with the seed to move up out of the capillary
and spread out onto the upper surface 10 to form the film 20. As
this occurs the crystal growth will spread laterally so that after
the surface is fully covered by film 20, crystal growth will occur
at all points along the horizontal expanse of the film and the
growing body will have a crosssectional shape conforming to the
shape of surface 10. An alternative and preferred mode of
establishing film 20 is to bring a seed (preferably one whose
cross-sectional shape corresponds to the shape of surface 10) into
contact with the end surface 10, and hold the seed there long
enough for some of it to melt and cover the end surface 10 as well
as connect with the melt in the capillary or capillaries. Then the
seed is withdrawn at a rate and with the melt film at a temperature
such that crystal growth will occur on the seed at all points along
the interface of the seed and the film 20. With the apparatus of
FIG. 1, the growing body will be a hollow tube 22.
As seen in FIG. 1, the melt film 20 is characterized by a meniscus
24 at its outer edge and a meniscus 26 at its inner edge. Each of
the menisci extends between an edge of the die's upper surface 10
and the growth interface and is concave, i.e. the two menisci are
bowed inwardly toward one another, as shown. It is to be understood
that as a practical matter it is not possible to observe the inner
meniscus 26 during crystal growth and for this reason only the
outer meniscus is measured and used as a basis for monitoring and
controlling the outer diameter of the growing tube 22. As
previously noted, the height h (and the degree of bowing) of
meniscus 24 will vary if a change is made in pulling speed and/or
the temperature off film 20, and the inner and outer diameters of
the growing tube 22 will change as the height of the meniscus
changes. More specifically, the inner and outer diameters of the
growing body will increase and decrease respectively as the height
of meniscus 24 increases and will decrease and increase
respectively when the meniscus height decreases. However, the
minimum size of the inner diameter and the maximum size of the
outer diameter of the growing body are determined by the
corresponding diameters of end surface 10 since the melt film 20
cannot expand beyond the inner and outer edges of end surface
10.
If the temperature of the film 20 is held substantially constant,
an increase in pulling speed will cause the meniscus height to
increase (the meniscus height decreases when the pulling speed is
lowered). If the pulling speed is held constant, an increase in the
temperature of film 20 will cause the meniscus height to increase,
while the reverse occurs if the film temperature is lowered. Since
it is a relatively easy matter to hold the pulling speed
substantially constant, i.e., to within 1% of the desired speed,
and since the meniscus height is relatively unaffected by small
changes in pulling speed (e.g., a change of 1% in pulling speed at
constant film temperature produces substantially no change in
meniscus height), it is preferred to hold the pulling speed
constant and to control meniscus height by adjusting the rate of
heat input which, assuming a constant rate of heat loss by
radiation, conduction, etc., in turn controls the temperature of
film 20.
FIG. 2 shows a crucible 30 containing a die or forming member
assembly 32 designed for growing a tubular body according to the
process disclosed in my U.S. Pat. No. 3,471,266. The forming member
32 consists of a plate 34 that rests on the bottom of the crucible
and a capillary unit that comprises a round tube 36 surrounding and
concentric with a solid rod 38. The elements of the capillary unit
are made of a material that is wetted by and will not react with or
dissolve in the melt material.
Tube 36 and rod 38 are disposed in depressions in plate 34 and are
welded thereto. The bottom end of tube 36 is slotted or has holes
as at 40 so as to provide inlet ports whereby melt can flow into
the annular space 42 between it and rod 38. The radial distance or
gap between rod 38 and the inside surface of tube 36 is such as to
allow the space 42 to function as a capillary for the melt material
44 contained in the crucible. The upper end of tube 36 is bevelled
as shown at 46 to provide a sharp top edge. The upper end of rod 38
is formed with a conical cavity 48 as shown so that it also has a
sharp top edge. The upper edges of tube 36 and rod 38 are level
with each other as shown and the height of the capillary unit is
set so that, for the given radial distance or gap between the tube
and rod, capillary action will cause melt to rise within and fully
fill the capillary so long as there is enough melt in the crucible
to trap the ports 40. Completing the assembly is a cover 50 for the
crucible. The latter has a center hole to accommodate the upper end
of the capillary unit which projects a short distance above the
cover as shown. Cover 50 functions as a radiation shield for the
melt.
The choice of crucible, die and cover material depends upon the
composition of the melt. By way of example, if the melt is
alpha-alumina, these components are preferably made of molybdenum
or tungsten.
The apparatus of FIG. 2 is mounted in a suitable crystal growing
furnace, e.g. of the type and in the manner disclosed in my U.S.
Pat. No. 3,471,266. As taught in said patent, a charge of material
to be grown is placed in the crucible and melted, and when this
occurs, the molten liquid will fill capillary 42. Crystal growth is
initiated by inserting an appropriate seed into the column of melt
52 in the capillary, and adjusting the thermal distribution in the
upper end of the melt column 52 so that crystal growth will occur
and be sustained as the seed crystal is withdrawn at an appropriate
speed. Assuming that the seed is not of the same annular
cross-sectional shape as the capillary, the crystal growth will
spread horizontally to the annular cross-sectional shape of the
melt column so that the growth product will assume the shape of a
hollow tube as shown at 54 in FIG. 3. Of course, a previously grown
tube, of a size suitable for introduction into the column of melt
in the capillary, may be used as a seed with the apparatus of FIG.
2.
FIG. 3 illustrates the growth interface using the apparatus of FIG.
2 and how the growth interface may be monitored in accordance with
this invention. As the growing crystal body 54 (or the seed) is
withdrawn, surface tension causes the column of melt 52 to adhere
to it and to rise above the level of the top edges of the capillary
unit. Crystal growth occurs at all points along the top end of the
column of melt, due to the surface tension effect noted above, and
the melt will form a vertical meniscus at each top edge as shown at
56 and 58. Each meniscus extends between an upper edge of the
capillary unit and the growth interface. The shape of the menisci
is similar to that of the menisci 24 and 26 of FIG. 1.
Crystal growth occurs at all points along the crystal-melt
interface which tends to be both within and above the capillary as
shown. As noted in my U.S. Pat. No. 3,471,266, the shape of the
growing body is determined by the temperature and the temperature
gradients of the upper end of the column of melt, and the
temperature gradients are shaped by the capillary unit. Also the
cross-sectional size of the growing body is affected by the pulling
rate and the temperature of the melt column.
As with the process illustrated in FIG. 1, I have determined that
the height of the outer meniscus 56 (the dimension h in FIG. 3)
will depend upon the pulling speed and the temperature at the upper
end of the melt column, i.e. at the growth interface, and that the
greater the height h, the smaller the o.d. and the larger the i.d.
of the growing tube. Similarly, the less the height h, the larger
the o.d. and the smaller the i.d. of the growing tube.
With both of the illustrated processes, a relatively small change
in the outer diameter of the growing tubular body is reflected by a
relatively large change in meniscus height. Thus, for example, if
the capillary unit of FIGS. 2 and 3 (or the forming member of FIG.
1) is designed and the growth process parameters set so that a
sapphire tube having an o.d. of 0.375 inch .+-. 0.003 inch can be
grown, a change of about 30.degree.C (assuming a constant pulling
speed) at growth interface, i.e. at the outside meniscus, will
cause the o.d. of the tube to change about .+-. 0.003 inch,
depending upon whehter the temperature is raised or lowered, and
will cause the meniscus height (typically in the order of 0.007
inch) to change from 60-100% (depending on the pulling speed).
Since the meniscus height can be measured very accurately, i.e. to
within about 0.0005 inch, the effect of a change in heating rate on
the meniscus height can be readily determined and the power input
to the crucible heating means of the furnace can be adjusted so as
to produce relatively precise incremental changes in meniscus
height, and thereby provide close control over the o.d. of the
growing tube.
By way of example but not limitation, the meniscus height may be
precisely measured using a microscope with a recticle in its
eyepiece focus. Other suitable commercially-available optical
devices are known to persons skilled in the art and may be used to
measure meniscus height.
In the preferred mode of practicing this invention, i.e. as used in
growing tubes for lamps, the operator adjusts the power input to
the heating means of the furnace so that the observed meniscus is
maintained at a height which, as determined from prior runs, using
the same constant pulling speed, will cause the crystal body to
grow with an o.d. that is within the prescribed limits. In contrast
to when controlling the heating rate according to direct
temperature measurements, the operator can determine by measuring
the meniscus height whether the o.d. of the growing tube is on the
high or low limits side of the desired o.d. size and can, by
appropriately adjusting the heating rate, adjust the meniscus, if
necessary, to bring or maintain the o.d. within the prescribed
tolerance limits. Since a tube may tend to grow slightly oval, the
preferred procedure is to maintain the observed meniscus height at
a value which assures that the maximum and minimum outer diameters
of the tube are within the high and low tolerance limits
respectively.
Both of the processes described in my U.S. Pat. Nos. 3,591,348 and
3,471,266 have the advantage that a plurality of crystal bodies of
like (or different) cross-sectional shape and size may be grown
simultaneously using a plurality of like (or different) forming
members or dies mounted in a common crucible and a common pulling
mechanism. The present invention facilitates growth of several like
bodies, e.g. tubes, simultaneously so that the o.d. of each body is
within prescribed tolerance limits. In such case, only one of the
several growing bodies is optically monitored to determine meniscus
height, and the power input to the heating means of the furnace is
adjusted so that the meniscus height of the monitored growth zone
is kept at a value that assures that the body growing at that zone
will have an o.d. substantially half-way between the prescribed
upper and lower tolerance limits, e.g. an o.d. of 0.375 inch where
the tolerable maximum and minimum o.d. values are 0.372 and 0.378
inch respectively. It has been found that when this mode of
monitoring is practiced, the other ones of the several growing
bodies also will have outside dimensions that comply with the
prescribed tolerances.
FIG. 4 illustrates how a furnace of the type shown in my aforesaid
U.S. Patents is modified to permit optical monitoring and
measurement of meniscus height by means of a microscope system.
Although in this case the furnace contains a crucible-multiple die
arrangement for growing a plurality of crystalline bodies
simultaneously according to the EFG process, it is to be understood
that the illustrated crucible-die arrangement may be replaced by
one suitable for growing bodies according to the SET process.
With reference to FIGS. 4 and 5 and also to my aforesaid U.S.
patents, a crucible 2 is mounted within the furnace enclosure which
consists of two spaced quartz tubes 60 and 62 that define an
annular space (which is closed off at its top and bottom ends)
through which cooling water is circulated for the purpose of
keeping the quartz at a safe temperature and also to absorb
infra-red energy so as to make it easier for the operator to
comfortably observe growth of the product. The plate 16 supported
by the crucible carries three die assemblies 4 (a, b and c)
constructed as shown in FIG. 1, plus a hollow filler tube 59 (FIG.
4) that is made of the same material as the die assemblies. The
bottom end of tube 59 terminates near but is spaced from the bottom
of the crucible while its upper end terminates above plate 16. A
delivery tube 61 made of quartz or other suitable heat-resistant
material extends through and is sealed to the furnace tubes 60 and
62 as shown. The bottom end of tube 61 is located in line with and
terminataes close to but does not engage the upper end of filler
tube 59. The purpose of filler tube 59 and delivery tube 61 is to
permit replenishing the melt in the crucible without interrupting
crystal growth. A tubular body is grown from a melt film supported
on the upper end surface of each die assembly as described above in
connection with FIG. 1. Only die assembly 4c and filler tube 59 are
visible in FIG. 4.
In accordance with this invention, a short section of transparent
quartz pipe 64 is inserted into aligned holes formed in the furnace
tubes 60 and 62 and sealed thereto so as to preserve the integrity
of the cooling water jacket. The inner end of pipe 64 is open but
its outer end is closed off by an end wall 66 so as to prevent
escape of the inert gas or vacuum that customarily is provided
within the furnace. As shown the pipe 64 is inclined outwardly and
is located so that its axis is directed at the upper end of one of
the three die assemblies, e.g. die assembly 4c.
The pulling mechanism (not shown) associated with the furnace has a
pulling rod 68 that corresponds to pulling rod 32 shown in FIG. 1
of my U.S. Pat. No. 3,471,266. Attached to the pulling rod is a
seed holder 70 which is adapted to hold a selected number, in this
case three, seeds 72. Each of the three seeds 72 (of which only one
is shown) is held by holder 70 in vertical alignment with a
different one of the three die assemblies 4a-c. Seed holder 70 has
a slot 73 large enough for it to clear delivery tube 61, whereby to
prevent the latter from obstructing the up and down movement.
Viewing and measurement of the meniscus associated with the
selected die assembly during crystal growth is accomplished by a
microscope 74 attached to a holder 76 that is adjustably mounted to
a suitable fixed support 78 which preferably but not necessarily is
part of or secured to a stationary portion of the furnace
apparatus. By way of example but not limitation, the microscope may
be a stereomicroscope. An essential requirement of the microscope
is that it be adapted with a recticle device for precisely
measuring the meniscus height as herein described. In the practice
of this invention, it is preferred to employ a Model 562B-LI
Stereostar Zoom microscope manufactured by American Optical
Company, Instrumental Division, Buffalo, N.Y., that is fitted with
10X eyepieces and has a suitable linear division recticle or
eyepiece disc mounted in one of its eyepieces, e.g., American
Optical eyepiece disc Catalog No. 1428, which has 200 divisions
each 0.001 inch at 2X magnification. The eyepiece disc is oriented
so that the graduated scale is a vertical image and the microscope
is aimed along pipe 64 so that the scale is focused on the meniscus
to be monitored and measured.
It is to be noted that in both of the processes illustrated in
FIGS. 1 and 3, the crystalline body grows from a pool of melt that
is a continuation of a column of melt in the capillary, and that
the pool of melt is characterized by at least one meniscus that
extends from the growth interface down to a top edge of the
capillary forming member. In FIG. 1, the growth pool of melt is the
film 20 that overlies the top end surface 10 and the meniscus 24
extends from the outer edge of the surface 10 up to the edge of the
growth interface. Although the height of the meniscus can be
controlled by adjusting the film temperature and/or the pulling
speed, surface tension will cause the bottom end of the meniscus to
remain substantially at the edge of the surface 10 despite changes
(within limits) of its height h. However, the curvature or bowing
of the meniscus will change, its radius of curvature becoming
shorter as the height h increases. The same is true of the meniscus
26. The growth pool of melt is less sharply defined in the process
illustrated in FIG. 3, but it is to be understood as being the
upper portion of the column of melt that forms the interface with
the growing body and notably includes that portion of the column of
melt that is bounded by the two menisci 56 and 58. In this
connection it is to be noted that the growth interface may be
tapered as shown or may be substantially flatter. The growth
interface tends to be less tapered as the radial dimension of the
capillary decreases (due apparently to a more isothermal condition
in the growth pool of melt) and also as the pulling speed is
increased.
Although the forming members of FIGS. 1-3 are for growing tubular
bodies, it is to be understood that forming members for growing
other shapes, e.g. rods, filaments, ribbons, etc., according to the
EFG and SFT processes, also may be used in the practice of this
invention since, regardless of the shape of the growing body, the
growth pool of melt is still characterized by at least one
meniscus. In the case of rods, filaments and ribbons, there is only
one meniscus (at the outside of the growth pool of melt) since the
growing body is as a solid. Growth of tubular bodies other than
round tubes, e.g. hollow bodies having a rectangular, square or
triangular cross-section, also is characterized by both inner and
outer menisci.
As is obvious from my aforesaid U.S. Patents, the EFG and SFT
processes improved according to this invention may be used to grow
crystalline bodies of a wide variety of materials, including but
not limited to alumina (sapphire) ruby, barium titanate, beryllium
oxide, titanium dioxide, chromium oxide (Cr.sub.2 O.sub.3), lithium
niobate, lithium fluoride (LiF), calcium fluoride (CaF.sub.2) and
sodium chloride. The products produced are monocrystalline or may
consist of two to four crystals growing together.
The following example provides further details of how to practice
the invention.
EXAMPLE
An EFG molybdenum die arrangement substantially as shown in FIGS. 4
and 5 is assembled with a molybdenum crucible and the crucible is
filled with a supply of solid particles of high purity (99.sup.+%)
alumina. The crucible and die assembly are mounted in a crystal
growing furnace of the type shown in my U.S. Pat. Nos. 3,591,348
and 3,471,266. With reference to FIG. 4, the crucible 2 is mounted
on short tungsten rods 80 within a cylindrical carbon heat
susceptor 82 which in turn is attached to and supported by a
tungsten rod 84 that is mounted in the bed plate (not shown) of the
furnace, substantially in the manner illustrated in the
aforementioned U. S. Patents. A cylindrical radiation shield 85
made of carbon cloth is wrapped around the carbon susceptor. The
R.F. heating coil 86 of the furnace is disposed so that it
surrounds the carbon susceptor 82 as shown.
The three die assemblies 4a-c are identical. Each is made of
molybdenum, as is the plate 16 and filter tube 59. Delivery tube 61
is made of alumina. With reference to FIGS. 1 and 4, the annular
upper end surface 10 of each capillary rod 6 has an outside
diameter of 0.378 inch and an inside diameter (i.e. the diameter of
hole 8) of 0.315 inch while each of the capillaries 12 has a
diameter of 0.012 inch. The crucible has an internal depth of about
11/2 inch and an internal diameter of about 11/2 inch. Each rod 6
has an overall length of about 13/8 inch and its bottom end is
spaced about one-eighth inch from the bottom of the crucible. The
upper ends of the rods 6 project about one-sixteenth inch above the
level of plate 16. Filler tube 59 has an o.d. of about 0.378 inch
and an inner diameter of about 0.325 inch, and its length is such
that its bottom end is about one-eighth inch from the bottom of the
crucible and its top end projects about one-sixteenth inch above
plate 16.
Three idential seeds 72 are attached to holder 70. The seeds are
substantially monocrystalline alumina tubes previously grown by
means of the same crucible-capillary arrangement. Cooling water is
introduced in the water jacket defined by quartz tubes 60 and 62
and the furnace enclosure 88 is evacuated and then filled with
argon to a pressure of about 1 atmosphere. The RF coil is energized
by a 500 KHz power supply which is operated so that the alumina
charge in crucible 2 is melted and the upper surface of the die is
at an average temperature of about 10.degree.-20.degree.C above the
melting point of alumina. In this molten condition, the alumina
rises in and fully fills each of the capillaries 12. Then the
furnace's pulling mechanism is actuated and operated so that the
three seeds are lowered into contact with the upper end surfaces 10
of the three die units 4a-c.
The seed crystals are allowed to rest in contact with the die units
for about 5-10 seconds, during which time the ends of the seeds
melt and form films as shown at 20 in FIG. 1 which overlie and
substantially fully cover the end surfaces 10. In each case the
film 20 connects with the columns of melt in the capillaries 12.
Then the pulling mechanism is operated so as to withdraw the three
tubular seeds at a rate of about one-fourth to one-fifth
inch/minute. The initial withdrawal of the seeds is accompanied by
solidification of melt therein from the films and as the seeds
continue to be withdrawn continuous crystal growth occurs on the
end of each seed. The crystal growth on the seeds tends to deplete
the films 20, but the films are replenished by additional melt fed
by the capillaries.
As crystal growth occurs on each of the three seeds, the meniscus
24 of the film 20 overlying the upper end surface of the capillary
unit 4c is optically monitored by means of an American Optical
Model 562B-L1 stereo-microscope disposed as shown in FIG. 4 and
modified with eyepieces and an eyepiece disc as previously
described. It is desired to maintain the height of the meniscus 24
to approximately halfway between the limits of 0.004 and 0.001
inch. Accordingly, as the crystal growth occurs, the power input to
the RF heating coil 86 is modified to raise or lower the
temperature of the melt films 20 so as to increase or decrease the
height of the meniscus 24 of the unit 4c as required. The pulling
speed is maintained constant at the aforementioned rate as crystal
growth processes. Additional powdered alumina is periodically
delivered to the crucible via tubes 59 and 61 to replenish the
supply of melt. The crystal growth is continued for approximately 4
hours, at which time the pulling rate is increased to approximately
1.0 inch per hour so as to cause the growing crystal to be pulled
free from the melt films 20. The power supply to the heater is then
turned off and the furnace allowed to cool. Then the seeds and
grown tubes are removed from the seed holder.
Crystalline bodies grown according to the procedure of this Example
are tubular and substantially monocrystalline. Furthermore, at
substantially all points along their lengths each of the bodies has
a diameter which is within the limits of 0.375 inch .+-. 0.003
inch.
The advantages of the invention can be readily determined by
modifying the procedure of the foregoing example in either of two
ways. The first modification consists of the same procedure except
that (a) the height of the film meniscus is not measured and (b)
the rate of power input to the RF coil is maintained constant
during crystal growth at the level which was found adequate to
initially raise the temperature of the upper end surface of the die
to about 10.degree.-20.degree.C above the melting point of alumina.
The second modification consists of the same procedure as in the
Example except that (a) the height of the film meniscus is not
measured and (b) the temperature of the edge of the film is
constantly measured with an optical pyrometer and the rate of power
input to the RF coil is adjusted as required so that the apparent
temperature of the edge of the film is kept within 10-20.degree.C
above the melting poing of alumina.
With the first modification, stress and grain boundaries tend to
appear in the later grown portions of the crystal bodies and
frequently crystal growth terminates prematurely due to
solidification of the melt on the end surface of the die assembly.
Further, the outside diameters of the crystal bodies tend to vary
substantially. The difficulties are due to the fact that the
temperature of the melt film can vary as much as 20.degree.C in
either direction due to unavoidable instabilities in the system and
also because the temperature of the melt film tends to drop as the
crystal grows longer and as the supply of melt in the crucible is
depleted.
With the second modification the problems of stresses and grain
boundaries and premature termination of crystal growth due to the
melt freezing to the die are minimized. However, the tubes have
varying outside diameters and the differences in o.d. at different
points along one tube typically will exceed 0.003 inch and not all
of the three tubes will meet the o.d. requirement of 0.375 inch
.+-. 0.003 inch. This is due, as previously noted, to (1) the fact
that changes in emissivity will case the pyrometer to give
erroneous readings and (2) the fact that initially the operator has
no way of knowing whether the tube being pulled from the film which
is monitored by the pyrometer has an o.d. that is exactly 0.375
inch or is nearer 0.375 .+-. 0.003 or 0.375 -- 0.003 inch. Thus it
is apparent that the invention, as herein described, offers the
advantages of increased product yield, particularly where several
products are required to be grown at the same time to the same
close tolerances as in the foregoing Example.
It is believed to be obvious that, if desired, the invention may be
practiced by maintaining the temperature at the solidliquid
interface substantially constant, and varying the pulling speed so
as to maintain the height of the meniscus 24 (or the meniscus 56 in
the case of the SFT process) within limits that will assure
production of bodies of substantially constant outside dimensions
that meet predetermined tolerances.
* * * * *