U.S. patent number 3,731,095 [Application Number 05/130,283] was granted by the patent office on 1973-05-01 for electron gun device of field emission type.
This patent grant is currently assigned to Hitachi, Ltd.. Invention is credited to Tsutomu Komoda.
United States Patent |
3,731,095 |
Komoda |
May 1, 1973 |
ELECTRON GUN DEVICE OF FIELD EMISSION TYPE
Abstract
In an electron gun device of the field emission type, a shield
electrode whose potential is the same as that of a cathode-tip of
needle shape is disposed in surrounding relationship to a first
anode so as to shield said first anode from ground potential
portions of the device, such as the envelope, so that discharge
between the anode and the ground potential portions is prevented,
whereby the needle tip of the cathode is protected from destruction
due to said discharge.
Inventors: |
Komoda; Tsutomu (Kodaira-shi,
Tokyo, JA) |
Assignee: |
Hitachi, Ltd. (Tokyo,
JA)
|
Family
ID: |
22443952 |
Appl.
No.: |
05/130,283 |
Filed: |
April 1, 1971 |
Current U.S.
Class: |
250/311;
250/214.1 |
Current CPC
Class: |
H01J
37/073 (20130101) |
Current International
Class: |
H01J
37/073 (20060101); H01J 37/06 (20060101); H01j
037/26 () |
Field of
Search: |
;313/82,83,206,240,80
;250/49.5A,49.5R |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
"Electronmicroscopy" by Igor Bensen, General Electric Review,
December 1944, pp. 6-12..
|
Primary Examiner: Lawrence; James W.
Assistant Examiner: Dixon; Harold A.
Claims
What is claimed is:
1. In an electron gun device of the field emission type for
generating an electron beam having a cathode tip of needle shape,
means for heating said cathode tip, a first anode, a second anode,
and means for applying an electric voltage between said cathode tip
and said first anode so as to produce an electric field
therebetween which causes electrons to be emitted from said tip,
the improvement which comprises a shield electrode disposed to
surround said first anode between said first and second anode and
means for applying to said shield electrode the same voltage as
that applied to said anode, whereby said shield electrode shields
said anode from ground potential portions of said device.
2. An electron gun device as defined in claim 1, wherein said anode
and said shield electrode are substantially concentric cup-shaped
elements.
3. An electron gun device as defined in claim 1, wherein said means
for heating said cathode tip includes a pair of terminals connected
to said cathode tip for applying a heating current thereto and an
insulator for supporting said pair of terminals, and further
including an additional shield electrode disposed between said
insulator and said anode and being connected to one of said pair of
terminals.
4. An electron gun device as defined in claim 3, wherein said means
for applying a voltage to said shield electrode includes an
electrical connection between said shield electrode and said
additional shield electrode.
5. An electron gun device as defined in claim 1, wherein said
shield electrode is a substantially cylindrical element disposed
concentrically to said anode.
6. An electron gun device of the field emission type
comprising:
a cathode tip of needle shape capable of being heated and having a
large negative electric potential with respect to ground potential
portions of said gun device;
an anode applied with an accelerating voltage with respect to said
tip so as to produce therebetween an electric field which causes
field emission of electrons from said tip; and
a shield electrode disposed to surround said anode and interposed
between said anode and said ground potential portions of the gun
device, said shield electrode being rendered in the same potential
as that of said tip, whereby said shield electrode shields said
anode from the ground potential portions to thereby prevent
undesired discharge therebetween.
7. An electron gun device as defined in claim 6, wherein said anode
and said shield electrode are substantially concentric cup-shaped
elements.
8. An electron gun device as defined in claim 6, wherein said
shield electrode is a substantially cylindrical element disposed
concentrically to said anode.
9. An electronic gun device as defined in claim 6, further
including means for heating said cathode tip including a pair of
terminals connected to said cathode tip for applying a heating
current thereto and an insulator for supporting said pair of
terminals, and an additional shield electrode disposed between said
insulator and said anode and being connected to one of said pair of
terminals.
10. An electron gun device as defined in claim 9, wherein said
means for applying a voltage to said shield electrode includes an
electrical connection between said shield electrode and said
additional shield electrode.
Description
BACKGROUND OF THE INVENTION
This invention relates to an electron gun device of the field
emission type, which is particularly suitable as a source of an
electron beam in an electron microscope, and the like.
As is well known, a conventional electron gun device for an
electron microscope has a cathode tip of needle shape, means for
heating said tip and an anode for causing electrons to be emitted
from aid tip by applying an electric field between said tip and
said anode.
In such an electron gun device, undesirable discharge occurs
frequently in the operation and at this time, the tip portion of
said cathode is destroyed so that the field emission of electrons
therefrom stops.
Since the useful life of the cathode tip in the conventional
electron gun device is very short for the reasons described above,
it is necessary to exchange said tip frequently.
In the electron gun device, ultra high vacuum conditions must be
maintained and once this condition is broken for exchange of said
tip, it is necessary to evacuate the electron gun device once
again. However, this requires complicated procedures and very long
time to effect such evacuation.
SUMMARY OF THE INVENTION
An object of the invention is to provide an electron gun device
having a very long useful life.
Another object of the invention is to provide an electron gun
device having the advantage that the number of times wherein
exchange of the cathode tip is required, and thus the number of
times wherein evacuation of the microscope is necessary, has been
greatly reduced.
A further object of the invention is to provide an electron gun
device suitable as the source of an electron beam for use in an
electron microscope and the like.
The electron gun device of this invention is characterized in that
a shield electrode, being at the same voltage as that of the anode,
is disposed in said device to surround an accelerating anode for
shielding said anode from parts at ground potential.
These and other objects, features and advantages of the present
invention will become more apparent from the following detailed
description when taken in conjunction with the accompanying
drawings, wherein:
FIG. 1 is a schematic diagram showing an embodiment of the
invention; and
FIG. 2 is a schematic diagram showing another embodiment of the
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
In FIG. 1, an electron gun for an electron microscope includes a
cathode tip 1 of needle shape, a first anode 2, a second anode 3,
the respective anodes being provided with holes 4 and 5 through
which an electron beam passes. Insulators 6 and 11 serve as
supports and spacers, the insulator 6 carrying terminal electrodes
7 supporting a tungsten filament 8 of hair-pin shape, and a
terminal electrode 9 carrying a contact spring 10. These are well
known elements which constitute a conventional electron gun
structure. However, in addition, a first shield electrode 12 is
provided which is a characteristic element according to the present
invention.
In a conventional electron gun structure, a negative high voltage,
for example -30 KV, is applied to the cathode tip 1 through the
terminal electrodes 7, and another negative high voltage of about
-27 KV is applied to the first anode through the contact spring 10
and the terminal electrode 9. Moreover, the second anode 3 is
grounded.
In the electron gun device of conventional structure, since the
intensity of the electric field adjacent to the top portion of the
cathode tip 1 becomes 10.sup.7 -10.sup.8 v/cm due to potential
difference between said tip 1 and the first anode 2, electrons are
caused to emit from said tip 1 by means of the electric current
flowing through the filament 8 so as to make it clean by heating
it. These electrons passing through hole 4 are focused by an
electric field produced between the first and second anodes 2 and 3
which act as an electron lens so that an electron beam having a
fine spot of high density is obtained from the hole 5.
Since the cathode tip 1 is surrounded by the first anode 2,
discharge almost never occurs between said tip 1 and parts which
are not at ground potential, such as the envelope of the electron
gun device (not shown), even when the negative high voltage is
applied to the cathode tip 1 as described above.
However, it is possible that discharge occurs between the first
anode 2 and the parts at ground potential. When such discharge
occurs, the potential of the first anode 2 is reduced to ground
potential at once, and the potential difference between the tip 1
and the first anode 2 becomes very high so that the quantity of
electrons emitted from the tip 1 increases rapidly and to a great
extent.
Generally, the tip portion of the cathode 1 is very sharp so as to
allow electrons to be emitted therefrom by means of electric field
effects. For example, a tungsten line, having a diameter of 0.1-0.2
mm whose radius of curvature at the tip portion is formed in a
needle shape to have the very small value of 500 A, is used as the
tip. Therefore, as a result of the rapid increase of electrons upon
occurrence of the above-mentioned discharge, the tip portion of the
cathode is extraordinarily heated and thereby destroyed, so that
emission of electrons therefrom stops since the intensity of the
electric field adjacent to the tip portion of the cathode 1
decreases to almost zero value, under which conditions the field is
unable to cause electrons to be emitted therefrom.
It is apparent from the foregoing description that the positive
potential difference between the cathode tip and the first anode
can be prevented from becoming excessive by preventing discharges
between the first anode and the ground potential parts of the
electron gun assembly and thereby destruction of the tip portion of
the cathode can be prevented.
Thus, the electron gun device of the present invention is designed
to have a first shield electrode 12 surrounding the first anode 2.
The same voltage that is applied to the tip 1 is applied to the
first shield electrode 12 through the contact spring 13 connected
to the terminal electrode 7.
Moreover, an insulator 15 capable of withstanding voltage of at
least 5 KV is disposed between the first anode 2 and the first
shield electrode 12, and if necessary, a second shield electrode 14
may be disposed to surround the end portion 6' of the insulator 6
so as to prevent a discharge therefrom.
The first shield electrode 12 has a bottom portion 16 which shields
the first anode 2 from the second anode 3 as well as from said
ground potential portions, but since the bottom portion 16 of the
shield electrode 12 has a curved smooth surface which is fully
polished so as not to cause any large variation in the distribution
of an electric field between said anodes, almost no discharge may
occur therebetween.
On the contrary, discharge may occur easily between contact
portions 17 and 18, or between contact portions 19 and 20 along the
insulator 11 between the two anodes. Therefore, the first shield
electrode can be modified to practically omit the bottom portion 16
and to dispose in its place a projected portion 12'.
According to this invention, since the top portion of the tip is
protected from destruction due to said discharge, the life time of
the tip greatly increases. This invention can be applied to all
electronic gun devices of the field emission type having at least a
cathode tip of needle shape and an anode for producing the electric
field between it and the tip so as to cause electrons to be emitted
from the tip.
While I have shown and described two embodiments in accordance with
the present invention, it is understood that the same is not
limited thereto but is susceptible of numerous changes and
modifications as known to a person skilled in the art, and I
therefore do not wish to be limited to the details shown and
described herein but intend to cover all such changes and
modifications as are obvious to one of ordinary skill in the
art.
* * * * *