U.S. patent number 3,636,919 [Application Number 04/881,512] was granted by the patent office on 1972-01-25 for apparatus for growing films.
This patent grant is currently assigned to The Ohio State University. Invention is credited to Carl O. Bozler.
United States Patent |
3,636,919 |
Bozler |
January 25, 1972 |
APPARATUS FOR GROWING FILMS
Abstract
Vapor deposition apparatus has a closed chamber formed by a
first platelike member having a recess to receive evaporant source
material and a shoulder in the top surface thereof to support a
substrate closely spaced from said source material and with the
substrate back surface generally flush with said top surface. A
second plate member overlies said top and back surfaces and in
sealing relationship therewith. Means communicate said space with a
gaseous medium.
Inventors: |
Bozler; Carl O. (Columbus,
OH) |
Assignee: |
The Ohio State University
(Columbus, OH)
|
Family
ID: |
3460459 |
Appl.
No.: |
04/881,512 |
Filed: |
December 2, 1969 |
Current U.S.
Class: |
118/726 |
Current CPC
Class: |
C23C
16/4481 (20130101) |
Current International
Class: |
C23C
16/448 (20060101); C23c 011/00 () |
Field of
Search: |
;148/175,174
;118/48-49.5 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
|
|
|
|
|
|
|
1,348,174 |
|
Nov 1963 |
|
FR |
|
1,075,387 |
|
Jul 1967 |
|
GB |
|
Primary Examiner: Kaplan; Morris
Claims
What is claimed is:
1. Apparatus for growing semiconductor films on a substrate by
close spaced vapor transport comprising:
A. means forming a nonreactive, closed chamber for positioning a
semiconductive source material and a substrate in a predetermined
spaced coplanar relationship to one another;
B. said means comprising a first platelike member having a recessed
portion adapted to contain the source material and an outwardly
facing shoulder portion formed in the top surface and the wall
defining said recessed portion;
C. said shoulder portion adapted to support and maintain the
substrate in said spaced relationship and with the substrates back
surface lying generally flush with the top surface of said first
member;
C. said means including a second plate member overlying said top
surface and substrate and in sealing relationship therewith;
D. means communicating the enclosed space between said substrate
and source material to a predetermined gaseous atmosphere;
E. a heat source disposed external to said chamber and adjacent
said platelike member whereby to evaporate the source material;
and
F. a heat sink disposed external to said chamber and adjacent said
second plate member.
2. Apparatus for the growing of film on a substrate as set forth in
claim 1 wherein said space maintained is in the order of 0.002 to
0.040 inch.
3. Apparatus as set forth in claim 1 wherein the nonreactive
material comprising said means (A) is quartz.
4. Apparatus as set forth in claim 1 wherein said means (D)
includes an inlet passage and an outlet passage disposed in said
means (A) which communicate with the space between said source
material and said substrate.
Description
SUMMARY OF INVENTION
The present invention relates to an apparatus to be used as a
reactor for the transfer of semiconductor material on a substrate
by use of close spaced vapor transport. The invention essentially
relies on an apparatus which permits the source and substrate
materials to be separated by a well defined spatial relationship
and permits independent temperature control of the source and
substrate materials.
OBJECTS
It is the object of the present invention to provide an apparatus
making possible the deposition of thin films of semiconductor
materials on a substrate using closed spaced vapor transport.
Further objects and features of the apparatus described in the
present invention will be more readily understood from the
following detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS
The drawing is a cross sectional view of the reactor constructed in
accordance with this invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring now specifically to FIG. 1, the apparatus therein
illustrated consists of four main components. The first of these is
the heat source 1, the lower plate 3, the upper plate 4, and the
heat sink 2. The heat source 1 is exterior to the reactor and may
be of any controllable type of sufficient capacity. The necessary
capacity of the heat source 1 will be determined by considering the
temperature that must be maintained by the source material 7 and
the volume of the reactor itself.
The second component of the reactor the lower plate 3 may be made
of any nonreactive nonporous material, e.g., fused quartz. The size
of the lower plate 3 will generally vary in relation to the size
and shape of the source 7 and substrate 9 materials used. Lower
plate 3 in the preferred embodiment has three distinct
configurations. The first is the lower recess 6 whose main function
is to serve as a holder for the source material 7. Therefore, the
size and shape of the lower recess is determined by the size and
shape of the source material 7 used.
Also formed in the lower plate 3 is the upper recess 8. The upper
recess is a lip which serves as a support for the substrate 9
material. The depth and size of upper recess 8 is generally
determined by the size and shape of the substrate 9 material which
is chosen. However, there are two important considerations in
determining the depth of the upper recess 8. The first is that the
distance 10 between the bottom of the substrate 9 and top of the
source 7 material is critical. The distance shown as 10 in FIG. 1
can range from 0.002 to 0.040 inch with an optimum distance of
0.010 inch. Another important consideration is the top surface of
the substrate 9 material is maintained level with the top of the
lower plate 3. Thus, when the lower plate 3 and upper plate 4 are
clamped together an enclosed chamber is formed and the top of the
substrate 9 is in contact with the bottom surface of the upper
plate 4.
Finally there is formed in the lower plate 3 the gas channel 16. As
shown in FIG. 1 the gas channel 16 provides an entrance 16a and
exit 16b for the atmosphere used in the reactor. The size of the
gas channel is not crucial.
The upper plate 4 is made of the same material that is chosen for
the lower plate 3, for example, fused quartz. The upper plate 4
also has gas channels 16a and 16b which match those of the lower
plate 3. The gas channels 16a and 16b in the upper plate 4 serve as
extensions for those in the lower plate 3.
The heat sink 2 is exterior to the reactor and may be of any
controllable type. The capacity of the heat sink 2 needed will
depend on the volume of the reactor and temperature at which it is
desired to maintain the substrate 9 materials.
Because of the control possible over source 7 and substrate 9
temperatures, many combinations of source 7 and substrate 9
materials will be feasible which were not possible in the prior art
processes. To illustrate the operation of this apparatus comprising
the preferred embodiment of FIG. 1, Al.sub.2 O.sub.3 is used as the
substrate 9 and InAs is used as the source 7 material. The
deposition of a source material such as InAs on a substrate like
Al.sub.2 O.sub.3 is accomplished using this embodiment by the
following procedure:
A section of the source material 7, InAs, is placed in lower recess
6 of the reactor. Next the substrate 9 material, Al.sub.2 O.sub.3,
is put in the upper recess 8. When the source 7 and substrate 9
materials are in position their adjacent surfaces are parallel and
separated at 10 by a distance in the order of 0.010 inch.
After the source 7 and substrate 9 materials are in place, the
upper 4 and lower 3 plates are clamped together forming an enclosed
chamber. The heat generator 1 is turned on and the reaction chamber
is filled at inlet 16a with an appropriate atmosphere, in this
example H.sub.2 and AsCl.sub.3 vapor is used.
The heat from generator 1 applied to the bottom of the chamber
causes the source material 7 to heat more rapidly than the
substrate 9. During this transient condition the substrate's 9
temperature lag sets up the proper conditions for the nucleation
process.
In this embodiment the source 7 material 7 is heated to 800.degree.
C. while the temperature of the substrate is maintained below
700.degree. C. by using the heat sink 2. After the substrate 9 has
been coated with InAs, the temperature of the substrate 9 is
allowed to rise above 700.degree. C. in order to decrease the
nucleation rate on what is now a surface covered with InAs. Thus by
raising the substrate 9 temperature as soon as the nuclei on the
Al.sub.2 O.sub.3 have reached critical size, the nucleation rate is
decreased and optimum crystal structure is obtained.
To shut down the reactor, the heat source is turned off, the
atmosphere is allowed to leave via outlet 16b the reaction chamber,
and the reactor is allowed to return to ambient conditions.
* * * * *