U.S. patent number 3,626,184 [Application Number 05/168,020] was granted by the patent office on 1971-12-07 for detector system for a scanning electron microscope.
Invention is credited to Albert V. Crewe.
United States Patent |
3,626,184 |
Crewe |
December 7, 1971 |
**Please see images for:
( Certificate of Correction ) ** |
DETECTOR SYSTEM FOR A SCANNING ELECTRON MICROSCOPE
Abstract
In an electron microscope transmitted electrons are detected
according to whether they are unscattered, elastically scattered or
inelastically scattered by the specimen. The elastically scattered
electrons are further separated according to the magnitude of the
scattering. Signals from the separate detectors can be used
separately or combined as desired to enhance the information
obtained from a specimen.
Inventors: |
Crewe; Albert V. (Palos Park,
IL) |
Assignee: |
|
Family
ID: |
21779049 |
Appl.
No.: |
05/168,020 |
Filed: |
March 5, 1970 |
Current U.S.
Class: |
250/311; 250/305;
250/310; 250/397 |
Current CPC
Class: |
H01J
37/05 (20130101); H01J 37/244 (20130101); H01J
37/045 (20130101); H01J 37/22 (20130101); H01J
49/484 (20130101); H01J 37/28 (20130101); H01J
2237/24507 (20130101); H01J 2237/24475 (20130101); H01J
2237/2449 (20130101); H01J 2237/24585 (20130101); H01J
2237/24465 (20130101); H01J 2237/24485 (20130101) |
Current International
Class: |
H01J
37/28 (20060101); H01J 37/22 (20060101); H01J
49/00 (20060101); H01J 37/244 (20060101); H01J
49/48 (20060101); H01J 37/05 (20060101); H01J
37/04 (20060101); H01j 037/28 () |
Field of
Search: |
;250/49.5A,49.5E,49.5PE,49.5AE |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
Denbigh et al.; Journal of Scientific Instr.; Vol. 42, No. 5, May,
1965, pp. 305-311;.
|
Primary Examiner: Birch; Anthony L.
Claims
The embodiments of the invention in which an exclusive property or
privilege is claimed are defined as follows:
1. A detector system for examination of a specimen by an electron
microscope having a source of electrons for irradiating the
specimen, the microscope acting to focus the electrons on a spot on
the specimen and further to scan the focused spot of electrons over
the specimen, the irradiating electrons after passing through the
specimen developing into groups of unscattered, inelastically
scattered and elastically scattered electrons, substantially all of
the unscattered and inelastically scattered electrons forming a
cone of illumination with substantially all of the elastically
scattered electrons being outside of the cone of illumination,
including in combination, first detection means positioned to
receive only electrons outside of the cone of illumination and to
detect all said received electrons and to develop a first output
signal representative of all of said received and detected
electrons, said first output signal being representative of the
elastically scattered electrons only, and utilization means coupled
to said first detector means for utilizing said first output
signal.
2. The detector system of claim 1 further including, second
detector means positioned to reject electrons outside of the cone
of illumination and to receive electrons in the cone of
illumination to detect at least one of the groups of inelastically
scattered and unscattered electrons in the cone of illumination and
to develop a second output signal representative of the group of
electrons detected, said utilization means being coupled to said
second detector means for utilizing said second output signal.
3. The detector system of claim 2 wherein, said second detector
means includes third detector means for detecting said
inelastically scattered electrons and to develop a third output
signal representative of the inelastically scattered electrons
detected, and fourth detector means for detecting said unscattered
electrons and to develop a fourth output signal representative of
the unscattered electrons detected, and utilization means coupled
to said third and fourth detector means for utilizing said third
and fourth output signals therefrom.
4. The detector system of claim 3 wherein, said first detector
means includes an opening therein substantially the size of the
cone of illumination of said inelastically scattered electrons and
said unscattered electrons, said first detector means being
positioned to permit electrons in said cone of illumination to pass
through said opening and to detect electrons outside of said cone
of illumination, said third and fourth detector means being
positioned to detect electrons within said cone of
illumination.
5. The detector system of claim 4 wherein, said first detector
means includes a plurality of first detectors, each of said first
detectors being positioned to detect electrons outside of said cone
of illumination and scattered at an angle different from the angle
of scatter of the electrons detected by any other of said second
detectors.
6. The detector system of claim 5 wherein, each of said plurality
of first detectors is in the form of an annular ring detector, said
plurality of annular first detectors being positioned
concentrically to detect electrons scattered to different angles
outside of said cone of illumination.
7. The detector system of claim 6 wherein, said third and fourth
detector means comprise a spherical analyzer, said spherical
analyzer being positioned to receive said electrons within said
cone of illumination and to separate the same according to the
energy thereof, said fourth detector means being positioned to
detect unscattered electrons, said third detector means including
at least one third detector positioned to detect inelastically
scattered electrons.
Description
CONTRACTUAL ORIGIN OF THE INVENTION
The invention described herein was made in the course of, or under,
a contract with the UNITED STATES ATOMIC ENERGY COMMISSION.
BACKGROUND OF THE INVENTION
In the scanning electron microscope a small focused spot of
electrons is scanned across the specimen being observed. Any
physical effect caused by the incident beam can be detected and
displayed as an intensity variation on a synchronously scanned
display oscilloscope. The area scanned may be rectangular, as in a
television picture, or it may be any other shape which is
desirable.
The electrons transmitted by the specimen can be divided into three
groups: those elastically scattered, those inelastically scattered
and those that are unscattered. In prior art electron microscopes
the transmitted electrons have been detected without separation or
they have been separated by energy content before detection. Thus
the elastically scattered and unscattered electrons have not been
separated before detection and information about the specimen has
been lost.
It is therefore an object of this invention to provide an improved
detection system for a scanning electron microscope.
Another object of this invention is to provide an electron
microscope wherein the transmitted electrons are separated
according to whether they are elastically or inelastically
scattered or are unscattered before detection.
Another object of this invention is to provide an electron
microscope wherein the elastically scattered electrons are
separated according to the degree of scattering before
detection.
SUMMARY OF THE INVENTION
In practicing this invention a detector for a scanning electron
microscope is provided which separately detects the elastic
electrons, the inelastic electrons and the unscattered electrons.
The inelastic electrons are deflected through only a very small
angle and thus remain in the cone of illumination of the beam after
it leaves the specimen together with the unscattered electrons. An
annular detector permits the inelastic and unscattered electrons to
pass through a hole therein to a separate detector where the
electrons are separated according to energy; that is, no energy
loss-- unscattered electrons; energy loss-- inelastic electrons.
The elastic electrons are deflected outside the cone of
illumination and are detected by the annular detector. A series of
annular detectors can be provided to measure the intensity of the
transmitted elastic electrons vs. degree of deflection. The signals
from the various detectors can be combined as desired to provide
information about the specimen.
DESCRIPTION OF THE DRAWINGS
The invention is illustrated in the drawings, of which:
FIG. 1 is a drawing of a scanning electron microscope;
FIG. 2 is a drawing of the detection system of this invention;
FIG. 3 is a drawing of another embodiment of the detection system
of this invention; and
FIG. 4 is a curve showing the output from the detection system of
this invention.
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIG. 1, there is shown a schematic and block diagram
of a scanning electron microscope. The microscope includes a vacuum
chamber 10 in which the microscope elements are positioned. An
electron source 11, which may consist of a field emission tip,
provides electrons which are focused on specimen 13. Anodes 14 and
16 act to accelerate and focus the electrons through aperture 17 to
specimen 13. Power supplies 19 and 20 are connected to anodes 14
and 16, respectively, to provide the required voltages for electron
acceleration and focusing.
The electron beam which impinges on specimen 13 is focused to as
small a spot as possible. Therefore, in order to illuminate the
desired area of the specimen, the beam is scanned over this desired
area in a manner similar to a TV scan. Sweep generator 22 provides
scanning voltages to deflection plates in the microscope
(represented by deflection plates 23 and 25). The voltages on the
deflection plates act to move the electron beam across the specimen
in a desired manner.
Sweep voltages from sweep generator 22 are also applied to the
deflection plates of CRT 26 (represented by deflection plates 28
and 29). The sweep voltages applied to the CRT 26 are in
synchronism with the sweep voltages applied to the electron
microscope so that the electron beam in the CRT 26 traces a raster
on the face of the tube as the specimen 13 is scanned.
A detector 31 placed beneath specimen 13 receives electrons
transmitted through the specimen. Detector 31 is coupled to cathode
32 of CRT 26 to modulate the intensity of the electron beam in CRT
26 according to the electrons received by detector 31. The
modulated electron beam forms a picture on the face of CRT 26
representative of the specimen being observed.
The electrons which reach the plane of detector 31 comprise three
components, those elastically scattered, those inelastically
scattered or energy loss electrons, and the unscattered electrons.
The elastically scattered electrons have a very wide angular
distribution and most of them reach the plane of detector 31
outside of the cone of illumination. The inelastic electrons are
scattered according to the energy loss involved in the inelastic
event. Since the majority of the energy loss events are in the
range 0-40 volts and the energy of the incident electrons is
several tens of kilovolts, the scattering angle is very small-- a
milliradian or less. The unscattered electrons fill the cone of
illumination and the intensity of this component is the intensity
of the original beam minus the elastic and inelastic electrons.
These three groups of electrons can be separated from one another
so that they can be separately used. Referring to FIG. 2, there is
shown a detection system which can separate the three groups of
electrons. The cone of illumination 35 from specimen 36 passes
through a hole in annular detector 40. If the hole in detector 40
is just large enough to allow the illuminating cone 35 to pass
through, it will detect the elastically scattered electrons which
are outside the cone of illumination 35. The elastically scattered
electrons are within cone 38 and outside of the cone of
illumination 35. The electrons in the cone of illumination and
which pass through the hole can be physically separated into
unscattered electrons and inelastically scattered electrons by
detector 39. The operation of detector 39 in separating the
unscattered electrons and the inelastically scattered electrons
will be described in a subsequent portion of the specification.
In FIG. 3, there is a detailed drawing of detectors suitable for
use in this electron microscope system. The cone of illumination 46
passes through a series of annular detectors 48 to 51 into an
electrostatic spherical analyzer 54 of conventional design.
Analyzer 54 includes electrodes 54 and 55 which are connected to
power supply 57. Power supply 57 acts to develop an electric field
between electrodes 54 and 55 to deflect electrons which enter the
analyzer. The amount of deflection is determined by the energy of
the electrons. Thus, with the field adjusted so that the
unscattered electrons strike detector 59, the inelastic electrons
which have lost energy will strike detectors 60 and 61. While three
detectors are shown, any number (two or greater) may be used,
consistent with the requirements of the system. Detectors 59, 60
and 61 may be, for example, scintillation detectors or silicon
surface barrier detectors.
The elastically scattered electrons from specimen 45 fall outside
the cone of illumination 46 and are detected by the annular
detectors 48 to 51. Detectors 48 to 51 may be, for example, silicon
surface barrier detectors. Each of the detectors 48 to 51 detect
the electrons which are elastically scattered at different
angles.
The signals from each of the detectors 48 to 51 and 59 to 61 are
amplified in amplifiers 63 to 69. The amplified signals are
combined in a desired manner in signal processor 71 and displayed
by display unit 72. The signals may be displayed as a
televisionlike picture, as photographs, as graphs or in other known
ways.
Different specimens will partition the electrons in different ways
so that in some cases it will be preferable to use one of the
signals while in other cases a combination of the signals would be
used. If the three signals are denoted by A (unscattered
electrons), A* (inelastically scattered electrons) and B
(elastically scattered electrons), a signal of the form:
would be useful. A suitable electronic signal processor could be
used to perform this function. The signal processor would have two
controls for controlling the values of x and y (where x and y can
assume positive or negative values) to develop the contrast of
interest to the microscopist.
Consider, for example, a specimen consisting of alternating areas
of 50 A. of carbon and 5 A. of tungsten. A plot of the elastic,
inelastic and unscattered electrons as a function of the spatial
distribution of the electrons on the detector aperture plane is
shown in FIG. 4. The cone of illumination is 10 milliradians and
the inelastic electrons are shown within the 10 milliradian section
of the plot as curves 75. The unscattered electrons are also shown
within the 10 milliradian section of the plot (separated from the
inelastic electrons) as curves 76. The elastic electron intensity
is plotted as a function of the angular distance from the cone of
illumination as curves 77. The tungsten contrast is small and
negative for the unscattered electrons, positive and larger for the
inelastic electrons and either positive or negative for the
elastically scattered electrons depending upon the angle of
observation.
Picture contract can therefore be enhanced as desired depending on
the choice of the electron groups which are used. If the ratio of
the inelastic electrons to the elastic electrons is used, the
picture contrast is proportional to 25/Z, where Z is the atomic
number of the element. This signal is substantially independent of
the thickness of the specimen so that "noise" which is caused by
thickness variations is reduced and specimen detail due to
different atoms is enhanced. In another example the signal from the
elastically scattered electrons below 50 milliradians (the
crossover point) could be subtracted from the signal above 50
milliradians to increase contrast. The resulting signal would then
be particularly sensitive to the relative thickness of the carbon
and the tungsten. The contrast of a particular area could be
enhanced by choosing the dividing line between the positive and
negative signals from a series of detectors such as 48 to 51 (FIG.
3).
* * * * *