U.S. patent number 3,614,512 [Application Number 04/815,679] was granted by the patent office on 1971-10-19 for ionizing device.
This patent grant is currently assigned to U.S. Philips Corporation. Invention is credited to Robert Evrard.
United States Patent |
3,614,512 |
Evrard |
October 19, 1971 |
IONIZING DEVICE
Abstract
Ion source for use in an ion pump or other apparatus, comprising
a secondary-emissive cylinder accommodating a grid. A
high-frequency voltage is applied between these two electrodes so
that the transit time of the diametrically moving electrons is one
whole period or a multiple thereof.
Inventors: |
Evrard; Robert (Paris,
FR) |
Assignee: |
U.S. Philips Corporation (New
York, NY)
|
Family
ID: |
8648952 |
Appl.
No.: |
04/815,679 |
Filed: |
April 14, 1969 |
Foreign Application Priority Data
Current U.S.
Class: |
315/98; 417/48;
250/493.1 |
Current CPC
Class: |
H01J
41/06 (20130101) |
Current International
Class: |
H01J
41/06 (20060101); H01J 41/00 (20060101); H01j
027/00 () |
Field of
Search: |
;230/69 ;313/7,63,230
;250/41.9SB ;324/33 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Hossfeld; Raymond F.
Claims
I claim:
1. An ion source comprising a first circular-cylindrical electrode
having a secondary-emissive inner surface, a second
circular-cylindrical gridlike electron-permeable electrode
enclosing an unobstructed space within and concentric with said
first electrode and spaced therefrom, a gas-forming ions during an
electrical discharge within the space formed by the first
electrode, and means to produce a high-frequency electric field
between said electrodes having an amplitude and frequency whereby
electrons enter said space within said second electrode and produce
a space charge there within, the transit time of the electrons
being such that the electrons strike the secondary-emissive surface
of the first electrode in the same phase as that in which they
leave said surface, and the transit time of the electrons from the
secondary-emissive surface towards the opposite side thereof is at
least one complete period of the electric high-frequency field.
Description
The invention relates to an ionizing device in which the electrons
producing the ionization of the available gases perform oscillatory
movements under the action of an electric high-frequency field
inside a circle-cylindrical electrode inside which a
circle-cylindrical grid electrode is arranged, while the transit
times of the electrons are such that the electrons strike the
secondary-emissive surface of the outer electrode in the same phase
as that in which they leave said surface.
In application Ser. No. 718,047, filed Apr. 2, 1968 an arrangement
is disclosed in which inside the grid an ion collecting electrode
is arranged for the case in which the ionizing device forms part of
a getter ion pump. In the case of an ion source a suction electrode
is provided.
The invention has for its object to provide a simpler
arrangement.
According to the invention in an ionizing device in which the
electrons producing the ionization of the available gases perform
oscillatory movements under the action of a high-frequency electric
field inside a circular-cylindrical electrode, inside of which a
grid electrode is arranged, while the transit times of the
electrons are such that the electrons strike the secondary-emissive
surface of the outer electrode in the same phase as that in which
they leave said surface, the space inside the grid-shaped electrode
is completely free, while the transit time of the electrons from
the surface of the secondary-emissive electrode to the opposite
side thereof is one complete period of the electric high-frequency
field or an integral multiple thereof.
In contrast to the arrangement disclosed in the prior Patent
Application, in which the oscillatory movements of the electrons
are performed across the rods of the grid and back on the same
side, the electrons in the device according to the invention travel
through the circular-cylindrical grid electrode. As a result the
distance covered may be more advantageous so that the possibility
of ionization is increased. Because all electrons pass
approximately through the axis of the electrode system, they are
capable of producing an important space charge which is further
amplified by the electrons released from the gas atoms. In this
negative space charge the ions can stay in high concentration
without diffusing outwardly so that a plasma is formed from which
the ions can be sucked away by electrodes (not shown) at the axial
ends of the coaxial electrode system.
It should be noted that an arrangement is known in which inside a
secondary-emissive cylinder a wire-shaped electrode is axially
arranged, between which two electrodes an electric high-frequency
field is applied, while the resonance requirement is satisfied.
However, the space charge in the axis of the system is lower and
hence also the ion concentration.
The invention will be described with reference to the drawing,
which shows a sectional view at right angles to the axis of the
electrode system of an ionizing device.
The cylinder electrode is formed by a stainless-steel sheath 3
having a layer of superficially oxidized silver 2 on the inner
side. The diameter of the sheath 3 is 240 mms. The grid 4 consists
of copper and has a diameter of 180 mms. Between the electrodes 3
and 4 an alternating voltage is applied which has a frequency of 40
Mc./sec. and an amplitude of 150 v.
* * * * *