U.S. patent number 3,598,083 [Application Number 04/869,746] was granted by the patent office on 1971-08-10 for complex motion mechanism for thin film coating apparatuses.
This patent grant is currently assigned to Varian Associates. Invention is credited to Hany E. Cottrell, Robert F. Dort, James R. Skinner.
United States Patent |
3,598,083 |
Dort , et al. |
August 10, 1971 |
COMPLEX MOTION MECHANISM FOR THIN FILM COATING APPARATUSES
Abstract
Apparatus is described for providing complex rotation about
three axes of a plurality of objects being coated by deposition.
The apparatus includes a frame adapted to be supported within a
conventional deposition coating chamber having a source providing
within the chamber an atmosphere of molecularly-sized particles of
the desired coating material. A substrate holding disc having a
face to which a plurality of substrate objects can be secured is
mounted to the frame for rotation with the face in line-of-sight of
the material source. The disc is mounted to the frame for orbiting
about an axis which extends toward the source and rotation about
its own axis. Each of the substrate object supporting members on
the face of the disc is rotatably mounted thereon for rotation of
the surface of the object to be coated about an axis which is
oblique to the source. A prime mover is provided causing rotation
about the various axes during the coating operation with the result
that the surfaces being coated of the substrate objects will
receive a uniform coating irrespective of irregularities in such
surfaces.
Inventors: |
Dort; Robert F. (Palo Alto,
CA), Skinner; James R. (Cupertino, CA), Cottrell; Hany
E. (Los Gatos, CA) |
Assignee: |
Varian Associates (Palo Alto,
CA)
|
Family
ID: |
25354187 |
Appl.
No.: |
04/869,746 |
Filed: |
October 27, 1969 |
Current U.S.
Class: |
118/730; 118/503;
118/53; 269/55 |
Current CPC
Class: |
C23C
14/505 (20130101) |
Current International
Class: |
C23C
14/50 (20060101); C23c 011/00 () |
Field of
Search: |
;118/47--49.5,52,53,500,504,423,425 ;269/55,58 ;117/106--107.2 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Kaplan; Morris
Claims
What we claim is:
1. Apparatus for providing complex motion to a plurality of
substrate objects in order to assure uniform coating by deposition
on a surface of each of such objects, said apparatus comprising a
frame adapted to be supported within a coating chamber having a
source of the desired coating material to provide an atmosphere in
the chamber of particles of the coating material, a substrate
holder having separate object supporting means rotatably mounted at
discrete locations on a face thereof which is in line-of-sight of
said source of material, said holder being mounted on said frame
for orbiting about a first axis which is spaced from said holder
and which extends generally toward said source and for rotation
about a second axis which passes through said face of said holder,
and means for orbiting and rotating said holder about said first
and second axes respectively while simultaneously rotating each of
said object supporting means on said holder face during the coating
operation to rotate the surface to be coated of each object held
thereby about an axis which is oblique to said source whereby
substrate objects held by the object supporting means are rotated
about three axes relative to said source during deposition thereon
of the coating material.
2. The apparatus of claim 1 wherein said separate object supporting
means are rotatably mounted on said face of said holder at
positions equally spaced from the location at which said second
axis passes through said face.
3. The apparatus of claim 1 wherein each of said object supporting
means includes a plurality of spring fingers normally urged toward
one another to grip therebetween a substrate object to be
coated.
4. The apparatus of claim 1 wherein said substrate holder is
selectively removable from said frame to facilitate access to said
object supporting means thereon.
5. The apparatus of claim 1 wherein said means for orbiting and
rotating said holder about said first and second axes respectively
includes a prime mover coupled to said holder for rotatably driving
said holder in an orbit about one of said first and second axes,
and means linking said holder with said frame for rotating said
holder about the other of said first and second axes upon the
orbiting thereof about said one axis.
6. The apparatus of claim 5 wherein means are included coupling
each of said object supporting means on said holder with said frame
for rotatably driving each of said object supporting means upon
rotation of said holder about said second axis.
7. The apparatus of claim 5 wherein said prime mover is drivingly
coupled to said holder through a central rotor facing said source
and mounted on said frame for coaxial rotation about said first
axis, an arm extending outwardly from said rotor and toward said
source, said holder being rotatably mounted on said arm for
rotation on an axis generally perpendicular thereto to provide said
rotation about said second axis, and wherein said means coupling
each of said object supporting means with said frame includes a
planetary gear arrangement linking each of said object supporting
means with said arm whereby upon rotation of said holder about said
second axis relative to said arm each of said object supporting
means is rotatably driven on said face.
8. The apparatus of claim 7 wherein said substrate holder includes
a gear cooperable with a corresponding gear on said frame to
automatically provide rotation of said holder about said second
axis upon the orbiting thereof by said rotor and arm about said
first axis.
9. The apparatus of claim 5 wherein said arm is selectively
separable from said rotor to enable removal of said substrate
holder from the remainder of said frame for access to the object
supporting means thereon.
Description
BACKGROUND OF THE INVENTION
This invention relates to the coating of one or more films of
material onto a plurality of substrate objects such as
microelectronic wafers and, more particularly, to improved
apparatus for providing complex motion to substrate objects during
the coating operation in order to assure uniform coating of
irregular surfaces of such objects.
Many microelectronic components, as well as other objects, are now
produced by coating a substrate object or wafer with one or more
thin films of a material which is generally an electrical
conducting or semiconducting material. In order to achieve the
desired film thinness, as well as for other reasons, those working
in the field generally effect the coating by forming an atmosphere
of molecularly sized particles of the desired coating material in a
coating chamber for deposition onto the substrate surface. There
are several techniques employed to provide the atmosphere of
particles. For example, one which is fairly commonly used is that
of "sputtering" the particles from a target electrode of the
material by bombarding the target with high energy positive ions.
Another technique used to form the atmosphere relies simply on the
evaporation of the particles from a body of the material. No matter
how the atmosphere of particles is formed, the atmosphere generally
does not have a uniform density of the material particles
throughout the coating chamber. This nonuniformity is caused by
various factors. For one thing, the density of the particles within
the atmosphere decreases as the distance from the source of such
particles increases. Moreover, the inclusion in the atmosphere of
necessary mechanical structures and the like will disrupt the
spacial distribution of the particles.
The nonuniform density of the particles within the coating
atmosphere can effect the rate of particle deposition and,
therefore, the coating rate on substrate objects. That is, the rate
of deposition and, hence, coating at any given location within the
chamber will depend upon the density of the particles at such
location Either time or space varying differences in the density in
the chamber will thus cause corresponding changes in the coating
rate. Those in the art have therefore been unable to control the
uniformity and thickness of an applied coating to the degree that
one would like. This is especially true when one attempts to coat a
plurality of substrate objects at one time. Such a plurality of
objects must necessarily be located at different positions within
the particle atmosphere with resulting different coating rates on
each object.
Many substrate objects desired to be coated, such as integrated
circuit wafers, have irregular surfaces on which the material is to
be deposited. These irregularities can further detrimentally affect
the uniformity of the resulting coating. That is, the ridges,
depressions, etc. in the surface tend to shade one another and
prevent deposition at certain locations on the surface while
enhancing the deposition at other locations. The result is that for
many applications the coated product will not meet designed
specifications.
SUMMARY OF THE INVENTION
It is a primary object of the instant invention to assure uniform
coating of the surfaces of a plurality of substrate objects
subjected to a coating atmosphere. As a particularly salient
feature of the invention, it assures uniform coating of a substrate
object surface irrespective of irregularities in the surface. In
its basic aspects, the apparatus of the invention includes a frame
which is adapted to be supported within a conventional coating
chamber having a material source to provide a particulate
atmosphere within the chamber of the desired coating material. A
holder for a plurality of substrates is mounted on the frame for
orbiting about a first axis which is spaced from such holder and
extends generally toward the source and rotation about a second
axis which passes through the face of the holder on which the
substrate objects are to be secured. A plurality of separate object
supporting means are mounted on a face of the holder which is in
the line-of-sight of the source of material. By orbiting the holder
during the coating operation about the first axis and rotating it
about the second axis as discussed above, all substrates supported
on the holder face will be moved throughout the same portion of the
coating atmosphere to thereby subject all of the substrate objects
to generally the same deposition conditions. In this connection,
each of the objects will be moved both laterally of the source and
longitudinally toward and away from the source.
Each of the separate object supporting means on the holder is
mounted thereon for rotation of the substrate surface to be coated
about an axis which is oblique to the source, and means are
included for rotating each of the objects simultaneously with
orbiting and rotation of the holder about its respective first and
second axes. As will become more clear hereinafter, this will
assure that all topographical features of each substrate object
will be uniformly coated by virtue of such rotation changing the
orientation of each object relative to the source. The combination
of this rotation of each object on the holder with the orbiting and
of the holder about the above-described first and second axes will
result in complete uniform coating of a plurality of objects in a
controlled environment irrespective of nonuniformities in the
coating atmosphere and irregularities in the surfaces of the
objects. The apparatus of the invention provides the substrate
movement responsible for this uniformity in a quite simple but yet
effective manner, and the particular structure providing this
motion has other features and advantages which will become apparent
from the following more detailed description of a preferred
embodiment of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
With reference to the accompanying two sheets of drawings:
FIG. 1 is a partially broken away and sectional side view of a
coating apparatus having incorporated therein a preferred
embodiment of the apparatus of the invention;
FIG. 2 is an enlarged view taken on a plane indicated by the line
2-2 in FIG. 1 and illustrating the rear side of the substrate
holder element of the invention;
FIG. 3 is a top sectional view taken on a plane indicated by the
line 3-3 in FIG. 1 illustrating a portion of the drive mechanism
for the apparatus of the invention; and
FIG. 4 is an enlarged partial sectional view taken on a plane
indicated by line 4-4 in FIG. 2 and illustrating details of an
object supporting element of the invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
With reference to FIG. 1 of the drawing, the apparatus of the
invention, generally referred to by the reference numeral 11, is
shown mounted within a conventional coating chamber 12. Coating
chamber 12 is defined by a vacuum envelope 13 mounted upon a base
14 which, in turn, has a vacuum system (not shown) connected
thereto for evacuating the chamber in accordance with usual
practice.
A source for providing an atmosphere within chamber 12 of
molecularly sized particles of the desired material is also
provided. While this source can be designed to provide the
particulate atmosphere in any appropriate manner, the source is
diagrammatically shown for illustrative purposes as a crucible 16
for holding a body of the material for evaporation. Means (not
shown) are included for heating the material within crucible 16 in
order to evaporate the same to provide the particulate atmosphere
of the material. It will be appreciated that although one source of
coating material is illustrated, a plurality of such sources may be
provided to enable either simultaneous or sequential coating of
substrate objects with different materials.
In accordance with conventional practice, a shutter mechanism 17 is
provided to enable selective blocking of the upward flow of
particles of the coating material toward the substrate objects.
More particularly, a shutter plate 18 is supported at a location
blocking line-of-sight between crucible 16 and the substrate
objects. Plate 18 is mounted via a gear transfer case 19 on a shaft
21 which is connected to suitable mechanism (not shown) outside of
base 14 for rotation by a flexible rotary cable 22. Plate 18 is
selectively rotatable by shaft 21 to an open position, i.e. to a
location out of the line-of-sight of evaporated material flowing
from source crucible 16.
After the coating chamber 12 is conventionally evacuated,
energization of the source of the coating material and movement of
the shutter plate 18 to the open position will result in
molecularly sized particles of the coating material flowing upward
from the source and providing a particulate atmosphere of the
coating material within the coating chamber. To assure good
adherence of the particles to substrate objects, it is preferred
that the atmosphere be heated. For this purpose, an annular array
of heaters in the form of quartz halide lamps 23 are supported upon
a frame ring 24 above the location of the source crucible 16. As
illustrated, lamps 23 define the perimeter of a passage through
which the coating material passes as it travels to the upper
portion of chamber 13. An angle bracket shield 26 is associated
with each of the lamps 23 to block line-of-sight deposition of
coating material from crucible 16 onto the lamps.
As mentioned previously, the density of particles of the coating
material in the coating atmosphere will not be uniform throughout
the coating chamber 12. For example, the density of the particulate
atmosphere will generally tend to decrease as the distance from the
source crucible 16 increases. Moreover, in view of the presence of
fixtures, such as the shutter arrangement 17 and the lamps 23, the
spacial distribution of the particles laterally throughout the
chamber will also not be uniform and can be time varying. This
nonuniformity in the particulate density will result in nonuniform
deposition rates and coatings. The consequential inability to
obtain on many substrate objects coatings of a controlled, uniform
thickness has placed serious limitations on the usefulness of
coating apparatuses of this type. This is particularly true with
respect to substrate objects, such as certain microelectronic
wafers, which have irregular surfaces on which the coating is to be
applied.
The apparatus 11 of the invention is designed to assure uniform
coating of a plurality of substrate objects within the coating
chamber, irrespective of nonuniformities in the coating atmosphere
and of irregularities in the surface configuration of such objects.
To accomplish this, the invention provides a predetermined complex
motion in a simple manner to each of the objects. Apparatus 11
includes a frame adapted to be supported within envelope 13 of
coating chamber 12. More particularly, the apparatus includes a
lower frame ring 27 which extends around the inner periphery of
chamber 12 adjacent its base and is supported therein by an annular
flange 28. A plurality of spaced apart support posts 29 extend
upwardly within envelope 13 from frame ring 27 to a location
adjacent the top of chamber 12. Such posts act as supporting
members to suspend within the chamber the remainder of the
structure of the apparatus. Also, as shown, the posts support the
ring 24 on which the lamps 23 are mounted.
A plate 31 is supported laterally within the chamber on the upper
ends of the posts 29. As best illustrated in FIG. 3, plate 31 is in
the shape of a disc with a segment thereof removed for a purpose
which will be described hereinafter.
A rotor in the form of a rectangular plate 32 is mounted for
rotation on the underneath surface of plate 31 axially of envelope
13. As illustrated, rotor 32 is in opposed, facing relationship to
crucible source 16 and is mounted for rotation on an axis 33 which
extends toward source crucible 16 and in a plane which is parallel
to plate 31 and lateral of such source 16. Throughout this
specification, whenever a direction with reference to the source of
material is stated, reference to the source is to be construed as
reference to the general direction at which the molecularly sized
particles emanate from such source.
A pair of hooks 34 projects outwardly from each of the four sides
of rectangular rotor plate 32. As illustrated, the hooks 34 of each
pair are equally spaced from the axis of rotation 33 of rotor 32 on
opposite sides thereof. Each pair of hooks 34 acts as means for
removably securing a corresponding arm 35 to rotor 32. In this
connection, each arm has at its upper end a pair of oppositely
directed ears 36 from each of which protrudes a pin 37 engageable
within a corresponding one of the hooks 34.
Each of the arms 35 extends in a direction toward the source 16 and
outwardly away from rotor 32. Rotatably mounted on the free end of
each arm 35 is a substrate holder in the form of a disc 38. As
illustrated, each of the discs 38 is mounted to a corresponding arm
at its center for rotation about an axis 39 which extends normally
to the disc and through a front face 40 thereof.
Each disc 38 is circumferentially provided with spur gear teeth 41
which mesh with a plurality of pins 42 defining the teeth of a ring
bevel gear 43. Bevel gear 43 extends peripherally around the inner
wall of envelope 13 at a location below rotor 32. As illustrated,
such ring bevel gear 43 is supported in position laterally of
chamber 12 as a part of the frame of the apparatus by blocks 44
secured to posts 29.
The substrate holders 38 are annularly disposed within the chamber
12 with the front face 40 of each in the line-of-sight of material
emanating from crucible source 16. A plurality of separate objects
supporting means are rotatably mounted at discrete locations on the
face 40 of each of the discs. More particularly, a circular array
of object supporting means are provided on each face 40 with such
supporting means being equally spaced from the axis of rotation 39
of the holder.
As a particularly salient feature of the instant invention, each of
the object supporting means is itself rotatable with respect to the
holder on which it is mounted. That is, each object supporting
means is mounted for rotation of the surface of the substrate held
thereby about an axis which is oblique to the source. In this
connection, and as is shown in FIG. 4, each object supporting
means, generally referred to by the reference numeral 46, includes
a bearing 47 rotatably mounting a sleeve 48 to its associated
holder 38. A spur gear 49 is secured to sleeve 48 on the rear side
of holder 36 in order to provide rotation of such object supporting
means in the manner described in more detail hereinafter.
Each of the supporting means includes an arrangement by which the
substrate object, schematically illustrated as a microelectronic
wafer 51, can be easily and quickly secured to or removed from the
holder 38. That is, each object supporting means includes a
plurality of fingers 52 which project outwardly from the interior
of sleeve 48 in order to grip the wafer 51 at selected positions
around its periphery. Spring fingers 52 are normally urged toward
one another in order to provide the gripping action. More
particularly, the fingers 52 are secured to the end 53 of a plunger
rod 54 which is normally urged to the right as viewed in FIG. 4 by
a compression spring 56 acting upon a piston 57 secured to plunger
54, to draw the spring fingers 52 into sleeve 48, and thereby urge
such fingers toward one another.
The spur gears 49 of all of the object supporting means of each
holder are coupled with one another and with arm 35 in a manner
assuring rotation of each of the object supporting means about its
own axis 58 upon rotation of the holder about the axis 39. For this
purpose, it will be seen with reference to FIG. 2 that a planetary
drive arrangement including a chain 59 connects each of the object
supporting means with a gear 60 which is rigid with respect to arm
34 coaxially with the axis of rotation of holder 38. Means for
adjusting the tension of the chain 59 is also provided in the form
of an idler gear 61 which is adjustably positionable along the
length of a slot 62 in order to tighten or slacken the chain. It
will be appreciated that upon rotation of holder 38 about axis 39,
each of the object supporting means on the holder face 40 will also
be rotated about the axis 58 passing through such supporting means
and through the surface to be coated of the object being
supported.
Driving means are provided for rotating the apparatus about its
various axes to provide the desired complex motion. A prime mover,
such as an electric motor schematically represented at 66, provides
axial rotation via a motion-transmitting flexible cable 67 to a
drive rod 68 which extends upwardly within envelope 13 through
plate 31. The upper end of drive rod 68 terminates above plate 31
in a gear 69 which is linked by a chain 71 to a drive gear 73.
Drive gear 73 is, in turn, axially secured to rotor 32 by a shaft
73 which extends through plate 31 and provides rotation of the
rotor about axis 33. A takeup idle roller 74 is mounted on plate 31
to facilitate tensioning of chain 71.
In view of the above construction, energization of motor 66 will
provide motion of any substrate object secured within the apparatus
upon one of the object supporting means about three different axes.
As will become more clear hereinafter, this motion will assure
uniform coating of the surface of the object desired to be coated
irrespective of irregularities in such surface. More particularly,
energization of motor 66 will provide rotation of rotor 32 about
axis 33 in view of the linkage discussed immediately above. Since
the substrate holders 38 are mounted on the arms 35 for rotation
with rotor 32, each substrate object on the holder will therefore
be moved laterally through chamber 12 around axis 33. Thus, all of
the substrate objects will be subjected to the same differences in
density of the coating atmosphere which may exist laterally in the
chamber 12 in the space in which the substrate objects are
located.
Rotation of rotor 32 will also cause rotation of each of the
substrate holders about its own axis 39. That is, by virtue of the
cooperation between the gear teeth 41 on each holder with the pins
42 of bevel gear 43, movement of each holder about gear ring 43 by
rotation of plate 32 will also cause the holder to rotate about its
axis 39. Thus, all of the substrate objects will also be moved
vertically of the coating chamber throughout the same space in such
chamber. This will assure that all of the objects will be exposed
to the same density differentials which may exist vertically in the
chamber along their path of travel.
Upon rotation of each substrate holder 36 about its axis 37, each
of the object supporting means thereon will be driven for rotation
about its own axis. That is, in view of the planetary and chain
arrangement by which each of the object supporting means is secured
to the gear 59 which is stationary with respect to arm 34, as the
holder 36 rotates with respect to arm 34, chain 58 will rotatably
drive the gears 49 and, hence, the object supporting means and any
substrate held thereby.
It is to be noted that because each of the arms 34 extends
outwardly from rotor 32, i.e., that the substrate holders are held
further apart at their lower extremities than at their upper
portion, the axis 39 of rotation of each of the holders has a
directional component which extends horizontally or laterally with
respect to the chamber 12 and crucible source 16 even though the
face 40 of each of such holders is in the line-of-sight of
particles emanating. This results in the axis 39 being oblique to
the direction of flow of particles from source 16. The axes 58 of
the separate object supporting means are parallel to axis 39 and
are therefore also oblique to source 16. The object supporting
means grip the object to be supported in a manner holding the
surface to be coated generally perpendicular to the rotational axis
58. Thus, the surface of the substrate object is also at an oblique
angle with respect to the source 16. The result is that any
irregularities in the form of ridges in the surface of the object,
or depressions, which irregularities will be generally
perpendicular to the surface of the object if it is a
microelectronic wafer, will be angularly related to the path of
coating particles flowing thereto from source 16. The rotation of
the surface when it is in this orientation will assure that
generally all surfaces formed by the ridges and indentations will
be brought into direct line-of-sight alignment with such flow,
thereby assuring deposition on such surfaces. It is to be noted
that in order for the substrate surface to be coated to be oblique
to the source, i.e., oblique to the direction of flow at the
surface being coated of the particles emanating from the source, it
may not be necessary that such surface be obliquely oriented in the
envelope 13. That is, the orientation of the surface and its axis
of rotation in the envelope will depend on the direction of flow of
the material particles at the location of such surface.
As another feature of the instant invention, it is designed to
facilitate ready access to the substrate objects secured thereto.
That is, each of the arms 35 is simply and quickly separable from
the rotor 32 by virtue of the hook and pin arrangement by which it
is connected to such rotor. After the arm is so disconnected from
the rotor, the full holder and the arm can be easily removed from
the apparatus. In this connection, it will be noted from FIG. 3
that because a segment of plate 31 is removed, ready access can be
had to any holder positioned for removal in line with such segment.
Once a holder is removed from the apparatus, coated substrate
objects held by the object supporting means can easily be
disengaged therefrom and replaced by uncoated objects by merely
depressing the plunger 54 of each object supporting means. For
assembly line coating, one can provide a table or the like on which
the holder can be rested with each of the plungers 54 in engagement
therewith to simultaneously release for replacement all of the
objects held by the object supporting means of the holder.
* * * * *