U.S. patent number 3,594,885 [Application Number 04/833,458] was granted by the patent office on 1971-07-27 for method for fabricating a dimpled concave dispenser cathode incorporating a grid.
This patent grant is currently assigned to Varian Associates. Invention is credited to Gerhard B. Kuehne, George V. Miram.
United States Patent |
3,594,885 |
Miram , et al. |
July 27, 1971 |
METHOD FOR FABRICATING A DIMPLED CONCAVE DISPENSER CATHODE
INCORPORATING A GRID
Abstract
Methods for fabricating concave dimpled dispenser cathodes are
disclosed. A multicell groove pattern is formed in the concave face
of the cathode blank. An array of concave dimples are formed in the
cellular regions of the concave emitter face bounded by the cells
of the groove pattern. A multicell grid structure is incorporated
into the groove pattern. The groove pattern is formable by
photoetching, electrical discharge machining or by milling. The
grid structure may be brazed into the grooves or merely supported
therein in noncontacting relation therewith.
Inventors: |
Miram; George V. (Daly City,
CA), Kuehne; Gerhard B. (Santa Clara, CA) |
Assignee: |
Varian Associates (Palo Alto,
CA)
|
Family
ID: |
25264477 |
Appl.
No.: |
04/833,458 |
Filed: |
June 16, 1969 |
Current U.S.
Class: |
445/47; 445/50;
313/337 |
Current CPC
Class: |
H01J
9/047 (20130101) |
Current International
Class: |
H01J
9/04 (20060101); H01j 009/16 (); H01j 009/44 () |
Field of
Search: |
;29/25.18,25.14,25.13,25.11,25.1 ;313/337,346 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Campbell; John F.
Assistant Examiner: Shore; Ronald J.
Claims
What we claim is:
1. In a method for fabricating a dimpled dispenser cathode for a
convergent stream electron gun the steps of, forming a multicell
groove pattern in the concave face of a dispenser cathode blank,
such multicell groove pattern conforming generally to the web
pattern of a multiapertured control grid to be employed over the
concave emissive surface of the dispenser cathode, forming an array
of concave dimpled emissive facets in the concave face of the
cathode blank, each of the individual facets being located such as
to be bounded by an individual cell of the multicell groove
pattern, and incorporating a multiapertured grid structure in the
groove pattern, such grid structure having a web pattern conforming
generally to the groove pattern and to the web pattern of the
control grid.
2. The method of claim 1 wherein the step of forming the
multicelled groove pattern in the concave face of the dispenser
cathode blank comprises the step of marking the concave face to be
grooved to indicate the pattern of the desired grooves, and milling
the grooves in the concave face according to the marked
pattern.
3. The method of claim 1 wherein the step of forming the
multicelled groove pattern in the concave face of the dispenser
cathode blank comprises the step of electrically discharge
machining the concave face with a tool having a discharge defining
electrode pattern conforming to at least a portion of the desired
groove pattern to be formed in the concave face of the dispenser
cathode blank.
4. The method of claim 1 wherein the step of forming the
multicelled groove pattern in the concave face of the dispenser
cathode blank comprises the step of, chemically etching the groove
pattern in the concave face of the dispenser cathode blank.
5. The method of claim 1 wherein the cathode blank into which the
groove pattern is to be formed comprises a porous tungsten body
with the pores infiltrated with a malleable material, and including
the steps of removing the malleable material from the grooved
cathode blank to leave a porous metal blank, and infiltrating the
pores of the metal blank with electron emissive material to form a
dispenser cathode body.
6. The method of claim 5 wherein the step of incorporating the grid
structure into the groove pattern includes the steps of, locating
the web of the grid structure in the groove pattern, and brazing
the grid structure to the grooved cathode body.
7. The method of claim 5 including the step of, coating the grid
structure to be incorporated in the groove pattern of the dispenser
cathode blank with an electron-emission-inhibiting coating.
8. The method of claim 4 wherein the step of chemically etching the
groove pattern includes the steps of, positioning a masking grid
structure, having the desired grid pattern to be formed in the
cathode, adjacent the concave face of the cathode blank, coating
the grid structure and exposed positions of the masked concave face
of the cathode blank with an acid-resistant emulsion, removing the
masking grid structure to expose the surface of the cathode blank
masked by the masking grid structure, and chemically etching the
exposed surfaces in the concave face of the cathode blank to form
the desired groove pattern.
9. The method of claIm 1 wherein the individual cell pattern of the
grooves formed in the concave face of the cathode blank is
hexagonal.
Description
DESCRIPTION OF THE PRIOR ART
Heretofore, it has been proposed to provide a multicell grid
structure on or in the surface of a concave and dimpled cathode
emitter with the cells of the grid structure being in alignment
with apertures in a control grid. Such a cathode is disclosed and
claimed in copending U.S. Pat. application Ser. No. 650,893 filed
July 3, 1967 and assigned to the same assignee as the present
invention. Such cathodes are especially useful in electron guns of
high-convergence high-power linear beam tubes since control grid
current interception is greatly reduced. This follows since the
grid structure in or on the cathode helps to focus the electron
beamlets through the aligned apertures of the control grid.
Moreover, the focusing grid structure helps to inhibit electron
emission from the regions of the cathode in registration with the
webs of the control grid. However, heretofore practical production
methods for fabricating dispenser cathodes incorporating such
focusing grid structures have not been known.
SUMMARY OF THE PRESENT INVENTION
The principal object of the present invention is the provision of
an improved method for fabricating a concave dimpled dispenser
cathode having a grid structure incorporated therein.
One feature of the present invention are the steps of forming a
multicell groove pattern in the concave face of a dispenser cathode
blank to accommodate a multiapertured grid structure and forming an
array of dimpled facets in the concave face of the cathode blank,
such facets each being bounded by individual cells of the multicell
groove pattern.
Another feature of the present invention is the same as the
preceding feature wherein the step of forming the groove pattern
comprises the step of milling the grooves in the concave face of
the cathode blank.
Another feature of the present invention is the same as the first
feature wherein the step of forming the groove pattern comprises
chemically etching the groove pattern in the concave face of the
cathode blank.
Another feature of the present invention is the same as the first
feature wherein the step of electrically discharge machining the
groove pattern with a discharge defining electrode having a pattern
conforming to at least a portion of the groove pattern to be
formed.
Other features and advantages of the present invention will become
apparent upon a perusal of the following specification taken in
connection with the accompanying drawings wherein:
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is fragmentary longitudinal sectional view of an electron
gun fabricated by methods incorporating features of the present
invention;
FIGS. 2 and 4 are enlarged detail views of alternative embodiments
to that portion of the structure of FIG. 1 delineated by lines 2-2
and 4-4,
FIGS. 3 and 5 are enlarged detail views of portions of FIGS. 2 and
4 delineated by lines 3-3 and 5-5, respectively,
FIG. 6 is a perspective flow diagram depicting a method of the
present invention for fabricating dispenser cathodes,
FIG. 7 is a flow diagram in block diagram form depicting a
cathode-fabricating method of the present invention;
FIG. 8 is flow diagram in block diagram form depicting certain
steps in a method of the present invention; and
FIG. 9 is a sectional view of a tool of an electrical discharge
machine depicting how it is employed in a method of the present
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring now to FIG. 1, there is shown an electron gun 1 employing
a concave dispenser cathode emitter 2. The emitter is of the type
disclosed in the aforecited U.S. Pat. application Ser. No. 650,893
and briefly is a spherical section of barium-impregnated porous
tungsten having a multitude of closely packed dimpled facets 3 in
the concave face 4 of the emitter 2. A centrally apertured anode
electrode 5 faces the concave face 4 of the emitter 2. A
multiapertured control grid 6 is disposed closely overlying and
conforming to the shape of the concave surface 4. The apertures 7
of the control grid 6 are preferably hexagonal and disposed in
registration with the dimpled facets 3, i.e., center of grid
openings 7 falls on an electron trajectory leaving the center of
facet 3. The facets 3 may be of circular or hexagonal boundary
configuration with spherically concave surfaces of substantially
lesser radius of curvature than the radius of curvature for the
composite concave face 4.
A focus grid structure 8, having a configuration substantially
identical to that of control grid 6, is incorporated into the
concave surface 4 of the emitter 2 such that the web portions of
focus grid 8 are in alignment with the similar web portions of the
control grid 6. The focus grid 8 is positioned within a grid shaped
groove pattern 9 in the concave surface 4 of the emitter. The grid
8 may be supported in noncontacting relation with respect to the
grooves or it may be affixed, as by brazing, to the grooves. These
two alternatives are depicted in greater detail in FIGS. 2--5
below. The focus grid serves to focus the individual electron
beamlets through the corresponding aperture 7 in control grid 6 in
a substantially nonintercepting manner. The focus grid 8, as of
molybdenum, is coated with an electron-emission-inhibiting
material, such as, carbon, titanium, zirconium, iridium, etc., to
prevent current interception on the control grid 6 because the
coating inhibits emission from those portions of the cathode
surface 4 which would have electron trajectories to intercept the
web members of grid 6.
After the beamlets pass through apertures 7 they converge into a
unitary beam which passes through the central opening in anode 5.
In a typical example, the gun 1 produces a beam of 1 amp at 10 kv.
with a microperveance of 1.0 and cathode loading current density of
1.2 amps/cm. 2. Grid interception was 0.8 percent of the beam
current.
Referring now to FIGS. 2 and 3, there is shown one embodiment of
the dispenser cathode 2. In this embodiment, focus grid structure 8
is supported at its periphery from a relatively heavy tubular
thermally conductive support 11 for heat sinking and cooling the
grid 8. The grid 8 is supported in noncontacting relation within
the groove pattern 9 to inhibit thermal conduction from the cathode
2, which normally operates within the range of 900.degree. to
1,100.degree. C, to the grid 8. The noncontacting relation also
serves to inhibit migration of barium impregnant from the cathode 2
to the grid 8. In a typical example, the grooves 9 have a width of
0.016 inch and a depth of 0.005 inch and the grid 8 has a web width
of 0.010 inch and a depth in the direction of the beam of 0.009
inch and is separated from the bottom of the groove 9 by 0.001
inch.
Referring now to FIGS. 4 and 5, there is shown a second embodiment
of the dispenser cathode 2 wherein the grid 8 is supported from the
cathode body via brazed joints 12 between the bottom of the grooves
9 and the abutting surface of the grid 8. Suitable braze materials
include molybdenum-nickel or molybdenum-ruthenium mixes.
Referring now to FIG. 6, there is shown a flow diagram depicting
the steps of the present invention for fabricating dispenser
cathodes having grid structures incorporated therein. In the
method, a spherically concave dispenser cathode blank 2, such as
porous tungsten impregnated with a malleable material such as
copper or plastic has its concave surface 4 grooved, in step (a),
with a multicell hexagonal pattern of grooves 9 such groove pattern
conforming to the grid pattern of the control grid 6 and to the
pattern of the focus grid 8 to be located in the grooves 9. The
grooves 9 may be formed as by chemical etching, milling, or by
electrical discharge machining in the manner more fully described
below with regard to FIGS. 7--9.
After the grid pattern of grooves 9 is formed, the dimpled facets 3
are formed, in step (b), in each of the cells of the groove pattern
9. The dimples 3 are formed either by machining or by electrical
discharge machining.
In step (c), the focus grid structure 8 is incorporated into the
groove pattern 9 either in noncontacting relation, as described
above with regard to FIGS. 2 and 3, or in contacting relation as
described with regard to FIGS. 4 and 5.
Referring now to FIG. 7, the general method of FIG. 6 is described
in greater detail as employing chemical etching to form the
grid-shaped pattern of grooves 9 in the cathode blank 2.
More specifically, in step (a), a masking grid structure
substantially identical to grid 8, in fact it can be grid 8, is
affixed to the concave surface 4 of the cathode blank 2, as by an
adhesive or by clamping. In step (b), an acid resistant emulsive
coating, such as A--Z 111 photo resist coating manufactured by
Shipley Company, is applied to the concave surface 4 of the cathode
blank 2 through the openings in the masking grid. In step (c), the
masking grid is removed leaving the exposed grid pattern in the
cathode blank surface 4.
In step (d), the surface 4 is treated with a chemical acid etch
such as potassium ferrocyanide and caustic for etching the groove
pattern 9 into the concave surface 4. In step (e) the surface 4 is
dimpled as above described. In step (b), the malleable impregnant
of the porous tungsten body is removed, as by chemical etching or
heating to boil out the impregnant.
In step (g), the porous tungsten body is impregnated with electron
emissive material, such as barium, ferrocyanide conventional
manner. In step (h), the grid structure 8 with its
electron-emission-inhibiting coating is incorporated in the grid
pattern of grooves 9 either in the noncontacting manner, as
described above with regard to FIGS. 2 and 3, or in contacting
relation, as described above with regard to FIGS. 4 and 5. The
dimpling step (e) can be performed either before or after
incorporation of the grid 8. If it is performed after incorporation
of the grid 8, the dimpling tool is merely inserted through the
respective aperture in grid 8.
Referring now to FIG. 8, there is shown the steps in an alternative
method for forming the pattern of grooves 9 in the cathode blank 2.
More specifically, steps (a--d) replace steps (a--d) in the process
of FIG. 7. In step (a), a masking grid is affixed to the cathode
blank 2, as in step (a) of the method of FIG. 7. In step (b), a
marking dye or paint is applied through the holes in the masking
grid to indicate the desired grid pattern for the grooves 9 by the
unpainted web pattern in the painted surface. In step (c), the
masking grid is removed to expose the desired grid pattern
markings. In step (d), the concave surface 4 is milled by a milling
machine along the unpainted lines of the desired grid pattern. The
remainder of the process of manufacture remains the same as
described with regard to FIG. 7.
Referring now to FIG. 9, there is shown an alternative method for
forming the grid pattern of grooves 9 in the cathode surface 4. In
this method, steps (a--d) of the method of FIG. 7 are replaced by
the step of electrically discharge machining the pattern of grooves
9 in the concave surface 4 of the cathode blank 2. The electrical
discharge defining electrode tool 15 has a spherically curved
surface 16 conforming to the surface 4 of the cathode blank 2.
Formed on the surface 16 of the tool 15 is a raised grid pattern 17
conforming to the grid pattern of the grooves 9 to be formed in the
cathode blank 2. The electrical discharge machining tool 15 is then
moved into the surface 4 of the cathode blank 2 to machine the grid
pattern of grooves 9 therein. The remainder of this method is the
same as that previously described above with regard to FIG. 7.
Since many changes could be made in the above construction and many
apparently widely different embodiments of this invention could be
made without departing from the scope thereof, it is intended that
all matter contained in the above description or shown in the
accompanying drawings shall be interpreted as illustrative and not
in a limiting sense.
* * * * *