U.S. patent number 3,591,813 [Application Number 04/803,280] was granted by the patent office on 1971-07-06 for lithium niobate transducers.
This patent grant is currently assigned to Bell Telephone Laboratories, Incorporated. Invention is credited to Gerald A. Coquin, Allen H. Meitzler, Arthur W. Warner, Jr..
United States Patent |
3,591,813 |
Coquin , et al. |
July 6, 1971 |
LITHIUM NIOBATE TRANSDUCERS
Abstract
The specification describes ultrasonic transducers made from
single crystal lithium niobate. Five crystal orientations are given
for which transducer characteristics are especially favorable.
Inventors: |
Coquin; Gerald A. (Berkeley
Heights, NJ), Meitzler; Allen H. (Morristown, NJ),
Warner, Jr.; Arthur W. (Whippany, NJ) |
Assignee: |
Bell Telephone Laboratories,
Incorporated (Murray Hill, Berkeley Heights, NJ)
|
Family
ID: |
25186106 |
Appl.
No.: |
04/803,280 |
Filed: |
February 28, 1969 |
Current U.S.
Class: |
310/360; 359/285;
252/62.9R; 73/632 |
Current CPC
Class: |
H01L
41/18 (20130101) |
Current International
Class: |
H01L
41/18 (20060101); H01v 007/00 () |
Field of
Search: |
;310/9.5 ;252/62.9 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Hirshfield; Milton O.
Assistant Examiner: Reynolds; B. A.
Claims
What we claim is:
1. A single crystal plate of lithium niobate having a crystal
orientation selected from the following: (yzw) -17.degree.
(.+-.3.degree.), (zxl) -54.degree. (.+-.3.degree.), (xyt)
41.degree. (.+-.3.degree.), (xyt) -49.degree. (.+-.3.degree.).
2. The single crystal plate of claim 1 having a (yzw) -17.degree.
(.+-.3.degree.) orientation.
3. The single crystal plate of claim 1 having a (zxl) -54.degree.
(.+-.3.degree.) orientation.
4. The single crystal plate of claim 1 having a (xyt) 41.degree.
(.+-.3.degree.) orientation.
5. The single crystal plate of claim 1 having a (xyt) -49.degree.
(.+-.3.degree.) orientation.
6. A crystal in accordance with claim 1 in combination with means
for impressing an electric field across the thickness of the
crystal plate.
7. An ultrasonic device comprising a crystal in accordance with
claim 1, means for impressing an electric field across the
thickness, and an ultrasonic wave transmission medium in
association with the crystal so that elastic waves generated by
said crystal propagate through the transmission medium.
Description
This invention relates to piezoelectric crystals of lithium niobate
and to ultrasonic transducers employing these crystals.
Recent interest in crystals in the class (3m) has uncovered new
piezoelectric materials. Much interest has centered around lithium
tantalate in this regard (see Journal of the American Ceramic
Society, 48, 112 (1965)).
It has now been found that certain crystal orientations exist in
lithium niobate which for transducer applications have
piezoelectric properties superior to those previously obtained with
lithium tantalate. Crystals in class (3m) have a low degree of
symmetry and the useful orientations have not previously been
recognized for LiNbo.sub.3. Useful orientations are those that
result in transducers vibrating in predominantly a single mode and
having a high effective electromechanical coupling factor. A
further important property, which is favorably exhibited by lithium
niobate, is a low dielectric constant for all orientations.
Several crystal orientations have been found for LiNbO.sub.3 which
result in transducers having coupling factors in excess of 50
percent and which have sufficient modal purity that propagation of
energy in spurious modes is more than 40 db. below the signal level
of the main mode. In addition to the high level of performance
obtainable from LiNbO.sub.3 transducers, this material has the
additional advantages that it is presently available commercially
and possesses mechanical properties that enable it to withstand the
processing required to prepare plates sufficiently thin for high
frequency applications.
The devices for which LiNbO.sub.3 is particularly suited are
ultrasonic transducers operating at relatively high frequencies,
i.e. above 100 mHz. Ultrasonic delay lines for digital storage at
those frequencies are currently being developed. High frequency
ultrasonic transducers are also useful in acousto-optic devices
such as ultrasonic light deflectors and ultrasonic light
modulators.
The crystal orientations which form the basis for this invention
are rotated Y-cut crystals having orientations designated (zxl )
73.degree., (yzw) -17.degree., and (zxl ) -54.degree. and X-cut
crystals designated (xyt) 41.degree., and (xyt) -49.degree..
These five crystal designs and their application will be described
more completely in the following detailed description.
In the drawing:
FIGS. 1 to 5 are geometric representations of the inventive crystal
orientations;
FIG. 6 is a perspective view of an ultrasonic transducer
incorporating one of the crystals of the invention; and
FIG. 7 is a perspective view of an ultrasonic device incorporating
the transducer of FIG. 6.
Rotated Y-cut plates of LiNbO.sub.3 can vibrate in a pure shear
mode with particle displacement along the X-axis or in either a
quasi-shear or a quasi-longitudinal mode of vibration, with
particle displacement normal to the X-axis but neither normal nor
parallel to the plane of the plate. An electric field applied in
the thickness direction will not excite the pure shear mode but in
most cases will excite both the quasi-shear and quasi-longitudinal
modes simultaneously. However, there are four rotated Y-cuts where
an electric field in the thickness direction excites only one mode,
the angles of rotation being 36.degree., 90.degree. (Z-cut),
123.degree., and 163.degree.. Two of these four, the 36.degree. and
163.degree. cuts, are most useful for transducer applications.
The 163.degree. rotated Y-cut plate, a (zxl ) +73.degree. cut in
IRE notation, has no coupling to the quasi-longitudinal mode and an
effective coupling factor of 61 percent for the quasi-shear mode.
The particle displacement for this mode is 1.7.degree. from the
plane of the plate so that it is very near to being a pure shear
mode of vibration. The fact that it is not exactly a pure mode
implies that, when used as a transducer, this cut will excite a
small amount of longitudinal wave motion in addition to the main
shear wave. If the longitudinal wave amplitude were large this
could be objectionable in some applications. However, since the
angle of the particle displacement is only 1.7.degree. from the
plane of the plate, the longitudinal mode excitation is in this
case negligible for practical purposes. For known transducer
applications there are two basically different useful orientations:
one with the length axis perpendicular to the particle displacement
vector, a (zxl ) 73.degree. cut; and one with the length axis along
the direction of the particle displacement vector, a (zyw)
-17.degree. cut. The (zxl ) 73.degree. orientation is shown in FIG.
1. The (yzw) -17.degree. orientation is shown in FIG. 2.
The 36.degree. rotated Y-cut plate, a (zxl ) -54.degree. cut in IRE
notation, is shown in FIG. 3. This crystal has zero coupling to the
quasi-shear mode and an effective coupling factor of 49 percent for
the quasi-longitudinal mode. The particle displacement for this
mode is 3.8.degree. from the plate normal, so that it is not quite
as pure a mode of vibration as quasi-shear mode in the 163.degree.
rotated Y-cut. This implies that such a transducer would excite a
small amount of shear wave motion in addition to the main
longitudinal wave. However, experiments conducted by bonding
transducers of this type to fused silica indicated that the shear
wave signal was not observable and its amplitude was at least 40
db. down from the longitudinal mode signal.
LiNbO.sub.3 plate with faces normal to the X-axis, as defined by
the 1949 IRE standard, can vibrate in a pure longitudinal mode with
the particle displacement along the X-axis, or in either of two
pure shear modes with the particle displacement normal to the
X-axis. However, an electric field applied in the thickness
direction excites only the two shear modes. Furthermore, one of the
shear modes, which will be called the strong shear mode, is excited
much more efficiently than the other (weak) shear mode. The
effective coupling constant is 68 percent for the strong shear mode
and only 10 percent for the weak shear mode. Thus an X-cut
LiNbO.sub.3 transducer bonded to an isotropic delay medium would
excite one shear wave very strongly and the other shear wave would
be about 18 db. down. Since both shear waves in the isotropic
material have the same velocity, the net result is a very slight
elliptical polarization of the particle displacement, which is not
objectionable.
The particle displacements of the two shear modes in the
LiNbO.sub.3 are not along the Y and Z crystal axes but are inclined
to the crystal axes, the direction of displacement for the strong
shear mode being 41.degree. from the Z-axis.
There are two major types of ultrasonic delay lines using shear
mode transducers and both of these types of delay lines require
controlling the direction of the particle displacement vector.
Polygon delay lines require that the particle displacement vector
lie in the planes of incidence and reflection for a transverse wave
reflecting from a facet. This, in turn, requires that the
displacement vector be normal to the long direction of a
rectangular plate. Hence in the IRE notation, the required plate is
an (xyt) 41.degree. cut. This crystal is shown in FIG. 4. The other
type of line is the strip or plate delay line in which the
transducers are again rectangular plates with the length usually
five or more times the height. For this type of delay line, the
particle displacement vector must be parallel to the major surfaces
of the delay medium; consequently, along the length direction of
the transducer. Again according to the IRE notation, the required
plate is an (xyt) -49.degree. cut. This plate is shown in FIG.
5.
In FIG. 6, a lithium niobate crystal, oriented as in one of FIGS. 1
to 5, is provided with electrodes 2 and 3, which may be deposited,
plated, etc. in accordance with any suitable technique. Such
electrodes may cover the broad crystal faces as shown or may be of
lesser area to minimize unwanted coupling. Electrical connection to
the electrodes is made by means of leads 4 and 5. The transducer of
this figure may serve as a resonator, for example in performing the
function of a filter or frequency standard, or it may be part of a
larger device such as a delay line.
The device of FIG. 7 is a conventional delay line incorporating a
transducer 10 which, like the device of FIG. 6, is made up of a
plate 11 of LiNbO.sub.3, together with its associated electrodes 12
and 13. Electrical connection is made by means of leads 14 and 15
connected to a signal source not shown. The elastic wave produced
by the electrical signal is then launched in the acoustic medium
16, which may be made of silica, glass, metal, or any other
suitable material. For certain uses, it is desirable to use
LiNbO.sub.3 for this member also, it having been observed that this
material shows unusually low loss particularly for frequencies
above 100 mHz. Upon reaching the end of acoustic member 16, the
elastic wave is reconverted into an electromagnetic signal in
transducer plate 21, and this signal is detected by means of
circuitry including electrodes 22 and 23, together with wire leads
24 and 25.
It should be stressed that the angle of rotation specified is
critical and should not be varied by more than .+-.3.degree..
Deviations greater than this result in deleterious effects on the
resonator characteristics such as a reduction in the coupling
efficiency and an increase in unwanted resonances.
The foregoing orientations have been consistently described as
applied to a plate structure, and it is this configuration that is
of concern in most transducers. For these purposes, a plate is
generally about a half wavelength thick for the center frequency,
that is of the order of millimeters or less. The large dimensions
are generally determined on the basis of good device design, such
as desired and/or permitted electrode resistance, capacitance, etc.
It is reasonable to assume that transducer plates have large
dimensions, at least five times the thickness dimension.
The invention has been described very briefly in terms of a small
number of embodiments. The composition itself and acceptable
techniques for preparing the composition are sufficiently well
known so that detailed discussion is unnecessary. Fundamentally,
the invention depends upon the finding that the particular
orientation described results in an optimization of the properties
disclosed. Minor modifications made in the composition, due either
to accidental inclusions or responsive to a desire to alter
properties such as temperature dependence, conductivity,
absorption, growth, etc. do not alter the inventive finding.
Accordingly, the preferred orientation is considered to apply so
long as at least 99 percent by weight of the composition is
LiNbO.sub.3. Similarly, representation of the vast family of
suitable transducer structures by the small number of examples set
forth is not intended to limit the invention.
While the devices described have utilized crystal sections having
two plane parallel surfaces each corresponding with the rotated
orientation of the invention, other structures known to those
skilled in the art may advantageously utilize the noted
orientations. For example, it is common in the resonator art to
contour one or both of the major faces so as to restrict the motion
to a desired portion of the plate. This has been accomplished by
tapering the surface of one or both faces away from the plateau or,
in the extreme, by use of one or two convex surfaces. Still another
approach, sometimes referred to as mode trapping, utilizes
thickened electrodes affixed only to the desired portion of the
plate. The effect of this configuration is to restrict the motion
to that portion of the crystal lying between electrodes. Beveling
of a resonator plate to reduce unwanted resonances is also
practice. Accordingly, to benefit from the inventive teaching it is
necessary only that those surface portions of the major faces
associated with the motion be oriented as specified. The annexed
claims are to be so construed.
Various additional modifications and extensions of this invention
will become apparent to those skilled in the art. All such
variations and deviations which basically rely on the teaching
through which this invention has advanced the art are properly
considered within the spirit and scope of this invention.
* * * * *