U.S. patent number 11,404,239 [Application Number 17/012,378] was granted by the patent office on 2022-08-02 for sample plate holder.
This patent grant is currently assigned to JEOL Ltd.. The grantee listed for this patent is JEOL Ltd.. Invention is credited to Akira Abe, Shuhei Abe, Yuta Murakami.
United States Patent |
11,404,239 |
Abe , et al. |
August 2, 2022 |
Sample plate holder
Abstract
A first spring array and a second spring array are provided in a
holder body. Three sample plates can be mounted in the holder body.
On each sample plate, pressing-up forces from the first spring
array and the second spring array are applied, but upward movement
of each sample plate is restricted by an inner surface of a
cover.
Inventors: |
Abe; Akira (Tokyo,
JP), Murakami; Yuta (Tokyo, JP), Abe;
Shuhei (Tokyo, JP) |
Applicant: |
Name |
City |
State |
Country |
Type |
JEOL Ltd. |
Tokyo |
N/A |
JP |
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Assignee: |
JEOL Ltd. (Tokyo,
JP)
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Family
ID: |
1000006468144 |
Appl.
No.: |
17/012,378 |
Filed: |
September 4, 2020 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20210074507 A1 |
Mar 11, 2021 |
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Foreign Application Priority Data
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Sep 5, 2019 [JP] |
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JP2019-162089 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01J
37/20 (20130101); H01J 37/28 (20130101) |
Current International
Class: |
H01J
37/20 (20060101); H01J 37/28 (20060101) |
References Cited
[Referenced By]
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2771665 |
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2013190315 |
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2015159236 |
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Sep 2015 |
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JP |
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2019128547 |
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Aug 2019 |
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JP |
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2019128547 |
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Aug 2019 |
|
JP |
|
WO-2013063208 |
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May 2013 |
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WO |
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2019013633 |
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Jan 2019 |
|
WO |
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Other References
Extended European Search Report issued in EP20193454.4 dated Jan.
28, 2021. cited by applicant .
Office Action issued in JP2019162089 dated May 25, 2021. cited by
applicant.
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Primary Examiner: Smyth; Andrew
Attorney, Agent or Firm: The Webb Law Firm
Claims
The invention claimed is:
1. A sample plate holder for use with a scanning electron
microscope (SEM) comprising: a holder body that has a storage space
configured to store m sample plates arranged in an x direction,
wherein m is an integer greater than or equal to 2, wherein a
sample is placed on an upper surface of each of the sample plates,
wherein each of the sample plates is transparent, and wherein a
background surface is provided on a bottom surface of the storage
space, the background surface at least one of: is formed of a
material which suppresses light reflection and has a treatment
applied thereto to suppress light reflection; a first pressing-up
element array provided in the storage space on one side in a y
direction orthogonal to the x direction, and formed from a
plurality of pressing-up elements arranged in the x direction; a
second pressing-up element array provided in the storage space on
another side in the y direction, and formed from a plurality of
pressing-up elements arranged in the x direction; and a cover that
covers the storage space while exposing a sample region in the
storage space, wherein the storage space is an inside space of the
holder body, the first pressing-up element array and the second
pressing-up element array are provided at the holder body, the
sample plates are arranged with their longitudinal direction
parallel to the y-direction, each of the sample plates comprises a
first end and a second end away from each other in the longitudinal
direction, in a state in which the m or a smaller number of the
sample plates are stored in the storage space, the first end of
each of the sample plates is supported by the plurality of
pressing-up elements in the first pressing-up element array and the
second end of each of the sample plates is supported by the
plurality of pressing-up elements in the second pressing-up element
array, and pressing-up forces are applied by the first pressing-up
element array and the second pressing-up element array on each of
the sample plates, so that an upper surface of each of the sample
plates is pressed against an inner surface of the cover, no
pressing up elements are provided below the sample plates between
the first pressing-up element array and the second pressing-up
element array, and when the cover is in a closed state, the first
pressing-up element array and the second pressing-up element array
are covered by the cover.
2. The sample plate holder according to claim 1, wherein each of
the first pressing-up element array and the second pressing-up
element array is formed from (m.times.n) pressing-up elements which
operate independently from each other, where n is an integer
greater than or equal to 2.
3. The sample plate holder according to claim 2, wherein the
pressing-up elements are springs, and m is 3.
4. The sample plate holder according to claim 1, further
comprising: a hinge portion configured to enable an opening
movement and a closing movement of the cover with respect to the
holder body; and a lock mechanism that locks the cover with respect
to the holder body when the cover is in a closed state.
5. The sample plate holder according to claim 1, wherein the holder
body comprises: a first side wall provided on one end in the y
direction; and a second side wall provided on another end in the y
direction, an upper surface of the first side wall and an upper
surface of the second side wall define a reference level, and in a
closed state of the cover, the inner surface of the cover abuts the
upper surface of the first side wall and the upper surface of the
second side wall so that an upper surface level of each of the
sample plates is aligned at the reference level.
6. The sample plate holder according to claim 5, wherein a first
scale is provided on the first side wall, and a second scale is
provided on the second side wall.
7. The sample plate holder according to claim 1, wherein a flow
path structure for blowing gas onto upper surfaces of the m or a
smaller number of the sample plates stored in the storage space is
provided on at least one of the holder body or the cover.
8. The sample plate holder according to claim 1, wherein the cover
has an observation window, and an electrically conductive mesh is
provided on the observation window.
9. The sample plate holder according to claim 1, wherein each of
the holder body and the cover is formed from an electrically
conductive material, a terminal for voltage application is provided
on one of the holder body or the cover, and an engagement block
formed from an insulating material and which is to be combined to a
movable stage is provided on the holder body.
10. The sample plate holder according to claim 1, wherein one or a
plurality of positioning marks are provided on the cover.
Description
CROSS REFERENCE TO RELATED APPLICATION
This application claims priority to Japanese Patent Application No.
2019-162089 filed Sep. 5, 2019, the disclosure of which is hereby
incorporated by reference in its entirety.
BACKGROUND OF THE INVENTION
Field of the Invention
The present disclosure relates to a sample plate holder, and in
particular to a sample plate holder used in a scanning electron
microscope.
Description of Related Art
A movable stage is provided inside a sample chamber in a scanning
electron microscope. A holder on which a sample to be observed is
placed is mounted on the movable stage. When the sample is provided
on a sample plate such as a slide glass, a convenient configuration
is such that the entirety of the sample plate itself is placed
inside the sample chamber and the sample is observed. In
particular, desirably, a plurality of sample plates are placed
inside the sample chamber so as to enable consecutive observation
of a plurality of samples. Realization of a dedicated holder for
this purpose is desired. A plurality of types of sample plates
having different thicknesses are provided.
JP 2015-159236 A discloses a holder which is placed in a charged
particle beam drawing apparatus. This holder holds one glass
substrate, and a pressing-up force is applied on the glass
substrate from below the glass substrate.
An advantage of the present disclosure lies in realization of a
sample plate holder which can hold a plurality of sample plates.
Alternatively, an advantage of the present disclosure lies in
realization of a sample plate holder which holds the sample plates
while aligning upper surface levels of the sample plates at a
reference level regardless of the thicknesses of the sample
plates.
SUMMARY OF THE INVENTION
According to one aspect of the present disclosure, there is
provided a sample plate holder comprising: a holder body that has a
storage space which can store m sample plates (wherein m is an
integer greater than or equal to 2) arranged in an x direction; a
first pressing-up element array provided in the storage space on
one side in a y direction orthogonal to the x direction, and formed
from a plurality of pressing-up elements arranged in the x
direction; a second pressing-up element array provided in the
storage space on the other side in the y direction, and formed from
a plurality of pressing-up elements arranged in the x direction;
and a cover that covers the storage space while exposing a sample
region in the storage space, wherein, in a state in which the m or
a smaller number of the sample plates are stored in the storage
space, pressing-up forces are applied by the first pressing-up
element array and the second pressing-up element array on each of
the sample plates, so that an upper surface of each of the sample
plates is pressed against an inner surface of the cover.
According to the structure described above, one or a plurality of
the sample plates are stored in the storage space of the holder
body, and are covered by the cover. In an exemplary configuration,
the cover has a horizontal orientation in a closed state, and the
inner surface thereof forms a horizontal surface. In the closed
state of the cover, the pressing-up forces of the first pressing-up
element array and the second pressing-up element array are applied
on the sample plates, but upward movements of the sample plates are
restricted by the cover. In this process, the levels of the upper
surfaces of the sample plates are aligned at the level of the inner
surface of the cover; that is, a reference level. The levels of the
upper surfaces of the sample plates are thus naturally aligned at
the reference level regardless of the thicknesses of the sample
plates which are being held. With this configuration, during
observation under a microscope, a plurality of samples can be
consecutively observed with no change of a focus depth or with only
a slight change of the focus depth.
According to another aspect of the present disclosure, in the
sample plate holder, each of the first pressing-up element array
and the second pressing-up element array is formed from the m or
more pressing-up elements which operate independently from each
other. Each pressing-up element may be formed from a spring, an
elastic member, or the like. Because the pressing-up forces are
applied on both ends on one side and on the other side of each
sample plate, an orientation of each sample plate can be
stabilized. In an exemplary configuration, the first pressing-up
element array and the second pressing-up element array are provided
at positions avoiding the sample region in which the sample may be
present, when viewed from above; more specifically, on respective
sides of the sample region.
According to another aspect of the present disclosure, in the
sample plate holder, m is 3, and each of the first pressing-up
element array and the second pressing-up element array is formed
from (m.times.n) pressing-up elements (wherein n is an integer
greater than or equal to 1). For example, n is 2. In this case,
each pressing-up element array is formed from six pressing-up
elements, which are desirably placed with equal spacing.
According to another aspect of the present disclosure, the sample
plate holder further comprises: a hinge portion that enables an
opening movement and a closing movement of the cover with respect
to the holder body; and a lock mechanism that locks the cover with
respect to the holder body when the cover is in a closed state.
According to this configuration, when the cover is in a closed
orientation, a rise of the cover can be prevented.
According to another aspect of the present disclosure, in the
sample plate holder, the holder body comprises a first side wall
provided on one end in the y direction, and a second side wall
provided on the other end in the y direction, an upper surface of
the first side wall and an upper surface of the second side wall
define a reference level, and, in a closed state of the cover, the
inner surface of the cover abuts the upper surface of the first
side wall and the upper surface of the second side surface so that
an upper surface level of each of the sample plates is aligned at
the reference level.
According to another aspect of the present disclosure, in the
sample plate holder, a first scale is provided on the first side
wall, and a second scale is provided on the second side wall. Each
scale corresponds to ticks or an array of markers for positioning.
For example, assuming placement of one sample plate, placement of
two sample plates, and placement of three sample plates, the first
and second scales are provided for defining the position(s) of the
sample plate(s).
According to another aspect of the present disclosure, in the
sample plate holder, each of the sample plates is transparent, and
a background surface having an action to suppress light reflection
is provided on a bottom surface of the storage space. According to
this configuration, visual inspection and observation of the sample
on each of the sample plate can be facilitated.
According to another aspect of the present disclosure, in the
sample plate holder, a flow path structure for blowing gas onto
upper surfaces of the m or a smaller number of the sample plates
stored in the storage space is provided on at least one of the
holder body or the cover. For example, when setting the sample
region as a low-vacuum region is desired, gas is blown to the
sample region. According to another aspect of the present
disclosure, in the sample plate holder, the cover has an
observation window, and an electrically conductive mesh is provided
on the observation window. According to this configuration, an
electric field around the sample can be stabilized, and
accumulation of charges can be prevented.
According to another aspect of the present disclosure, in the
sample plate holder, each of the holder body and the cover is
formed from an electrically conductive material, a terminal for
voltage application is provided on one of the holder body or the
cover, and an engagement block formed from an insulating material
and which is to be combined to a movable stage is provided on the
holder body. According to this configuration, an electrical
potential of the holder as a whole can be controlled. According to
another aspect of the present disclosure, in the sample plate
holder, one or a plurality of positioning marks are provided on the
cover. The positioning marks may be used in positioning the sample
plate holders.
BRIEF DESCRIPTION OF THE DRAWINGS
Embodiment(s) of the present disclosure will be described based on
the following figures, wherein:
FIG. 1 is a perspective diagram showing an open state of a sample
plate holder according to a first embodiment of the present
disclosure;
FIG. 2 is a schematic diagram showing a state in which a sample
plate holder is mounted on a stage;
FIG. 3 is a perspective diagram showing a closed state of the
sample plate holder according to the first embodiment of the
present disclosure;
FIG. 4 is a perspective diagram showing an initial state of the
sample plate holder according to the first embodiment of the
present disclosure;
FIG. 5 is a cross-sectional diagram showing the sample plate holder
according to the first embodiment of the present disclosure;
FIG. 6 is a perspective diagram showing an open state of a sample
plate holder according to a second embodiment of the present
disclosure;
FIG. 7 is a perspective diagram showing a closed state of the
sample plate holder according to the second embodiment of the
present disclosure;
FIG. 8 is an exploded perspective diagram showing a sample plate
holder according to a third embodiment of the present
disclosure;
FIG. 9 is a perspective diagram showing the sample plate holder
according to the third embodiment of the present disclosure;
FIG. 10 is a perspective diagram showing a sample plate holder
according to a fourth embodiment of the present disclosure; and
FIG. 11 is a perspective diagram showing a sample plate holder
according to a fifth embodiment of the present disclosure.
DESCRIPTION OF THE INVENTION
Embodiments of the present disclosure will now be described with
reference to the drawings.
FIGS. 1 to 5 show a sample plate holder according to a first
embodiment of the present disclosure. The sample plate holder is
specifically a slide glass holder for sample observation, and is
placed in a sample chamber of a scanning electron microscope. The
sample to be observed is, for example, pre-processed fine
particles. Alternatively, fine particles including asbestos or a
biological tissues in a segmented form may be set as the
observation target. Alternatively, other samples may be set as the
observation target.
In FIG. 1, a sample plate holder 10 comprises a holder body 12 and
a cover 14. Each of these elements is formed from, for example, a
metal such as stainless steel or aluminum. Alternatively, these
elements may be formed from other materials. In FIG. 1, an x
direction is a first horizontal direction, a y direction is a
second horizontal direction, and a z direction is a vertical
direction. These three directions are orthogonal to each other.
When the sample plate holder 10 is mounted on a movable stage in
the sample chamber, an orientation of the sample plate holder 10
may vary depending on an orientation of the movable stage. The
first horizontal direction, the second horizontal direction, and
the vertical direction described above are defined assuming a case
in which the sample plate holder 10 is mounted on a horizontal
surface and has a basic orientation.
The holder body 12 has a base 20 which is a horizontal plate. A
thin background plate 22 is provided on an upper surface of the
base 20. The background plate 22 is formed from a material which
reduces or suppresses reflection of light, or a treatment for
reducing or suppressing the reflection of light is applied on a
surface of the background plate 22. Example of this treatment
include plating (for example, chrome plating), rough surface
machining, coloring, and the like.
The holder body 12 has side plates 24 and 26 respectively provided
on one end and on the other end in the y direction. The side plates
24 and 26 have an upstanding, plate-shape form. In addition, the
holder body 12 has a front plate 28 and a back plate 30 provided
respectively on one end (front end) and on the other end (back end)
in the x direction. The front and back plates also have an
upstanding, plate-shape form.
The inside of the holder body 12; more specifically, a space above
the background plate 22 and surrounded by the four plates 24, 26,
28, and 30, is a storage space, and one or a plurality of sample
plates are stored and placed in the storage space. In FIG. 1, two
sample plates 16 and 18 are placed in the storage space. The sample
plates 16 and 18 are slide glasses having transparency, and samples
are placed on upper surfaces thereof. In FIG. 1, illustration of
the sample is omitted.
On an upper surface of each of the sample plates 16 and 18, a
portion other than the ends in the y direction and sides parallel
to the y direction is an individual sample region. An overall
sample region is conceptualized as a region including all of a
plurality of the individual sample regions on the plurality of
sample plates 16 and 18. The y direction corresponds to a
long-length direction of each of the sample plates 16 and 18, and
the x direction corresponds to a short-length direction of each of
the sample plates 16 and 18.
In the holder body 12, on one side in the y direction; more
specifically, near the side plate 24, there is provided a spring
array 34 which functions as a first pressing-up element array. In
the illustrated example configuration, the spring array 34 is
formed from six springs 35 arranged in a straight line shape with
equal spacing. In the holder 12, on the other side in the y
direction; more specifically, near the side plate 26, there is
provided a spring array 36 which functions as a second pressing-up
element array. Similar to the spring array 34, the spring array 36
is formed from six springs 35 arranged in a straight line shape
with equal spacing. Each spring 35 applies a pressing-up force as
an elastic force or an urging force on a sample plate contacting
the spring 35. Alternatively, in place of the plurality of springs
35, a plurality of elastic elements may be used.
When a maximum number of the sample plates arranged in the x
direction is m, and n springs are provided on each of left and
right sides for each sample plate in a state in which the m sample
plates are arranged, each of the spring arrays 34 and 36 is formed
from (m.times.n) springs 35. Here, m is an integer greater than or
equal to 2, and n is an integer greater than or equal to 1. In the
illustrated example configuration, m is 3 and n is 2.
In the configuration exemplified in FIG. 1, two sample plates 16
and 18 are placed in the storage space. The sample plates 16 and 18
contact each other at an intermediate position in the x direction.
In this case, each end of the sample plates 16 and 18 is supported
by two springs. In a case in which three sample plates are provided
in the storage space, each of the ends of the sample plates is
supported by two springs. When one sample plate is provided in the
storage space; more specifically, when the sample plate is provided
at an intermediate position in the x direction, each end of the
sample plate is supported by two springs.
In any of these cases, each sample plate is stably supported. In
other words, two spring arrays 34 and 36 are configured such that
the sample plates can be stably supported regardless of the number
of sample plates to be held.
The side plate 24 and the side plate 26 have the same form or forms
that are symmetric with each other, and the form of the side plate
24 will be described herein as a representative side plate. The
side plate 24 has an upper surface 24A which defines a reference
level. The side plate 26 has a similar upper surface 26A. The side
plate 24 has a plurality of projections 38, 40, 42, and 44 arranged
in the x direction. Between two adjacent projections 38, 40, 42,
and 44, recesses 52, 54, and 56 are provided. On upper surfaces of
the projections 40 and 42, markers 48 and 50 are provided. When
three sample plates are placed, markers 48 and 50 show
inter-sample-plate positions. When two sample plates are placed,
the markers 48 and 50 show center positions of the sample plates.
When one sample plate is placed, the markers 48 and 50 show ends in
the x direction of the sample plate. On the recess 54, a marker 57
showing an intermediate position in the x direction is
provided.
Each of the markers 48, 50, and 57 is a line or a groove parallel
to the y direction. The plurality of recesses 52, 54, and 56 also
function as grooves into which a fingertip or a tool such as a
forceps is inserted. As described above, the side plate 26 has a
form similar to that of the side plate 24. Each of the plurality of
projections 38, 40, 42, and 44, each of the plurality of recesses
52, 54, and 56, and each of the plurality of markers 48, 50, and 57
provided on the side plates 24 and 26 functions as a scale element.
That is, as a whole, these elements function as a scale.
On a front side of the holder body 12, a lower engagement portion
32 is provided. In the illustrated example configuration, the lower
engagement portion 32 is formed from two protrusions 76 and 78, and
a locking metal fitting 80.
The cover 14 is rotatably held by a hinge portion 58 provided on
the holder body 12. In FIG. 1, the cover 14 has an open
orientation. That is, the sample plate holder 10 is in an open
state. The cover 14 has an observation window 60 serving as a
quadrangular opening. The cover 14 has a form surrounding the
observation window 60, and more specifically has an edge portion 62
provided on one side in the y direction and an edge portion 64
provided on the other side in the y direction of the observation
window 60.
The two edge portions 62 and 64 are flat plates, and function as
plate end pressing pieces. A folding piece 66 is provided as a
portion continuous from the edge portion 62, and a folding piece 68
is provided as a portion continuous from the edge portion 64. The
cover 14 has an upper engagement portion 70, which is formed from
two protrusions 72 and 74.
When the cover 14 is in the open orientation and the sample plate
holder 10 is in the open state, the sample plates 16 and 18 in the
storage space are in a state in which the plates are pressed from
below up to an uppermost level while being supported by the
plurality of springs 35 immediately below the sample plates. When
the cover 14 is changed from the open orientation to a closed
orientation, and the sample plate holder 10 is changed to a closed
state, an inner surface (back surface) 14A of the cover 14 presses
the ends of the plurality of sample plates 16 and 18 downward. The
downward movement of the cover 14 is restricted when the inner
surface 14A of the cover 14 abuts the upper surfaces 24A and 26A of
the two side plates 24 and 26. In this state, ends on the upper
surfaces of the plurality of sample plates 16 and 18 are in close
contact with the inner surface 14A of the cover 14, and the
plurality of sample plates 16 and 18 are sandwiched between the
plurality of springs 35 and the cover 14.
In this process, upper surface levels of the sample plates 16 and
18 are aligned with an inner surface level of the cover 14; that
is, a level (reference level) of the upper surfaces of the two side
plates 24 and 26. Even when the plurality of sample plates 16 and
18 differ in thickness, the upper surface levels of the sample
plates are always aligned at the reference level.
In the closed orientation of the cover 14, a locked state is formed
by the lower engagement portion 32 and the upper engagement portion
70. Specifically, the metal fitting 80 attached to the two
protrusions 76 and 78 is hooked to the two protrusions 72 and 74.
This operation is performed by a user, but alternatively, a
configuration may be employed in which the locked state is
automatically formed during a closing operation.
FIG. 2 schematically shows a portion of a scanning electron
microscope. The scanning electron microscope has a sample chamber
82 and a lens barrel 84. Reference numeral 90 shows an electron
beam. In the sample chamber 82, a movable stage (sample stage) 86
is provided. A controller (not shown) controls a position and an
orientation of the movable stage 86. The sample plate holder 10 is
mounted on the movable stage 86.
FIG. 3 shows the sample plate holder 10 in a closed state. That is,
the holder body 12 is covered by the cover 14. FIG. 3 shows a
configuration in which three sample plates 92, 94, and 96 are held.
Respective ends 92a, 92b, 94a, 94b, 96a, and 96b of the sample
plates 92, 94, and 96 are pressed down by the two edge portions 62
and 64 of the cover 14. An overall sample region 97 including all
of three individual sample regions 92A, 94A, and 96A is exposed
through the observation window 60. A lock mechanism 98 is formed by
the lower engagement portion 32 and the upper engagement portion
70.
FIG. 4 shows the sample plate holder 10 in an open state. FIG. 4
shows an initial state in which no sample plate is mounted. Each of
the spring arrays 34 and 36 provided on the holder body 12 is
formed from six springs 35.
FIG. 5 shows a yz cross section of the sample plate holder 10. As
already described, the sample plate holder 10 comprises the holder
body 12, and the cover 14 covering the holder body 12. The inner
surface of the cover 14 abuts the upper surfaces 24A and 26A of the
two side plates 24 and 26. Pressing-up forces are applied from the
plurality of springs 35 on the sample plate 16, but the ends 16a
and 16b of the sample plate 16 are in contact with inner surfaces
62A and 64A of the two edge portions 62 and 64, and a further rise
of the sample plate 16 is thus restricted.
A plurality of holes 100 are formed on the holder body 12, and a
plurality of screw members 102 are inserted into the plurality of
holes 100. The plurality of springs 35 are attached on upper ends
of the plurality of screw members 102. In FIG. 5, z0 shows the
reference level, which is aligned with the inner surface level of
the cover and the upper surface level of the side plate.
As described, according to the sample plate holder of the present
embodiment, the upper surface levels of the sample plates can be
naturally aligned at the reference level regardless of the
thicknesses of the sample plates. Therefore, there can be obtained
an advantage in that the focus depth does not need to be changed,
or needs to be changed only slightly according to the thickness of
the sample plate. In addition, there can be obtained another
advantage in that a plurality of sample plates can be
simultaneously held and simultaneously set inside the sample
chamber, and a plurality of samples can be consecutively observed.
In this process also, the focus depth does not need to be changed
or needs to be changed only slightly according to the thickness of
the sample plate. In the sample plate holder according to the
present embodiment, regardless of the number of sample plates which
are placed thereon, each of the ends of each sample plate is stably
supported by two springs. On each side plate, a structure which
functions as a scale is provided, and the sample plates can be
accurately placed using the scale as a guide. In addition, because
a treatment to suppress the light reflection is applied on the
surface of the background plate, visibility of the sample plate and
the sample can be improved.
FIGS. 6 and 7 show a sample plate holder 10A according to a second
embodiment of the present disclosure. In FIG. 6, the sample plate
holder 10A comprises the holder body 12 and a cover 14B. The cover
14B has the observation window 60, and a metal mesh 104 is provided
on the observation window 60. The entirety of the sample plate
holder 10A is formed from an electrically conductive material. FIG.
7 shows the sample plate holder 10A in a closed state. The body 12
is covered by the cover 14B. According to the second embodiment of
the present disclosure, advantages can be obtained, in electron
microscope observation, in that an electric field around the sample
can be stabilized and in that charging of the sample can be
prevented.
FIGS. 8 and 9 show a sample plate holder 10B according to a third
embodiment of the present disclosure. In FIG. 8, the sample plate
holder 10B comprises the holder body 12 and a cover 106. The cover
106 is formed from a lower cover 108 and an upper cover 110. In
FIG. 8, for the purpose of explanation, the lower cover 108 and the
upper cover 110 are illustrated in a separated state.
A flow path structure 112 is formed on the lower cover 108. The
flow path structure 112 has gas flow paths 114 and 116, and also
has a gas introduction port 118, and a plurality of gas ejection
ports 120, 122, 124, 126, 128, and 130. The gas ejection ports form
two gas ejection port arrays.
In FIG. 9, the lower cover 108 and the upper cover 110 are
combined. Gas is sent from two gas ejection port arrays 119 and 125
formed on the cover 106 to a sample region 132 (refer to reference
numeral 134). With this process, the sample can be set under a
low-vacuum environment. That is, the inside of the sample chamber
is generally set in high vacuum, and gas is locally sent so that
the portion is set to low vacuum. As the gas, air, nitrogen, or the
like may be used. This configuration can be applied to various
sample plate holders.
FIG. 10 shows a sample plate holder 10C according to a fourth
embodiment of the present disclosure. On a lower surface of the
holder body 12, a combining block 138 formed form an insulating
material is provided. The combining block 138 is a portion to be
connected to the movable stage. On the lower surface of the body
12, a terminal 136 is provided. The entirety of the sample plate
holder 10C is formed from an electrically conductive material. A
signal line is connected to the terminal 136, and a voltage is
applied thereon, so that the sample plate holder, and consequently,
the sample, can be set at a desired electrical potential.
FIG. 11 shows a sample plate holder 10D according to a fifth
embodiment of the present disclosure. On an upper surface of the
cover 14, a plurality of alignment marks 140a, 140b, and 140c are
formed. During observation under an optical microscope or
observation under an electron microscope, the sample plate holder
10D can be positioned by reference to the alignment marks 140a,
140b, and 140c.
* * * * *