U.S. patent number 11,262,284 [Application Number 16/747,286] was granted by the patent office on 2022-03-01 for particle counter.
This patent grant is currently assigned to RION Co., Ltd.. The grantee listed for this patent is RION Co., Ltd.. Invention is credited to Tomonobu Matsuda, Takashi Minakami, Daisuke Sakaue, Daisuke Shinozaki.
United States Patent |
11,262,284 |
Matsuda , et al. |
March 1, 2022 |
Particle counter
Abstract
A particle counter includes: a multi-flow cell with flow
passages arrayed in a first direction and having a section
including a detection region, for detecting a particle, formed when
the flow passage is irradiated with irradiation light; a light
receiving optical system configured to receive emitted light
generated from a particle contained in sample fluid flowing in the
at least one flow passage and passing through the detection region;
an optical axis moving unit configured to move an optical axis of
the irradiation light and an optical axis of the emitted light in
the first direction; and a counter configured to count the particle
for each particle size based on an intensity of the emitted
light.
Inventors: |
Matsuda; Tomonobu (Tokyo,
JP), Minakami; Takashi (Tokyo, JP), Sakaue;
Daisuke (Tokyo, JP), Shinozaki; Daisuke (Tokyo,
JP) |
Applicant: |
Name |
City |
State |
Country |
Type |
RION Co., Ltd. |
Tokyo |
N/A |
JP |
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Assignee: |
RION Co., Ltd. (Tokyo,
JP)
|
Family
ID: |
1000006141978 |
Appl.
No.: |
16/747,286 |
Filed: |
January 20, 2020 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20200240890 A1 |
Jul 30, 2020 |
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Foreign Application Priority Data
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Jan 24, 2019 [JP] |
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JP2019-009879 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G01N
21/53 (20130101); G01N 15/0205 (20130101); G01N
2015/1493 (20130101); G01N 2015/1486 (20130101) |
Current International
Class: |
G01N
15/02 (20060101); G01N 21/53 (20060101); G01N
15/14 (20060101) |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2051061 |
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Apr 2009 |
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EP |
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2002-243632 |
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Aug 2002 |
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JP |
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Primary Examiner: Nguyen; Sang H
Attorney, Agent or Firm: Rankin, Hill & Clark LLP
Claims
What is claimed is:
1. A particle counter comprising: a light source configured to emit
irradiation light; an irradiation optical system configured to
irradiate a predetermined position on an optical axis of the
irradiation light with the irradiation light; a multi-flow cell
comprising transparent bodies at fixed positions on a main body and
including flow passages arrayed in a first direction, the flow
passage having a detection region for detecting a particle
contained in a sample fluid flowing in the flow passage, the
detection region being formed at the predetermined position on the
optical axis of the irradiation light in the flow passage when the
predetermined position is irradiated with the irradiation light
from outside; a light receiving optical system configured to
receive emitted light generated from the particle passing through
the detection region, a light receiving axis of the light receiving
optical system extending in a second direction perpendicular to the
first direction; an optical axis moving unit configured to move, in
the first direction along the array of the multiple flow passages,
the optical axis of the irradiation light entering the at least one
flow passage and the light receiving axis of the light receiving
optical system; and a counter configured to count the particle for
each particle size based on an intensity of the emitted light
received by the light receiving optical system, wherein each flow
cell of the multi-flow cell includes a flow passage formed as one
passage and having a first flow passage extending in the second
direction from an inlet port into which the sample fluid is
supplied, a third flow passage extending in the second direction
from an outlet port from which the sample fluid is discharged, and
a second flow passage extending in a third direction perpendicular
to both of the first and second directions and connected to the
first and third flow passages, each flow cell further includes an
incident surface below the first flow passage in the third
direction, and the irradiation light enters one of the multiple
flow cells through the incident surface.
2. The particle counter according to claim 1, further comprising a
focal point adjustment unit configured to adjust a focal point of
the light receiving optical system in the second direction.
3. The particle counter according to claim 2, wherein the focal
point adjustment unit includes a first actuator configured to move
a first stage configured to support the light receiving optical
system in the second direction to adjust the focal point in the
second direction, and the optical axis moving unit includes a
second actuator configured to move a second stage configured to
support the first actuator together with the irradiation optical
system in the first direction to move the optical axis of the
irradiation light and the light receiving axis of the light
receiving optical system in the first direction.
4. The particle counter according to claim 2, further comprising a
storage configured to store, regarding the multiple flow passages
formed inside the multi-flow cell, at least a position of each of
the optical axis of the irradiation light and the light receiving
axis of the light receiving optical system in the first direction
in advance, the optical axis of the irradiation light and the light
receiving axis of the light receiving optical system being moved
corresponding to a position of each flow passage by the optical
axis moving unit, wherein the optical axis moving unit is
configured to move, corresponding to the at least one flow passage
in which the detection region is formed, the optical axis of the
irradiation light and the light receiving axis of the light
receiving optical system to the position of each of the optical
axis of the irradiation light and the light receiving axis of the
light receiving optical system stored in advance in the storage,
the storage further stores a position of the focal point in the
second direction, the focal point being adjusted corresponding to
the position of each flow passage by the focal point adjustment
unit, and the focal point adjustment unit is configured to adjust,
corresponding to the at least one flow passage in which the
detection region is formed, the focal point to the position of the
focal point stored in the storage.
5. The particle counter according to claim 1, further comprising a
storage configured to store, regarding the multiple flow passages
formed inside the multi-flow cell, at least a position of each of
the optical axis of the irradiation light and the light receiving
axis of the light receiving optical system in the first direction
in advance, the optical axis of the irradiation light and the light
receiving axis of the light receiving optical system being moved
corresponding to a position of each flow passage by the optical
axis moving unit, wherein the optical axis moving unit is
configured to move, corresponding to the at least one flow passage
in which the detection region is formed, the optical axis of the
irradiation light and the light receiving axis of the light
receiving optical system to the position of each of the optical
axis of the irradiation light and the light receiving axis of the
light receiving optical system stored in advance in the
storage.
6. The particle counter according to claim 1, wherein the
multi-flow cell is configured such that multiple flow cells of the
transparent bodies having the flow passages are arrayed, and each
flow cell is fixed in close contact with a portion as a reference
of a position of an entirety of the multi-flow cell in the first
and second directions.
7. The particle counter according to claim 6, wherein each flow
cell is in a substantially rectangular solid shape, and at an
identical side surface, includes the inlet port into which the
sample fluid is supplied and the outlet port from which the sample
fluid is discharged.
8. The particle counter according to claim 1, wherein the emitted
light is scattered light or fluorescence.
9. The particle counter according to claim 1, wherein the detection
region is formed in the first flow passage.
10. The particle counter according to claim 1, wherein the
irradiation light enters one of the multiple flow cells through the
incident surface at a predetermined angle with respect to the
incident surface, the predetermined angle being such an angle that
the irradiation light passes through the detection region while not
interfering the third flow passage.
Description
CROSS-REFERENCE TO RELATED APPLICATION
This application claims priority from Japanese Patent Application
No. 2019-009879 filed with the Japan Patent Office on Jan. 24,
2019, the entire content of which is hereby incorporated by
reference.
BACKGROUND
1. Technical Field
One aspect of the present disclosure relates to a particle
counter.
2. Related Art
Typically, a measuring device (a particle counter) including
multiple flow cells for continuously measuring multiple types of
sample liquid has been known (see, e.g., JP-A-2002-243632). In this
measuring device, an irradiation optical system and a light
receiving optical system are fixed at predetermined positions.
Meanwhile, the multiple flow cells arrayed in the horizontal
direction are provided movably as a whole. Positioning is performed
in such a manner that all of the multiple flow cells are moved in
the horizontal direction such that the flow cell targeted for
measurement is arranged on an optical path of the irradiation
optical system. Thereafter, measurement of the sample liquid is
performed. Moreover, sample liquid inlet and outlet ports are
provided on upper and lower sides of each flow cell. The sample
liquid flows in the flow cell through a lower portion thereof, and
is discharged from the flow cell through an upper portion
thereof.
SUMMARY
A particle counter includes: a light source configured to emit
irradiation light; an irradiation optical system configured to
irradiate a predetermined position on an optical axis with the
irradiation light; a multi-flow cell comprising transparent bodies
at fixed positions on a main body and including flow passages
arrayed in a first direction, the flow passage having a detection
region for detecting a particle contained in a sample fluid flowing
in the flow passage, the detection region being formed at the
predetermined position on the optical axis in the flow passage when
the predetermined position is irradiated with the irradiation light
from outside; a light receiving optical system configured to
receive emitted light generated from the particle passing through
the detection region, the light receiving optical system taking a
second direction perpendicular to the first direction as an optical
axis; an optical axis moving unit configured to move, along the
array of the multiple flow passages, an optical axis of the
irradiation light entering the at least one flow passage and an
optical axis of the emitted light received by the light receiving
optical system in the first direction; and a counter configured to
count the particle for each particle size based on an intensity of
the emitted light received by the light receiving optical
system.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic perspective view of a particle counter in one
embodiment;
FIG. 2A is a front view of the particle counter in one embodiment,
and FIG. 2B is a side view of the particle counter;
FIG. 3 is a perspective view of a flow cell in one embodiment;
FIG. 4 is a vertical sectional view (a sectional view along an
IV-IV cut line of FIG. 3) of the flow cell in one embodiment;
FIG. 5 is a vertical sectional view (a sectional view along a V-V
cut line of FIG. 3) of the flow cell in one embodiment;
FIG. 6 is a disassembled perspective view of a flow cell unit in
one embodiment;
FIGS. 7A and 7B are perspective views of a pressure bush in one
embodiment;
FIGS. 8A, 8B, and 8C are views for describing the form of fixing of
each flow cell in a stepwise manner;
FIGS. 9A and 9B are perspective views of the flow cell unit in one
embodiment;
FIG. 10 is a functional block diagram of a configuration of the
particle counter in one embodiment; and
FIG. 11 is a schematic perspective view of a particle counter in
another embodiment.
DETAILED DESCRIPTION
In the following detailed description, for purpose of explanation,
numerous specific details are set forth in order to provide a
thorough understanding of the disclosed embodiments. It will be
apparent, however, that one or more embodiments may be practiced
without these specific details. In other instances, well-known
structures and devices are schematically shown in order to simplify
the drawing.
In the related art of JP-A-2002-243632, pipes connected to the flow
cells are also moved in association with movement of the flow
cells. For this reason, as measurement proceeds, looseness of a
connection portion between the pipe and the flow cell or cracking
at a bent portion of the pipe due to load accumulation is easily
caused, and due to such looseness or cracking, there are
possibilities that leakage of the sample liquid is caused.
Moreover, a structure in which the sample liquid flows from the
lower side to the upper side is employed, and for this reason, a
pipe for inflow of the sample liquid and a pipe for outflow of the
sample liquid are each connected to the lower and upper portions of
each flow cell. Thus, many spaces are necessary for such pipe
arrangement. Because of these reasons, it is difficult to avoid
upsizing of the device.
For these reasons, one object of the present disclosure is to
provide the technique of preventing leakage of sample fluid in a
particle counter and the technique of downsizing such a particle
counter.
One aspect of the present disclosure provides the following
particle counter. Note that phrasing in parentheses below is merely
made by way of example, and the aspect of the present disclosure is
not limited to such phrasing.
That is, the particle counter (the present particle counter)
according to one aspect of the present disclosure includes a light
source configured to emit irradiation light, an irradiation optical
system configured to irradiate a predetermined position on an
optical axis with the irradiation light, a multi-flow cell
including flow passages arrayed in a certain direction and having a
particle detection region formed at the predetermined position in
the flow passage when the predetermined position is irradiated with
the irradiation light, a light receiving optical system configured
to receive emitted light generated from a particle passing through
the detection region, an optical axis moving unit configured to
move, along the array of the multiple flow passages, the optical
axis of the irradiation light entering the flow passage and the
optical axis of the emitted light received by the light receiving
optical system, and a counter configured to count the particle for
each particle size based on the intensity of the emitted light
received by the light receiving optical system.
The present particle counter counts, for example, the particle
contained in the sample fluid flowing in the flow passage placed in
a main body by means of the irradiation light with which the inside
of the flow passage is irradiated.
The multi-flow cell comprises transparent bodies at fixed positions
on the main body and includes the flow passages inside. The
positions of the multiple flow passages arrayed in the multi-flow
cell with respect to the main body are constant. Moreover, in the
multi-flow cell, the array of the multiple flow passages is formed
such that multiple sections where the particle detection region is
formed are arrayed in a first direction (e.g., a width direction of
the present particle counter). The light receiving optical system
receives the emitted light generated from the particle, the light
receiving optical system taking a second direction (e.g., a depth
direction of the counter) perpendicular to the first direction as
an optical axis. Moreover, the optical axis moving unit moves the
optical axis of the irradiation light entering the flow passage and
the optical axis of the emitted light received by the light
receiving optical system in the first direction.
In the present particle counter of this aspect, the flow passage
(the flow passage as an irradiation light condensing destination)
in which the detection region is formed is switched among the
multiple flow passages in the multi-flow cell, and in this manner,
other detection can be performed. Upon switching of the flow
passage, the optical axis of the irradiation light entering the
flow passage and the optical axis of the emitted light received by
the light receiving optical system move in the first direction. On
the other hand, the multi-flow cell does not move. Thus, in the
present particle counter of this aspect, pipes connected to the
multi-flow cell do not move. For this reason, e.g., looseness and
cracking due to pipe movement are less caused. As a result, leakage
of the sample fluid can be reduced.
Preferably, the present particle counter further includes a focal
point adjustment unit configured to adjust the focal point of the
light receiving optical system in the second direction.
In the present particle counter of this aspect, the focal point of
the light receiving optical system is adjusted in the second
direction in association with switching of the flow passage in
which the detection region is formed. Moreover, the position of the
focal point moves in the second direction. However, the multi-flow
cell does not move after all. Thus, in the present particle counter
of this aspect, the pipes connected to the multi-flow cell do not
move either. Consequently, leakage of the sample fluid which may be
caused due to pipe movement can be reduced.
More preferably, in the present particle counter, the focal point
adjustment unit includes an actuator configured to move a stage
configured to support the light receiving optical system in the
second direction to adjust the focal point in the second direction.
Moreover, the optical axis moving unit includes another actuator
configured to move a stage configured to support the actuator
together with the irradiation optical system in the first direction
to move each optical axis in the first direction.
In the present particle counter of this aspect, each of the focal
point adjustment unit and the optical axis moving unit has the
actuator. The focal point adjustment unit uses the actuator
included in this unit itself to move the light receiving optical
system in the second direction. On the other hand, the optical axis
moving unit uses the actuator included in this unit itself to
collectively move the irradiation optical system and the actuator
included in the focal point adjustment unit in the first direction.
Thus, in the present particle counter of this aspect, movement of
each configuration (the irradiation optical system, the light
receiving optical system) relating to adjustable elements (the
optical axis of the irradiation light entering the flow passage,
the optical axis of the emitted light received by the light
receiving optical system, the focal point of the light receiving
optical system) in the same direction can be collectively
performed. With this configuration, each configuration does not
need to be separately moved in the first or second direction. Thus,
movement of the optical axes and adjustment of the focal point in
association with switching of the flow passage can be efficiently
performed.
Much more preferably, the present particle counter further includes
a storage configured to store, regarding the multiple flow passages
formed inside the multi-flow cell, at least a position in the first
direction in advance, the position in the first direction being the
position of each optical axis moved corresponding to the position
of each flow passage by the optical axis moving unit. The optical
axis moving unit is configured to move, corresponding to the flow
passage in which the detection region is formed, each optical axis
to the position of each optical axis stored in advance in the
storage.
Moreover, in the present particle counter of this aspect, in
addition to the position of each optical axis, the storage stores,
in advance, the position of the focal point in the second
direction, the focal point being adjusted corresponding to the
position of each flow passage by the focal point adjustment unit.
The focal point adjustment unit is configured to adjust,
corresponding to the flow passage in which the detection region is
formed, the focal point to the position of the focal point stored
in advance in the storage.
In the present particle counter of this aspect, the position (e.g.,
coordinates in the width direction, X-coordinates) of each optical
axis in the first direction and the position (e.g., coordinates in
the depth direction, Y-coordinates) of the focal point in the
second direction are precisely adjusted corresponding to the
position of each flow passage at the stage of manufacturing. The
positions (the X-coordinates and the Y-coordinates corresponding to
each flow passage) in two directions are stored in advance in the
storage, these positions being determined based on an adjustment
result and corresponding to each flow passage.
Thus, the present particle counter of this aspect automatically
moves, in association with switching of the flow passage, each
optical axis and the focal point by a distance corresponding to the
positions stored corresponding to the flow passage in advance, and
in this manner, the optical axis of the irradiation light entering
the flow passage, the optical axis of the emitted light received by
the light receiving optical system, and the focal point of the
light receiving optical system can be moved to positions optimal
for the flow passage. With this configuration, particle detection
and particle counting can be performed with high accuracy.
Moreover, in the present particle counter, the multi-flow cell is
preferably configured such that multiple flow cells of the
transparent bodies having the flow passages are arrayed, and each
flow cell is preferably fixed in close contact with a portion as a
reference of the position of the entirety of the multi-flow cell in
the first and second directions.
According to the present particle counter of this aspect, each flow
cell is firmly fixed at an intended correct position in the
multi-flow cell. Thus, degradation of the accuracy of particle
detection and particle counting due to shift of the position of
each flow cell can be reduced in advance.
Much more preferably, in the present particle counter, each flow
cell is in a substantially rectangular solid shape, and includes an
inlet port into which the sample fluid is supplied and an outlet
port from which the sample fluid is discharged at the same side
surface. Moreover, each flow cell includes a flow passage formed as
one passage and having a first flow passage extending in the second
direction from the inlet port, a third flow passage extending in
the second direction from the outlet port, and a second flow
passage extending in a third direction perpendicular to any of the
first and second directions and connected to the first and third
flow passages.
In a case where multiple flow cells (e.g., flow cells having
substantially-straight flow passages) each configured such that
sample fluid inlet and outlet ports are formed at different
surfaces are arrayed to form a multi-flow cell, a pipe space is
ensured corresponding to each surface. For this reason, upsizing of
a particle counter is not avoidable. On the other hand, in the
present particle counter of the above-described aspect, the sample
fluid inlet and outlet ports are formed at the same surface of the
flow cell. Thus, in the multi-flow cell, pipes connected to the
flow cells included in the multi-flow cell are arrayed at the same
surface of the multi-flow cell. Consequently, according to the
present particle counter of this aspect, a space ensured for the
pipes is only at one surface. As a result, the present particle
counter can be downsized.
In a case where the multiple flow cells each configured such that
the sample fluid inlet and outlet ports are formed at the different
surfaces are arrayed to form the multi-flow cell, pipes are
connected to different surfaces. For this reason, there are,
depending on the direction of pipe extension, possibilities that
the pipe interferes irradiation light exiting from the flow cell,
or there are possibilities that the pipe warps due to contact with
other components and a fine particle is caused from, e.g., an inner
wall of the pipe. This may be a noise source, leading to
degradation of detection accuracy. On the other hand, according to
the present particle counter of the above-described aspect,
interference of the pipe with the irradiation light or contact of
other components is less caused. Thus, occurrence of noise due to
the pipe can be reduced. As a result, particle detection and
particle counting can be performed with favorable accuracy.
More preferably, in the present particle counter, the emitted light
is scattered light or fluorescence. According to the present
particle counter of this aspect, one of the scattered light or the
fluorescence easily receivable depending on the properties of the
particle contained in the sample fluid can be selected as a
receiving target. Thus, the accuracy of particle detection and
particle counting can be improved.
As described above, according to the present particle counter,
leakage of the sample fluid can be reduced, and the particle
counter can be downsized.
Hereinafter, embodiments of the present disclosure will be
described with reference to the attached drawings. Note that the
embodiments below are preferable examples, and the technique of the
present disclosure is not limited to these examples.
[Configuration of Particle Counter]
FIG. 1 is a schematic perspective view of a particle counter 1 in
one embodiment. For the sake of easy understanding of the
embodiment, some components are not shown in FIG. 1. Note that the
particle counter 1 is one aspect of a particle counter.
The particle counter 1 includes, for example, a light source 20, a
mirror 30, a lighting lens 40, multiple flow cells 10, and a light
receiving unit 50. Each component of the particle counter 1 is
directly or indirectly supported on a sensor base 2 with, e.g., a
not-shown jig. Multiple leg portions 3 are provided on a bottom
surface of the sensor base 2. The leg portion 3 is formed from an
elastic member which can absorb vibration, such as antivibration
rubber. With this configuration, transmission of vibration caused
around to each component is reduced. Moreover, the particle counter
1 is housed in a not-shown housing. Thus, the sensor base 2, the
not-shown housing, and the like structurally form a main body
portion (a counter main body, a main body) in the particle counter
1.
In an installation state or a use state of the particle counter 1,
in a case where a longitudinal direction of the sensor base 2 is a
width direction of the counter main body and a direction
perpendicular to such a direction is a front-back (depth)
direction, the multiple flow cells 10 are arrayed in the width
direction. Each flow cell 10 has, on a front side thereof, an inlet
and an outlet of sample fluid. Pipes are each connected to the
inlet and the outlet. Each flow cell 10 is fixed to the inside of a
flow cell holder 6 (see FIG. 6) not shown in FIG. 1. These multiple
flow cells 10 are integrally included in a flow cell unit (a
multi-flow cell) 80 (see FIGS. 2A and 2B). The flow cell holder 6
(see FIG. 6) is set to a flow cell base 5 (see FIGS. 2A and 2B),
and is indirectly supported by the sensor base 2.
Note that in the present embodiment, ten flow cells 10 are arrayed
in the width direction. Note that the number of flow cells 10 is
not limited to above. An internal structure of the flow cell unit
will be described later in detail with reference to another
drawing. Moreover, in subsequent description, a direction (the
width direction of the counter main body) in which the multiple
flow cells 10 are arrayed as a first direction will be referred to
as an "X-direction," and an axis extending in the X-direction will
be referred to as an "X-axis."
The light source 20 is fixed to the sensor base 2. The light source
20 emits irradiation light La (e.g., laser light) having a
predetermined wavelength in the X-direction at a spread angle which
can be taken as parallel. The sensor base 2 also serves as a heat
sink of the light source 20, and efficiently releases heat
generated from the light source 20. The mirror 30 reflects the
irradiation light La emitted from the light source 20 toward a
detection region in the flow cell 10. Moreover, the lighting lens
40 is provided on an optical path of the irradiation light La
reflected on the mirror 30. The irradiation light La passes through
the lighting lens 40. The irradiation light La can be condensed
(concentrated) by the lighting lens 40. With this configuration,
the irradiation light La having a high energy density can be
condensed to the detection region of the flow cell 10.
The light receiving unit 50 is provided behind the flow cells 10.
The light receiving unit 50 includes, for example, multiple light
receiving lenses, a light receiving element, an amplifier, and an
A/D converter. The multiple light receiving lenses are housed in a
cylindrical light receiving tube 52 for reducing reception of light
of background noise. At the flow cell 10 that the irradiation light
La enters, when a particle contained in the sample fluid passes
through the detection region, scattered light (one example of
emitted light) is generated from the particle. Such scattered light
is condensed by the multiple light receiving lenses. Then, such
light is received by the light receiving element (e.g., a
photodiode), and is converted into an electrical signal. This
electrical signal is eventually converted into an output signal
having a level corresponding to the intensity of the scattered
light. This output signal is sent to a control unit 90 (see FIG.
10). Based on the intensity of the scattered light indicated by the
output signal, particle counting is performed for each particle
size. In a case where the particle contains a fluorescent
substance, fluorescence (one example of the emitted light) is
generated from the particle depending on the setting of the
wavelength of the irradiation light. An optical filter for
selecting the wavelength is added to the light receiving lenses in
order that the fluorescence emitted from the particle can be
received and counting can be performed as in the case of the
scattered light.
Note that a configuration of the control unit 90 will be described
later with reference to another drawing. Moreover, in subsequent
description, the center axis (hereinafter referred to as a "light
receiving axis") of the light receiving lens will be referred to as
a "Y-axis," and a direction in which the Y-axis extends (the
front-back direction of the counter main body) as a second
direction will be referred to as a "Y-direction." In a case where
the vertical direction is a "Z-direction," the X-direction, the
Y-direction, and the Z-direction cross orthogonally with each
other.
The particle counter 1 includes an X-axis stage 60 for moving some
components in the X-direction and a Y-axis stage 70 for moving some
components in the Y-direction. Of these components, the X-axis
stage 60 is provided on a slider of an X-axis actuator 62 extending
in the X-direction. The Y-axis stage 70 is provided on a slider of
a Y-axis actuator 72 extending in the Y-direction. Moreover, the
slider of the Y-axis actuator 72 is provided on the X-axis stage
60.
The X-axis actuator 62 and the Y-axis actuator 72 are linear
actuators, for example. The X-axis actuator 62 and the Y-axis
actuator 72 slide, using built-in motors as drive sources, the
stages provided on the sliders thereof along linear guides.
The X-axis actuator 62 is fixed to the sensor base 2, and using the
X-axis motor as the drive source, slides the X-axis stage 60 in the
X-direction.
The Y-axis actuator 72 is fixed to the X-axis stage 60, and using
the Y-axis motor as the drive source, slides the Y-axis stage 70 in
the Y-direction. When the X-axis stage 60 slides in the
X-direction, all components supported on the X-axis stage 60 move
in the X-direction accordingly. Moreover, when the Y-axis stage 70
slides in the Y-direction, all components supported on the Y-axis
stage 70 move in the Y-direction accordingly. Note that such
movement is performed in a state in which the counter main body
including the sensor base 2 is fixed.
Of the above-described components of the particle counter 1, the
mirror 30 and the lighting lens 40 are fixed to a front end of the
X-axis stage 60 through a vertical bracket 65 and a holder 66. The
Y-axis stage 70 is indirectly supported on the X-axis stage 60
through the slider of the Y-axis actuator 72. Moreover, the light
receiving unit 50 is fixed to the Y-axis stage 70. Thus, in
association with slide of the X-axis stage 60, the mirror 30, the
lighting lens 40, and the light receiving unit 50 move in the
X-direction. In association with slide of the Y-axis stage 70, the
light receiving unit 50 moves in the Y-direction.
Note that the X-axis motor and the Y-axis motor as the drive
sources of the X-axis actuator 62 and the Y-axis actuator 72 are
not necessarily built in the X-axis actuator 62 or the Y-axis
actuator 72, and may be provided outside the X-axis actuator 62 and
the Y-axis actuator 72. In this case, the Y-axis motor is not
necessarily supported on the X-axis stage 60.
Subsequently, the form of movement in the X-direction and the
Y-direction will be specifically described with reference to FIGS.
2A and 2B.
FIG. 2A is a front view of the particle counter 1 in one
embodiment. The flow cell unit 80 includes the multiple flow cells
10. In the flow cell unit 80, the multiple flow cells 10 are
integrally housed in the flow cell holder 6 (see FIG. 6). The flow
cell unit 80 is fixed to the sensor base 2 through the flow cell
base 5. In an illustrated state, the irradiation light La emitted
from the light source 20 is reflected on the mirror 30, passes
through the lighting lens 40, and is concentrated to enter the
detection region of the first flow cell 10 from the right side as
viewed from the front side.
The mirror 30 and the lighting lens 40 are fixed to optimal
positions for concentrating the irradiation light La to the light
receiving axis of the light receiving unit 50 positioned behind the
flow cells 10 and adjusting the center of detection region to the
light receiving axis. Moreover, the position (hereinafter referred
to as "X-coordinates") of the X-axis stage 60 corresponding to the
X-direction position of the light receiving axis (the light
receiving unit 50) corresponding to each flow cell 10 is determined
based on an adjustment result at the stage of manufacturing, and is
stored in advance in the control unit 90.
When a channel targeted for counting is selected by the control
unit 90, the X-axis motor built in the X-axis actuator 62 is
driven, and the X-axis stage 60 slides to the X-coordinates
corresponding to the flow cell 10 of the channel targeted for
counting. Then, in association with slide of the X-axis stage 60,
the mirror 30, the lighting lens 40, and the light receiving unit
50 indirectly supported on the X-axis stage 60 move in the
X-direction. Note that gray portions in the figure indicate the
components movable in the X-direction. Moreover, a chain
double-dashed line in the figure indicates the position of the
component in a case where the X-axis stage 60 slides to the
X-coordinates corresponding to the third flow cell 10 from the left
side as viewed from the front side.
FIG. 2B is a side view of the particle counter 1 in one embodiment.
Pipes 8 connected to the flow cells 10 extend from the flow cell
unit 80 fixed to the sensor base 2 through the flow cell base 5 to
the outside of the housing 4 through a pipe window provided on the
front side of the housing 4. In an illustrated state, the light
receiving tube 52 (the light receiving unit 50) is present at a
position indicated by a solid line. Thus, a distance between the
light receiving tube 52 and the flow cell unit 80 in the
Y-direction is constant. However, due to a micron-order (.mu.m)
processing error at the stage of manufacturing, there is a slight
individual difference in the size of each flow cell 10. For this
reason, a distance between the light receiving tube 52 and the
detection region of each flow cell 10 in the Y-direction is not
constant.
For this reason, the light receiving unit 50 is preferably moved to
a Y-direction position corresponding to each flow cell 10 to
correct the distance between the light receiving tube 52 and the
detection region of each flow cell 10 in the Y-direction, thereby
adjusting the focal point positions of the multiple light receiving
lenses housed in the light receiving tube 52 with high accuracy. By
such adjustment, the scattered light generated from a nano-order
(nm) fine particle can be precisely condensed to the light
receiving element. The position (hereinafter referred to as
"Y-coordinates") of the Y-axis stage 70 corresponding to the
Y-direction position of the light receiving unit 50 corresponding
to each flow cell 10 is also determined based on the adjustment
result at the stage of manufacturing, and is stored in advance in
the control unit 90.
When the channel targeted for counting is specified by the control
unit 90, the X-axis stage 60 first slides to the X-coordinates
corresponding to the flow cell 10 of the channel targeted for
counting as described above. Accordingly, the mirror 30, the
lighting lens 40, and the light receiving unit 50 move in the
X-direction. Thereafter, the Y-axis motor built in the Y-axis
actuator 72 is driven, and the Y-axis stage 70 next slides to the
Y-coordinates corresponding to the flow cell 10 of the channel
targeted for counting. Accordingly, the light receiving unit 50
moves in the Y-direction. Note that gray portions in the figure
indicate the components movable in the Y-direction. Moreover, a
chain double-dashed line in the figure indicates the position of
the component in a case where the Y-axis stage 70 slides to the
back side with respect to a position indicated by a solid line.
As described above, a user of the particle counter 1 merely selects
the channel targeted for counting in order that the X-axis stage 60
and the Y-axis stage 70 can be slid to the coordinates
corresponding to the flow cell 10 of such a channel, i.e., the
mirror 30, the lighting lens 40, and the light receiving unit 50
can be moved to optimal positions. In this manner, the positions of
the optical axes of the irradiation optical system and the
positions of the optical axis and focal point of the light
receiving optical system can be adjusted with high accuracy
according to the selected channel.
[Structure of Flow Cell]
FIG. 3 is a perspective view of the flow cell 10 in one embodiment
from the lateral side.
The flow cell 10 is formed in a substantially rectangular solid
shape with using a transparent material such as quartz or sapphire,
and has a substantially C-shaped flow passage. Specifically, the
flow cell 10 has a first flow passage 13, a second flow passage 14,
and a third flow passage 15. The first flow passage 13 extends in
the Y-direction from an inlet port 11 formed at a lower front
portion. The third flow passage 15 extends in the Y-direction (the
second direction) from an outlet port 12 formed at an upper front
portion. The second flow passage 14 is connected to (i.e.,
"communicates with") each end portion of the first flow passage 13
and the third flow passage 15, and extends in the Z-direction (a
third direction) and forms one passage. Moreover, a recessed
portion 18 formed in a recessed shape is provided at a back portion
of the second flow passage 14 at a position on an extension of the
first flow passage 13. Further, a condensing lens 19 formed in a
raised shape is provided at a back portion of the flow cell 10 at a
position on the same extension.
The sample fluid is supplied to the first flow passage 13 through
the inlet port 11, and is discharged to the outside through the
outlet port 12 by way of the second flow passage 14 and the third
flow passage 15. Moreover, the irradiation light La enters the flow
cell 10 through an incident surface 16 forming a bottom surface of
the flow cell 10, and exits to the outside through a transmission
surface 17 forming an upper surface of the flow cell 10. The
irradiation light La having exited to the outside of the flow cell
is absorbed by a not-shown trap above the transmission surface
17.
FIG. 4 is a vertical sectional view (a sectional view along an
IV-IV cut line in FIG. 3) of the flow cell 10 in one embodiment
from the front side.
The first flow passage 13 has a rectangular cross-section. At the
first flow passage 13, in a section where the irradiation light La
enters (is irradiated) (is condensed) the center (a predetermined
position) of the first flow passage 13, a detection region A for
the particle (a floating substance) contained in the sample fluid
is formed.
The irradiation light La enters the flow cell 10 through the
incident surface 16 in a state in which an angle of the irradiation
light La is inclined with respect to the Z-direction as viewed from
the front side. More specifically, the irradiation light La enters
the flow cell 10 through the incident surface 16 at a predetermined
angle with respect to the incident surface 16, the predetermined
angle being such an angle that the irradiation light La passes
through the detection region A while not interfering the third flow
passage 15. Then, the irradiation light La enters the first flow
passage 13, and passes (forms) the detection region A. Thereafter,
the irradiation light La passes through a position deviating from
the third flow passage 15, and exits to the outside through the
transmission surface 17.
Here, the cross-section of the first flow passage 13 is in a
rectangular shape for employing flat surfaces mirror-finished in
nano order as the two wall surfaces defining the upper and lower of
the first flow passage 13, through which the irradiation light La
passes. With this configuration, noise (unnecessary light
scattering and reflection) which may be caused at an interface
between the wall surface of the first flow passage 13 and the
sample fluid before and after passage of the irradiation light La
through the detection region A formed inside the first flow passage
13 can be reduced as much as possible. Thus, in the first flow
passage 13, at least a wall surface of a portion through which the
irradiation light La passes may be formed as a flat surface.
Moreover, in the present embodiment, the sectional shape of the
third flow passage 15 is a circular shape. However, the sectional
shape of the third flow passage 15 is not limited to above. The
sectional area of each of the flow passages 13, 14, 15 can be set
as necessary depending on the situation.
FIG. 5 is a vertical sectional view (a sectional view along a V-V
cut line in FIG. 3) of the flow cell 10 in one embodiment from the
front side.
The irradiation light La enters the flow cell 10 through the
incident surface 16 in a state in which the irradiation light La is
parallel to the Z-direction as viewed from the side face thereby
forming the detection region A in the first flow passage 13. The
center of the detection region A is present on the light receiving
axis of the light receiving unit 50 positioned behind the flow
cell. Moreover, the recessed portion 18 and the condensing lens 19
are arranged such that the center axes thereof are coincident with
the light receiving axis of the light receiving unit 50. Here, the
recessed portion 18 is used for reducing light refraction at an
inner wall surface due to a difference between the refractive index
of the sample fluid and the refractive index of the flow cell. With
such arrangement, the condensing lens 19 and the multiple light
receiving lenses included in the light receiving unit 50 positioned
behind the condensing lens 19 can integrally demonstrate a good
light condensing capability.
When a particle P contained in the sample fluid passes through the
detection region A, the particle P generates side scattered light
Ls as the scattered light due to interaction between the particle P
and the irradiation light La. The side scattered light Ls is,
through the recessed portion 18, condensed by the condensing lens
19 and the multiple light receiving lenses in the light receiving
unit 50. Note that a dashed line in FIG. 5 indicates the area of
scattering of the side scattered light Ls, and does not indicate
the side scattered light Ls after condensing. Moreover, in order to
utilize the condensing angle of the condensing lens 19 to a maximum
extent, the position of an inner wall of the second flow passage 14
is set to such a position that entrance of light into the
condensing lens 19 is not interfered.
The irradiation light La having passed through the first flow
passage 13 passes through a position deviating not only from the
second flow passage 14 but also from the third flow passage 15, and
exits to the outside of the flow cell 10 through the transmission
surface 17. Of three flow passages 13, 14, 15 formed inside the
flow cell 10, the flow passage through which the irradiation light
La passes is only the first flow passage 13 as described above. The
irradiation light La does not substantially interfere the second
flow passage 14 or the third flow passage 15. The optical path of
the irradiation light La is set to such a position in order that
occurrence of noise due to interference of the irradiation light La
with the second flow passage 14 or the third flow passage 15 can be
reduced. Thus, only proper scattered light generated from the
nano-order (nm) fine particle contained in the sample fluid is
easily detected. As a result, particle detection accuracy and
particle counting accuracy can be improved.
[Internal Structure of Flow Cell Unit]
FIG. 6 is an exploded perspective view of the flow cell unit 80 in
one embodiment from the back side. The flow cell unit 80 is a
multi-flow cell including the multiple flow cells 10 integrated by
fixing to the inside of the flow cell holder 6. The flow cell unit
80 includes, for example, the flow cell holder 6, the flow cells
10, pressure bushes 86, and a backboard 89.
In the flow cell holder 6, housing chambers 81 corresponding to the
number of flow cells 10 are formed (only some of these components
are illustrated with reference numerals). The multiple flow cells
10 are pushed into inner walls of the housing chambers 81 by the
pressure bushes 86 in a state in which the flow cells 10 are
separately housed in these uniformly-divided housing chambers 81.
Further, a back surface of the flow cell holder 6 in this state is
covered with the backboard 89. For example, holes 89a and holes
89b, 89c for fastening are perforated at the backboard 89. The
holes 89a are provided for avoiding interference between the
condensing lens 19 provided on a back surface of each flow cell 10
and the backboard 89 (avoiding such interfere to expose the
condensing lens 19). The backboard 89 is fastened to the flow cell
holder 6 with a fastening member such as a screw.
Note that a not-shown opening is perforated at a position
corresponding to above each housing chamber 81 at an upper portion
of the flow cell holder 6. Such an opening is used to release the
irradiation light having transmitted through each flow cell 10.
Moreover, the not-shown trap configured to absorb the released
irradiation light is provided above the opening. The trap may be
provided across the entirety of the upper portion of the flow cell
holder 6, or may be provided at the upper portion of one flow cell
10. In the latter case, the trap may be according to a change in
the channel targeted for detection, moved in the X-direction
together with the optical axis of a light receiving system so that
the trap is provided at the upper portion of the flow cell 10 of
the channel targeted for counting.
Subsequently, the shape and role of the pressure bush 86 will be
described with reference to FIGS. 7A and 7B.
FIG. 7A is a perspective view of the pressure bush 86 of one
embodiment. The pressure bush 86 includes a lower portion 86a
formed in a substantially rectangular columnar shape and an upper
portion 86b. The upper portion 86b is continuously formed on an
extension of one corner forming the lower portion 86a, and has a
substantially triangular columnar shape. Of these portions, the
upper portion 86b has an edge on the extension of the corner of the
lower portion 86a, and has an opposing surface 87 at a position
facing such an edge. Moreover, a fastening hole 88 is perforated to
penetrate the lower portion 86a in the front-back direction. The
fastening hole 88 is provided for insertion of a fastening member
configured to fasten the entirety of the pressure bush 86 to the
flow cell holder 6. Note that the material of the pressure bush 86
is a material having elasticity, such as resin (e.g., Teflon (the
registered trademark)).
FIG. 7B is a partially-enlarged perspective view of the flow cell
holder 6. FIG. 7B illustrates a state in which the flow cells 10
and the pressure bushes 86 are housed in the flow cell holder 6.
Here, for the sake of easy understanding of the present embodiment,
an upper frame (a portion forming an upper wall of each housing
chamber 81) of the flow cell holder 6 is not shown.
In addition to the housing chambers 81, mounting tables 85 for
mounting the pressure bushes 86 are formed inside the flow cell
holder 6. The width (the dimension in the X-direction) of the
housing chamber 81 is set slightly wider than the width of the flow
cell 10 to smoothly take in or out the flow cell 10. Moreover, an
opposing wall 84 is formed above the mounting table 85. The
opposing wall 84 is set as an outward angle with respect to such an
inner wall. The pressure bush 86 is mounted on the mounting table
85 in a state in which the opposing surface 87 closely contacts the
opposing wall 84.
In the flow cell 10 housed in the housing chamber 81, the entirety
of one side surface of the flow cell 10 faces a first reference
surface 82. On the other hand, the other side surface of the flow
cell 10 partially faces a side surface of the pressure bush 86. The
pressure bush 86 mounted on the mounting table 85 presses the flow
cell 10 in the X-direction from the other side surface, and causes
the flow cell 10 to closely contact the first reference surface 82.
Here, the first reference surface 82 is a reference surface in
determination on the position of each flow cell 10 in the
X-direction in the flow cell holder 6. The pressure bush 86 presses
the flow cell 10 and causes the flow cell 10 to closely contact the
first reference surface 82, and in this manner, the flow cell 10 is
fixed to a predetermined accurate position in the X-direction. Note
that the position of each flow cell 10 in the Y-direction in the
flow cell holder 6 is determined with reference to a second
reference surface 83 forming part of the back surface of the flow
cell holder 6.
FIGS. 8A, 8B, and 8C are views for describing the form of fixing of
each flow cell 10 to the flow cell holder 6 with reference to the
stages of assembly of the flow cell unit 80. In FIGS. 8A, 8B, and
8C, the upper frame (the portion forming the upper wall of each
housing chamber 81) of the flow cell holder 6 is not shown
either.
FIG. 8A illustrates the stage of housing the flow cells 10 in the
housing chambers 81. At this stage, no action has done to make the
flow cell 10 to closely contact the first reference surface 82, and
therefore, there are possibilities that a slight clearance is
present between the flow cell 10 and the first reference surface 82
(such a clearance is not present in some cases).
FIG. 8B illustrates the stage of mounting the pressure bushes 86 on
the mounting tables 85. At this stage, in association with close
contact of the opposing surface 87 of the pressure bush 86 with the
opposing wall 84, the flow cell 10 is pressed in the X-direction by
the pressure bush 86 to closely contact the first reference surface
82. Thus, the clearance between the flow cell 10 and the first
reference surface 82 is eliminated. In this state, the pressure
bush 86 slightly projects to the back side with respect to the
position of the second reference surface 83. Such projection
functions as a push-in margin for the backboard 89 to be fastened
thereafter.
FIG. 8C illustrates the stage of fastening the backboard 89 to the
flow cell holder 6. At this stage, the pressure bushes 86 slightly
projecting to the back side at the stage of FIG. 8B are pushed in
the Y-direction by the backboard 89, and closely contact the second
reference surfaces 83. In this state, the pressure bush 86 is
pressed against the opposing wall 84, and is pushed back by the
opposing wall 84. This generates, at the pressure bush 86, the
force of pushing the flow cell 10 in the X-direction. Accordingly,
the flow cell 10 can more firmly closely contact the first
reference surface 82.
Note that on the front side, the pipes 8 (see FIG. 9B) not shown in
FIGS. 8A to 8C are connected to the flow cell 10 through joints.
Such a joint has a structure for preventing leakage of the sample
fluid. This joint is pushed in the Y-direction when the flow cell
10 is in a state in which the flow cell 10 is housed in the flow
cell holder 6. In this state, the flow cell 10 is pushed in the
Y-direction, and the back surface thereof closely contacts the
backboard 89. Further, the position of the flow cell 10 in the
Y-direction is adjusted to the second reference surface 83. Thus,
in the Y-direction, the flow cell 10 is also fixed to a
predetermined accurate position.
With the above-described structure, positioning regarding the
position of each flow cell 10 in the X-direction and the
Y-direction in the flow cell holder 6 (the flow cell unit 80) can
be accurately performed. Thus, each flow cell 10 can be firmly
fixed to a desired position.
FIGS. 9A and 9B are perspective views of the flow cell unit 80. Of
these figures, FIG. 9A is the perspective view of the flow cell
unit 80 as a single body from the back side. FIG. 9B is the
perspective view of the flow cell unit 80 set to the flow cell base
5 from the front side.
On the back side of the flow cell unit 80, the condensing lenses 19
provided on the back surfaces of the flow cells 10 housed inside
are visible through the holes 89a perforated at the backboard 89
fastened to the flow cell holder 6. Moreover, on the front side of
the flow cell unit 80, the pipes 8 connected to the flow cells 10
housed inside through the joints extend in the state of being
aligned in two upper and lower lines. The pipe 8 is a tube having
plasticity and made of, e.g., PFA resin. The pipes 8 are come out
of the housing 4 through the pipe window provided at the front of
the housing 4 without substantially interfering other components of
the particle counter 1. Moreover, on the outside of the housing 4,
the pipes 8 aligned in the lower line are connected to a delivery
port as a sample fluid supply source, and the pipes 8 aligned in
the upper line are connected to a discharge port as a sample fluid
discharge destination.
In the flow cell 10 of the present embodiment, the vertical flow
passage is formed to have the substantially C-shape as described
above. Further, the sample fluid inlet ports are aligned in lower
line and outlet ports are aligned in upper line, on the front side.
Thus, two pipes 8 connected to each flow cell 10 are all aligned on
the front side of the flow cell unit 80. Moreover, the flow cell
unit 80 is fixed to the sensor base 2 through the flow cell base 5.
Thus, even when the channel targeted for counting is changed, the
pipes 8 do not move. Unless some kinds of external factors are
provided, the pipes 8 stay at substantially-constant positions.
Thus, less failure regarding the pipe 8, such as looseness or
cracking due to movement or warpage of the pipe 8, is caused, and
therefore, there is no concern about leakage of the sample
fluid.
Here, for comparison with the present embodiment, a case where
multiple flow cells configured such that flow passages have a
substantially straight shape or a substantially L-shape are arrayed
will be considered. At such a flow cell, sample fluid inlet and
outlet ports are provided at two different surfaces. Thus, pipe
spaces are needed at each position facing these two surfaces. For
this reason, the entirety of a device is upsized consequently.
Moreover, there are, depending on the direction of pipe extension,
possibilities that a pipe interferes irradiation light exiting from
the flow cell, or there are possibilities that the pipe moves or
warps due to contact of the extending pipe with other components
and a fine particle is caused from, e.g., an inner wall of the
pipe. This leads to occurrence of optical or electrical noise. Such
noise degrades particle detection accuracy.
On the other hand, in the present embodiment, all pipes 8 are
aligned on the front side. Thus, a space ensured for the pipes is
only at one surface (the front side). Consequently, the entirety of
the device can be compactified. Moreover, the irradiation light La
enters the flow cell 10 through the bottom surface (the incident
surface 16), and exits from the flow cell 10 through the upper
surface (the transmission surface 17). Thus, the pipes 8 do not
substantially interfere the irradiation light La. Further, all
pipes 8 aligned on the front side of the flow cell unit 80 directly
extend to the front side, and come out of the housing 4. Thus, the
pipes 8 do not substantially interfere other components of the
particle counter 1. Consequently, in the present embodiment,
occurrence of noise due to the pipes 8 can be reduced. As a result,
the particle can be detected with favorable accuracy.
[Functions of Particle Counter]
FIG. 10 is a functional block diagram of a configuration of the
particle counter 1 in one embodiment.
In addition to each of the above-described components used for
particle detection, the particle counter 1 includes the control
unit 90 configured to control particle detection and particle
counting. The control unit 90 includes, for example, an operation
inputter 91, a storage 92, a position adjuster 93, a detection
manager 94, a counter 95, and a data outputter 96.
The operation inputter 91 provides an operation screen to the user,
and receives operation made by the user via the operation screen.
On the operation screen, the user can make operation for
instructing, e.g., selection of the channel targeted for counting,
start and completion of detection, and saving of a counting result.
The operation inputter 91 outputs an instruction corresponding to
the contents of the received operation to the position adjuster 93,
the detection manager 94, and the data outputter 96 as other
functions. Further, the operation inputter 91 performs, e.g.,
switching of the operation screen according to the contents of
input from the position adjuster 93, the detection manager 94, and
the data outputter 96 as other functions.
The storage 92 is a so-called storage area, and stores information
regarding particle detection and particle counting. The storage 92
stores the X-coordinates and the Y-coordinates corresponding to the
flow cell 10 of each channel in advance.
That is, the storage 92, regarding the multiple flow passages 13 to
15 (the flow cell 10) formed inside the flow cell unit 80, stores,
in advance, at least the X-direction position of each optical axis
moved corresponding to the position of each flow cell 10 by the
X-axis actuator 62. These optical axes include the optical axis of
the irradiation light La entering the flow passage and the optical
axis of the emitted light (the scattered light) received by the
light receiving unit 50.
Further, in addition to the above-described position of each
optical axis, the storage 92 stores, in advance, the Y-direction
focal point position of the light receiving lens 53 adjusted
corresponding to the position of each flow cell 10 by the Y-axis
actuator 72, the light receiving lens 53 being included in the
light receiving unit 50.
When a specific channel is specified by the operation inputter 91,
the position adjuster 93 first reads, from the storage 92, the
X-coordinates and the Y-coordinates corresponding to the flow cell
10 of such a channel. Then, the position adjuster 93 actuates the
X-axis actuator 62 to drive the X-axis motor 64, thereby sliding
the X-axis stage 60 to the X-coordinates.
Further, the position adjuster 93 actuates the Y-axis actuator 72
to drive the Y-axis motor 74, thereby sliding the Y-axis stage 70
to the Y-coordinates. When drive of the X-axis motor 64 and the
Y-axis motor 74 is ended, i.e., when adjustment of the positions of
the X-axis stage 60 and the Y-axis stage 70 is completed, a state
in which detection can be started is brought. The position adjuster
93 notifies the operation inputter 91 of the state in which
detection can be started.
When the operation inputter 91 makes the instruction of starting
detection for the specific channel, the detection manager 94
switches the light source 20 and the light receiving unit 50 to an
actuation state. Moreover, when the operation inputter 91 makes the
instruction of completing detection for the specific channel, the
detection manager 94 switches the light source 20 and the light
receiving unit 50 to a non-actuation state. When the light source
20 and the light receiving unit 50 are switched to the
non-actuation state, a state in which the channel targeted for
counting can be changed is brought. The detection manager 94
notifies the operation inputter 91 of the state in which the
channel can be changed.
Note that switching of the actuation state of the light source 20
may be performed every time detection is started and completed.
Alternatively, while the particle counter 1 is operated, the light
source 20 may be maintained in the actuation state. Alternatively,
the particle counter 1 may be configured such that detection is
started or completed without the operation inputter 91 (the
operation by the user). For example, detection may be automatically
started, taking completion of position adjustment of the stages 60,
70 by the position adjuster 93 as a trigger. Then, detection may be
automatically completed after a lapse of predetermined time after
the start of detection.
When the light source 20 and the light receiving unit 50 are
actuated by the detection manager 94, the irradiation light La
emitted from the light source 20 is reflected on the mirror 30.
Thereafter, the irradiation light La passes through the lighting
lens 40, and enters the flow cell 10 in a concentrated state.
Accordingly, the irradiation light La forms the detection region A
in the sample fluid flow passage. When the particle P contained in
the sample fluid passes through the detection region A, the
particle P generates the side scattered light Ls as the scattered
light. The side scattered light Ls is condensed by the light
receiving lens 53, enters the light receiving element 54, and is
received by the light receiving element 54. The side scattered
light Ls received by the light receiving element 54 is converted
into the electrical signal corresponding to the intensity of the
side scattered light Ls. Such an electrical signal is amplified
with a predetermined gain by the amplifier 55, and thereafter, is
converted into a digital signal by the A/D converter 56. Then, the
light receiving unit 50 outputs the obtained digital signal to the
counter 95.
The counter 95 determines the particle size of the detected
particle based on the level of the digital signal output from the
light receiving unit 50, i.e., the intensity of the side scattered
light Ls, thereby counting the particle for each particle size. The
counter 95 outputs a counting result to the data outputter 96.
The data outputter 96 outputs data based on the counting result
output from the counter 95. The form of the output of the data may
be displaying on a display screen, output to a printer, or
transmission to other devices via a network. When final data of the
counting result is ready upon completion of detection, a state in
which the final data can be saved is brought. The data outputter 96
notifies the operation inputter 91 of the state in which the final
data can be saved.
Note that the control unit 90 may be integrally provided inside the
particle counter 1. Alternatively, the control unit 90 may be
provided as a separate body outside the particle counter 1. In the
latter case, the control unit 90 may be connected to the particle
counter 1 via, e.g., a cable or a network.
[Configuration of Particle Counter in Other Embodiments]
FIG. 11 is a schematic perspective view of a particle counter 101
in another embodiment. For the sake of easy understanding of the
disclosure, some components are not shown in FIG. 11.
In the particle counter 101, a fiber laser is used as the light
source of the irradiation light La. The light source 120 is
arranged outside the housing 4 (not shown). A head 122 is provided
at a tip end of an optical fiber extending from the light source
120. The head 122 is fixed to a holder 166. Thus, according to the
selected channel, the head 122 moves in the X-direction in tandem
with the X-axis stage 60. The irradiation light La is emitted from
the head 122 to the flow passage of the flow cell 10. Unlike the
above-described embodiment, the irradiation light La emitted from
the light source does not need to be reflected toward the flow
passage of the flow cell 10. Thus, in the present embodiment, no
mirror is provided. Moreover, in the case of using the fiber laser,
the light source can be arranged outside the housing 4. Thus,
measures for heat release are not substantially necessary. With use
of such a light source, the particle counter 101 can be further
downsized.
[Superiority of Embodiments Above]
As described above, according to the above-described embodiments,
the following advantageous effects are obtained.
(1) The flow cell unit 80 is fixed to the sensor base 2 through the
flow cell base 5. Even in a case where the channel targeted for
counting is changed and the irradiation optical system and the
light receiving optical system are moved, the flow cells 10 do not
move. Thus, less failure such as looseness or cracking is caused at
the pipes 8 connected to the flow cells 10. Consequently, according
to the above-described embodiments, leakage of the sample fluid can
be prevented.
(2) The flow passage of the flow cell 10 is formed in the
substantially C-shape. Thus, all pipes 8 connected to the multiple
flow cells 10 are aligned at one surface. With this configuration,
the space ensured for arranging the pipes 8 is only at one surface.
Consequently, according to the above-described embodiments, the
particle counter 1 can be downsized.
(3) The user of the particle counter 1 merely selects the channel
targeted for counting in order that the mirror 30, the lighting
lens 40, and the light receiving unit 50 can be moved to optimal
positions corresponding to such a channel. Thus, according to the
selected channel, the position of the optical axis of the
irradiation optical system and the positions of the optical axis
and focal point of the light receiving optical system can be
adjusted with high accuracy.
(4) The flow cell unit 80 has such an internal structure that
positioning of the housed flow cell 10 in the X-direction and the
Y-direction can be accurately performed. Thus, each flow cell 10
can be firmly fixed to an accurate position.
(5) The irradiation light La enters the flow cell 10 at such an
angle that the irradiation light La passes through the first flow
passage 13 and does not interfere the second flow passage 14 or the
third flow passage 15. Thus, occurrence of noise can be reduced. As
a result, detection of the scattered light generated from the
particle is facilitated.
Any of the above-described advantageous effects (3) to (5)
contributes to high-accuracy detection of the nano-order fine
particle contained in the sample fluid. Thus, according to the
above-described embodiments, the accuracy of particle detection and
particle counting can be improved.
The aspects of the present disclosure are not limited to the
above-described embodiments, and various modifications can be made
to these aspects.
In the flow cell unit 80 in the above-described embodiments, the
multiple flow cells 10 are arrayed in one direction, and the single
substantially C-shaped flow passage is formed inside each flow cell
10. Instead of the flow cell unit 80, an integrated flow cell (a
single flow cell configured such that multiple substantially
C-shaped flow passages are formed inside) including the multiple
substantially C-shaped flow passages arrayed in one direction may
be used as the multi-flow cell.
In the above-described embodiments, the light receiving unit 50 is
provided movable in the X-direction and the Y-direction in
association with slide of the X-axis stage 60 and the Y-axis stage
70. Instead, a mirror movable in the X-direction and the
Y-direction in association with slide of the X-axis stage 60 and
the Y-axis stage 70 may be separately provided behind the flow cell
unit 80. In this case, the light receiving unit 50 does not need to
be moved. For example, the X-axis stage 60 does not necessarily
support the light receiving unit 50. Alternatively, the light
generated from the particle contained in the sample fluid may enter
the light receiving unit 50 through the mirror. In such a
configuration, the separately-provided mirror is moved in the
X-direction and the Y-direction according to the channel targeted
for counting. With this configuration, the focal point of the
light, entering the light receiving unit 50, from the particle
through the mirror can be adjusted along the optical axis with high
accuracy.
In the above-described embodiments, the photodiode is used as the
light receiving element 54. Instead, a multi-divided light
receiving element may be used as the light receiving element 54.
With use of the multi-divided light receiving element, a SN ratio
can be further improved. As a result, particle detection and
particle counting can be performed with higher accuracy.
In the above-described embodiments, the pipes 8 connected to the
flow cells 10 has such a sufficient length that the pipes 8 extend
to the outside of the housing 4. The pipes 8 are, at a tip end
portion extending outward of the pipe window provided at the
housing 4, connected to the sample fluid inlet and outlet ports.
However, the form of connection of the pipes 8 is not limited to
above. For example, the pipes 8 may be fixed to the pipe window,
and at such a portion, may be connected to the sample fluid inlet
and outlet ports.
In the above-described embodiments, the actuation state of the
light source 20 is switched by the control unit 90 (the detection
manager 94). Instead, a shutter which can close an emission port of
the light source 20 to block the irradiation light may be
separately provided. In this case, opening/closing (the
presence/absence of light shielding) of the shutter may be switched
by the control unit 90.
In addition, the materials, the numerical values, and the like
described as examples of each component of the particle counter 1
are merely examples. Needless to say, these examples can be
modified as necessary upon implementation of the technique of the
present disclosure.
The foregoing detailed description has been presented for the
purposes of illustration and description. Many modifications and
variations are possible in light of the above teaching. It is not
intended to be exhaustive or to limit the subject matter described
herein to the precise form disclosed. Although the subject matter
has been described in language specific to structural features
and/or methodological acts, it is to be understood that the subject
matter defined in the appended claims is not necessarily limited to
the specific features or acts described above. Rather, the specific
features and acts described above are disclosed as example forms of
implementing the claims appended hereto.
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