U.S. patent application number 16/879637 was filed with the patent office on 2021-11-25 for semiconductor device packages with angled pillars for decreasing stress.
The applicant listed for this patent is Micron Technology, Inc.. Invention is credited to Shams U. Arifeen.
Application Number | 20210366859 16/879637 |
Document ID | / |
Family ID | 1000005955178 |
Filed Date | 2021-11-25 |
United States Patent
Application |
20210366859 |
Kind Code |
A1 |
Arifeen; Shams U. |
November 25, 2021 |
SEMICONDUCTOR DEVICE PACKAGES WITH ANGLED PILLARS FOR DECREASING
STRESS
Abstract
Semiconductor devices having mechanical pillar structures, such
as angled pillars, that are rectangular and orientated with respect
to a semiconductor die to reduce bending stress and in-plane shear
stress at a semiconductor die to which the angled pillars are
attached, and associated systems and methods, are disclosed herein.
The semiconductor device can include angled pillars connected to
the semiconductor die and to a package substrate. The angled
pillars can be configured such that they are orientated relative to
a direction of local stress to increase section modulus.
Inventors: |
Arifeen; Shams U.; (Boise,
ID) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Micron Technology, Inc. |
Boise |
ID |
US |
|
|
Family ID: |
1000005955178 |
Appl. No.: |
16/879637 |
Filed: |
May 20, 2020 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 2224/81815
20130101; H01L 24/14 20130101; H01L 2924/3511 20130101; H01L
2224/14517 20130101; H01L 2924/3512 20130101; H01L 2224/16227
20130101; H01L 2224/81203 20130101; H01L 24/81 20130101; H01L 24/16
20130101 |
International
Class: |
H01L 23/00 20060101
H01L023/00 |
Claims
1. A semiconductor device, comprising: a package substrate
including circuit elements; a semiconductor die including
integrated circuitry, active bond pads electrically coupled to the
integrated circuitry, and inactive bond areas electrically isolated
from the integrated circuitry, wherein the semiconductor die has an
active surface with a major reference axis, a minor reference axis
normal to the major reference axis, and a die center coordinate;
and angled pillars between the substrate and the semiconductor die,
wherein the angled pillars have a non-circular cross-sectional
shape with a major pillar axis, a minor pillar axis, and a pillar
center coordinate, wherein the major pillar axis is at least
approximately normal to a line passing through the die center
coordinate and the pillar center coordinate, and wherein the line
is at an oblique angle with respect to the major reference axis and
the minor reference axis.
2. The semiconductor device of claim 1, wherein approximately
normal is 90 degrees plus or minus 2 to 8 degrees, 3 to 7 degrees,
4 to 6 degrees, or 5 degrees.
3. The semiconductor device of claim 1, wherein the non-circular
cross-sectional shape is rectangular.
4. The semiconductor device of claim 1, wherein the non-circular
cross-sectional shape includes oval, elliptical, square,
rectilinear, or irregular.
5. The semiconductor device of claim 1, wherein the at least some
of the angled pillars are electrically coupled to an active bond
pad of the semiconductor die.
6. The semiconductor device of claim 1, wherein at least some of
the angled pillars are connected to an inactive bond area of the
semiconductor die.
7. The semiconductor device of claim 1, further comprising aligned
pillars that have a major pillar axis that is at least
substantially parallel to one of the major reference axis or the
minor reference axis, and wherein the aligned pillars are
electrically coupled to active bond pads of the semiconductor
die.
8. The semiconductor device of claim 1, further comprising aligned
pillars that have a major pillar axis that is at least
substantially parallel to one of the major reference axis or the
minor reference axis, and wherein the aligned pillars are
electrically coupled to active bond pads of the semiconductor die
and the angled pillars are coupled to inactive bond areas of the
semiconductor die.
9. The semiconductor device of claim 1, further comprising aligned
pillars that have a major pillar axis that is at least
substantially parallel to the major reference axis or the minor
reference axis, and wherein the aligned pillars are electrically
coupled to active bond pads of the semiconductor die, a first set
of the angled pillars are electrically coupled to active bond pads
of the semiconductor die, and a second set of the angled pillars
are coupled to inactive bond areas of the semiconductor die.
10. A method of forming a semiconductor device, the method
comprising: forming angled pillars on a semiconductor die, the
semiconductor die including integrated circuitry, active bond pads
electrically coupled to the integrated circuitry, and inactive bond
areas electrically isolated from the integrated circuitry, wherein
the semiconductor die also has an active surface with a major
reference axis, a minor reference axis normal to the major
reference axis, and a die center coordinate, and the angled pillars
have a non-circular cross-sectional shape with a major pillar axis,
a minor pillar axis, and a pillar center coordinate, and wherein
the major pillar axis is at least approximately normal to a line
passing through the die center coordinate and the pillar center
coordinate at an oblique angle with respect to the major reference
axis and the minor reference axis; and attaching the angled pillars
to a package substrate.
11. The method of claim 10, wherein approximately normal is 90
degrees plus or minus 2 to 8 degrees, 3 to 7 degrees, 4 to 6
degrees, or 5 degrees.
12. The method of claim 10, wherein the non-circular
cross-sectional shape is rectangular.
13. The method of claim 10, wherein the non-circular
cross-sectional shape includes oval, elliptical, square,
rectilinear, or irregular.
14. The method of claim 10, wherein at least some of the pillars
are electrically coupled to an active bond pad of the semiconductor
die.
15. The method of claim 10, wherein at least some of the pillars
are connected to an inactive bond area of the semiconductor
die.
16. The method of claim 10, further comprising aligned pillars that
have a major pillar axis that is at least substantially parallel to
one of the major reference axis or the minor reference axis, and
wherein the aligned pillars are electrically coupled to active bond
pads of the semiconductor die.
17. The method of claim 16, further comprising aligned pillars that
have a major pillar axis that is at least substantially parallel to
one of the major reference axis or the minor reference axis, and
wherein the aligned pillars are electrically coupled to active bond
pads of the semiconductor die and the angle pillars are coupled to
inactive bond areas of the semiconductor die.
18. The method of claim 16, further comprising aligned pillars that
have a major pillar axis that is at least substantially parallel to
the major reference axis or the minor reference axis, and wherein
the aligned pillars are electrically coupled to active bond pads of
the semiconductor die, a first set of the angled pillars are
electrically coupled to active bond pads of the semiconductor die,
and a second set of the angled pillars are coupled to inactive bond
areas of the semiconductor die.
19. A semiconductor device, comprising: a package substrate
including circuit elements; a semiconductor die including
integrated circuitry, active bond pads electrically coupled to the
integrated circuitry, and inactive bond areas electrically isolated
from the integrated circuitry, wherein the semiconductor die also
has a lengthwise dimension and a widthwise dimension; and angled
pillars between the substrate and the semiconductor die, wherein
the angled pillars have a non-circular cross-sectional shape with a
first dimension, a second dimension normal to the first dimension
and less than the first dimension, and a pillar center coordinate,
wherein the second dimension extends along an axis at a non-zero
angle with respect to both the lengthwise dimension and the
widthwise dimension.
20. The semiconductor device of claim 19, further comprising
aligned pillars that have a major pillar axis that is at least
substantially parallel to the major reference axis or the minor
reference axis, and wherein the aligned pillars are electrically
coupled to active bond pads of the semiconductor die, a first set
of the angled pillars are electrically coupled to active bond pads
of the semiconductor die, and a second set of the angled pillars
are coupled to inactive bond areas of the semiconductor die.
Description
TECHNICAL FIELD
[0001] The present technology generally relates to semiconductor
devices having pillars, and in some embodiments more particularly
to angled pillar orientations for die-to-die, die-to-substrate,
and/or package-to-package interconnects.
BACKGROUND
[0002] Microelectronic devices, such as memory devices,
microprocessors, and light emitting diodes, typically include one
or more semiconductor die mounted to a substrate. Semiconductor die
can include functional features, such as memory cells, processor
circuits, and interconnecting circuitry. Semiconductor die also
typically include bond pads electrically coupled to functional
features, active pillars electrically coupled to active bond pads,
and dummy pillars for structural support. The active pillars can be
pins or other types of structures for connecting the semiconductor
die to busses, circuits, or other assemblies.
[0003] The semiconductor die can be electrically coupled to another
substrate via flip-chip die attach processes (e.g., a
thermo-compression bonding (TCB) or mass reflow operation) in which
conductive pillars formed on the bond pads or other areas of the
die are coupled to the substrate via a bond material disposed
between the conductive pillars and the substrate. For example,
active pillars are attached to electrically conductive terminals on
the substrate. To attach the bond material to the substrate, the
semiconductor package is heated to reflow the bond material and
form a robust connection. However, heating the semiconductor
package and/or subsequently cooling the semiconductor package,
along with thermal cycling during product reliability tests and
power cycling during end-customer usage, can induce significant
thermo-mechanical stress between the semiconductor die and the
substrate due to a mismatch in the coefficients of thermal
expansion (CTE) of these components. Often, the stress can induce
interfacial delamination and crack growth in the passivation
material of the semiconductor die near one or more of the bond
pads, which can render the semiconductor package inoperable.
BRIEF DESCRIPTION OF THE DRAWINGS
[0004] Many aspects of the present technology can be better
understood with reference to the following drawings. The components
in the drawings are not necessarily to scale. Instead, emphasis is
placed on illustrating clearly the principles of the present
technology.
[0005] FIG. 1A is a plan view of a semiconductor package having
angled pillars configured in accordance with embodiments of the
present technology; FIG. 1B is a diagram of a coordinate system
with reference axes and an example of the orientation of an angled
pillar of the semiconductor die of FIG. 1A; and FIG. 1C is a
cross-sectional view of the semiconductor package shown in FIG. 1A
along line 1C-1C.
[0006] FIGS. 2A and 2B are a cross-sectional view and a perspective
view, respectively, of a portion of the semiconductor package shown
in FIG. 1C and an angled pillar configured in accordance with
embodiments of the present technology.
[0007] FIG. 3A is a diagram showing directionality of stress with
respect to an angled pillar configured in accordance with
embodiments of the present technology, and FIG. 3B is a diagram
showing directionality of stress with respect to conventional
circular pillars.
[0008] FIGS. 4A-4C are cross-sectional views of angled pillars
having various shapes in accordance with embodiments of the present
technology.
[0009] FIGS. 5A-5D illustrate angled pillars and bond pads of the
semiconductor package having various shapes in accordance with
embodiments of the present technology.
[0010] FIG. 6 is a schematic view of a system that includes a
semiconductor assembly configured in accordance with embodiments of
the present technology.
DETAILED DESCRIPTION
[0011] Specific details of several embodiments of semiconductor
devices having mechanical rectangular pillars that are angled based
on the local directionality of stresses to increase a section
modulus and thereby reduce bending stress and in-plane shear stress
at the interface between the angled pillars and the semiconductor
die are disclosed. The term "semiconductor device" generally refers
to a solid-state device that includes one or more semiconductor
materials. Examples of semiconductor devices include logic devices,
memory devices, microprocessors, and diodes among others.
Furthermore, the term "semiconductor device" can refer to a
finished device or to an assembly or other structure at various
stages of processing before becoming a finished device. Depending
upon the context in which it is used, the term "substrate" can
refer to a wafer-level substrate or to a singulated, die-level
substrate. A person having ordinary skill in the relevant art will
recognize that the methods described herein can be performed at the
wafer level or at the die level. Furthermore, unless the context
indicates otherwise, structures disclosed herein can be formed
using conventional semiconductor-manufacturing techniques.
Materials can be deposited, for example, using chemical vapor
deposition, physical vapor deposition, atomic layer deposition,
spin coating, and/or other suitable techniques. Similarly,
materials can be removed, for example, using plasma etching, wet
etching, chemical-mechanical planarization, or other suitable
techniques. A person skilled in the relevant art will also
understand that the technology may have additional embodiments, and
that the technology may be practiced without several of the details
of the embodiments described below with reference to FIGS. 1A-3A
and 4-6.
[0012] In several of the embodiments described below, a
semiconductor device can include a semiconductor substrate
including circuit elements, active bond pads and/or inactive bond
areas, and angled pillars that are oriented at an oblique angle
with respect to orthogonal reference axes. The semiconductor device
can also include aligned pillars that are parallel or perpendicular
to the orthogonal reference axes. The pillars of the semiconductor
device can be attached to terminals of a package substrate by a
bond material. Some of the angled pillars can be connected to
electrically inactive bond areas, such as areas on a passivation
material on the semiconductor substrate. Such pillars are known as
dummy pillars. Other pillars can be electrically connected to
electrically active bond pads that are electrically coupled to
power, ground and/or other circuit elements of the semiconductor
substrate. Such pillars are active pillars, and they can be angled
pillars and/or aligned pillars. The angled pillars can have
rectangular cross-sections and be orientated at an oblique angle
relative to the orthogonal reference axes (e.g., an angle other
than being parallel to or perpendicular to orthogonal axes aligned
with the edges of the semiconductor substrate). In some
embodiments, some or all of the angled pillars can be orientated at
different oblique angles, or some or all of the angled pillars can
be orientated at the same oblique angle. The angled pillars can be
orientated at an angle based on the local direction of chip-package
interface (CPI) stresses caused by, for example, mismatches between
a coefficient of thermal expansion (CTE) of the semiconductor die
and a CTE of the package substrate. Accordingly, the angled pillars
can reduce the likelihood of mechanical failure around the bond
pads and/or bond areas after, for example, flip-chip die attach
processing (e.g., thermo-compression bonding (TCB) or mass
reflowing) has been performed and/or during operation (e.g., power
cycling or extreme temperature environments).
[0013] At the beginning of a TCB operation, heating causes a bond
material in interconnects to reflow and electrically connect
conductive pillars to a package substrate. Semiconductor packages
are often heated to 200.degree. C. or greater (e.g., greater than
about 217.degree. C.) to reflow the bond material. During the TCB
operation, a compressive force is also applied to attach the
interconnects to the package substrate. One drawback of TCB
operations is that cooling of the semiconductor package can cause
the semiconductor die and the package substrate to warp or bend
relative to one another, which can exert stresses on the pillars.
For example, the semiconductor die can have a CTE that is different
than a CTE of the package substrate, and the CTE differential can
cause them to warp relative to one another during cooling and/or
heating of the semiconductor package. Accordingly, the package
substrate 102 can have a warped, non-planar shape after cooling. In
other embodiments, the semiconductor die or both the semiconductor
die and the package substrate can have a non-planar, warped shape
after cooling. The CTE differential between the semiconductor die
and the package substrate can laterally stress and bend the
interconnects. This can cause cracks to form and propagate within
the semiconductor substrate, which can cause mechanical and/or
electrical failures.
[0014] Many embodiments of the present technology are described
below in the context of mechanical pillar structures that have a
rectangular cross-section and are angled relative to the direction
of stress to provide an adequate section modulus that can withstand
the CPI stresses. A person having ordinary skill in the relevant
art will also understand that the present technology may have
embodiments for forming mechanical pillar structures with
rectangular cross-sections on either the first side or the second
side of a substrate assembly, and the mechanical pillar structures
may be used in the context of other electrical connectors
associated with a semiconductor assembly. The present technology
may accordingly be practiced without several of the details of the
embodiments described herein with reference to FIGS. 1A-3A and 4-6.
For example, some details of semiconductor devices and/or packages
well known in the art have been omitted so as not to obscure the
present technology. In general, it should be understood that
various other devices and systems in addition to those specific
embodiments disclosed herein may be within the scope of the present
technology.
[0015] For ease of reference, identical reference numbers are used
to identify similar or analogous components or features throughout
this disclosure, but the use of the same reference number does not
imply that the features should be construed to be identical.
Indeed, in many examples described herein, identically numbered
features have a plurality of embodiments that are distinct in
structure and/or function from each other. Furthermore, the same
shading may be used to indicate materials in cross section that can
be compositionally similar, but the use of the same shading does
not imply that the materials should be construed to be identical
unless specifically noted herein.
[0016] As used herein, the terms "vertical," "lateral," "upper,"
"lower," "above," and "below" can refer to relative directions or
positions of features in the semiconductor devices in view of the
orientation shown in the Figures. For example, "upper" or
"uppermost" can refer to a feature positioned closer to the top of
a page than another feature. These terms, however, should be
construed broadly to include semiconductor devices having other
orientations, such as inverted or inclined orientations where
top/bottom, over/under, above/below, up/down, and left/right can be
interchanged depending on the orientation.
[0017] FIG. 1A is a plan view of a semiconductor package 100
("package 100") having angled pillars 120 configured in accordance
with embodiments of the present technology. The package 100 can
include a package substrate 102, a semiconductor die 110, and the
angled pillars 120 extending between the package substrate 102 and
the semiconductor die 110. The angled pillars 120 can be orientated
at an oblique angle relative to reference axes, such as
non-perpendicular and non-parallel angles with respect to
orthogonal references axes defined by the edges of the
semiconductor die 110. In some embodiments, the angled pillars 120
can be referred to as outriggers. The package 100 can further
include aligned pillars 130 that are at least substantially
perpendicular to or parallel to the reference axes. Depending on
the application, the angled pillars 120 and/or the aligned pillars
130 can be "active pillars" that are electrically coupled to
electrical circuitry in the package substrate 102 and/or the
semiconductor die 110, or the angled pillars 120 and/or the aligned
pillars 130 can be "dummy pillars" that are not electrically
coupled to either one or both of the package substrate 102 and/or
the semiconductor die 110.
[0018] FIG. 1B is a diagram of a coordinate system with reference
axes and an example of the orientation of an angled pillar 120 of
the semiconductor die 110 of FIG. 1A in accordance with embodiments
of the present technology. As shown in FIGS. 1A and 1B, the angled
pillars 120 can have a non-circular cross-sectional shape (e.g.,
rectangular, oval, elliptical, square, rectilinear, or irregular)
with a major axis 140, a minor axis 142, and a center coordinate
144. The edges of the angled pillar 120 can define a plane figure
of the angled pillar 120. The center coordinate 144 can be defined
by a centroid of the plane figure of the angled pillar 120. In the
illustrated embodiment, the major axis 140 and minor axis 142
define a plane of the angled pillar 120 that is parallel to an
active surface of the semiconductor die 110. In some other
embodiments, the major axis 140 and minor axis 142 can define a
plane of the angled pillar 120 that is orthogonal to the active
surface of the semiconductor die 110. The active surface of the
semiconductor die 110 can have a major reference axis 150, a minor
reference axis 152, and a center coordinate 154 at the center of
the active surface. The major reference axis 150 and the minor
reference axis 152 can define orthogonal reference axes. When the
semiconductor die 110 has a rectilinear footprint, the major
reference axis 150 can be at least substantially parallel to one
edge of the semiconductor die 110 and the minor reference axis 152
can be at least substantially parallel to an orthogonal edge of the
semiconductor die 110. The edges of the semiconductor die 110 can
define a plane figure of the semiconductor die 110. The center
coordinate 154 can be defined by a centroid of the plane figure of
the semiconductor die 110. The angled pillar 120 is orientated such
that a line 148 passing through the center coordinate 144 and the
center coordinate 154 is (a) at least approximately normal to the
major reference axis 140 of the angled pillar 120 and (b) at an
oblique angle with respect to the major reference axis 150 and the
minor axis 152. In some embodiments, approximately normal includes
90 degrees plus or minus 2 to 8 degrees, 3 to 7 degrees, 4 to 6
degrees, and 5 degrees. In some embodiments, the angled pillar 120
can be configured on the semiconductor die 110 with an angle of
rotation 156 denoted as .theta..sub.i. The angle of rotation 156
can be defined as .theta..sub.i=tan.sup.-1 (h.sub.i/w.sub.i), where
(h.sub.i,w.sub.i) is the coordinate location of the angled pillar
120 with respect to the center coordinate 154 of the active surface
of the semiconductor die 110.
[0019] In the embodiment shown in FIG. 1A, there are 36 angled
pillars 120 and 20 active pillars 130, but the package 100 can
include fewer or more angled pillars 120 and active pillars 130.
For example, the package 100 can include tens, hundreds, thousands,
or more angled pillars 120 and tens, hundreds, thousands, or more
active pillars 130 arrayed between the semiconductor die 100 and
the package substrate 102. In some embodiments, the angled pillars
120 on the semiconductor die 110 can have the same dimensions
(e.g., length, width, and height). In other embodiments, some of
the angled pillars 120 on the semiconductor die 110 can have the
same dimensions while other of the angled pillars 120 can have
different dimensions. In other embodiments, each angled pillar 120
on the semiconductor die 110 can have different dimensions.
[0020] FIG. 1C is a cross-sectional view of the package 100 shown
in FIG. 1A along line 1C-1C. In the illustrated embodiment, the
semiconductor die 110 includes the semiconductor substrate 112
(e.g., a silicon substrate, a gallium arsenide substrate, an
organic laminate substrate, etc.) having a first side/surface 113a
and a second side/surface 113b opposite the first side 113a. The
first side 113a of the semiconductor substrate 112 can be an active
side including one or more circuit elements 114 (e.g., wires,
traces, interconnects, transistors, etc., shown schematically) and
active bond pads 118 formed in and/or on the first side 113a. The
circuit elements 114 can include, for example, memory circuits
(e.g., dynamic random memory (DRAM) or other type of memory
circuits), controller circuits (e.g., DRAM controller circuits),
logic circuits, and/or other circuits. In other embodiments, the
semiconductor substrate 112 can be a "blank" substrate that does
not include integrated circuit components and that is formed from,
for example, crystalline, semi-crystalline, and/or ceramic
substrate materials, such as silicon, polysilicon, aluminum oxide
(Al.sub.2O.sub.3), sapphire, and/or other suitable materials.
[0021] The package substrate 102 can include an interposer, a
printed circuit board, a dielectric spacer, another semiconductor
die (e.g., a logic die), or another suitable substrate with
circuitry, such as a redistribution structure. The package
substrate 102 can further include active bond pads 105 and
electrical connectors 103 (e.g., solder balls, conductive bumps,
conductive pillars, conductive epoxies, and/or other suitable
electrically conductive elements) electrically coupled to the
active bond pads 105. The active bond pads 105 and electrical
connectors 103 are configured to electrically couple the package
100 to external devices or circuitry (not shown). The package
substrate 102 can also include inactive pads 108 that are not
electrically coupled to circuitry.
[0022] In the illustrated embodiment, the first side 113a of the
semiconductor substrate 112 faces the package substrate 102 (e.g.,
in a direct chip attach (DCA) configuration). In other embodiments,
the semiconductor die 110 can be arranged differently. For example,
the second side 113b of the semiconductor substrate 112 can face
the package substrate 102 and the semiconductor die 110 can include
one or more TSVs extending through the semiconductor substrate 112
to electrically couple the circuit elements 114 to the active
pillars 120. Moreover, while only a single semiconductor die 110 is
shown in FIG. 1C, in other embodiments the package 100 can include
one or more additional semiconductor dies stacked on and/or over
the semiconductor die 110.
[0023] In the illustrated embodiment, the semiconductor die 110 can
be mechanically connected to the package substrate 102 by
connecting inactive angled pillars 120 to the inactive bond pads
108 via a bond material 106. The angled pillars 120 can be
electrically isolated from the semiconductor die 110 and formed
from a material such as copper. The active pillars 130 can be
electrically connected to active bond pads 118 of the semiconductor
die 110 via the bond material 106. The active pillars 130 can be
formed of any suitably conductive material such as, for example,
copper, nickel, gold, silicon, tungsten, conductive-epoxy,
combinations thereof, etc., and can be formed from using an
electroplating, electroless-plating, or other suitable process. In
some embodiments, barrier materials (not shown), such as nickel,
nickel-based intermetallic, and/or gold, can be formed over end
portions of the active pillars 130. The barrier materials can
facilitate bonding and/or prevent or at least inhibit the
electromigration of copper or other metals used to form the active
pillars 130.
[0024] In some embodiments, the package 100 can further include an
underfill or molded material formed over the package substrate 102
and/or at least partially around the semiconductor die 110. In some
embodiments, the package 100 can include other components such as
external heatsinks, a casing (e.g., thermally conductive casing),
electromagnetic interference (EMI) shielding components, etc.
[0025] FIGS. 2A and 2B are a cross-sectional view and a perspective
view, respectively, of a portion of the semiconductor package 100
shown in FIG. 1C and the angled pillar 120 configured in accordance
with embodiments of the present technology. The angled pillar 120
can have a rectangular cross-sectional shape, as opposed to having
an oblong, circular, or square cross-sectional shape. FIG. 2B
illustrates the angled pillar 120 connected to a passivation
material of the semiconductor die 110 and to the inactive pad 108
of the package substrate 102 by the bond material 106. In some
embodiments, the angled pillar 120 can be connected to the
semiconductor die 110 through a bond material and a bond pad. The
active pillar 130 can include features generally similar to the
features of the angled pillars 120. As shown in FIGS. 2A and 2B,
the angled pillar 120 is orientated at an oblique angle relative to
the major and minor reference axes 150 and 152 of the semiconductor
die 110.
[0026] FIG. 3A is a diagram showing directionality of stress with
respect to the angled pillar 120 configured in accordance with
embodiments of the present technology, and FIG. 3B is a diagram
showing directionality of stress with respect to a conventional
circular pillar 320. In FIG. 3A, the angled pillar 120 can be
angularly orientated so that the major axis of the angled pillar is
at least substantially perpendicular to the direction of local
stress to increase a section modulus. Since CTE mismatch and
warpage are two primary components responsible for
thermo-mechanical stress, crack initiation and crack propagation at
the semiconductor die 110 mostly occur in mixed mode fracture
(e.g., Mode I: peeling and Mode II: in-plane shearing). Due to
thermal loading scenarios during various assembly and test events,
the direction of maximum local stress is not horizontal or vertical
in the angled pillars 120, but rather it changes based on the
location of the angled pillars 120 with respect to the center of
the semiconductor die 110. When the angled pillars 120 are
angularly orientated in the direction of the stress, the
rectangular cross-section can provide a larger section modulus
compared to a circular pillar. The increased section modulus can
help reduce bending stress and in-plane shear stress at the
semiconductor die 100, which is expected to reduce cracking,
delamination and other undesirable events. The cross-sectional
areas of the angled pillars 120 can be constant or increased
depending on pitch to reduce normal stress.
[0027] Comparing FIGS. 3A and 3B, the stress contour in the
passivation material with the angled pillar 120 (FIG. 3A) at, for
example, the outermost corner angled pillar is significantly less
than that of the circular pillar 320 (FIG. 3B). More specifically,
the size and magnitude of the stress indicated at the upper right
region of the angled pillar 120 is less than that of the circular
pillar 320. The angled pillars 102 are thus expected to provide an
improvement in peeling and in-plane shear stress compared to
circular pillars.
[0028] Table 1 shows a significant improvement in peeling stress
and in-plane shear stress reduction when a rectangular angled
pillar is in the outermost corner of the semiconductor package
compared to a circular pillar. For example, the maximum peeling
stress and maximum in-plane shear stress of a circular shaped
pillar is 625 MPa and 191 MPa, respectively. The maximum peeling
stress and maximum in-plane shear stress of a square shaped pillar
is 15% higher (721 MPa) and 27% lower (139 MPa) than that of the
circular shaped pillar, respectively. The maximum peeling stress
and maximum in-plane shear stress of the rectangular angled pillar
120 is 24% lower (478 MPa) and 42% lower (110 MPa) than that of the
circular shaped pillar, respectively.
TABLE-US-00001 Maximum Maximum In- Peeling % Difference plane Shear
% Difference Stress from Stress from Pillar Shape (MPa) Baseline
(MPa) Baseline Circular 625 Baseline 191 Baseline Square 721 15%
139 -27% Proposed 478 -24% 110 -42% Rotated Rectangular
[0029] FIGS. 4A-C are cross-sectional views of angled pillars
having various shapes in accordance with embodiments of the present
technology. FIG. 4A illustrates the angled pillar 120 including a
rectangular cross-sectional shape. FIG. 4B illustrates the angled
pillar 402 including an oval or elliptical cross-sectional shape.
FIG. 4C illustrates the angled pillar 404 including an oblong
cross-sectional shape. In these illustrated embodiments, the length
of the angled pillars 120, 402, and 404 along the major axis 140 is
longer than the width. The shape of the angled pillar can include,
but is not limited to, irregular, rectilinear, and trapezoidal.
[0030] FIGS. 5A-D illustrate angled pillars and bond pads of the
semiconductor package 100 having various shapes and configured in
accordance with embodiments of the present technology. The various
shapes and sizes of the bond pads can be used to cover the whole
cross-sectional area of the angled pillars. FIG. 5A illustrates the
rectangular bond pad 108 covering the whole cross-section of the
rectangular angled pillar 120. FIG. 5B illustrates a circular bond
pad 508 covering the whole cross-section of the rectangular angled
pillar 120. FIG. 5C illustrates the circular bond pad 508 covering
the whole cross-section of the oval or elliptical angled pillar
402. FIG. 5D illustrates the circular bond pad 508 covering the
whole cross-section of the oblong angled pillar 404. The active
pillars 130 can share features similar to the features of the
angled pillars illustrated in FIGS. 5A-D. FIGS. 5A-D show a pillar
on pad formation; however, these embodiments can also be used with
a pillar on trace application.
[0031] FIG. 6 is a schematic view of a system that includes a
semiconductor assembly configured in accordance with embodiments of
the present technology. Any one of the semiconductor devices and/or
packages having the features described above with reference to
FIGS. 1A-C, 2A-B, 3A, 4A-C, 5A-D can be incorporated into any of a
myriad of larger and/or more complex systems, a representative
example of which is system 600 shown schematically in FIG. 6. The
system 600 can include a processor 602, a memory 604 (e.g., SRAM,
DRAM, flash, and/or other memory devices), input/output devices
606, and/or other subsystems or components 608. The semiconductor
dies and/or packages described above with reference to FIGS. 1A-C,
2A-B, 3A, 4A-C, 5A-D can be included in any of the elements shown
in FIG. 6. The resulting system 600 can be configured to perform
any of a wide variety of suitable computing, processing, storage,
sensing, imaging, and/or other functions. Accordingly,
representative examples of the system 600 include, without
limitation, computers and/or other data processors, such as desktop
computers, laptop computers, Internet appliances, hand-held devices
(e.g., palm-top computers, wearable computers, cellular or mobile
phones, personal digital assistants, music players, etc.), tablets,
multi-processor systems, processor-based or programmable consumer
electronics, network computers, and minicomputers. Additional
representative examples of the system 600 include lights, cameras,
vehicles, etc. With regard to these and other example, the system
600 can be housed in a single unit or distributed over multiple
interconnected units, e.g., through a communication network. The
components of the system 600 can accordingly include local and/or
remote memory storage devices and any of a wide variety of suitable
computer-readable media.
[0032] From the foregoing, it will be appreciated that specific
embodiments of the technology have been described herein for
purposes of illustration, but that various modifications may be
made without deviating from the disclosure. Accordingly, the
invention is not limited except as by the appended claims.
Furthermore, certain aspects of the new technology described in the
context of particular embodiments may also be combined or
eliminated in other embodiments. Moreover, although advantages
associated with certain embodiments of the new technology have been
described in the context of those embodiments, other embodiments
may also exhibit such advantages and not all embodiments need
necessarily exhibit such advantages to fall within the scope of the
technology. Accordingly, the disclosure and associated technology
can encompass other embodiments not expressly shown or described
herein.
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