U.S. patent application number 16/555755 was filed with the patent office on 2020-03-05 for substrate processing apparatus, and method of manufacturing semiconductor device.
This patent application is currently assigned to KOKUSAI ELECTRIC CORPORATION. The applicant listed for this patent is KOKUSAI ELECTRIC CORPORATION. Invention is credited to Kenji SHIRAKO, Tomoshi TANIYAMA.
Application Number | 20200071821 16/555755 |
Document ID | / |
Family ID | 69642120 |
Filed Date | 2020-03-05 |
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United States Patent
Application |
20200071821 |
Kind Code |
A1 |
SHIRAKO; Kenji ; et
al. |
March 5, 2020 |
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING
SEMICONDUCTOR DEVICE
Abstract
There is provided a technique that includes: a first processing
module including a first processing chamber for processing
vertically arranged substrates; a second processing module
including a second processing chamber for processing the
substrates, the second processing chamber disposed adjacent to the
first processing chamber; a first exhaust box storing a first
exhaust system exhausting the first processing chamber; a second
exhaust box storing a second exhaust system exhausting the second
processing chamber; a common supply box controlling at least one of
a flow path and a flow rate of process gases supplied into the
first and second processing chambers; a first valve group
connecting gas pipes from the common supply box to the first
processing chamber such that a communication state is controllable;
and a second valve group connecting the gas pipes from the common
supply box to the second processing chamber such that a
communication state is controllable.
Inventors: |
SHIRAKO; Kenji; (Toyama-shi,
JP) ; TANIYAMA; Tomoshi; (Toyama-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KOKUSAI ELECTRIC CORPORATION |
Tokyo |
|
JP |
|
|
Assignee: |
KOKUSAI ELECTRIC
CORPORATION
Tokyo
JP
|
Family ID: |
69642120 |
Appl. No.: |
16/555755 |
Filed: |
August 29, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
C23C 16/4412 20130101;
H01L 21/67303 20130101; C23C 16/52 20130101; H01L 21/6719 20130101;
H01L 21/67757 20130101; H01L 21/67017 20130101; H01L 21/67161
20130101 |
International
Class: |
C23C 16/44 20060101
C23C016/44; H01L 21/67 20060101 H01L021/67; H01L 21/673 20060101
H01L021/673; C23C 16/52 20060101 C23C016/52 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 4, 2018 |
JP |
2018-165213 |
Claims
1. A substrate processing apparatus comprising: a first processing
module including a first processing chamber for processing a
plurality of vertically arranged substrates; a second processing
module including a second processing chamber for processing the
plurality of vertically arranged substrates, the second processing
chamber being disposed adjacent to the first processing chamber; a
first exhaust box containing a first exhaust system configured to
exhaust the first processing chamber; a second exhaust box
containing a second exhaust system configured to exhaust the second
processing chamber; a common supply box configured to control at
least one of a flow path and a flow rate of a plurality of process
gases supplied into the first processing chamber and the second
processing chamber; a first valve group that connects gas pipes
from the common supply box to the first processing chamber such
that a communication state between the gas pipes and the first
processing chamber is controllable; and a second valve group that
connects the gas pipes from the common supply box to the second
processing chamber such that a communication state between the gas
pipes and the second processing chamber is controllable, wherein,
in the first processing module and the second processing module,
processes of repeating substantially the same gas supply sequence
are performed in parallel with each other while having a shift time
therebetween so as to form a same film, and wherein the shift time
is determined by a method of delaying the gas supply sequence of
one of the first processing module and the second processing module
so that a supply timing of a predetermined gas among the plurality
of process gases does not overlap with the gas supply sequence of
the other of the first processing module and the second processing
module which has started the processing before the one of the first
processing module and the second processing module starts the
processing.
2. The substrate processing apparatus of claim 1, wherein the first
processing module and the second processing module, the first
exhaust box and the second exhaust box, and the first valve group
and the second valve group are respectively configured and arranged
in plane symmetry with each other, based on surfaces to which the
first processing module and the second processing module are
adjacent, and wherein lengths of a plurality of gas distribution
pipes between the first valve group and the first processing module
are equal to lengths of the corresponding gas distribution pipes
between the second valve group and the second processing
module.
3. The substrate processing apparatus of claim 1, wherein the
plurality of process gases includes three types of precursor gases,
wherein the gas supply sequence is to periodically supply the three
types of precursor gases at time intervals to one processing
chamber, and wherein, while the gas supply sequence is being
performed in parallel in the first processing module and the second
processing module, there is a timing at which each of the three
types of precursor gases is not supplied to any of the first
processing chamber and the second processing chamber.
4. The substrate processing apparatus of claim 2, further
comprising: a first process controller configured to control the
first processing module, the first exhaust box, and the first valve
group; and a second process controller configured to control the
second processing module, the second exhaust box, and the second
valve group, wherein the first process controller and the second
process controller transmit information substantially indicating
circulation states of the first valve group and the second valve
group controlled respectively by the first process controller and
the second process controller to other process controllers, and
wherein the first processing module and the second processing
module are operated asynchronously except while prohibiting
simultaneous supply of the same gas valve by the first valve group
and the second valve group.
5. The substrate processing apparatus of claim 1, wherein the
plurality of process gases includes three types of precursor gases,
wherein the gas supply sequence is to periodically supply the three
types of precursor gases at time intervals to one processing
chamber, and wherein, in the gas supply sequence, an exhaust by the
first exhaust system or the second exhaust system is performed at
least for the time intervals.
6. The substrate processing apparatus of claim 5, wherein the
exhaust includes an exhaust process in which the exhaust by the
first exhaust system or the second exhaust system is performed, and
a purge process in which the exhaust by the first exhaust system or
the second exhaust system is performed while flowing a purge gas
after the exhaust process.
7. The substrate processing apparatus of claim 5, wherein the shift
time is the same as the longest supply time of the precursor gas
among the three types of precursor gases in the gas supply
sequence.
8. The substrate processing apparatus of claim 5, wherein the shift
time is further limited based on a rule that exhaust timings of a
first gas and a second gas included in the three types of precursor
gases of the first processing module do not overlap with exhaust
timings of the first gas and the second gas of the second
processing module.
9. The substrate processing apparatus of claim 5, wherein the shift
time is further limited based on a rule that an end of a purge
process of a first gas included in the three types of precursor
gases and an exhaust process of a second gas included in the three
types of precursor gases of the first processing module do not
overlap with an end of a purge process of the first gas and an
exhaust process of the second gas of the second processing
module.
10. A method of manufacturing a semiconductor device, comprising:
providing the substrate processing apparatus of claim 1; loading
the plurality of substrates into the first processing chamber;
loading the plurality of substrates into the second processing
chamber; and performing the processes of forming the same film in
the first processing module and the second processing module in
parallel with each other while having the shift time therebetween.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is based upon and claims the benefit of
priority from Japanese Patent Application No. 2018-165213, filed on
Sep. 4, 2018, the entire contents of which are incorporated herein
by reference.
TECHNICAL FIELD
[0002] The present disclosure relates to a substrate processing
apparatus, and a method of manufacturing a semiconductor
device.
BACKGROUND
[0003] A substrate processing apparatus includes a processing
module having a process furnace that processes a plurality of
vertically arranged substrates. As such a type of substrate
processing apparatus, a substrate processing apparatus including a
plurality of processing modules has been proposed in the related
art.
[0004] In a substrate processing apparatus including a first
processing module and a second processing module, when the same
film is formed on a substrate by each of the processing modules,
qualities of the films formed by the plurality of processing
modules may differ from each other.
SUMMARY
[0005] Some embodiments of the present disclosure provide a
technique capable of obtaining uniform qualities for films formed
by first and second processing modules when forming the same film
in the first and second processing modules.
[0006] Other objects and novel features will be apparent from the
description of the present disclosure and the accompanying
drawings.
[0007] A summary of a representative embodiment of the present
disclosure is simply described as shown below.
[0008] According to one embodiment of the present disclosure, there
is provided a technique including: a first processing module
including a first processing chamber for processing a plurality of
vertically arranged substrates; a second processing module
including a second processing chamber for processing the plurality
of vertically arranged substrates, the second processing chamber
being disposed adjacent to the first processing chamber; a first
exhaust box storing a first exhaust system configured to exhaust
the first processing chamber; a second exhaust box storing a second
exhaust system configured to exhaust the second processing chamber;
a common supply box configured to control at least one of a flow
path and a flow rate of a plurality of process gases supplied into
the first and second processing chambers; a first valve group that
connects gas pipes from the common supply box to the first
processing chamber such that a communication state between the gas
pipes and the first processing chamber is controllable; and a
second valve group that connects the gas pipes from the common
supply box to the second processing chamber such that a
communication state between the gas pipes and the second processing
chamber is controllable, wherein, in the first processing module
and the second processing module, processes of repeating
substantially the same gas supply sequence are performed in
parallel with each other while having a shift time therebetween so
as to form the same film, and wherein the shift time is determined
by delaying the gas supply sequence of one of the first processing
module and the second processing module so that a supply timing of
a predetermined gas among the plurality of process gases does not
overlap with the gas supply sequence of the other of the first
processing module and the second processing module which has
started the processing before the one of the first processing
module and the second processing module starts the processing.
BRIEF DESCRIPTION OF DRAWINGS
[0009] FIG. 1 is a top view schematically showing an example of a
substrate processing apparatus suitably used in an embodiment of
the present disclosure.
[0010] FIG. 2 is a longitudinal sectional view schematically
showing an example of a substrate processing apparatus suitably
used in an embodiment of the present disclosure.
[0011] FIG. 3 is a longitudinal sectional view schematically
showing an example of a substrate processing apparatus suitably
used in an embodiment of the present disclosure.
[0012] FIG. 4 is a longitudinal sectional view schematically
showing an example of a process furnace suitably used in an
embodiment of the present disclosure.
[0013] FIG. 5 is a cross-sectional view schematically showing an
example of a processing module suitably used in an embodiment of
the present disclosure.
[0014] FIG. 6A is a view for explaining an example of control of a
recipe by a controller.
[0015] FIG. 6B is a view for explaining an example of control of a
recipe by a controller.
[0016] FIG. 6C is a view for explaining an example of control of a
recipe by a controller.
[0017] FIG. 7 is a view for explaining another example of control
of the recipe by the controller.
[0018] FIG. 8 is a view showing a processing flow for determining a
shift amount.
[0019] FIG. 9 is a top view schematically illustrating an example
of a substrate processing apparatus according to a first
modification.
[0020] FIG. 10 is a top view schematically showing an example of a
substrate processing apparatus according to a second
modification.
[0021] FIG. 11 is a view showing a gas supply system according to a
third modification.
DETAILED DESCRIPTION
[0022] Hereinafter, non-limiting exemplary embodiments of the
present disclosure will be described with reference to the
drawings. Throughout the drawings, the same or corresponding
components are denoted by the same or corresponding reference
numerals, and explanation thereof will not be repeated. A storage
chamber 9 side to be described later is referred to as a front side
(forward side), and the transport chambers 6A and 6B side to be
described later is referred to as a back side (backward side). A
side facing a boundary line (adjacent surface) of processing
modules 3A and 3B to be described later is referred to as an inner
side, and a side away from the boundary line is referred to as an
outer side.
[0023] In the present embodiment, a substrate processing apparatus
2 is configured as a vertical substrate processing apparatus
(hereinafter referred to as a processing apparatus) 2 which carries
out a substrate processing process such as heat treatment as one
process of a manufacturing process in a method of manufacturing a
semiconductor device.
[0024] As shown in FIGS. 1 and 2, the processing apparatus 2
includes two adjacent processing modules 3A and 3B. The processing
module 3A is constituted by a process furnace 4A and a transfer
chamber 6A. The processing module 3B is constituted by a process
furnace 4B and a transfer chamber 6B. Transfer chambers 6A and 6B
are disposed below the process furnaces 4A and 4B, respectively. A
transfer chamber 8 including a transfer device 7 for transferring a
wafer W is disposed adjacent to the front side of the transfer
chambers 6A and 6B. A storage chamber 9 for storing a pod (hoop) 5
for storing a plurality of wafers W is connected to the front side
of the transfer chamber 8. An I/O port 22 is installed on the
entire surface of the storage chamber 9, and the pod 5 is
loaded/unloaded into/from the processing apparatus 2 via the I/O
port 22.
[0025] Gate valves 90A and 90B are installed on the boundary walls
(adjacent surfaces) of the transfer chambers 6A and 6B and the
transfer chamber 8, respectively. Pressure detectors are
respectively installed in the transfer chamber 8 and in the
transfer chambers 6A and 6B, and an internal pressure of the
transfer chamber 8 is set to be lower than internal pressures of
the transfer chambers 6A and 6B. Further, oxygen concentration
detectors are respectively installed in the transfer chamber 8 and
the transfer chambers 6A and 6B, and an oxygen concentration in the
transfer chamber 8A and the transfer chambers 6A and 6B is kept to
be lower than an oxygen concentration in the atmosphere. As shown
in FIG. 3, a clean unit 62C for supplying clean air into the
transfer chamber 8 is installed on a ceiling of the transfer
chamber 8. The clean unit 62C is configured to circulate the clean
air, for example, an inert gas, in the transfer chamber 8. By
circularly purging an inside of the transfer chamber 8 with the
inert gas, the inside of the transfer chamber 8 can be made into a
clean atmosphere. With such a configuration, it is possible to
prevent particles and the like in the transfer chambers 6A and 6B
from mixing into the transfer chamber 8 and prevent a natural oxide
film from being formed on the wafer W in the transfer chamber 8 and
the transfer chambers 6A and 6B.
[0026] Since the processing module 3A and the processing module 3B
have the same configuration, only the processing module 3A will be
representatively described below.
[0027] As shown in FIG. 4, the process furnace 4A includes a
cylindrical reaction tube 10A and a heater 12A as a heating means
(heating mechanism) installed on an outer periphery of the reaction
tube 10A. The reaction tube is made of, for example, quartz or SiC.
A process chamber 14A for processing a wafer W as a substrate is
formed inside the reaction tube 10A. A temperature detection part
16A as a temperature detector is installed in the reaction tube
10A. The temperature detection part 16A stands along the inner wall
of the reaction tube 10A.
[0028] A gas used for substrate processing is supplied into the
process chamber 14A by a gas supply mechanism 34 as a gas supply
system. The gas supplied by the gas supply mechanism 34 may be
changed depending on a type of film to be formed. Here, the gas
supply mechanism 34 includes a precursor gas supply part, a
reaction gas supply part and an inert gas supply part. The gas
supply mechanism 34 is stored in a supply box 72 to be described
later. Since the supply box 72 is provided in common for the
processing modules 3A and 3B, it is regarded as a common supply
box.
[0029] The precursor gas supply part, which is a first gas supply
part, includes a gas supply pipe 36a. The gas supply pipe 36a is
provided with a mass flow controller (MFC) 38a, which is a flow
rate controller (flow rate control part), and valves 41a and 40a,
which are opening/closing valves such as diaphragm valves, in order
of upstream to downstream. The gas supply pipe 36a is connected to
a nozzle 44a penetrating a side wall of a manifold 18. The nozzle
44a is vertically installed in the reaction tube 10A and has a
plurality of supply holes opened toward wafers W held by a boat 26.
A precursor gas is supplied to the wafers W through the supply
holes of the nozzle 44a.
[0030] Similarly, a reaction gas is supplied to the wafers W from
the reaction gas supply part, which is a second gas supply part,
through a supply pipe 36b, an WC 38b, a valve 41b, a valve 40b and
a nozzle 44b. An inert gas is supplied to the wafers W from the
inert gas supply part through supply pipes 36c and 36d, MFCs 38c
and 38d, valves 41c and 41d, valves 40c and 40d and nozzles 44a and
44b. The nozzle 44b is vertically installed in the reaction tube
10A and has a plurality of supply holes opened toward the wafers W
held by the boat 26. The precursor gas is supplied to the wafers W
through the supply holes of the nozzle 44b.
[0031] In addition, the gas supply mechanism 34 is provided with a
third gas supply part for supplying a reaction gas, a precursor
gas, or an inert gas or a cleaning gas that does not directly
contribute to the substrate processing, to the wafers W. The
reaction gas is supplied to the wafers W from the third gas supply
part through a supply pipe 36e, an WC 38e, a valve 41e, a valve 40e
and a nozzle 44c. The inert gas or the cleaning gas is supplied to
the wafers W from the inert gas supply part through a supply pipe
36f, an WC 38f, a valve 41f, a valve 40f and a nozzle 44c. The
nozzle 44c is vertically installed in the reaction tube 10A and has
a plurality of supply holes opened toward the wafers W held by the
boat 26. The precursor gas is supplied to the wafers W through the
supply holes of the nozzle 44c.
[0032] Three nozzles 44a, 44b and 44c are installed in the reaction
tube 10A, so that three types of precursor gases can be supplied
into the reaction tube 10A in a predetermined sequence or in a
predetermined cycle. Valves 40a, 40b, 40c, 40d, 40e and 40f
connected to the nozzles 44a, 44b and 44c in the reaction tube 10A
are final valves and are provided in a final valve installation
part 75A to be described later. Similarly, three nozzles 44a, 44b
and 44c are installed in the reaction tube 10B, so that three types
of precursor gases can be supplied into the reaction tube 10B in a
predetermined sequence or in a predetermined cycle. Valves 40a,
40b, 40c, 40d, 40e and 40f connected to the nozzles 44a, 44b and
44c in the reaction tube 10B are final valves and are provided in a
final valve installation part 75B to be described later.
[0033] A plurality of gas pipes 35 on the output side of the valves
41a to 41f are branched into a plurality of gas distribution pipes
35A respectively connected to the valves 40a, 40b, 40c, 40d, 40e
and 40f of the reaction tube 10A and a plurality of gas
distribution pipes 35B respectively connected to the valves 40a,
40b, 40c, 40d, 40e and 40f of the reaction tube 10B between the
valves 41a to 41f and the valves 40a to 40f. The plurality of gas
pipes 35 may be regarded as gas pipes in common for the reaction
tubes 10A and 10B.
[0034] An exhaust pipe 46A is attached to the manifold 18A. A
vacuum pump 52A as a vacuum exhaust device is connected to the
exhaust pipe 46A via a pressure sensor 48A as a pressure detector
(pressure detection part) for detecting the internal pressure of
the process chamber 14A and an APC (Auto Pressure Controller) valve
50A as a pressure regulator (pressure regulation part). With such a
configuration, the internal pressure of the process chamber 14A can
be set to a processing pressure corresponding to the processing. An
exhaust system A is mainly constituted by the exhaust pipe 46A, the
APC valve 50A and the pressure sensor 48A. The exhaust system A is
stored in an exhaust box 74A to be described later. One vacuum pump
52A may be installed in common for the processing modules 3A and
3B.
[0035] The process chamber 14A accommodates therein a boat 26A as a
substrate holder which vertically supports a plurality of wafers W,
for example, 25 to 150 wafers W, in a shelf shape. The boat 26A is
supported above a heat insulating part 24A by a rotary shaft 28A
penetrating a lid 22A and the heat insulating part 24A. The rotary
shaft 28A is connected to a rotation mechanism 30A installed below
the lid 22A. The rotary shaft 28A is configured to be rotatable in
a state in which the inside of the reaction tube 10A is air-tightly
sealed. The lid 22A is vertically driven by a boat elevator 32A as
an elevation mechanism. Thus, the boat 26A and the lid 22A are
integrally raised and lowered, and the boat 26A is loaded/unloaded
into/from the reaction tube 10A.
[0036] Transfer of the wafers W onto the boat 26A is performed in
the transfer chamber 6A. As shown in FIG. 1, a clean unit 60A is
installed on one side in the transfer chamber 6A (an outer side of
the transfer chamber 6A, or a side opposite to a side facing the
transfer chamber 6B). The clean unit 60A is configured to circulate
clean air (for example, an inert gas) inside the transfer chamber
6A. The inert gas supplied into the transfer chamber 6A is
exhausted from the transfer chamber 6A by an exhaust unit 62A
installed on the side surface facing the clean unit 60A (the side
surface facing the transfer chamber 6B) with the boat 26A
interposed between the exhaust unit 62A and the clean unit 60A, and
is resupplied from the clean unit 60A into the transfer chamber 6A
(circulation purge). The internal pressure of the transfer chamber
6A is set to be lower than the internal pressure of the transfer
chamber 8. Further, the oxygen concentration in the transfer
chamber 6A is set to be lower than the oxygen concentration in the
atmosphere. With such a configuration, it is possible to prevent a
natural oxide film from being formed on the wafers W during the
transfer operation of the wafers W.
[0037] A controller 100 is connected to and controls the rotation
mechanism 30A, the boat elevator 32A, the MFCs 38a to 38f and the
valves 41a to 40f of the gas supply mechanism 34A, and the APC
valve 50A. The controller 100 includes, for example, a
microprocessor (computer) including a CPU, and is configured to
control the operation of the processing apparatus 2. An
input/output device 102 configured as, for example, a touch panel
or the like is connected to the controller 100. One controller 100
may be installed for each of the processing module 3A and the
processing module 3B, or may be installed in common for them.
[0038] A storage part 104 may be a storage device (hard disk or
flash memory) incorporated in the controller 100, or an external
portable recording device (magnetic tape, magnetic disk such as
flexible disk or hard disk, optical disk such as CD or DVD,
magneto-optical disk such as MO, or a semiconductor memory such as
USB memory or memory card). A program may be provided to the
computer using communication means such as the Internet or a
dedicated line. When the controller 100 reads the program from the
storage part 104 according to an instruction from the input/output
device 102 as necessary and executes a process according to a read
recipe, the processing apparatus 2 execute a desired process under
control of the controller 100. The controller 100 is stored in a
controller box 76 (76A and 76B). When the controller 100 is
installed for each of the processing module 3A and the processing
module 3B, the controller 100 (A) for controlling the processing
module 3A is installed in the controller box 76A, and the
controller 100 (B) for controlling the processing module 3B is
installed in the controller box 76B.
[0039] Next, a process of forming a film on a substrate
(film-forming process) using the above-described processing
apparatus 2 will be described. Here, an example of forming a
silicon nitride (SiN) film on a wafer W by supplying a
hexachlorodisilane (Si.sub.2Cl.sub.6, abbreviation: HCDS) gas as a
first process gas (precursor gas) and an ammonia (NH.sub.3) as a
second process gas (reaction gas) to the wafer W will be described.
In the following description, the operations of various parts
constituting the processing apparatus 2 are controlled by the
controller 100.
[0040] In the film-forming process according to the present
embodiment, a SiN film is formed on a wafer W by repeating a step
of supplying an HCDS gas to the wafer W in the process chamber 14A,
a step of removing the HCDS gas (residual gas) from the inside of
the process chamber 14A, a step of supplying an NH.sub.3 gas to the
wafer W in the process chamber 14A, and a step of removing the
NH.sub.3 gas (residual gas) from the inside of the process chamber
14A a predetermined number of times (once or more). In the present
disclosure, this film formation sequence is written as follows for
the sake of convenience.
(HCDS.fwdarw.NH.sub.3).times.nSiN
(Wafer Charging and Boat Loading)
[0041] The gate valve 90A is opened, and the wafer W is transferred
to the boat 26A. When a plurality of wafers W are loaded into the
boat 26A (wafer charging), the gate valve 90A is closed. The boat
26A is loaded into the process chamber 14A by the boat elevator 32A
(boat loading), and the lower opening of the reaction tube 10A is
in a state of being air-tightly closed (sealed) by the lid 22A.
(Pressure Adjustment and Temperature Adjustment)
[0042] The process chamber 14A is vacuum-exhausted (evacuated) by
the vacuum pump 52A so that the inside of the process chamber 14A
reaches a predetermined pressure (degree of vacuum). The internal
pressure of the process chamber 14A is measured by the pressure
sensor 48A, and the APC valve 50A is feedback-controlled based on
the measured pressure information. Further, the wafer W in the
process chamber 14A is heated by the heater 12A so as to have a
predetermined temperature. At this time, a condition of conduction
of current to the heater 12A is feedback-controlled based on the
temperature information detected by the temperature detection part
16A so that the process chamber 14A has a predetermined temperature
distribution. Further, the rotation of the boat 26A and the wafer W
by the rotation mechanism 30A is started.
(Film-Forming Process)
[Precursor Gas Supplying Step]
[0043] When the internal temperature of the process chamber 14A is
stabilized at a preset processing temperature, an HCDS gas is
supplied to the wafer W in the process chamber 14A. The HCDS gas is
controlled by the MFC 38a to have a desired flow rate, and is
supplied into the process chamber 14A via the gas supply pipe 36a,
the valves 41a and 40a and the nozzle 44a. The valve 40a opens when
the valve 41a of processing module 3A and/or 3B opens. The valve
40a operates on interlocking basis, moreover the valve 40a could
operates more slowly than the valve 41a for longer life time. That
is achieved by restricting an air flow for an air-operated valve or
by limiting applied voltage for a solenoid-operated valve. For
example, a transition time of the valve 41a from close to open
could be set to 5 ms whereas that of valve 40a is 3 ms. The same
applies to the other valves 41b to 41f.
[Precursor Gas Exhausting Step]
[0044] Next, the supply of the HCDS gas is stopped, and the inside
of the process chamber 14A is vacuum-exhausted by the vacuum pump
52A. At this time, an N.sub.2 gas may be supplied as an inert gas
from the inert gas supply part into the process chamber 14A (inert
gas purge).
[Reaction Gas Supplying Step]
[0045] Next, an NH.sub.3 gas is supplied to the wafer W in the
process chamber 14A. The NH.sub.3 gas is controlled by the MFC 38b
to have a desired flow rate, and is supplied into the process
chamber 14A via the gas supply pipe 36b, the valves 41b and 40b and
the nozzle 44b.
[Reaction Gas Exhausting Step]
[0046] Next, the supply of the NH.sub.3 gas is stopped, and the
inside of the process chamber 14A is vacuum-exhausted by the vacuum
pump 52A. At this time, an N.sub.2 gas may be supplied from the
inert gas supply part into the process chamber 14A (inert gas
purge). By performing a cycle of performing the above-described
four steps a predetermined number of times (once or more), a SiN
film having a predetermined composition and a predetermined film
thickness can be formed on the wafer W.
(Boat Unloading and Wafer Discharging)
[0047] After the film having a predetermined film thickness is
formed, an N.sub.2 gas is supplied from the inert gas supply part,
the inside of the process chamber 14A is replaced with the N.sub.2
gas, and the internal pressure of the process chamber 14A is
restored to the normal pressure. Thereafter, the lid 22A is lowered
by the boat elevator 32A, and the boat 26A is unloaded from the
reaction tube 10A (boat unloading). Thereafter, the processed wafer
W is taken out of the boat 26A (wafer discharging).
[0048] Thereafter, the wafer W may be stored in the pod 5 and
unloaded out of the processing apparatus 2, or may be transferred
to the process furnace 4B and continuously subjected to substrate
processing such as annealing. When processing the wafer W in the
process furnace 4B continuously after processing of the wafer W in
the process furnace 4A, the gate valves 90A and 90B are opened, and
the wafer W is directly transferred from the boat 26A to the boat
26B. Subsequent loading/unloading of the wafer W into/from the
process furnace 4B is performed in the same procedure as the
above-described substrate processing by the process furnace 4A.
Further, the substrate processing in the process furnace 4B is
performed, for example, in the same procedure as the
above-described substrate processing by the process furnace 4A.
[0049] The processing conditions at the time of forming the SiN
film on the wafer W are exemplified as follows. [0050] Processing
temperature (wafer temperature): 100 degrees C. to 800 degrees C.
[0051] Processing pressure (internal pressure of process chamber):
5 Pa to 4,000 Pa [0052] HCDS gas supply flow rate: 1 sccm to 2,000
sccm [0053] NH.sub.3 gas supply flow rate: 100 sccm to 30,000 sccm
[0054] N.sub.2 gas supply flow rate: 1 sccm to 50,000 sccm [0055]
By setting the processing conditions to value within the respective
ranges, the film-forming process can be appropriately
performed.
[0056] Next, a back surface configuration of the processing
apparatus 2 will be described.
[0057] For example, if the boat 26 is broken, the boat 26 needs to
be replaced. If the reaction tube 10 is broken or needs to be
cleaned, it is necessary to remove the reaction tube 10. In this
manner, when maintenance for the transfer chamber 6 or the process
furnace 4 is performed, the maintenance is performed from
maintenance areas A and B on the back side of the processing
apparatus 2.
[0058] As shown in FIG. 1, maintenance ports 78A and 78B are
respectively formed on the back sides of the transfer chambers 6A
and 6B. The maintenance port 78A is formed on the transfer chamber
6B side of the transfer chamber 6A, and the maintenance port 78B is
formed on the transfer chamber 6A side of the transfer chamber 6B.
The maintenance ports 78A and 78B are opened and closed by
maintenance doors 80A and 80B, respectively. The maintenance doors
80A and 80B are configured to be rotated with hinges 82A and 82B as
base shafts, respectively. The hinge 82A is installed on the
transfer chamber 6B side of the transfer chamber 6A, and the hinge
82B is installed on the transfer chamber 6A side of the transfer
chamber 6B. That is, the hinges 82A and 82B are installed adjacent
to each other near the inner corner located on the adjacent
surfaces on the back sides of the transfer chambers 6A and 6B. The
maintenance areas are formed on the processing module 3B side on
the back surface of the processing module 3A and on the processing
module 3A side on the back surface of the processing module 3B.
[0059] As indicated by imaginary lines, as the maintenance doors
80A and 80B are horizontally rotated backward on the back side of
the transfer chambers 6A and 6B around the hinges 82A and 82B, the
back side maintenance ports 78A and 78B are opened. The maintenance
door 80A is configured to be opened to the left at 180 degrees
toward the transfer chamber 6A. The maintenance door 80B is
configured to be opened to the right at 180 degrees toward the
transfer chamber 6B. That is, the maintenance door 80A is rotated
clockwise toward the transfer chamber 6A and the maintenance door
80B is rotated counterclockwise toward the transfer chamber 6A. In
other words, the maintenance doors 80A and 80B are rotated in
opposite directions. Since the maintenance doors 80A and 80B are
configured to be removable, they may be removed for
maintenance.
[0060] A utility system 70 is installed near the back sides of the
transfer chamber 6A and 6B. The utility system 70 is interposed
between maintenance areas A and B. When maintenance of the utility
system 70 is performed, the maintenance is performed from the
maintenance areas A and B.
[0061] The utility system 70 includes final valve installation
parts 75A and 75B, exhaust boxes 74A and 74B, a supply box 72 and
controller boxes 76A and 76B.
[0062] The utility system 70 is constituted by the exhaust boxes
74A and 74B, the supply box 72 and the controller boxes 76A and 76B
in this order from the housing side (the transfer chambers 6A and
6B). The final valve installation parts 75A and 75B are provided
above the exhaust boxes 74A and 74B. The maintenance ports of the
boxes of the utility system 70 are formed on the maintenance areas
A and B, respectively. The supply box 72 is disposed on the side
opposite to the side adjacent to the transfer chamber 6A of the
exhaust box 74A, and a supply box 72B is disposed adjacent to the
side adjacent to the transfer chamber 6B on the exhaust box
74B.
[0063] As shown in FIG. 3, in the processing module 3A, the final
valve installation part 75A where the final valves (the valves 40a,
40b and 40c located at the lowermost stage of the gas supply
system) of the gas supply mechanism 34 are installed is disposed
above the exhaust box 74A. Preferably, it is disposed just above
(right above) the exhaust box 74A. With such a configuration, even
when the supply box 72 is disposed away from the housing side,
since the pipe length from the final valves to the process chamber
can be shortened, the quality of film formation can be improved.
Although not shown in FIG. 3, in addition to the valves 40a, 40b
and 40c, the valves 40d, 40e and 40f are also disposed in the final
valve installation part 75A.
[0064] In addition, although not shown, in the processing module
3B, the final valve installation part 75B where the final valves
(the valves 40a, 40b and 40c located at the lowermost stage of the
gas supply system) of the gas supply mechanism 34 are installed is
disposed above the exhaust box 74B. Preferably, it is disposed just
above (right above) the exhaust box 74B. With such a configuration,
even when the supply box 72 is disposed away from the housing side,
since the pipe length from the final valves to the process chamber
can be shortened, the quality of film formation can be improved. In
addition to the valves 40a, 40b and 40c, the valves 40d, 40e and
40f are also disposed in the final valve installation part 75B.
[0065] As shown in FIG. 5, the configurations of the processing
modules 3A and 3B and the utility system 70 are arranged in plane
symmetry with respect to an adjacent surface S1 of the processing
modules 3A and 3B. The reaction tubes 10A and 10B are also arranged
in plane symmetry with respect to the adjacent surface S1 of the
processing modules 3A and 3B. Thus, pipes are arranged such that
the pipe lengths of the exhaust pipes 46A and 46B from the
processing modules 3A and 3B to the exhaust boxes 74A and 74B are
substantially the same in the processing modules 3A and 3B. In
addition, pipes (gas pipes) are arranged such that the pipe lengths
from final valves 40A and 40B installed in the final valve
installation parts 75A and 75B to nozzles 44A and 44B are
substantially the same in the processing modules 3A and 3B.
[0066] In FIG. 5, the final valve 40A indicates the valves 40a to
40f of the processing module 3A, and the final valve 40B indicates
the valves 40a to 40f of the processing module 3B. The nozzle 44A
indicates the nozzles 44a to 44c of the processing module 3A, and
the nozzle 44B indicates the nozzles 44a to 44c of the processing
module 3B. For example, when a pipe 10Aa corresponds to a pipe
between the valve 40a of the processing module 3A and the nozzle
44a of the processing module 3A and a pipe 10Ba corresponds to a
pipe between the valve 40a of the processing module 3B and the
nozzle 44a of the processing module 3B, the pipe 10Aa and the pipe
10Ba have substantially the pipe length. In addition, when a pipe
10Ab corresponds to a pipe between the valve 40b of the processing
module 3A and the nozzle 44b of the processing module 3A and a pipe
10Bb corresponds to a pipe between the valve 40b of the processing
module 3B and the nozzle 44b of the processing module 3B, the pipe
10Ab and the pipe 10Bb have substantially the pipe length. Thus, an
arrival time when a gas is supplied from the supply box 72 to the
nozzle 44a of the processing module 3A via the valve 40a and the
pipe 10Aa of the processing module 3A may be the same as an arrival
time when the same gas is supplied from the supply box 72 to the
nozzle 44a of the processing module 3B via the valve 40a and the
pipe 10Ba of the processing module 3B. Therefore, recipe management
of the processing modules 3A and 3B by the controller 100 can be
facilitated. Furthermore, as indicated by arrows in FIG. 5,
rotation directions of wafers W in the process furnaces 4A and 4B
are also set to be opposite to each other.
[0067] The form of arrangement of the reaction tubes 10A and 10B is
not limited to that shown in FIG. 5. The nozzles 44A and 44B may be
installed to correspond to the final valve installation parts 75A
and 75B, respectively. The reaction tubes 10A and 10B may be
arranged such that the exhaust pipes 46A and 46B leading to the
exhaust boxes 74A and 74B have the shortest length. However, the
reaction tubes 10A and 10B may be disposed in plane symmetry with
respect to the adjacent surface S1 of the processing modules 3A and
3B.
[0068] Since the common supply box 72 is provided for the
processing modules 3A and 3B and the gas pipes from the supply box
72 to the final valves 40A and 40B are shared, it is possible to
save a space of the substrate processing apparatus.
[0069] In addition, a footprint required by the substrate
processing apparatus 2 is lowered, and it is possible to reduce a
use area of a clean room with respect to a required amount of
production, which is very advantageous in terms of economy.
[0070] FIGS. 6A, 6B and 6C are views for explaining an example of
control of a recipe by the controller. A recipe is one describing a
supply amount of each process gas such as reaction gas and
precursor gas, a target vacuum degree (or an exhaust speed),
process chamber temperature and the like. in a time series, and may
include a pattern repeated at a fixed cycle. The term recipe may,
in a narrow sense, refer to one cycle of this repeated pattern.
When a created recipe is executed by the controller 100, the
processing apparatus 2 executes a desired process under the control
of the controller 100. When the processing apparatus 2 includes the
processing modules 3A and 3B, the same gas may be used between the
processing modules 3A and 3B depending on the timing of starting
the recipe.
[0071] In the present embodiment, the controller 100 that manages
the recipe has a mutual monitoring function so that the same
process gas cannot be simultaneously flown into the reaction tubes
10A and 10B of the processing modules 3A and 3B. By registering the
target gas and valve to be monitored in a parameter or recipe in
the controller, the controller 100 mutually monitors the recipe for
the processing modules 3A and 3B based on the registered gas and
valve, and performs control to optimize the recipe start time and
the like so that the same process gas cannot be simultaneously
flown into the processing modules 3A and 3B. The optimization of
the recipe start time and the like can be adjusted using evacuation
time of the vacuum pump 52A to evacuate the reaction tubes 10A and
10B or purge time for purging the reaction tubes 10A and 10B with
an N.sub.2 gas. The mutual monitoring and control includes a valve
level and a recipe level.
[0072] FIG. 6A shows an example of recipes RC1 and RC2 executed
respectively by the processing modules 3A and 3B. The recipes RC1
and RC2 are the same recipes, and use three process gases A, B and
C. In order to form the same film on the respective substrates in
the reaction tubes 10A and 10B, the recipes RC1 and RC2 of
substantially the same gas supply sequence are repeatedly executed
for multiple cycles. Each of the recipes RC1 and RC2 includes
process steps PS1 to PS9 which are substantially the same gas
supply sequence. The process step PS1 is a process (A) of supplying
a process gas A into the reaction tube 10A or 10B. The process step
PS4 is a process (B) of supplying a process gas B into the reaction
tube 10A or 10B. The process step PS7 is a process (C) of supplying
a process gas C into the reaction tube 10A or 10B. The process
steps PS2, PS5 and PS8 are performed after the process steps PS1,
PS4 and PS7, respectively. The process steps PS2, PS5 and PS8 are
processes (V) of evacuating the reaction tube 10A or 10B by setting
the target vacuum degree to a relatively low pressure (for example,
10 to 100 Pa). The process steps PS3, PS6 and PS9 are performed
after the process step PS2, PS5 and PS8, respectively. The process
steps PS3, PS6 and PS9 are processes (P) of evacuating the reaction
tubes 10A and 10B while flowing a purge gas (N.sub.2 gas) into the
reaction tubes 10A and 10B.
[0073] As shown in FIG. 6A, in the recipes RC1 and RC2, when the
recipes RC1 and RC2 are started with a short time difference with
respect to time T, it is assumed that the same process gases A, B
and C are simultaneously used. That is, the process steps PS1, PS4
and PS7 of the processing module 3A and the process steps PS1, PS4
and PS7 of the processing module 3B may be executed simultaneously.
However, there is only one mass flow controller (MFC) corresponding
to each of the process gases A, B and C. As shown in FIG. 4, in the
gas supply mechanism 34 stored in the supply box 72, for example, a
mass flow controller for the process gas A is the MFC 38a, a mass
flow controller for the process gas B is the MFC 38b, and a mass
flow controller for the process gas C is the MFC 38c. For this
reason, when the same process gas A, B or C is simultaneously used
in the processing modules 3A and 3B, a flow rate to each of the
processing modules 3A and 3B cannot be controlled with an accuracy
equivalent to a conventional accuracy and the recipe will be
different between the modules 3A and 3B. The difference in recipe
between the processing modules 3A and 3B affects the quality of the
film formed in the processing modules 3A and 3B. For this reason,
the same process gas A, B or C may not be used at the same time in
the processing modules 3A and 3B in some embodiments.
[0074] In the control of the valve level, the controllers 100 of
the processing module 3A and 3B mutually monitor an opening/closing
state of the valves 40a to 40c of the processing module 3A and an
opening/closing state of the valves 40a to 40c of the processing
module 3B between the processing modules 3A and 3B. This control of
the valve level is also called an interlock.
[0075] For example, when the corresponding final valves (that is,
connected by the same distribution pipe) of the processing module
3B on the other side are closed, the controller 100 of the
processing module 3A opens the final valves of its own processing
module 3A according to the recipe. On the other hand, when the
corresponding final valves (that is, connected by the same
distribution pipe) of the processing module 3B on the other side
are opened, the controller 100 of the processing module 3A performs
control to interrupt the recipe of its own processing module 3A
until the final valves are closed. In addition, when the
corresponding final valves (that is, connected by the same
distribution pipe) of the processing module 3A on the other side
are closed, the controller 100 of the processing module 3B opens
the final valves of its own processing module 3B according to the
recipe. On the other hand, when the corresponding final valves
(that is, connected by the same distribution pipe) of the
processing module 3A on the other side are opened, the controller
100 of the processing module 3B performs control to interrupt the
recipe of its own processing module 3B until the final valves are
closed.
[0076] On the other hand, in the control of the process recipe
level, the controller 100 monitors progresses of the recipes RC1
and RC2 at each timing such as the start of the recipes RC1 and RC2
or before the boat loading, etc. and predicts the timing of
sequence in which the used gases A, B and C flow. In the processing
modules 3A and 3B, when the same process gas A, B or C does not
flow at the same timing, the recipes RC1 and RC2 proceed as they
are. On the other hand, in the processing modules 3A and 3B, when
the same process gas A, B or C is predicted to flow at the same
timing, the controller 100 calculates a sequence in which the same
process gas does not flow at the same time, and performs control to
shift the timing of the supply of the gas used.
[0077] That is, in the processing modules 3A and 3B, in order to
form the same film, processes of repeating substantially the same
gas supply sequence are performed in parallel with each other while
having a shift time therebetween. The shift time is determined by
delaying the gas supply sequence of one of the processing modules
3A and 3B which will start processing later so that the supply
timing of a specific gas among the plurality of process gases A, B
and C does not overlap with the gas supply sequence of the other of
the processing modules 3A and 3B which has previously started
processing.
[0078] For example, as shown in FIG. 6A, it is assumed that the
controller 100 predicts the timing of the gas supply sequence in
which the process gases A, B and C used flow when the recipes RC1
and RC2 start. That is, it is assumed that the same process gas A,
B or C is predicted to flow into the processing modules 3A and 3B
at the same timing. In this case, the controller 100 calculates a
sequence in which the same process gas does not flow at the same
time, and performs control to shift the timing of supplying the gas
used. That is, before the start of the recipes RC1 and RC2, the
controller 100 generates the recipe RC2 for which the timing of the
gas supply sequence is shifted in time so that the same process gas
A, B or C does not flow at the same timing in the processing
modules 3A and 3B. As shown in FIG. 6B, in the recipe RC2 performed
in the processing module 3B, a process step PSA1 is automatically
added by the controller 100 before the process step PS1. The
process step PSA1 is, for example, a process (P) of evacuating the
reaction tube 10B while flowing a purge gas (N.sub.2 gas) into the
reaction tube 10B. When the recipe RC2 (PS1 to PS9) is executed for
a plurality of cycles, the process step PSA1 is added only before
the first process step PS1 of the first cycle. The process step
PSA1 is not added before the process step PS1 in the second and
subsequent cycles of the recipe RC2 (PS1 to PS9). That is, after
performing the last process step PS9 of the first cycle of the
recipe RC2 (PS1 to PS9), the first process step PS1 of the second
cycle of the recipe RC2 (PS1 to PS9) is performed. Similarly, after
performing the last process step PS9 of the second cycle of the
recipe RC2 (PS1 to PS9), the first process step PS1 of the third
cycle of the recipe RC2 (PS1 to PS9) is performed.
[0079] In the example of FIG. 6B, among the process gases A, B and
C which cannot be flown at the same time, the one having the
longest supply time (t.sub.max) in one cycle of the recipes RC1 and
RC2 is selected (here PS7), and a recipe time difference t.sub.diff
between the processing modules 3A and 3B is adjusted by delaying
the start time of the process step PS1 of either recipe RC1 or RC2
so that the recipe time difference t.sub.diff is equal to
t.sub.max+n*t.sub.cycle. In the example of FIG. 6B, the start time
of PS1 in the recipe RC2 is delayed by a time when the process step
PSA1 is added, as compared with the start time of PS1 in the recipe
RC1. That is, the adjusted time difference t.sub.diff_adj=t.sub.max
n*t.sub.cycle (where, n is an arbitrary integer and t.sub.cycle is
the time of one cycle of the recipe: the time from the start time
of PS1 to the end time of PS7). It is assumed that
t.sub.max.ltoreq.t.sub.cycle/2.
[0080] If it is preferable to reduce the delay time, depending on
the current time difference (the advancing time of the recipe RC2
of the current processing module 3B based on the recipe RC1 of the
processing module 3A) t.sub.diff,
TABLE-US-00001 { if (t.sub.max .ltoreq. (|t.sub.diff | %
t.sub.cycle) < t.sub.max + t.sub.cycle/2) then {the advancing
processing module is delayed by (|t.sub.diff|%t.sub.cycle) -
t.sub.max (i.e., t.sub.diff_adj = t.sub.diff - ((|t.sub.diff| %
t.sub.cycle)- t.sub.max));} else if ((|t.sub.diff| % t.sub.cycle)
< t.sub.max) then {the delayed PM is delayed by (|t.sub.diff | %
t.sub.cycle) - t.sub.max;} Else {the delayed processing module is
delayed by t.sub.cycle - (|t.sub.diff| % t.sub.cycle) - t.sub.max;}
} Where, % is an operator of the least nonnegative remainder. When
0<(t.sub.diff%t.sub.cycle)<t.sub.cycle/2, the processing
module 3A is in progress . Otherwise, the processing module 3B is
in progress.
[0081] The controller 100 also has an adjustment function to make
the heat histories of the process chambers 14A and 14B equal to
each other. It is possible to set the determined time and
automatically adjust the time for waiting for the purge time set
for the history between batches as well as the recipes in
simultaneous progression. That is, in the last cycle in which the
recipes RC1 and RC2 of the processing modules 3A and 3B shown in
FIG. 6B are repeatedly executed in multiple cycles, the process
step PS9 of the recipe RC1 of the processing module 3A will end
earlier in time than the process step PS9 of the recipe RC2 of the
processing module 3B. Therefore, the heat history of the process
chamber 14A and the heat history of the process chamber 14B will be
different from each other.
[0082] As shown in FIG. 6C, in the last cycle of the recipe RC1 of
the processing module 3A, a process step PSA2 of the same time as
PSA1 is automatically added by the controller 100 after the process
step PS9. Thus, the heat history of the process chamber 14A and the
heat history of the process chamber 14B can be equal to each other.
The process step PSA2 is, for example, a process (P) of evacuating
the reaction tube 10A while flowing a purge gas (N.sub.2 gas) into
the reaction tube 10A.
[0083] The processing module 3A and the processing module 3B
basically operate asynchronously, and dependency between the
processing module 3A and the processing module 3B is small.
Therefore, even if one of the processing module 3A and the
processing module 3B is stopped due to a failure or the like, the
other of the processing module 3A and the processing module 3B can
continue the processing.
[0084] FIG. 7 is a view for explaining another example of control
of the recipe by the controller. FIG. 7 shows four examples in
which processing times of process steps (PSA1 to PSA4) added before
the process step PS1 are different in the recipe RC2 performed in
the processing module 3B.
[0085] A recipe RC21 shown in FIG. 7 is the same as the recipe RC2
shown in FIG. 6B, and is based on a rule that the advancing time of
the recipe RC21 is shifted by the supply time of the process gas C
for which the supply time in one cycle is the longest. Therefore,
in the recipe RC21, the process step PSA1 is added before the
process step PS1. Thus, after the process step PS7 of supplying the
gas C to the processing module 3A is completed, the process step
PS7 of supplying the gas C to the processing module 3B is
subsequently started. Alternatively, it can be said that the recipe
RC21 is based on a rule that the exhaust timing of the process
gases A and B and the exhaust timing of the process gas C do not
overlap with each other. According to this rule, when the process
gas C undergoes a gas phase reaction with the process gases A and
B, it is possible to suppress generation of undesirable solids in
the upstream of the common vacuum pump 52. Alternatively, it can be
said that the recipe RC21 is based on a rule that the end of the
purge process of the process gases A, B and C does not overlap with
the exhaust process of any gas. According to this rule, it is
possible to prevent an increase in residual gas concentration at
the end of purge.
[0086] In a recipe RC22 shown in FIG. 7, a process step PSA2 is
added before the process step PS1. Thus, after using the process
gases A and B in the processing module 3A (after the end of the
process step PS4), the process step PS1 of using the process gas A
is started in the processing module 3B.
[0087] In a recipe RC23 shown in FIG. 7, a process step PSA3 is
added before the process step PS1. The recipe RC23 is based on a
rule that the phase of the recipe is simply inverted between the
processing modules 3A and 3B (that is, the time difference is set
to t.sub.diff_adj=t.sub.cycle/2). According to this rule, due to
its temporal symmetry, even in a case where a buffer tank is
provided between the gas supply system 34 and the final valve
installation parts 75A and 75B, a gas can be uniformly supplied to
the processing modules 3A and 3B under the same conditions.
Alternatively, it can be said that the recipe RC23 is based on a
rule that the exhaust timings of the process gases A, B and C do
not overlap with each other. This is suitable when a total time of
continuous supply, exhaust and purge steps for one gas is
t.sub.cycle/2 or more.
[0088] In a recipe RC24 shown in FIG. 7, a process step PSA4 is
added before the process step PS1. Thus, after the end of the
supply of the process gas C to the processing module 3B (after the
end of the process step PS7), the supply of the process gas C to
the processing module 3A in the second cycle is subsequently
started (the process step PS7 in the second cycle). When the
processing modules 3A and 3B are not distinguished from each other
(an order thereof does not matter), the recipe RC24 is equivalent
to the recipe RC21 of the processing module 3B.
[0089] As shown in the recipes RC1 to RC4 of FIG. 7, the start
timing of the process step PS1 of using the process gas A in the
processing module 3B can be optimally controlled by a set parameter
and a predicted sequence.
[0090] However, none of the recipes RC1 and RC21 to RC24 in FIG. 7
can be said to be guaranteed that all the gas supply timings do not
overlap with each other for any recipe.
[0091] FIG. 8 is a view showing a processing flow for determining
an amount of shift in which the supply timings do not overlap with
each other. The processing flow of FIG. 8 is to calculate the
required amount of shift starting from a state in which a time
difference t.sub.adj between the cycles of the recipes of the
processing modules 3A and 3B is zero.
[0092] Step S1: 0 is substituted for a variable t.sub.adj_add
indicating the time to delay the recipe of the processing module 3B
further than the current time difference t.sub.adj.
[0093] Step S2: The following process (steps S21 to S23) is
performed on each of the process gases by sequentially selecting
one (gas x) from the process gases.
[0094] Step S21: In one specific cycle of the recipe in the
processing module 3A, the supply section of the gas x is
sequentially selected from the top, and its start time
t.sub.1xi_start and its end time t.sub.1xi_end are specified.
Where, i is an index of n.sub.x existing supply sections.
[0095] Step S22: It is checked whether or not there is supply of
gas x which starts between the start time t.sub.1xt_start and the
end time t.sub.1xi_end in any one cycle of the recipe in the
processing module 3B having a time t.sub.adj difference from the
processing module 3A, and a maximum value of the delay time
required to eliminate overlap of supply sections is updated.
Specifically, t.sub.2xj_start satisfying the condition of
t.sub.1xi_start.ltoreq.t.sub.2xj_start<t.sub.1xi_end is searched
from all cycle supply sections j=1 . . . n.sub.x, and if
t.sub.adj_add<t.sub.2xj_start-t.sub.1xi_start, then
t.sub.2xj_start-t.sub.1xi_start is substituted for
t.sub.adj_add.
[0096] Step S23: If the index i has not reached n.sub.x, the
process returns to step S21, and if it has reached n.sub.x, the
process proceeds to the next step (step S3).
[0097] Step S3: If the held variable t.sub.adj_add is zero, the
current time difference t.sub.adj is determined (that is, t.sub.adj
is determined as t.sub.diff_adj or t.sub.max), and the process is
ended.
[0098] When the variable t.sub.adj_add add is non-zero in step S3,
if t.sub.cycle<t.sub.diff_adj+t.sub.adj in step S4, the process
is interrupted because it is impossible to eliminate the
overlap.
[0099] If t.sub.cycle.gtoreq.t.sub.diff_adj+t.sub.adj in step S4,
t.sub.diff_adj-t.sub.adj is substituted for t.sub.diff_adj in step
S5, and the process returns to step S1.
[0100] The above description is summarized as follows.
[0101] A substrate processing apparatus (2) includes:
[0102] a first processing module (3A) including a first processing
chamber (reaction tube (10A)) for processing a plurality of
vertically arranged substrates (W);
[0103] a second processing module (3A) including a second
processing chamber (reaction tube (10B)) for processing the
plurality of vertically arranged substrates, the second processing
chamber (10B) being disposed adjacent to the first processing
chamber (10A);
[0104] a first exhaust box (74A) storing a first exhaust system
configured to exhaust the first processing chamber (10A);
[0105] a second exhaust box (74B) storing a second exhaust system
configured to exhaust the second processing chamber (10B);
[0106] a common supply box (72) that controls at least one of a
flow path and a flow rate of a plurality of process gases (A, B and
C) supplied into the first and second processing chambers (10A and
10B);
[0107] a first valve group (40A and 40a to 40f) that connects gas
pipes from the common supply box (72) to the first processing
chamber (10A) such that a communication state between the gap pipes
and the first processing chamber is controllable; and
[0108] a second valve group (40B and 40a to 40f) that connects the
gas pipes from the common supply box to the second processing
chamber (10B) such that a communication state between the gas pipes
and the second processing chamber.
[0109] In the first processing module and the second processing
modules (3A and 3B), processes of repeating substantially the same
gas supply sequence (recipes RC1 and RC2) are performed in parallel
with each other while having a shift time therebetween so as to
form the same film.
[0110] The shift time is determined by a method (insertion of PSA1
to recipe RC2) of delaying the gas supply sequence (PS7 of recipe
RC2) of one (3B) of the processing modules (3A and 3B) so that a
supply timing of a predetermined gas among the plurality of process
gases (A, B and C) does not overlap with the gas supply sequence
(PS7 of recipe RC1) of the other (3A) of the processing modules (3A
and 3B) which has started the processing before the one of the
processing modules (3A and 3B) starts the processing.
[0111] In the substrate processing apparatus (2), [0112] The first
and second processing modules (3A and 3B), the first and second
exhaust boxes (74A and 74B) and the first and second valve groups
(40A and 40B) are respectively configured and arranged in plane
symmetry with each other, based on surfaces (S1 and S2) to which
the first and second processing modules (3A and 3B) are adjacent.
[0113] Lengths of a plurality of gas pipes (10Aa and 10Ab) between
the first valve group (40A) and the first processing module (3A)
are equal to lengths of the corresponding gas pipes (10Ba and 10Bb)
between the second valve group (40B) and the second processing
module (3B).
[0114] In the substrate processing apparatus (2), [0115] The
plurality of process gases includes three types of precursor gases.
[0116] The gas supply sequence (recipes RC1 and RC2) is to
periodically supply three types of process gases (A, B and C) at
time intervals to one processing chamber. While the gas supply
sequence is being performed in parallel in the first and second
processing modules (3A and 3B), there is a timing (in FIG. 6B, PS2
and PS3 of RC1, PSA1 of RC2, PS5 and PS6 of RC1, and PS2 and PS3 of
RC2) at which each of the three types of process gases (A, B and C)
is not supplied to any of the first and second processing modules
(3A and 3B).
[0117] The substrate processing apparatus (2) further includes:
[0118] a first process controller (controller 100(A)) that controls
the first processing module (3A), the first exhaust box (74A) and
the first valve group (40A); and [0119] a second process controller
(controller 100 (B)) that controls the second processing module
(3B), the second exhaust box (74B) and the second valve group
(40B).
[0120] The first and second process controllers (100 (A) and 100
(B)) transmit information substantially indicating circulation
states of the first and second valve groups (40A and 40B)
controlled respectively by the first and second process controllers
(100 (A) and 100 (B)) to other process controllers (100 (A) and 100
(B)), and the first and second processing modules (3A and 3B) are
operated asynchronously except while prohibiting simultaneous
supply of the same gas valve by the first and second valve groups
(40A and 40B).
MODIFICATIONS
[0121] Several modifications will be described below.
First Modification
[0122] FIG. 9 is a top view schematically showing an example of a
substrate processing apparatus according to a first modification of
the present disclosure.
[0123] As shown in FIG. 9, a utility system 70 is constituted by a
supply box 72, exhaust boxes 74A and 74B and controller boxes 76A
and 76B. The supply box 72, the exhaust boxes 74A and 74B and the
controller boxes 76A and 76B are arranged in plane symmetry with
respect to the adjacent surface S.sub.2 of the transfer chambers 6A
and 6B. The exhaust box 74A is disposed at an outer corner of the
back surface of the transfer chamber 6A opposite to the transfer
chamber 6B. The exhaust box 74B is disposed at an outer corner of
the back surface of the transfer chamber 6B opposite to the
transfer chamber 6A. That is, the exhaust boxes 74A and 74B are
installed flat (smoothly) so that the outer side surfaces of the
transfer chambers 6A and 6B and the outer side surfaces of the
exhaust boxes 74A and 74B are connected in a plane.
[0124] The supply box 72 is centrally located between the exhaust
boxes 74A and 74B, spaced apart from the exhaust boxes 74A and 74B.
The front surface of the supply box 72 is disposed in contact with
the back surfaces of the transfer chamber 6A and 6B. The final
valve installation parts 75A and 75B are installed in contact with
the back surfaces of the process furnaces 4A and 4B. The contacting
portion of the side surfaces of the final valve installation parts
75A and 75B is provided on the upper side of the front surface of
the supply box 72. A plurality of pipes are arranged from the
supply box 72 to the final valve installation parts 75A and 75B at
the overlapping portions of the final valve installation parts 75A
and 75B and the supply box 72. The controller boxes 76A and 76B are
provided in contact with the back surface of the supply box 72.
[0125] Even with such a configuration, similarly to the one
described in FIG. 5, an arrival time when a gas is supplied from
the supply box 72 to the nozzle 44a of the processing module 3A via
the valve 40a and the pipe 10Aa of the processing module 3A may be
the same as an arrival time when the same gas is supplied from the
supply box 72 to the nozzle 44a of the processing module 3B via the
valve 40a and the pipe 10Ba of the processing module 3B.
Second Modification
[0126] FIG. 10 is a top view schematically showing an example of a
substrate processing apparatus according to a second modification
of the present disclosure. FIG. 10 differs from FIG. 9 in that the
controller boxes 76A and 76B are provided at the back surfaces of
the exhaust boxes 74A and 74B and the supply box 72 is provided at
the entire floor surface. The other configurations are the same as
those in FIG. 10. A plurality of pipes from the supply box 72 to
the final valve installation parts 75A and 75B can be arranged at a
position indicated by a dotted rectangular line BB.
[0127] Even with such a configuration, similarly to the one
described in FIG. 5, an arrival time when a gas is supplied from
the supply box 72 to the nozzle 44a of the processing module 3A via
the valve 40a and the pipe 10Aa of the processing module 3A may be
the same as an arrival time when the same gas is supplied from the
supply box 72 to the nozzle 44a of the processing module 3B via the
valve 40a and the pipe 10Ba of the processing module 3B.
Third Modification
[0128] FIG. 11 is a view showing a gas supply system according to a
third modification of the present disclosure.
[0129] FIG. 11 illustrates a gas supply system 34 for supplying a
nitrogen gas (N.sub.2), an ammonia gas (NH.sub.3), an HCDS gas and
a cleaning gas (GCL). The final valve installation part 75A has the
same configuration as the final valve installation part 75B, and,
explanation of the configuration of the final valve installation
part 75B will not be repeated.
[0130] The HCDS gas can be supplied to the nozzle 44a of the
reaction tubes 10A and 10B via the valve 42a, the MFC 38a, the
valve 41a, and the valve 40a of the final valve installation parts
75A and 75B.
[0131] The ammonia gas (NH.sub.3) can be supplied to the nozzle 44b
of the reaction tubes 10A and 10B via the valve 42b, the MFC 38b,
the valve 41b, and the valve 40b of the final valve installation
parts 75A and 75B. The ammonia gas (NH.sub.3) can also be supplied
to the nozzle 44c of the reaction tubes 10A and 10B via the valve
41b2, and the valve 40f of the final valve installation parts 75A
and 75B.
[0132] The nitrogen gas (N.sub.2) can be supplied to the nozzle 44a
of the reaction tubes 10A and 10B via the valve 42d, the MFC 38c,
the valve 41c, and the valve 40c of the final valve installation
parts 75A and 75B. The nitrogen gas (N.sub.2) can also be supplied
to the nozzle 44b of the reaction tubes 10A and 10B via the valve
42d, the MFC 38d, the valve 41d, and the valve 40d of the final
valve installation parts 75A and 75B. Further, the nitrogen gas
(N.sub.2) can be supplied to the nozzle 44c of the reaction tubes
10A and 10B via the valve 42d, the MFC 38f, the valve 41f, and the
valve 40f of the final valve installation parts 75A and 75B.
[0133] The cleaning gas GCL can be supplied to all the nozzles 44a,
40b and 40c of the reaction tubes 10A and 10B via the valve 42g,
the MFC 38g, the valve 41g, and the valves 40g, 40g2 and 40g3 of
the final valve installation parts 75A and 75B.
[0134] Further, the valve 41a2 at the downstream of the MFC 38c,
the valve 41b3 at the downstream of the MFC 38b, and the valve 41g2
at the downstream of the MFC 38b are connected to an exhaust system
ES.
[0135] As shown in FIG. 11, a plurality of gas pipes 35, which are
distribution pipes on the downstream side of the gas supply system
34, are branched into a plurality of gas distribution pipes 35A
connected to the final valve installation part 75A and a plurality
of gas pipes 35B connected to the final valve installation part
75B. The plurality of gas distribution pipes 35A and the plurality
of gas pipes 35B have the same length. The plurality of gas pipes
35 may be appropriately provided with a heater, a filter, a check
valve, a buffer tank and the like.
[0136] The valves 40a to 40d, 40f, 40g, 40g2 and 40g3, which are a
final valve group of the processing module 3A, are provided in
front of three nozzles (also referred to as injectors) 44a, 44b and
44c of the reaction tube 10A of the processing module 3A. Supply of
gas to the injectors can be directly operated by the controller
100. The final valve group (the valves 40a to 40d, 40f, 40g, 40g2
and 40g3) of FIG. 11 can supply a plurality of gases simultaneously
(that is, in mixture) to one injector 44a, 44b or 44c. In addition,
the cleaning gas GCL from one distribution pipe can be supplied to
all the injectors 44a, 44b and 44c. The valves 40a to 40d, 40f,
40g, 40g2 and 40g3, which are a final valve group of the processing
module 3B, have the same configuration as the final valve group
(the valves 40a to 40d, 40f, 40g, 40g2, 40g3) of the processing
module 3A.
[0137] According to the present embodiments, one or more of the
following effects can be obtained.
[0138] 1) Qualities of films formed among a plurality of processing
modules 3A and 3B may be made uniform.
[0139] 2) Heat histories may be made equal among the plurality of
processing modules 3A and 3B.
[0140] 3) Since a common supply box is provided for the plurality
of processing modules 3A and 3B and gas pipes from the supply box
to the final valves are shared, it is possible to save a space of
the substrate processing apparatus.
[0141] 4) By the above item 3), the footprint required by the
substrate processing apparatus 2 is lowered, and it is possible to
reduce a use area of a clean room with respect to the required
amount of production, which is very advantageous in terms of
economy.
[0142] Although an example of using the HCDS gas as a precursor gas
has been illustrated in the above embodiments, the present
disclosure is not limited thereto. For example, in addition to the
HCDS gas, it may be possible to use, as the precursor gas, an
inorganic halosilane precursor gas such as a DCS
(Si.sub.2H.sub.4Cl.sub.6: dichlorodisilane) gas, an MCS
(SiH.sub.3Cl: monochlorosilane) gas or a TCS (SiHCl.sub.3:
trichlorosilane) gas, a halogen group-non-containing amino-based
(amine-based) silane precursor gas such as a 3DMAS (Si
[N(CH.sub.3).sub.2].sub.3H: tris-dimethyl-amino-silane) gas or a
BTBAS (SiH.sub.2[NH(C.sub.4H.sub.9)].sub.2:
bis-tertiary-butyl-amino-silane) gas, or a halogen
group-non-containing inorganic silane precursor gas such as an MS
(SiH.sub.4: monosilane) gas or a DS (Si.sub.2H.sub.6: disilane)
gas.
[0143] Although an example of forming a SiN film has been
illustrated in the above embodiments, the present disclosure is not
limited thereto. For example, in addition to the SiN film, it may
be possible to form a SiO.sub.2 film, a SiON film, a SiOCN film, a
SiOC film, a SiCN film, a SiBN film, a SiBCN film or the like using
a nitrogen (N)-containing gas (nitriding gas) such as an ammonia
(NH.sub.3) gas, a carbon (C)-containing gas such as a propylene
(C.sub.3H.sub.6) gas, a boron (B)-containing gas such as a boron
trichloride (BCl.sub.3) gas, or the like. Even when these films are
formed, the film formation can be performed under the same
processing conditions as the above embodiments, and the same
effects as the above embodiments can be obtained.
[0144] Although an example of depositing a film on a wafer W has
been illustrated in the above embodiments, the present disclosure
is not limited thereto. For example, the present disclosure can
also be suitably applied to a case where a wafer W or a film formed
on the wafer W is subjected to a process such as oxidation,
diffusion, annealing, etching or the like.
[0145] Although the present disclosure made by the present
inventors has been concretely described by way of examples, the
present disclosure is not limited to the above embodiments and
examples, but may be changed and modified in different ways.
[0146] For example, it is also possible to arrange reaction
chambers of three or more processing modules for one gas supply
device and supply a gas through supply pipes having the same
length. In addition, it is to be understood by those skilled in the
art that the present disclosure can be easily applied to an
apparatus that executes two equal-time recipes sharing not all but
some (for example, Si precursor gas) of gases used in parallel with
a predetermined time difference.
[0147] According to the present disclosure in some embodiments, it
is possible to obtain uniform qualities for films formed by first
and second processing modules.
[0148] While certain embodiments have been described, these
embodiments have been presented by way of example only, and are not
intended to limit the scope of the disclosures. Indeed, the
embodiments described herein may be embodied in a variety of other
forms. Furthermore, various omissions, substitutions and changes in
the form of the embodiments described herein may be made without
departing from the spirit of the disclosures. The accompanying
claims and their equivalents are intended to cover such forms or
modifications as would fall within the scope and spirit of the
disclosures.
* * * * *