U.S. patent application number 15/363288 was filed with the patent office on 2018-01-25 for mosfet and a method for manufacturing the same.
This patent application is currently assigned to SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION. The applicant listed for this patent is SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION. Invention is credited to Yu CHEN.
Application Number | 20180026093 15/363288 |
Document ID | / |
Family ID | 57494099 |
Filed Date | 2018-01-25 |
United States Patent
Application |
20180026093 |
Kind Code |
A1 |
CHEN; Yu |
January 25, 2018 |
MOSFET AND A METHOD FOR MANUFACTURING THE SAME
Abstract
A MOSFET including a source region and a drain region are
unsymmetrical in structure, with the horizontal junction depth of
the drain region being greater than that of the source region, and
the vertical junction depth of the drain region being greater than
that of the source region; the breakdown voltage of the device can
be raised by increasing the horizontal and vertical junction depths
of the drain region, and the horizontal dimension of the device can
be diminished by reducing the horizontal and vertical junction
depths of the source region; a gate dielectric layer is
unsymmetrical in structure-and the GIDL effect in the device can be
reduced by increasing the thickness of the first gate dielectric
section, and the driving current of the device can be increased by
reducing the thickness of the second gate dielectric section.
Inventors: |
CHEN; Yu; (Shanghai,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING
CORPORATION |
Shanghai |
|
CN |
|
|
Assignee: |
SHANGHAI HUAHONG GRACE
SEMICONDUCTOR MANUFACTURING CORPORATION
Shanghai
CN
|
Family ID: |
57494099 |
Appl. No.: |
15/363288 |
Filed: |
November 29, 2016 |
Current U.S.
Class: |
257/344 |
Current CPC
Class: |
H01L 29/42368 20130101;
H01L 29/4983 20130101; H01L 29/7835 20130101; H01L 29/0615
20130101; H01L 29/6659 20130101; H01L 29/66659 20130101 |
International
Class: |
H01L 29/06 20060101
H01L029/06; H01L 29/49 20060101 H01L029/49; H01L 29/66 20060101
H01L029/66; H01L 29/78 20060101 H01L029/78 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 19, 2016 |
CN |
201610566545.8 |
Claims
1. A metal-oxide semiconductor field-effect transistor (MOSFET),
wherein: a well region of the second conductivity type is formed in
the surface of the semiconductor substrate; a gate dielectric layer
and a polysilicon gate are sequentially formed on the surface of
said well region; a doped source region of the first conductivity
type and a doped drain region of the first conductivity type are
respectively formed in the surface of said well region; the drain
region is self-aligned with a first side of said polysilicon gate,
and said source region is self-aligned with a second side of said
polysilicon gate; the source region and said drain region are
unsymmetrical in structure, wherein the horizontal junction width
of said drain region is greater than that of said source region,
and the vertical junction depth of said drain region is greater
than that of said source region; the breakdown voltage of the
device can be raised by increasing the horizontal and vertical
junction depths of said drain region, and the horizontal dimension
of the device can be diminished by reducing the horizontal and
vertical junction depths of said source region; the gate dielectric
layer is unsymmetrical in structure, wherein said gate dielectric
layer includes a first gate dielectric section and a second gate
dielectric section which are horizontally connected; the thickness
of said first gate dielectric section is greater than that of said
second gate dielectric section; horizontally, said drain region
extends beyond the first side of said polysilicon gate to the
bottom of said polysilicon gate, thereby forming an overlap between
said drain region and said polysilicon gate, with said first gate
dielectric section located therein; and the GIDL effect in the
device can be reduced by increasing the thickness of said first
gate dielectric section, and the driving current of the device can
be increased by reducing the thickness of said second gate
dielectric section.
2. The MOSFET of claim 1, wherein said semiconductor substrate is a
silicon substrate.
3. The MOSFET of claim 1, wherein said source region is formed by a
heavily doped source/drain implanted region having the first
conductivity type, said drain region is formed by an overlap
between the heavily doped source/drain implanted region and a
lightly doped drain region having the first conductivity type, the
source/drain implanted region of said source region and the
source/drain implanted region of said drain region are formed by
the same process, and the junction depth of said drain region is
adjusted through said lightly doped drain region.
4. The MOSFET of claim 1, wherein said gate dielectric layer is a
gate oxide layer.
5. The MOSFET of claim 4, wherein said second gate dielectric
section is a thermal oxide layer or deposited oxide layer, and said
first gate dielectric section adds a local oxide layer to said
second gate dielectric section.
6. The MOSFET of claim 1, wherein side walls are formed on the
sides of said polysilicon gate.
7. The MOSFET of claim 1, wherein the MOSFET is an N-type device,
with the first conductivity type being N-type and the second
conductivity type being P-type; alternatively, the MOSFET is a
P-type device, with the first conductivity type being P-type and
the second conductivity type being N-type.
8. A method of manufacturing the MOSFET, comprising the steps of:
step 1: providing a semiconductor substrate and introducing dopant
having the second conductivity type in the surface thereof to form
a well region; step 2: forming a first oxide layer on the surface
of said semiconductor substrate by thermal oxidation or chemical
vapor deposition; step 3: forming a polysilicon gate on the surface
of the first oxide layer by chemical vapor deposition and
photolithography, wherein said polysilicon gate covers the surface
of said well region via said first oxide layer; step 4: forming a
first dielectric layer by chemical vapor deposition, wherein said
first dielectric layer is made of silicon nitride or silicon
oxynitride; step 5: removing said first dielectric layer in the
drain-forming region with photolithography and etching processes,
while retaining said first dielectric layer in the source-forming
region, wherein said drain-forming region is located outside a
first side of said polysilicon gate, said source-forming region is
located outside a second side of said polysilicon gate, the
reserved part of said first dielectric layer further extends from
said source-forming region to the top of said polysilicon gate, and
the removed part of said first dielectric layer further extends
from said drain-forming region to the top of said polysilicon gate;
step 6: with the photoresist on said first dielectric layer and the
top thereof as a mask, conducting ion implantation of dopants
having the first conductivity type to form a lightly doped drain
region, wherein said lightly doped drain region is self-aligned
with the first side of said polysilicon gate; the junction depth of
the drain region is adjusted through ion implantation of said
lightly doped drain region; and horizontally, said lightly doped
drain region extends from the first side of said polysilicon gate
to the bottom thereof, thereby forming an overlap between said
drain region and said polysilicon gate; step 7: removing the
photoresist on the top of said first dielectric layer, and with
said first dielectric layer as a mask, performing local thermal
oxidation to form a local thermal oxide layer, wherein said local
thermal oxide layer extends from said drain-forming region to the
bottom of said polysilicon gate, and then removing said first
dielectric layer; said first oxide layer located at the bottom of
said polysilicon gate and not overlaid with said local thermal
oxide layer constitutes a second gate dielectric section and the
overlap between said local thermal oxide layer extending to the
bottom of said polysilicon gate and said first oxide layer
constitutes a first gate dielectric section; said first gate
dielectric section and said second gate dielectric section are
connected horizontally to form a gate dielectric layer; said first
gate dielectric section is located in the overlap between said
drain region and said polysilicon gate; the GIDL effect in the
device can be reduced by increasing the thickness of said first
gate dielectric section, and the driving current of the device can
be increased by reducing the thickness of said second gate
dielectric section; step 8: performing resource/drain implantation
of impurity having the first conductivity type to form heavily
doped resource/drain implanted regions on both sides of said
polysilicon gate, wherein each said resource/drain implanted region
is self-aligned with a corresponding side of said polysilicon gate,
the overlap between said resource/drain implanted region on the
first side of said polysilicon gate and said lightly doped drain
region forms a drain region, and said resource/drain implanted
region on the second side of said polysilicon gate forms a source
region; said source region and said drain region are unsymmetrical
in structure, wherein the horizontal junction width of said drain
region is greater than that of said source region, and the vertical
junction depth of said drain region is greater than that of said
source region; the breakdown voltage of the device can be raised by
increasing the horizontal and vertical junction depths of said
drain region, and the horizontal dimension of the device can be
diminished by reducing the horizontal and vertical junction depths
of said source region.
9. The method of manufacturing a MOSFET of claim 8, wherein said
semiconductor substrate is a silicon substrate.
10. The method of manufacturing the MOSFET of claim 8, wherein
prior to performing said source/drain implantation in Step 8, side
walls are formed on the sides of said polysilicon gate by
deposition and etching processes; when performing said source/drain
implantation, said side walls on the two sides of said polysilicon
gate are taken as the boundaries for self-alignment, said
source/drain implantation is performed at a tilt angle, said
source/drain implanted regions formed thereby extend horizontally
to the bottom of said side walls, and the breadth of the horizontal
extension of said source/drain implanted regions is greater than
the maximum horizontal breadth of said side walls.
11. The method of manufacturing a MOSFET of claim 10, wherein the
angle between the ion beam and the vertical direction is greater
than 10 degrees and the implantation dose exceeds 5E14 cm.sup.-2 in
said source/drain implantation.
12. The method of manufacturing a MOSFET of claim 8, wherein the
angle between the ion beam and the vertical direction is greater
than 10 degrees and the implantation dose exceeds 5E14 cm.sup.-2 in
said ion implantation of dopants to form a lightly doped drain
region in Step 6.
13. The method of manufacturing a MOSFET of claim 8, wherein the
thickness of said first dielectric layer is between 50 and 300
angstroms.
14. The method of manufacturing a MOSFET of claim 8, wherein the
thickness of said local thermal oxide layer is between 30 and 300
angstroms.
15. The method of manufacturing a MOSFET of claim 8, wherein the
MOSFET is an N-type device, with the first conductivity type being
N-type and the second conductivity type being P-type;
alternatively, the MOSFET is a P-type device, with the first
conductivity type being P-type and the second conductivity type
being N-type.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] The present application claims priority to Chinese Patent
Application No. 201610566545.8 filed on Jul. 19, 2016, the entirety
of which is incorporated by reference herein.
TECHNICAL FIELD
[0002] The present invention relates to the field of semiconductor
integrated circuit, more particularly to a metal-oxide
semiconductor field-effect transistor (MOSFET); the present
invention further relates to a method for manufacturing the
MOSFET.
BACKGROUND OF THE INVENTION
[0003] For MOS devices frequently used in current semiconductor
fabrication technology, the existing MOSFET is structured as shown
in FIG. 1. Taking an N-type MOSFET as an example, the existing
MOSFET includes:
[0004] P-type well region 101 formed in the surface of the
semiconductor substrate.
[0005] A gate dielectric layer, such as a gate oxide layer 102, and
a polysilicon gate sequentially formed on the surface of said well
region 101.
[0006] Side walls 105 formed on both sides of said polysilicon gate
103.
[0007] Lightly doped drain regions 104 and heavily doped
source/drain implanted regions 106 are formed in said well region
101 on both sides of said polysilicon gate 103, wherein said
lightly doped drain regions 104 are self-aligned with the sides of
said polysilicon gate 103, and said source/drain implanted regions
106 are self-aligned with the sides of said side walls 105 on both
sides of said polysilicon gate 103. The overlap between said
lightly doped drain region 104 and said source/drain implanted
region 106 on one side of said polysilicon gate 103 constitutes the
source region, and the overlap between said lightly doped drain
region 104 and said source/drain implanted region 106 on the other
side of said polysilicon gate 103 constitutes the drain region.
[0008] As described in FIG. 1, said source region and said drain
region of the existing MOSFET are totally symmetrical and have
identical performance, such as breakdown voltage, parasitic
resistance and capacitance.
[0009] For the existing structure, the breakdown voltage of the
device needs to be raised by increasing the concentration of
impurity in the source and drain regions, and the junction depths
of the source and drain regions. To avoid source/drain punch
through, the channel of the device will have to be increased
accordingly with the junction depths of the source and drain
regions, so raising the breakdown voltage of the device is in
contradiction with reducing the dimensions of the device. For
power-related applications which need an array of devices, the
increase in the size of individual devices significantly influences
the size of the whole chip.
[0010] At the same time, in prior art, the thickness of gate oxide
layer 102 of the device needs to be reduced, in order to reduce the
gate-induced drain leakage (GIDL) current, which is induced by the
high electric field between gate and drain, around the border
between the source and drain junctions and polysilicon gate 103.
However, the thickening of gate oxide layer 102 will be accompanied
by the weakening of the current driving capability of the device,
so in the existing structure, reducing GIDL is in contradiction
with increasing the current driving capability of the device.
SUMMARY OF THE INVENTION
[0011] The present invention aims to provide a MOSFET, which
increases the breakdown voltage of the device while reducing its
dimensions, and reduces the GIDL effect in the device while
increasing its current driving capability.
[0012] To solve e.g., the above technological problems, the MOSFET
provided in the present invention includes:
[0013] A well region of the second conductivity type formed in the
surface of the semiconductor substrate;
[0014] A gate dielectric layer and a polysilicon gate sequentially
formed on the surface of the well region;
[0015] A doped source region of the first conductivity type and a
doped drain region of the first conductivity type respectively
formed in the surface of the well region;
[0016] Wherein, the drain region is self-aligned with a first side
of said polysilicon gate, and the source region is self-aligned
with a second side of said polysilicon gate.
[0017] The source region and the drain region are unsymmetrical in
structure, wherein the horizontal junction depth of the drain
region is greater than that of the source region, and the vertical
junction depth of the drain region is greater than that of the
source region; the breakdown voltage of the device can be raised by
increasing the horizontal and vertical junction depths of said
drain region, and the horizontal dimension of the device can be
diminished by reducing the horizontal and vertical junction depths
of the source region.
[0018] The gate dielectric layer is unsymmetrical in structure,
wherein the gate dielectric layer includes a first gate dielectric
section and a second gate dielectric section which are horizontally
connected; the thickness of the first gate dielectric section is
greater than that of the second gate dielectric section;
horizontally, the drain region extends beyond the first side of the
polysilicon gate to the bottom of the polysilicon gate, thereby
forming an overlap between the drain region and the polysilicon
gate, with the first gate dielectric section located therein; and
the GIDL effect in the device can be reduced by increasing the
thickness of the first gate dielectric section, and the driving
current of the device can be increased by reducing the thickness of
the second gate dielectric section.
[0019] As a further improvement, the semiconductor substrate is a
silicon substrate.
[0020] As a further improvement, the source region is formed by a
heavily doped source/drain implanted region having the first
conductivity type, the drain region is formed by an overlap between
the heavily doped source/drain implanted region and a lightly doped
drain region having the first conductivity type, the source/drain
implanted region of the source region and the source/drain
implanted region of the drain region are formed by the same
process, and the junction depth of the drain region is adjusted
through the lightly doped drain region.
[0021] As a further improvement, the gate dielectric layer is a
gate oxide layer.
[0022] As a further improvement, the second gate dielectric section
is a thermal oxide layer or deposited oxide layer, and the first
gate dielectric section adds a local oxide layer to the second gate
dielectric section.
[0023] As a further improvement, side walls are formed on the sides
of the polysilicon gate.
[0024] As a further improvement, the MOSFET is an N-type device,
with the first conductivity type being N-type and the second
conductivity type being P-type; alternatively, the MOSFET is a
P-type device, with the first conductivity type being P-type and
the second conductivity type being N-type.
[0025] To solve the above technological problems, the method for
manufacturing a MOSFET provided in the present invention
includes:
[0026] Step 1: providing a semiconductor substrate and introducing
dopant having the second conductivity type in the surface thereof
to form a well region;
[0027] Step 2: forming a first oxide layer on the surface of the
semiconductor substrate by thermal oxidation or chemical vapor
deposition;
[0028] Step 3: forming a polysilicon gate on the surface of the
first oxide layer by chemical vapor deposition and
photolithography, wherein the polysilicon gate covers the surface
of the well region via the first oxide layer;
[0029] Step 4: forming a first dielectric layer by chemical vapor
deposition, wherein the first dielectric layer is made of silicon
nitride or silicon oxynitride;
[0030] Step 5: removing the first dielectric layer in the
drain-forming region with photolithography and etching processes,
while retaining the first dielectric layer in the source-forming
region, wherein the drain-forming region is located outside a first
side of the polysilicon gate, the source-forming region is located
outside a second side of the polysilicon gate, the reserved part of
the first dielectric layer further extends from the source-forming
region to the top of the polysilicon gate, and the removed part of
the first dielectric layer further extends from the drain-forming
region to the top of the polysilicon gate.
[0031] Step 6: with the photoresist on the first dielectric layer
and the top thereof as a mask, conducting ion implantation of
dopants having the first conductivity type to form a lightly doped
drain region, wherein the lightly doped drain region is
self-aligned with the first side of the polysilicon gate; the
junction depth of the drain region is adjusted through ion
implantation of the lightly doped drain region; and horizontally,
the lightly doped drain region extends from the first side of the
polysilicon gate to the bottom thereof, thereby forming an overlap
between the drain region and the polysilicon gate;
[0032] Step 7: removing the photoresist on the top of the first
dielectric layer, and with the first dielectric layer as a mask,
performing local thermal oxidation to form a local thermal oxide
layer, wherein the local thermal oxide layer extends from the
drain-forming region to the bottom of the polysilicon gate, and
then removing the first dielectric layer;
[0033] The overlap between the local thermal oxide layer extending
to the bottom of the polysilicon gate and the first oxide layer
constitutes a first gate dielectric section, and the part of the
first oxide layer located at the bottom of the polysilicon gate and
not overlaid with the local thermal oxide layer constitutes a
second gate dielectric section;
[0034] The first gate dielectric section and the second gate
dielectric section are connected horizontally to form a gate
dielectric layer; the first gate dielectric section is located in
the overlap between the drain region and the polysilicon gate; the
GIDL effect in the device can be reduced by increasing the
thickness of the first gate dielectric section, and the driving
current of the device can be increased by reducing the thickness of
the second gate dielectric section.
[0035] Step 8: performing resource/drain implantation of impurity
having the first conductivity type to form heavily doped
resource/drain implanted regions on both sides of the polysilicon
gate, wherein each the resource/drain implanted region is
self-aligned with a corresponding side of the polysilicon gate, the
overlap between the resource/drain implanted region on the first
side of the polysilicon gate and the lightly doped drain region
forms a drain region, and the resource/drain implanted region on
the second side of the polysilicon gate forms a source region.
[0036] The source region and the drain region are unsymmetrical in
structure, wherein the horizontal junction depth of the drain
region is greater than that of the source region, and the vertical
junction depth of the drain region is greater than that of the
source region; the breakdown voltage of the device can be raised by
increasing the horizontal and vertical junction depths of the drain
region, and the horizontal dimension of the device can be
diminished by reducing the horizontal and vertical junction depths
of the source region.
[0037] As a further improvement, the semiconductor substrate is a
silicon substrate.
[0038] As a further improvement, prior to performing the
source/drain implantation in Step 8, side walls are formed on the
sides of the polysilicon gate by deposition and etching
processes.
[0039] When performing source/drain implantation, the side walls on
the two sides of the polysilicon gate are taken as the boundaries
for self-alignment, the source/drain implantation is performed at a
tilt angle, the source/drain implanted regions formed thereby
extend horizontally to the bottom of the side walls, and the
breadth of the horizontal extension of the source/drain implanted
regions is greater than the maximum horizontal breadth of the side
walls.
[0040] As a further improvement, the angle between the ion beam and
the vertical direction is greater than 10 degrees, and the
implantation dose exceeds 5E14 cm.sup.-2 in source/drain
implantation.
[0041] As a further improvement, the angle between the ion beam and
the vertical direction is greater than 10 degrees, and the
implantation dose exceeds 5E14 cm.sup.-2 in ion implantation of
dopants to form a lightly doped drain region in Step 6.
[0042] As a further improvement, the thickness of the first
dielectric layer is between 50 and 300 angstroms.
[0043] As a further improvement, the thickness of the local thermal
oxide layer is between 30 and 300 angstroms.
[0044] As a further improvement, the MOSFET is an N-type device,
with the first conductivity type being N-type and the second
conductivity type being P-type; alternatively, the MOSFET is a
P-type device, with the first conductivity type being P-type and
the second conductivity type being N-type.
[0045] In the present invention, the source region and the drain
region being configured to be unsymmetrical in structure makes it
possible to increase the breakdown voltage of the device by
increasing the horizontal and vertical junction depths of the drain
region alone; configured as independent of the drain region in the
present invention, the source region needs not be able to endure a
high voltage, so the junction depth of the source region is
configured to be smaller than that of the drain region, which means
the horizontal dimension of the device can be diminished by
reducing the horizontal and vertical junction depths of the source
region; that is to say, the source region in the present invention
can adopt a relatively smaller junction depth, thereby reducing the
dimensions of the device; therefore, the present invention can
increase the breakdown voltage of the device while reducing the
dimensions thereof.
[0046] In the present invention, the drain region adopts a
relatively greater junction depth, and horizontally extends from
the first side of the polysilicon gate to the bottom thereof,
thereby forming an overlap between the drain region and the
polysilicon gate. The gate dielectric layer is divided into two
sections, the location of the first gate dielectric section
coincides with the overlap, and the relative position between the
two can be adjusted by self-alignment to locate the first gate
dielectric section in the overlap between the drain region and the
polysilicon gate. In accordance with the present invention, the
GIDL effect in the device can be reduced by increasing the
thickness of the first gate dielectric section, and the driving
current of the device can be increased by reducing the thickness of
the second gate dielectric section. Therefore, the present
invention can reduce the GIDL effect in the device and at the same
time increase its current driving capability.
BRIEF DESCRIPTION OF THE DRAWINGS
[0047] The present invention will be described in detail by
reference to the accompanying drawings and specific
embodiments:
[0048] FIG. 1 describes the structure of the existing (prior art)
MOSFET;
[0049] FIG. 2 describes the structure of the MOSFET in accordance
with an embodiment of the present invention;
[0050] FIGS. 3A-3E describe the device structures in each step of
the manufacturing process for MOSFET in accordance with an
embodiment of the present invention.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0051] As shown in FIGS. 3A-3E, which describe the device
structures in each step of the manufacturing process for MOSFET in
accordance with the embodiment of the present invention, the MOSFET
in accordance with the embodiment of the present invention
includes:
[0052] A well region 1 of the second conductivity type formed in
the surface of the semiconductor substrate. Preferably, the
semiconductor substrate is a silicon substrate.
[0053] A gate dielectric layer and a polysilicon gate 3
sequentially formed on the surface of well region 1.
[0054] A doped source region of the first conductivity type and a
doped drain region of the first conductivity type respectively
formed in the surface of well region 1. Preferably, the source
region is formed by a heavily doped source/drain implanted region 7
having the first conductivity type, the drain region is formed by
an overlap between heavily doped source/drain implanted region 7
and a lightly doped drain region 5 having the first conductivity
type, source/drain implanted region 7 of the source region and
source/drain implanted region 7 of the drain region are formed by
the same process, and the junction depth of the drain region is
adjusted through lightly doped drain region 5.
[0055] Side walls 6 formed on the sides of polysilicon gate 3,
wherein the drain region is self-aligned with the first side of
polysilicon gate 3 and the source region is self-aligned with the
other side of polysilicon gate 3. Preferably, each source/drain
implanted region 7 is self-aligned with the side wall 6 on the
corresponding side of polysilicon gate 3, and horizontally extends
to the bottom of polysilicon gate 3 on the corresponding side, with
the breadth of the horizontal extension of source/drain implanted
regions 7 to the bottom of polysilicon gate 3 being greater than
the maximum horizontal breadth of side walls 6. Lightly doped drain
region 5 is self-aligned with the first side of polysilicon gate 3,
and horizontally extends from the first side of polysilicon gate 3
to the bottom thereof, thereby forming an overlap between the drain
region and polysilicon gate 3;
[0056] As shown in FIG. 2, in accordance with an embodiment of the
present invention, the source region and the drain region are
unsymmetrical in structure, wherein the horizontal junction depth
of the drain region is greater than that of the source region, and
the vertical junction depth of the drain region is greater than
that of the source region; the breakdown voltage of the device can
be raised by increasing the horizontal and vertical junction depths
of the drain region, and the horizontal dimension of the device can
be diminished by reducing the horizontal and vertical junction
depths of the source region.
[0057] The gate dielectric layer is unsymmetrical in structure,
wherein the gate dielectric layer includes a first gate dielectric
section 4 and a second gate dielectric section 2 which are
horizontally connected; the thickness of first gate dielectric
section 4 is greater than that of second gate dielectric section 2;
first gate dielectric section 4 is located in the overlap between
the drain region and polysilicon gate 3; and the GIDL effect in the
device can be reduced by increasing the thickness of first gate
dielectric section 4, and the driving current of the device can be
increased by reducing the thickness of second gate dielectric
section 2. Preferably, second gate dielectric section 2 is a
thermal oxide layer or deposited oxide layer, and first gate
dielectric section 4 adds a local oxide layer to second gate
dielectric section 2.
[0058] In accordance with an embodiment of the present invention,
the MOSFET is an N-type device, with the first conductivity type
being N-type and the second conductivity type being P-type;
alternatively, the MOSFET is a P-type device, with the first
conductivity type being P-type and the second conductivity type
being N-type.
[0059] FIGS. 3A-3E describe the device structures in each step of
the manufacturing process for MOSFET in accordance with an
embodiment of the present invention. A method of manufacturing the
MOSFET in accordance with an embodiment, comprising the steps
of
[0060] Step 1: as shown in 3A, providing a semiconductor substrate
and introducing dopant having the second conductivity type in the
surface thereof to form well region 1. Preferably, said
semiconductor substrate is a silicon substrate.
[0061] Step 2: as shown in 3A, forming first oxide layer 2 on the
surface of said semiconductor substrate by thermal oxidation or
chemical vapor deposition.
[0062] Step 3: as shown in 3A, forming polysilicon gate 3 on the
surface of first oxide layer 2 by chemical vapor deposition and
photolithography, wherein polysilicon gate 3 covers the surface of
well region 1 via first oxide layer 2.
[0063] Step 4: as shown in 3B, forming a first dielectric layer 201
by chemical vapor deposition, wherein first dielectric layer 201 is
made of silicon nitride or silicon oxynitride. Preferably, the
thickness of first dielectric layer 201 is between 50 and 300
angstroms.
[0064] Step 5: as shown in FIG. 3C, forming the pattern of a
photoresist 202 with photolithography, removing first dielectric
layer 201 in the drain-forming region with etching process, while
retaining first dielectric layer 201 in the source-forming region,
wherein the drain-forming region is located outside the first side
of polysilicon gate 3, the source-forming region is located outside
the second side of polysilicon gate 3, the reserved part of first
dielectric layer 201 further extends from the source-forming region
to the top of polysilicon gate 3, and the removed part of first
dielectric layer 201 further extends from the drain-forming region
to the top of polysilicon gate 3.
[0065] Step 6: as shown in FIG. 3C, with photoresist 202 on first
dielectric layer 201 and the top thereof as a mask, conducting ion
implantation of dopants having the first conductivity type to form
a lightly doped drain region 5, wherein lightly doped drain region
5 is self-aligned with the first side of polysilicon gate 3; the
junction depth of the drain region is adjusted through ion
implantation of lightly doped drain region 5; and horizontally,
lightly doped drain region 5 extends from the first side of
polysilicon gate 3 to the bottom thereof, thereby forming an
overlap between the drain region and polysilicon gate 3.
Preferably, the angle between the ion beam and the vertical
direction is greater than 10 degrees, and the implantation dose
exceeds 5E14 cm.sup.-2 in source/drain implantation.
[0066] Step 7: as shown in FIG. 3D, removing photoresist 202 on the
top of first dielectric layer 201, and using first dielectric layer
201 as a mask, performing local thermal oxidation to form a local
thermal oxide layer 4, wherein local thermal oxide layer 4 extends
from the drain-forming region to the bottom of polysilicon gate 3,
and then removing first dielectric layer 201. Preferably, the
thickness of local thermal oxide layer 4 is between 30 and 300
angstroms.
[0067] The overlap between local thermal oxide layer 4 extending to
the bottom of polysilicon gate 3 and first oxide layer 2
constitutes first gate dielectric section 4, and first oxide layer
2 located at the bottom of polysilicon gate 3 and not overlaid with
local thermal oxide layer 4 constitutes second gate dielectric
section 2;
[0068] First gate dielectric section 4 and second gate dielectric
section 2 are horizontally connected to form the gate dielectric
layer; first gate dielectric section 4 is located in the overlap
between the drain region and polysilicon gate 3; the GIDL effect in
the device can be reduced by increasing the thickness of first gate
dielectric section 4, and the driving current of the device can be
increased by reducing the thickness of second gate dielectric
section 2.
[0069] Step 8: as shown in FIG. 3E, prior to performing
source/drain implantation, side walls 6 are formed on the sides of
polysilicon gate 3 with deposition and etching processes.
[0070] As shown in FIG. 2, when performing resource/drain
implantation of impurity having the first conductivity type,
heavily doped resource/drain implanted regions 7 are formed on both
sides of polysilicon gate 3; side walls 6 on the two sides of
polysilicon gate 3 are taken as the boundaries for self-alignment,
source/drain implantation is performed at a tilt angle,
source/drain implanted regions 7 formed thereby extend horizontally
to the bottom of side walls 6, and the breadth of the horizontal
extension of source/drain implanted regions 7 is greater than the
maximum horizontal breadth of side walls 6. Preferably, the angle
between the ion beam and the vertical direction is greater than 10
degrees, and the implantation dose exceeds 5E14 cm.sup.-2 in
source/drain implantation.
[0071] The overlap between resource/drain implanted region 7 on the
first side of polysilicon gate 3 and lightly doped drain region 5
forms the drain region, and resource/drain implanted region 7 on
the second side of polysilicon gate 3 forms the source region.
[0072] The source and drain regions are unsymmetrical in structure,
wherein the horizontal junction depth of the drain region is
greater than that of the source region, and the vertical junction
depth of the drain region is greater than that of the source
region; the breakdown voltage of the device can be raised by
increasing the horizontal and vertical junction depths of the drain
region, and the horizontal dimension of the device can be
diminished by reducing the horizontal and vertical junction depths
of the source region.
[0073] In accordance with the embodiment of the present invention,
the MOSFET is an N-type device, with the first conductivity type
being N-type and the second conductivity type being P-type. In
alternative embodiments, the MOSFET may be a P-type device, with
the first conductivity type being P-type and the second
conductivity type being N-type.
[0074] The present invention has been described in great detail by
reference to a specific embodiment. But this does not intend to
limit the scope of the present invention. Without departing from
the spirit of the present invention, a person having ordinary
skills in the art may make various modifications and improvements,
which shall be considered to fall within the scope of the present
invention.
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