U.S. patent application number 15/003765 was filed with the patent office on 2017-07-27 for semiconductor structure and fabricating method thereof.
The applicant listed for this patent is Micron Technology, Inc.. Invention is credited to Tieh-Chiang Wu.
Application Number | 20170213885 15/003765 |
Document ID | / |
Family ID | 59360629 |
Filed Date | 2017-07-27 |
United States Patent
Application |
20170213885 |
Kind Code |
A1 |
Wu; Tieh-Chiang |
July 27, 2017 |
SEMICONDUCTOR STRUCTURE AND FABRICATING METHOD THEREOF
Abstract
A semiconductor structure and a method of fabricating thereof
are provided. The semiconductor structure includes a substrate and
a capacitor structure. The substrate has a first blind hole and a
trench. The first blind hole communicates with the trench. The
first blind hole has a first depth, and the trench has a second
depth smaller than the first depth. The capacitor structure
includes a first inner conductor, a first inner insulator, and an
outer conductor. The first inner conductor is in the first blind
hole. The first inner insulator surrounds the first inner
conductor. The outer conductor has a first portion surrounding the
first inner insulator and an extending portion extending from the
first portion. The first portion is in the first blind hole, and
the extending portion is in the trench. The first inner conductor
is separated from the outer conductor by the first inner
insulator.
Inventors: |
Wu; Tieh-Chiang; (Taoyuan
City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Micron Technology, Inc. |
Boise |
ID |
US |
|
|
Family ID: |
59360629 |
Appl. No.: |
15/003765 |
Filed: |
January 21, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/3065 20130101;
H01L 28/91 20130101; H01L 29/66181 20130101 |
International
Class: |
H01L 49/02 20060101
H01L049/02 |
Claims
1. A semiconductor structure, comprising: a substrate having a
first blind hole and a trench, the first blind hole communicating
with the trench, the first blind hole having a first depth, and the
trench having a second depth smaller than the first depth; and a
capacitor structure, comprising: a first inner conductor in the
first blind hole; a first inner insulator surrounding the first
inner conductor; and an outer conductor having a first portion
surrounding the first inner insulator and an extending portion
extending from the first portion, the first portion in the first
blind hole, and the extending portion in the trench, wherein the
first inner conductor is separated from the outer conductor by the
first inner insulator.
2. The semiconductor structure of claim 1, wherein an area of the
extending portion is smaller than a total area of the first
portion, the first inner insulator and the first inner conductor in
plan view.
3. The semiconductor structure of claim 1, wherein a thickness of
the extending portion is smaller than a total thickness of the
first portion, the first inner insulator and the first inner
conductor.
4. The semiconductor structure of claim 1, further comprising: a
second blind hole communicating with the trench in the substrate; a
second portion of the outer conductor in the second blind hole; a
second inner insulator embedding in the second portion of the outer
conductor; and a second inner conductor embedding in the second
inner insulator.
5. The semiconductor structure of claim 4, further comprising a
first metal layer in contact with the outer conductor, and a second
metal layer in contact with the first inner conductor and the
second inner conductor.
6. The semiconductor structure of claim 1, further comprising an
outer insulator between the substrate and the outer conductor.
7. The semiconductor structure of claim 6, wherein the outer
insulator has a thickness smaller than the second depth of the
trench.
8. The semiconductor structure of claim 6, wherein a combined
thickness of the outer insulator and the extending portion is equal
to the second depth of the trench.
9. The semiconductor structure of claim 1, wherein a thickness of
the extending portion is equal to the second depth of the
trench.
10. The semiconductor structure of claim 1, wherein a thickness of
the extending portion is different from a thickness of the first
portion.
11. The semiconductor structure of claim 1, wherein the capacitor
structure is coplanar with the substrate.
12. A method of fabricating a semiconductor structure, comprising:
forming a first blind hole and a trench in a substrate, the first
blind hole communicating with the trench, the first blind hole
having a first depth, and the trench having a second depth smaller
than the first depth; forming an outer conductor which has a first
portion in the first blind hole and an extending portion in the
trench; forming a first inner insulator over the first portion; and
forming a first inner conductor over the first inner insulator and
separated from the first portion by the first inner insulator.
13. The method of claim 12, further comprising: forming a second
blind hole communicating with the trench in the substrate; forming
a second portion of the outer conductor in the second blind hole;
forming a second inner insulator over the second portion; and
forming a second inner conductor over the second inner insulator
and separated from the second portion by the second inner
insulator.
14. The method of claim 13, wherein the second blind hole has a
third depth larger than the second depth of the trench.
15. The method of claim 13, wherein the first depth of the first
blind hole is different from the third depth of the second blind
hole.
16. The method of claim 12, further comprising forming an outer
insulator in the first blind hole and the trench, before forming
the outer conductor.
17. The method of claim 16, wherein a thickness of the outer
insulator is smaller than the second depth of the trench.
18. The method of claim 12, wherein the outer conductor fills the
trench.
19. The method of claim 12, further comprising forming a first
metal layer in contact with the outer conductor and a second metal
layer in contact with the first inner conductor and the second
inner conductor.
20. The method of claim 12, wherein forming the first blind hole
and the trench is by laser drilling, dry etching, or wet etching.
Description
BACKGROUND
[0001] Field of Invention
[0002] The present invention relates to a semiconductor structure
and a fabricating method thereof. More particularly, the present
invention relates to a semiconductor structure having connected
capacitors embedded in substrate and a fabricating method
thereof.
[0003] Description of Related Art
[0004] The semiconductor integrated circuit (IC) industry has
experienced rapid growth. During the growth, size or geometry of
the semiconductor devices has greatly decreased. Moreover, in order
to promote the performance of semiconductor devices, the placement
of decoupling capacitors (DECAPs) is a common approach to reduce
the power supply noises and voltage fluctuations and maintain power
and signal integrity. Generally, the decoupling capacitor is used
in many integrated circuits such as CMOS.
[0005] However, because the voltages provided by different power
supplies vary within wide limits, it is difficult to implement
sufficient decoupling capacitors for all types of power supplies.
Specifically, the power supplies providing high voltages are
usually need the decoupling capacitors with high capacitance to
reduce noises. Generally, decoupling capacitors with high
capacitance usually require a large amount of installation space
which makes it difficult to find space in small-size semiconductor
devices to provide enough decoupling capacitors for each power
supply. Accordingly, a semiconductor structure including an
improved capacitor structure with high capacitance at small size
and a fabricating method of the semiconductor structure are
required.
SUMMARY
[0006] The invention provides a semiconductor structure. The
semiconductor structure includes a substrate and a capacitor
structure. The substrate has a first blind hole and a trench. The
first blind hole communicates with the trench. The first blind hole
has a first depth, and the trench has a second depth smaller than
the first depth. The capacitor structure includes a first inner
conductor, a first inner insulator, and an outer conductor. The
first inner conductor is in the first blind hole. The first inner
insulator surrounds the first inner conductor. The outer conductor
has a first portion surrounding the first inner insulator and an
extending portion extending from the first portion. The first
portion is in the first blind hole, and the extending portion is in
the trench. The first inner conductor is separated from the outer
conductor by the first inner insulator.
[0007] In one embodiment, an area of the extending portion is
smaller than a total area of the first portion, the first inner
insulator and the first inner conductor in plan view.
[0008] In one embodiment, a thickness of the extending portion is
smaller than a total thickness of the first portion, the first
inner insulator and the first inner conductor.
[0009] In one embodiment, the semiconductor structure further
includes a second blind hole, a second portion of the outer
conductor, a second inner insulator, and a second inner conductor.
The second blind hole communicates with the trench in the
substrate. The second portion of the outer conductor is in the
second blind hole. The second inner insulator embeds in the second
portion of the outer conductor. The second inner conductor embeds
in the second inner insulator.
[0010] In one embodiment, the semiconductor structure further
includes a first metal layer in contact with the outer conductor,
and a second metal layer in contact with the first inner conductor
and the second inner conductor.
[0011] In one embodiment, the semiconductor structure further
includes an outer insulator between the substrate and the outer
conductor.
[0012] In one embodiment, the outer insulator has a thickness
smaller than the second depth of the trench.
[0013] In one embodiment, a combined thickness of the outer
insulator and the extending portion is equal to the second depth of
the trench.
[0014] In one embodiment, a thickness of the extending portion is
equal to the second depth of the trench.
[0015] In one embodiment, a thickness of the extending portion is
different from a thickness of the first portion.
[0016] In one embodiment, the capacitor structure is coplanar with
the substrate.
[0017] The invention provides a method of fabricating a
semiconductor structure, and the method includes following steps. A
first blind hole and a trench is formed in a substrate. The first
blind hole communicates with the trench. The first blind hole has a
first depth and the trench has a second depth smaller than the
first depth. An outer conductor which has a first portion in the
first blind hole and an extending portion in the trench is formed.
A first inner insulator is formed over the first portion. A first
inner conductor is formed over the first inner insulator and
separated from the first portion by the first inner insulator.
[0018] In one embodiment, the method further includes the following
steps. A second blind hole communicating with the trench is formed
in the substrate. A second portion of the outer conductor is formed
in the second blind hole. A second inner insulator is formed over
the second portion. A second inner conductor is formed over the
second inner insulator and separated from the second portion by the
second inner insulator.
[0019] In one embodiment, the second blind hole has a third depth
larger than the second depth of the trench.
[0020] In one embodiment, the first depth of the first blind hole
is different from the third depth of the second blind hole.
[0021] In one embodiment, the method further includes forming an
outer insulator in the first blind hole and the trench, before
forming the outer conductor.
[0022] In one embodiment, a thickness of the outer insulator is
smaller than the second depth of the trench.
[0023] In one embodiment, the outer conductor fills the trench.
[0024] In one embodiment, the method further includes forming a
first metal layer in contact with the outer conductor and a second
metal layer in contact with the first inner conductor and the
second inner conductor.
[0025] In one embodiment, the first blind hole and the trench are
formed by laser drilling, dry etching, or wet etching.
[0026] It is to be understood that both the foregoing general
description and the following detailed description are by examples,
and are intended to provide further explanation of the invention as
claimed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The invention can be more fully understood by reading the
following detailed description of the embodiment, with reference
made to the accompanying drawings as follows:
[0028] FIG. 1 is a flow chart of a method of fabricating a
semiconductor structure, in accordance with one embodiment.
[0029] FIGS. 2A, 3A, 4A, 5A and 6A are plan views of a
semiconductor structure at various stages of fabrication, in
accordance with one embodiment.
[0030] FIGS. 2B, 3B, 4B, 5B and 6B are cross-sectional views of
FIGS. 2A, 3A, 4A, 5A and 6A along the line AA', respectively.
[0031] FIG. 7 is a cross-sectional view of a semiconductor
structure at a stage of fabrication, in accordance with one
embodiment.
[0032] FIG. 8 is a plan view of a semiconductor structure at a
stage of fabrication, in accordance with one embodiment.
DETAILED DESCRIPTION
[0033] Reference will now be made in detail to the present
embodiments of the invention, examples of which are illustrated in
the accompanying drawings. Wherever possible, the same reference
numbers are used in the drawings and the description to refer to
the same or like parts.
[0034] The following embodiments are disclosed with accompanying
diagrams for detailed description. For illustration clarity, many
details of practice are explained in the following descriptions.
However, it should be understood that these details of practice do
not intend to limit the present invention. That is, these details
of practice are not necessary in parts of embodiments of the
present invention. Furthermore, for simplifying the drawings, some
of the conventional structures and elements are shown with
schematic illustrations.
[0035] It will be understood that when an element is referred to as
being "on" another element, it can be directly on the other element
or intervening elements may be present therebetween. Furthermore,
relative terms, such as "lower" or "bottom" and "upper" or "top",
may be used herein to describe one element's relationship to
another element as illustrated in the Figures. It will be
understood that relative terms are intended to encompass different
orientations of the device in addition to the orientation depicted
in the Figures.
[0036] It will be understood that, although the terms first,
second, third etc. may be used herein to describe various elements,
components, regions, layers and/or sections, these elements,
components, regions, layers and/or sections should not be limited
by these terms. These terms are only used to distinguish one
element, component, region, layer or section from another element,
component, region, layer or section. Thus, a first element,
component, region, layer or section discussed below could be termed
a second element, component, region, layer or section without
departing from the teachings of the present invention.
[0037] As aforementioned problems, it is difficult to implement
sufficient decoupling capacitors for all types of power supplies.
Further, decoupling capacitors with high capacitance usually
require a large amount of installation space in semiconductor
devices. Accordingly, the instant disclosure provides a
semiconductor structure including an innovative capacitor structure
with high capacitance and a fabricating method of the semiconductor
structure. The capacitance of the capacitor structure can be easily
adjusted for satisfying all types of power supplies at small size.
The fabricating method has advantages such as simple process and
low process cost.
[0038] FIG. 1 is a flow chart of a method of fabricating a
semiconductor structure, in accordance with one embodiment. FIGS.
2A, 3A, 4A, 5A and 6A are plan views of a semiconductor structure
at various stages of fabrication. FIGS. 2B, 3B, 4B, 5B and 6B are
cross-sectional views of FIGS. 2A, 3A, 4A, 5A and 6A along the line
AA', respectively.
[0039] The flow chart 100 of FIG. 1 begins with operation 110.
Please referring to FIGS. 2A and 2B, a first blind hole 222, a
second blind hole 224, and a trench 226 are formed in a substrate
210. Both the first blind hole 222 and the second blind hole 224
communicate with the trench 226. Therefore, the first blind hole
222 communicates with the second blind hole 224 by the trench 226.
Further, the first blind hole 222, the second blind hole 224, and
the trench 226 constitute a recess 220. Specifically, the recess
220 is dumbbell-shaped in plan view as shown in FIG. 2A.
[0040] As shown in FIG. 2B, the first blind hole 222 has a first
depth d.sub.1, the trench 226 has a second depth d.sub.2, and the
second blind hole 224 has a third depth d.sub.3. The second depth
d.sub.2 of the trench 226 is smaller than the first depth d.sub.1
of the first blind hole 222 and smaller than the third depth
d.sub.3 of the second blind hole 224 as well.
[0041] In one embodiment, the recess 220 is formed by laser
drilling, dry etching, or wet etching. For example, the substrate
210 may be etched by dry etching such as reactive ion etching (RIE)
to form the recess 220. The RIE includes but not limited to
cryogenic deep reactive ion etching (DRIE) or Bosch deep reactive
ion etching. In one embodiment, the recess 220 is formed by a dry
etching process. At first, a photoresist (PR) layer (not shown) is
formed over the substrate 210, which has a first opening, a second
opening and a third opening. The second opening is smaller than
both first opening and third opening. Subsequently, the substrate
210 is etched through the first opening to form the first blind
hole 222, through the second opening to form the trench 226, and
through the third opening to form the second blind hole 224.
Because of RIE lag, the second depth d.sub.2 of the trench 226 is
smaller than both the first depth d.sub.1 of the first blind hole
222 and the third depth d.sub.3 of the second blind hole 224 as
shown in FIG. 2B.
[0042] According to the dry etching process described above, the
depths of blind hole and the trench can be controlled by adjusting
size of openings in the photoresist layer. Therefore, in one
embodiment, the first depth d.sub.1 of the first blind hole 222 is
different from the third depth d.sub.3 of the second blind hole
224.
[0043] In one embodiment, the substrate 210 is die or silicon
wafer, which may includes active components, such as N-channel
field effect transistors (NFETs), P-channel field effect
transistors (PFETs), metal-oxide-semiconductor field effect
transistors (MOSFETs), complementary metal-oxide-semiconductor
transistors (CMOSs), high voltage transistors, and/or high
frequency transistors, and/or passive components such as resistors
and/or inductors, and/or combinations thereof. The silicon wafer
includes a material of Si, SiGe, SiGeC or SiC, a layered
semiconductor such as Si/SiGe or a silicon-on-insulator (SOI).
[0044] Continuing to operation 120 and referring to FIGS. 3A and
3B, an outer insulator 230 is formed in the first blind hole 222,
the second blind hole 224, and the trench 226. In one embodiment,
the outer insulator 230 is formed by chemical vapor deposition
(CVD), atomic layer deposition (ALD), physical vapor deposition
(PVD) or plasma-enhanced chemical vapor deposition (PECVD) and is
made of silicon nitride or silicon dioxide. In one embodiment, the
operation 120 is omitted.
[0045] It is worth noting that the outer insulator 230 has a
thickness t.sub.1 smaller than the second depth d.sub.2 of the
trench 226. In other words, the trench 226 is not filled with the
outer insulator 230. Therefore, the remaining part of the trench
226 is capable of being filled in other materials, after forming
the outer insulator 230 in the trench 226.
[0046] Continuing to operation 130 and referring to FIGS. 4A and
4B, an outer conductor 240 is formed over the outer insulator 230.
The outer conductor 240 has a first portion 242 in the first blind
hole 222, a second portion 244 in the second blind hole 224, and an
extending portion 246 in the trench 226. The extending portion 246
extends from the first portion 242 to the second portion 244.
Further, the outer insulator 230 and the extending portion 246 fill
the trench 226. That is, a combined thickness of the outer
insulator 230 and the extending portion 246 is equal to the second
depth d.sub.2 of the trench 226. The combined thickness is equal to
sum of the thickness t.sub.1 of the outer insulator 230 and a
thickness t.sub.2 of the extending portion 246. However, in an
alternative embodiment, the outer insulator 230 is omitted.
Therefore, the trench 226 is filled with the extending portion 246
only. In other words, a thickness of the extending portion 246 is
equal to the depth of the trench 226.
[0047] In one embodiment, the outer conductor 240 is formed by CVD,
ALD, PVD or PECVD and is made of any suitable conductive material
such as tungsten, aluminum, copper, polysilicon or alloy. By the
above forming methods, a thickness t.sub.2 of extending portion 246
may be different with a thickness t.sub.3 of the first portion
242.
[0048] Further, the first blind hole 222 is not filled with the
first portion 242 of the outer conductor 240 and the second blind
hole 224 is not filled with the second portion 244 of the outer
conductor 240 as well. Therefore, the remaining parts of the first
blind hole 222 and the second blind hole 224 are capable of being
filled in other materials.
[0049] Continuing to operation 140 and referring to FIGS. 5A and
5B, a first inner insulator 252 is formed over the first portion
242 and a second inner insulator 254 is formed over the second
portion 244. The forming methods and materials of the first inner
insulator 252 and the second inner insulator 254 can refer to the
embodiment of forming the outer insulator 230.
[0050] Continuing to operation 150 and referring to FIGS. 6A and
6B, a first inner conductor 262 is formed over the first inner
insulator 252 and a second inner conductor 264 is formed over the
second inner insulator 254 to form a semiconductor structure 200.
The outer insulator 230, the outer conductor 240, the first inner
insulator 252, the second inner insulator 254, the first inner
conductor 262 and the second inner conductor 264 form a capacitor
structure 270. In one embodiment, the capacitor structure 270 is
coplanar with the substrate 210 as shown in FIG. 6B. The forming
methods and materials of the first inner conductor 262 and the
second inner conductor 264 can refer to the embodiment of forming
the outer conductor 240.
[0051] In detail, the outer insulator 230 is between the substrate
210 and the outer conductor 240. The first inner conductor 262 is
in the first blind hole 222. The first inner insulator 252
conformally surrounds the first inner conductor 262. The first
portion 242 of the outer conductor 240 conformally surrounds the
first inner insulator 252. The first inner conductor 262 is
separated from the outer conductor 240 by the first inner insulator
252. Further, the second inner conductor 264 is in the second blind
hole 224. The second inner insulator 254 conformally surrounds the
second inner conductor 264. The second portion 244 of the outer
conductor 240 conformally surrounds the second inner insulator 254.
The second inner conductor 264 is separated from the outer
conductor 240 by the second inner insulator 254.
[0052] In other words, the first inner insulator 252 embeds in the
first portion 242 of the outer conductor 240 and the first inner
conductor 262 embeds in the first inner insulator 252. The second
inner insulator 254 embeds in the second portion 244 of the outer
conductor 240 and the second inner conductor 264 embeds in the
second inner insulator 254.
[0053] Further, as shown in FIG. 6A, an area of the extending
portion 246 is smaller than a total area of the first portion 242,
the first inner insulator 252 and the first inner conductor 262 in
plan view. As shown in FIG. 6B, a thickness t.sub.2 of the
extending portion 246 is smaller than a total thickness t.sub.4 of
the first portion 242, the first inner insulator 252 and the first
inner conductor 262.
[0054] It is worth noting that the first portion 242, the first
inner insulator 252 and the first inner conductor 262 form a first
capacitor 272, and the second portion 244, the second inner
insulator 254 and the second inner conductor 264 form a second
capacitor 274. The first capacitor 272 is electrically connected to
the second capacitor 274 by the extending portion 246 of the outer
conductor 240 to form connected capacitors in the substrate
210.
[0055] Because the first capacitor 272 and the second capacitor 274
are trench-type capacitors, both occupy smaller space than
planar-type capacitor. It is beneficial for reducing the size of
semiconductor devices. Moreover, because, firstly, the first
capacitor 272 and the second capacitor 274 can be easily connected
by the extending portion 246 without additional connecting line
and, secondly, the forming process of the extending portion 246 is
integrated into the forming process of the first capacitor 272 and
the second capacitor 274, the fabricating method of instant
disclosure can simplify the necessary steps of forming connection
between the first capacitor 272 and the second capacitor 274.
Therefore, the fabricating method has advantages such as simple
process and low process cost.
[0056] Further, the extending portion 246 is embedded in the
substrate 210, so such structural design is beneficial for reducing
the size of semiconductor devices. By connecting the first
capacitor 272 and the second capacitor 274, the capacitance of the
capacitor structure 270 is higher than single first capacitor 272
or second capacitor 274. Therefore, the capacitor structure 270
with higher capacitance can be used for promoting the performance
of high-voltage power supply and has more extensive
application.
[0057] FIG. 7 is a cross-sectional view of a semiconductor
structure 300 at a stage of fabrication, in accordance with one
embodiment. A dielectric layer 310 with openings is formed on the
substrate 210 and the capacitor structure 270. The openings are
subsequently filled with a first metal layer 320 and a second metal
layer 330 to form the semiconductor structure 300. Compared to the
semiconductor structure 200 shown in FIG. 6B, the semiconductor
structure 300 further includes the dielectric layer 310 covering
the substrate 210 and the capacitor structure 270, the first metal
layer 320 in contact with the outer conductor 240, and the second
metal layer 330 in contact with both the first inner conductor 262
and the second inner conductor 264. Because the second metal layer
330 has continuity such that the first inner conductor 262 is
electrically connected to the second inner conductor 264. The
capacitor structure 270 can be connected with other components such
as power supplies through the first metal layer 320 and the second
metal layer 330.
[0058] FIG. 8 is a plan view of a semiconductor structure at a
stage of fabrication, in accordance with one embodiment. A
capacitor structure 470 is embedded in a substrate 410 to form a
semiconductor structure 400. The capacitor structure 470 includes
an outer insulator 430, an outer conductor 440, inner insulators
451, 453, 455 and 457, and inner conductors 461, 463, 465, and 467.
The outer conductor 440 has a first portion 441, a second portion
443, a third portion 445, a fourth portion 447 and extending
portions 442, 444, 446 and 448. The first portion 441 surrounds the
inner insulator 451, and the inner insulator 451 surrounds the
inner conductor 461 and separates the inner conductor 461 from the
first portion 441 to form a first capacitor 471. A second capacitor
473, a third capacitor 475 and a fourth capacitor 477 have the same
structure as the first capacitor 471 so we don't give unnecessary
details here. It is worth noting that the first capacitor 471 is
connected with the second capacitor 473 by the extending portion
442 and connected with the fourth capacitor 477 by the extending
portion 448. That means one capacitor can connect with two
capacitors. It can be easily deduced that one capacitor is capable
of connecting with more than two capacitors to increase
capacitance. Therefore, by adjusting the amount of capacitors in
the capacitor structure, we can easily adjust the capacitance for
satisfying all types of power supplies. Moreover, by connecting
sufficient amount of capacitors by extending portions, the
capacitor structure can have high enough capacitance to reduce the
power supply noises, reduce voltage fluctuations and maintain power
and signal integrity and thus promote the performance of
semiconductor devices.
[0059] Although the present invention has been described in
considerable detail with reference to certain embodiments thereof,
other embodiments are possible. Therefore, the spirit and scope of
the appended claims should not be limited to the description of the
embodiments contained herein.
[0060] It will be apparent to those skilled in the art that various
modifications and variations can be made to the structure of the
present invention without departing from the scope or spirit of the
invention. In view of the foregoing, it is intended that the
present invention cover modifications and variations of this
invention provided they fall within the scope of the following
claims.
* * * * *