U.S. patent application number 12/260439 was filed with the patent office on 2009-05-21 for cryopump apparatus and operation method therefor.
This patent application is currently assigned to CANON ANELVA TECHNIX CORPORATION. Invention is credited to Kazutoshi Aoki, Tokumitsu Arai, Isao Mochizuki.
Application Number | 20090126374 12/260439 |
Document ID | / |
Family ID | 40615080 |
Filed Date | 2009-05-21 |
United States Patent
Application |
20090126374 |
Kind Code |
A1 |
Arai; Tokumitsu ; et
al. |
May 21, 2009 |
CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR
Abstract
A cryopump apparatus includes a sensor which detects at least
one of the temperature and pressure in a cryopump, a controller
which detects a change in at least one of the temperature and
pressure in the cryopump on the basis of the detection result
obtained by the sensor, thereby determining the connection state
between the controller and the cryopump, and a display device which
displays an abnormal point for the cryopump estimated from the
determination result obtained by the controller.
Inventors: |
Arai; Tokumitsu;
(Minamitsuru-gun, JP) ; Aoki; Kazutoshi;
(Minamitsuru-gun, JP) ; Mochizuki; Isao;
(Minamitsuru-gun, JP) |
Correspondence
Address: |
FITZPATRICK CELLA HARPER & SCINTO
30 ROCKEFELLER PLAZA
NEW YORK
NY
10112
US
|
Assignee: |
CANON ANELVA TECHNIX
CORPORATION
Kawasaki-shi
JP
|
Family ID: |
40615080 |
Appl. No.: |
12/260439 |
Filed: |
October 29, 2008 |
Current U.S.
Class: |
62/55.5 ;
417/901; 62/126 |
Current CPC
Class: |
F04B 37/14 20130101;
F04B 37/08 20130101 |
Class at
Publication: |
62/55.5 ;
417/901; 62/126 |
International
Class: |
F04B 37/08 20060101
F04B037/08; F25B 49/04 20060101 F25B049/04 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 1, 2007 |
JP |
2007-285230 |
Claims
1. A cryopump apparatus including a cryopump which drives a
refrigerator to exhaust a gas in a vessel as an exhaust target
using condensation and adsorption of the gas, and a controller
which is connected to the cryopump and controls an operation and
exhaust performance thereof, comprising: detection means for
detecting at least one of a temperature and pressure in the
cryopump; determination means for detecting a change in at least
one of the temperature and pressure in the cryopump on the basis of
the detection result obtained by said detection means, thereby
determining a connection state between the controller and the
cryopump; and display means for, if said determination means
determines that there is an abnormality of the connection state,
displaying an estimated abnormal point for the cryopump.
2. The apparatus according to claim 1, wherein said determination
means operates a refrigerator of a predetermined cryopump, and
detects a change in temperature at the time by a temperature sensor
which configures said detection means, thereby determining a
connection state of a refrigerator driving cable between the
refrigerator and the controller, and a connection state of a
temperature sensor cable between the refrigerator and the
controller.
3. The apparatus according to claim 1, wherein said determination
means opens a roughing valve connected to a pipe which communicates
with a roughing vacuum pump of a predetermined cryopump, and
detects a drop in temperature at the time by a pressure sensor
which configures said detection means, thereby determining a
connection state of a roughing valve opening/closing cable between
the roughing valve and the controller, and a connection state of a
pressure sensor cable between said pressure sensor and the
controller, and said determination means opens a purge valve
connected to a purge gas supply pipe of a predetermined cryopump,
and detects a rise in pressure at the time by a pressure sensor
which configures said detection means, thereby determining a
connection state of a purge valve opening/closing cable between the
purge valve and the controller, and a connection state of a
pressure sensor cable between said pressure sensor and the
controller.
4. The apparatus according to claim 1, wherein said determination
means generates heat by a heater included in a predetermined
cryopump, and detects a change in temperature at the time by a
temperature sensor which configures said detection means, thereby
determining a connection state of a heater cable between the heater
and the controller, and a connection state of a temperature sensor
cable between said temperature sensor and the controller.
5. The apparatus according to claim 1, wherein said determination
means opens a purge valve connected to a purge gas supply pipe of a
predetermined cryopump to raise a pressure in the predetermined
cryopump, and thereafter opens a discharge valve to discharge one
of a gas and a liquid from inside the predetermined cryopump, and
detects a drop in pressure at the time by a pressure sensor which
configures said detection means, thereby determining a connection
state of a discharge valve opening/closing cable between the
discharge valve and the controller, and a connection state of a
pressure sensor cable between said pressure sensor and the
controller.
6. The apparatus according to claim 1, wherein said determination
means operates a refrigerator of a predetermined cryopump to make
an internal temperature of the predetermined cryopump different
from a temperature of an environment in which the predetermined
cryopump is installed by a certain degree, and then opens one of a
roughing valve connected to a pipe which communicates with a
roughing vacuum pump of the predetermined cryopump and a purge
valve connected to a purge gas supply pipe of the predetermined
cryopump, and detects, by a temperature sensor which configures
said detection means, that a subsequent change in temperature is
slow if the roughing valve is opened, and that a subsequent change
in temperature is fast if the purge valve is opened, thereby
determining a connection state of a purge valve opening/closing
cable between the purge valve and the controller, and a connection
state of a temperature sensor cable between said temperature sensor
and the controller.
7. The apparatus according to claim 1, wherein said determination
means generates heat by a heater included in a predetermined
cryopump to make an internal temperature of the predetermined
cryopump higher than a temperature of an environment in which the
predetermined cryopump is installed, and then opens one of a
roughing valve connected to a pipe which communicates with a
roughing vacuum pump of the predetermined cryopump and a purge
valve connected to a purge gas supply pipe of the predetermined
cryopump, and detects, by a temperature sensor which configures
said detection means, that a subsequent drop in temperature is slow
if the roughing valve is opened, and that a subsequent drop in
temperature is fast if the purge valve is opened, thereby
determining a connection state of a roughing valve opening/closing
cable between the roughing valve and the controller, a connection
state of a purge valve opening/closing cable between the purge
valve and the controller, and a connection state between said
temperature sensor and the controller.
8. A vacuum processing apparatus comprising a cryopump apparatus
defined in claim 1.
9. An operation method for a cryopump apparatus including a
cryopump which drives a refrigerator to exhaust a gas in a vessel
as an exhaust target using condensation and adsorption of the gas,
and a controller which is connected to the cryopump and controls an
operation and exhaust performance thereof, the cryopump including
detection means for detecting at least one of a temperature and
pressure, comprising: a detection step of detecting a change in at
least one of the temperature and pressure in the cryopump by the
detection means; a determination step of determining, by the
controller, a connection state between the controller and a
predetermined cryopump on the basis of the detection result
obtained in the detection step; and a display step of, if it is
determined in the determination step that there is an abnormality
of the connection state, displaying an estimated abnormal point for
the predetermined cryopump on display means.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a cryopump apparatus having
a cryopump which drives a refrigerator to exhaust a gas in a vessel
as the exhaust target using condensation and adsorption of the gas,
and a controller which is connected to the cryopump and controls
its operation and exhaust performance, and an operation method
therefor.
[0003] 2. Description of the Related Art
[0004] A vacuum exhaust system including a cryopump or cryotrap and
a controller is often used as a vacuum processing apparatus
represented by a semiconductor manufacturing apparatus. In
particular, a general vacuum processing apparatus for the
semiconductor manufacture has a structure in which a large number
of vacuum chambers are partitioned with valves. One cryopump or
cryotrap is mounted in each of these vacuum chambers. Therefore,
several to several tens of cryopumps or cryotraps are mounted per
apparatus.
[0005] The cryopump or cryotrap has a refrigerator, a temperature
sensor for measuring the temperature of its internal space, and a
pressure sensor for measuring the pressure of its internal space.
Cables for supplying power to the respective devices and those for
reading out the values output from the sensors are necessary.
[0006] The cryopump or cryotrap is a so-called storage type vacuum
pump. This pump requires so-called regeneration for discharging the
stored gas. In addition, this pump has a property that it cannot
cool down to a temperature at which vacuum exhaust is possible
unless it is temporarily roughed out to a certain pressure by a
roughing vacuum pump after the regeneration. For this reason, the
cryopump has a plurality of valves such as a purge valve for
introducing a purge gas to its inside in regeneration, a roughing
valve for roughing it out, and a discharge valve for discharging a
gas generated upon vaporization due to the regeneration to its
outside as needed.
[0007] Cables for opening/closing these valves are accordingly
necessary.
[0008] The cryopump or cryotrap often includes a heater to shorten
the regeneration time. In this case, a cable for supplying power to
the heater is also necessary.
[0009] These wiring lines are connected between the cryopump or
cryotrap and the controller to extend in the vacuum processing
apparatus. FIGS. 11 and 12 show such states.
[0010] The cryopump apparatus shown in FIG. 11 includes one
cryopump 2a and a controller 1 which controls it.
[0011] The cryopump 2a includes a temperature sensor 3, a heater 4,
a pressure sensor 5, a purge valve 6 connected to a purge gas
supply pipe, a roughing valve 7 connected to a pipe which
communicates with a roughing vacuum pump 17, and a refrigerator 9.
The cryopump 2a also includes a discharge valve 8 for discharging a
gas or liquid from its inside to its outside.
[0012] The following cables 10 to 16 are connected between the
cryopump 2a and the controller 1. That is, a temperature sensor
cable 10 for measuring the temperature in the cryopump 2a by the
temperature sensor 3, a heater cable 11 for supplying power to the
heater 4, and a pressure sensor cable 12 for measuring the pressure
in the cryopump 2a by the pressure sensor 5 are connected. A purge
valve opening/closing cable 13 for opening/closing the purge valve
6, and a roughing valve opening/closing cable 14 for
opening/closing the roughing valve 7 are also connected. A
discharge valve opening/closing cable 15 for opening/closing the
discharge valve 8, and a refrigerator driving cable 16 for driving
the refrigerator 9 are also connected. The roughing vacuum pump 17
is connected to a roughing pipe connected to the roughing valve
7.
[0013] The cryopump apparatus shown in FIG. 12 includes two
cryopumps 2a and 2b and a controller 1 which controls them. The
cryopumps 2a and 2b have the same configuration as that of the
cryopump 2a described above, and cables 10 to 16 identical to those
described above are connected to the controller 1.
[0014] Japanese Patent Laid-Open No. 2001-317457, for example,
discloses the above-described cryopump apparatus and an operation
method therefor.
[0015] A vacuum processing apparatus which mounts a cryopump
apparatus including a plurality of cryopumps and a controller as
described above often has a large, complicated structure. Also, the
cryopumps and controller are often set at a great distance, which
makes it hard to wire them.
[0016] Wiring is generally performed in accordance with a wiring
diagram by writing wiring names at the two ends to prevent any
faulty connection. Nevertheless, wiring errors sometimes occur when
an enormous number of wiring lines are connected in similar
patterns.
[0017] After the wiring operation, the cryopump apparatus is
activated. Note that if a plurality of cryopumps are activated at
once, they often start up while any wiring errors remain
unspecified. In this case, normal control cannot be performed in
subsequent regeneration, which may damage the apparatus.
[0018] A case in which the temperature sensor cables 10 are
incorrectly connected to the two cryopumps 2a and 2b as shown in
FIG. 12 will be considered. In this case, when no large difference
in, for example, a change in temperature between the two cryopumps
2a and 2b is detected upon activating the cryopumps 2a and 2b at
once, they continue operation without noticing faulty wiring. After
that, for example, one of the two cryopumps 2a and 2b is
regenerated using a heating means such as the heater 4 without
noticing the fact that the temperature sensors 3 are incorrectly
wired. In this case, despite a rise in the actual temperature in
the regenerated cryopump, temperature measurement is performed for
the other cryopump with a low temperature. For this reason, the
controller 1 detects the temperature in the regenerated cryopump as
being kept low. If this state is prolonged, the cryopump
regenerated using the heating means may be damaged after an
excessive rise in temperature.
[0019] Other wiring errors, if any, may cause troubles: for
example, the valve opens or the cryopump starts regeneration or
stops at an unintended timing.
[0020] The above-described situations are typically encountered
when a cryopump is used, but the same applies a case in which a
cryotrap is used.
SUMMARY OF THE INVENTION
[0021] The present invention has been made to solve the
above-described problem, and has as its object to prevent, for
example, any faulty-wiring-related troubles and erroneous
operations by detecting faulty wiring of a cryopump apparatus
having a plurality of cryopumps and a controller.
[0022] According to one aspect of the present invention, there is
provided a cryopump apparatus including a cryopump which drives a
refrigerator to exhaust a gas in a vessel as an exhaust target
using condensation and adsorption of the gas, and a controller
which is connected to the cryopump and controls an operation and
exhaust performance thereof, comprising:
[0023] detection means for detecting at least one of a temperature
and pressure in the cryopump;
[0024] determination means for detecting a change in at least one
of the temperature and pressure in the cryopump on the basis of the
detection result obtained by the detection means, thereby
determining a connection state between the controller and the
cryopump; and
[0025] display means for, if the determination means determines
that there is an abnormality of the connection state, displaying an
estimated abnormal point for the cryopump.
[0026] According to another aspect of the present invention, there
is provided an operation method for a cryopump apparatus including
a cryopump which drives a refrigerator to exhaust a gas in a vessel
as an exhaust target using condensation and adsorption of the gas,
and a controller which is connected to the cryopump and controls an
operation and exhaust performance thereof, the cryopump including
detection means for detecting at least one of a temperature and
pressure, comprising:
[0027] a detection step of detecting a change in at least one of
the temperature and pressure in the cryopump by the detection
means;
[0028] a determination step of determining, by the controller, a
connection state between the controller and a predetermined
cryopump on the basis of the detection result obtained in the
detection step; and a display step of, if it is determined in the
determination step that there is an abnormality of the connection
state, displaying an estimated abnormal point for the predetermined
cryopump on display means.
[0029] According to the present invention, it is possible to
prevent, for example, any faulty-wiring-related troubles and
erroneous operations by detecting faulty wiring of a cryopump
apparatus having a plurality of cryopumps and a controller.
[0030] Further features of the present invention will become
apparent from the following description of exemplary embodiments
with reference to the attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0031] FIG. 1 is a connection diagram of a cryopump apparatus
including a plurality of cryopumps and a controller according to an
embodiment of the present invention;
[0032] FIG. 2 is a flowchart illustrating an operation for
determining the connection states between the cryopumps and the
controller by the controller shown in FIG. 1;
[0033] FIG. 3 is a flowchart illustrating the operation of the
controller continued to FIG. 2;
[0034] FIG. 4 is a flowchart illustrating the operation of the
controller continued to FIG. 3;
[0035] FIG. 5 is a flowchart illustrating the operation of the
controller continued to FIG. 4;
[0036] FIG. 6 is a flowchart illustrating the operation of the
controller continued to FIG. 5;
[0037] FIG. 7 is a flowchart illustrating the operation of the
controller continued to FIG. 6;
[0038] FIG. 8 is a flowchart illustrating the operation of the
controller continued to FIG. 7;
[0039] FIG. 9 is a flowchart illustrating the operation of the
controller continued to FIG. 8;
[0040] FIGS. 10A and 10B are tables for explaining abnormal
statuses obtained by the operation of the controller shown in FIGS.
2 to 9;
[0041] FIG. 11 is a connection diagram of a cryopump apparatus
including one cryopump and a controller according to a prior art;
and
[0042] FIG. 12 is a connection diagram of a cryopump apparatus
including two cryopumps and a controller according to a prior
art.
DESCRIPTION OF THE EMBODIMENT
[0043] A cryopump apparatus and an operation method therefor
according to an embodiment of the present invention will be
described in detail below with reference to the accompanying
drawings. In this embodiment, the present invention is applied to a
cryopump apparatus having a cryopump which drives a refrigerator to
exhaust a gas in a vessel as the exhaust target using condensation
and adsorption of the gas, and a controller which is connected to
the cryopump and controls its operation and exhaust performance.
However, the present invention is not particularly limited to this,
and may be applied to a vacuum exhaust system having a cryotrap and
a controller which is connected to the cryotrap and controls its
operation and exhaust performance. The same reference numerals as
in the cryopump apparatuses according to the prior arts denote the
same constituent elements, and a description thereof will be
simplified or not be given.
[0044] FIG. 1 is a connection diagram of a cryopump having a
plurality of cryopumps 2a, 2b, . . . , 2c and a controller 1 which
is connected to them and controls their operations and exhaust
performances.
[0045] The cryopump apparatus includes a detection means for
detecting at least one of the temperature and pressure (temperature
sensor and pressure sensor) in each of the cryopumps 2a, 2b, . . .
, 2c. The controller 1 detects a change in at least one of the
temperature and pressure in each of the cryopumps 2a, 2b, . . . ,
2c by the detection means, thereby determining the connection
states between the controller 1 and predetermined cryopumps 2a, 2b,
. . . , 2c. Details of this determination will be explained below.
Also, the controller 1 can display, on a display device 100,
abnormal points for the predetermined cryopumps estimated from the
determination results.
[0046] Each of the cryopumps 2a, 2b, . . . , 2c includes a
temperature sensor 3, a heater 4, a pressure sensor 5, a purge
valve 6 connected to a purge gas supply pipe, a roughing valve 7
connected to a pipe which communicates with a roughing vacuum pump
17, and a refrigerator 9. The temperature sensor 3 and pressure
sensor 5 configure a detection means. Each of the cryopumps 2a, 2b,
. . . , 2c also includes a discharge valve 8 for discharging a gas
or liquid from inside each of the cryopumps 2a, 2b, . . . , 2c
(inside each of vacuum pumps) to its outside.
[0047] The following cables 10 to 16 are connected between each of
the cryopumps 2a, 2b, . . . , 2c and the controller 1. That is, a
temperature sensor cable 10 for measuring the temperature in the
cryopump by the temperature sensor 3, a heater cable 11 for
supplying power to the heater 4, and a pressure sensor cable 12 for
measuring the pressure in the cryopump by the pressure sensor 5 are
connected. A purge valve opening/closing cable 13 for
opening/closing the purge valve 6, and a roughing valve
opening/closing cable 14 for opening/closing the roughing valve 7
connected to the roughing vacuum pump 17 are also connected. A
discharge valve opening/closing cable 15 for opening/closing the
discharge valve 8, and a refrigerator driving cable 16 for driving
the refrigerator 9 are also connected. A roughing pipe connected to
the roughing valve 7 is connected to the roughing vacuum pump 17.
This configuration is the same as those shown in FIGS. 11 and 12
described above.
[0048] That is, the controller 1 is connected to the temperature
sensor 3 in each of the cryopumps 2a, 2b, . . . , 2c via the
temperature sensor cable 10, and connected to the heater 4 via the
heater cable 11. The controller 1 is also connected to the pressure
sensor 5 via the pressure sensor cable 12, connected to the purge
valve 6 via the purge valve opening/closing cable 13, and connected
to the roughing valve 7 via the roughing valve opening/closing
cable 14. The controller 1 is also connected to the discharge valve
8 via the discharge valve opening/closing cable 15, and connected
to the refrigerator 9 via the refrigerator driving cable 16.
[0049] The temperature sensor 3 measures the temperature in each of
the cryopumps 2a, 2b, . . . , 2c, and provides the temperature
measurement value to the controller 1 via the temperature sensor
cable 10. This allows the controller 1 to monitor the temperatures
in the cryopumps 2a, 2b, . . . , 2c.
[0050] Supplying an electric current to the heater 4 via the heater
cable 11 allows the controller 1 to electrically control the ON/OFF
operation of the heater 4.
[0051] The pressure sensor 5 measures the pressure in each of the
cryopumps 2a, 2b, . . . , 2c, and provides the pressure measurement
value to the controller 1 via the pressure sensor cable 12. This
allows the controller 1 to monitor the pressures in the cryopumps
2a, 2b, . . . , 2c.
[0052] The purge valve 6 receives a control signal from the
controller 1 via the purge valve opening/closing cable 13. This
allows the controller 1 to electrically control the opening/closing
operation (ON/OFF operation) of the purge valve 6.
[0053] The roughing valve 7 receives a control signal from the
controller 1 via the roughing valve opening/closing cable 14. This
allows the controller 1 to electrically control the opening/closing
operation (ON/OFF operation) of the roughing valve 7.
[0054] The discharge valve 8 receives a control signal from the
controller 1 via the discharge valve opening/closing cable 15. This
allows the controller 1 to electrically control the opening/closing
operation (ON/OFF operation) of the discharge valve 8.
[0055] Supplying an electric current to the refrigerator 9 via the
refrigerator driving cable 16 allows the controller 1 to control
the refrigeration operation of the refrigerator 9.
[0056] Of the above-described constituent elements, the heater 4,
purge valve 6, roughing valve 7, discharge valve 8, and
refrigerator 9 correspond to controlled devices the operations of
which are controlled by the controller according to the present
invention, and the temperature sensor 3 and pressure sensor 5
correspond to the detection means according to the present
invention. The heater cable 11, purge valve opening/closing cable
13, roughing valve opening/closing cable 14, discharge valve
opening/closing cable 15, and refrigerator driving cable 16
correspond to the controlled device cables. The temperature sensor
cable 10 and pressure sensor cable 12 correspond to the sensor
cables according to the present invention.
[0057] In this embodiment, a control program for confirming that
there is no faulty wiring between the controller 1 and the
plurality of cryopumps 2a, 2b, . . . , 2c is installed in the
controller 1 in advance. The controller 1 implements a function of
confirming that the cables 10 to 16 are connected without any
errors and omissions by executing the control program as the
connection states are changed upon installing or modifying the
cryopump apparatus. The confirmation result can be provided to an
output device (not shown) such as a display device to notify the
operator of it.
[0058] An operation according to this embodiment will be explained
with reference to FIGS. 2 to 10. For the sake of convenience, the
following description will be given assuming three cryopumps 2a,
2b, and 2c as the plurality of cryopumps 2a, 2b, . . . , 2c.
[0059] FIGS. 2 to 9 are flowcharts illustrating an example of an
operation method of determining the connection states of the cables
10 to 16 between the three cryopumps 2a, 2b, and 2c and the
controller 1 (confirming that there is no faulty wiring or the
like) by the controller 1. A control program (operation program)
for determining the connection state illustrated in the flowcharts
of FIGS. 2 to 9 is stored in a memory (e.g., a ROM (Read Only
Memory)) in the controller 1 in advance.
[0060] FIGS. 10A and 10B are tables showing an abnormal status
table for estimating abnormal points from the detection results (ON
states) of a plurality of (seven in the example shown in FIGS. 10A
and 10B) abnormal statuses A1 to A7 which can be detected by the
above-described operation of the controller 1 (to be described
later). The abnormal status table shown in FIGS. 10A and 10B are
stored to be rewritable in a memory (e.g., a RAM (Random Access
Memory)) in the controller 1. The controller 1 serves as a
determination means and detects a change in at least one of the
temperature and pressure in a predetermined cryopump on the basis
of the detection result obtained by a sensor which configures a
detection means, thereby determining the connection state between
the controller and the predetermined cryopump. The controller 1
serves as a display control means and can display, on the display
device 100, abnormal points for the predetermined cryopump
estimated from the above-described determination result.
[0061] Referring to FIG. 2, first, the controller 1 starts
executing the control program, and then monitors the temperatures
and pressures in the cryopumps 2a, 2b, and 2c detected by their
temperature sensors 3 and pressure sensors 5, respectively (step
S1). The connection state determination operation is executed in
the order of the cryopumps 2a, 2b, and 2c (steps S2 to S4).
[0062] The operation of the cryopump 2a will be representatively
explained with reference to FIGS. 3 to 9, but the same applies to
the other cryopumps 2b and 2c.
[0063] Referring to FIG. 3, the controller 1 starts executing the
control program for determining the connection state described
above, and starts the operation of the cryopump 2a. In this start
operation, first, the controller 1 turns on the refrigerator 9 of
the cryopump 2a via the refrigerator driving cable 16 to start a
refrigeration operation, while measuring, via the temperature
sensor cable 10, the temperature in the cryopump 2a detected by its
temperature sensor 3 (step S11). At this time, the controller 1
does not perform the same operation for the other cryopumps 2b and
2c.
[0064] Next, the controller 1 checks whether the temperature in the
cryopump 2a alone drops by a temperature difference .DELTA.T1
serving as a preset reference value within a timer time t1 serving
as a preset reference value (step S12). Note that the timer time t1
and temperature difference .DELTA.T1 are stored in, for example,
the memory in the controller 1 in advance.
[0065] If YES in step S12, the controller 1 determines that the
temperature sensor cable 10 and refrigerator driving cable 16 of
the cryopump 2a are connected correctly (step S13), and turns off
the refrigerator 9 of the cryopump 2a to stop the refrigeration
operation (step S14).
[0066] If NO in step S12, the temperature in the cryopump 2a has
not dropped by .DELTA.T1 or those in the other cryopumps 2b and 2c
have dropped by .DELTA.T1 within the timer time t1 (step S15). In
this case, the controller 1 determines that there is faulty wiring
of the temperature sensor cable 10 or refrigerator driving cable 16
of the cryopump 2a (step S16). The controller 1 then turns on the
abnormal status A1 corresponding to the cryopump 2a in the abnormal
status table shown in FIGS. 10A and 10B (step S17), and the process
shifts to step S14 described above.
[0067] In this manner, it is possible to confirm that the
temperature sensor cable 10 and refrigerator driving cable 16 are
connected to the same cryopump 2a by monitoring, by the controller
1, a drop in the temperature in the cryopump 2a detected by its
temperature sensor 3.
[0068] Referring to FIG. 4, the controller 1 turns on and opens the
roughing valve 7 connected to the roughing valve opening/closing
cable 14, while measuring, via the pressure sensor cable 12, the
pressure in the cryopump 2a detected by its pressure sensor 5 (step
S21). At this time, the controller 1 does not perform the same
operation for the other cryopumps 2b and 2c.
[0069] Next, the controller 1 checks whether the pressure in the
cryopump 2a alone drops by a pressure difference .DELTA.P1 serving
as a preset reference value within a timer time t2 serving as a
present reference value (step S22). Note that the timer time t2 and
pressure difference .DELTA.P1 are stored in, for example, the
memory in the controller 1 in advance.
[0070] If YES in step S22, the controller 1 determines that the
pressure sensor cable 12 and roughing valve opening/closing cable
14 of the cryopump 2a are connected correctly, the roughing valve 7
operates normally, and the roughing vacuum pump 17 is operating
normally (step S23). The controller 1 then turns off and closes the
roughing valve 7 of the cryopump 2a (step S24).
[0071] If NO in step S22, the pressure in the cryopump 2a has not
dropped by API or those in the other cryopumps 2b and 2c have
dropped by .DELTA.P1 within the timer time t2 (step S25). In this
case, the controller 1 determines that there is faulty wiring of
the pressure sensor cable 12 or roughing valve opening/closing
cable 14 of the cryopump 2a, the roughing valve 7 has broken down,
or the roughing vacuum pump 17 is not operating normally (step
S26). The controller 1 then turns on the abnormal status A2
corresponding to the cryopump 2a in the abnormal status table shown
in FIGS. 10A and 10B (step S27), and the process shifts to step S24
described above.
[0072] In this manner, it is possible to confirm the following
details by monitoring, by the controller 1, a drop in the pressure
in the cryopump 2a detected by its pressure sensor 5 (pressure
drop) within a predetermined time. That is, it is possible to
confirm that the pressure sensor cable 12 and roughing valve
opening/closing cable 14 are connected to the same cryopump 2a, the
roughing valve 7 operates normally, and the roughing vacuum pump 17
is operating normally.
[0073] Referring to FIG. 5, after closing the roughing valve 7, the
controller 1 turns on and opens the purge valve 6 connected to the
purge valve opening/closing cable 13, while measuring, via the
pressure sensor cable 12, the pressure in the cryopump 2a detected
by its pressure sensor 5 (step S31). At this time, the controller 1
does not perform the same operation for the other cryopumps 2b and
2c.
[0074] Next, the controller 1 checks whether the pressure in the
cryopump 2a alone rises by a pressure difference .DELTA.P2 serving
as a preset reference value within a timer time t3 serving as a
preset reference value (step S32). Note that the timer time t3 and
pressure difference .DELTA.P2 are stored in, for example, the
memory in the controller 1 in advance.
[0075] If YES in step S32, the controller 1 determines that the
pressure sensor cable 12 and purge valve opening/closing cable 13
of the cryopump 2a are connected correctly, the purge valve 6
operates normally, and a purge gas is being supplied to the primary
side of the purge valve 6 (step S33). The controller 1 then turns
off and closes the purge valve 6 of the cryopump 2a (step S34).
[0076] If NO in step S32, the pressure in the cryopump 2a has not
risen by .DELTA.P2 or those in the other cryopumps 2b and 2c has
risen within the timer time t3 (step S35). In this case, the
controller 1 determines that there is faulty wiring of the pressure
sensor cable 12 or purge valve opening/closing cable 13 of the
cryopump 2a, the purge valve 6 has broken down, or a purge gas is
not being supplied to the primary side of the purge valve 6 (step
S36). The controller 1 then turns on the abnormal status A3
corresponding to the cryopump 2a in the abnormal status table shown
in FIGS. 10A and 10B (step S37), and the process shifts to step S34
described above.
[0077] In this manner, it is possible to confirm the following
details by monitoring, by the controller 1, a rise in the pressure
in the cryopump 2a detected by its pressure sensor 5 (pressure
rise) within a predetermined time. That is, it is possible to
confirm that the pressure sensor cable 12 and purge valve
opening/closing cable 13 are connected to the same cryopump 2a, the
purge valve 6 operates normally, and a purge gas is being supplied
to the primary side of the purge valve 6.
[0078] Referring to FIG. 6, when the discharge valve 8 is attached
to the cryopump 2a, the controller 1 turns on and opens the purge
valve 6 to sufficiently purge the inside of the cryopump 2a, and
thereafter turns off and closes the purge valve 6. The controller 1
then turns on and opens the discharge valve 8 connected to the
discharge valve opening/closing cable 15, while measuring, via the
pressure sensor cable 12, the pressure in the cryopump 2a detected
by its pressure sensor 5 (step S41). At this time, the controller 1
does not perform the same operation for the other cryopumps 2b and
2c.
[0079] Next, the controller 1 checks whether the pressure in the
cryopump 2a alone drops by a preset pressure difference .DELTA.P3
within a preset timer time t4 (step S42). Note that the timer time
t4 and pressure difference .DELTA.P3 are stored in, for example,
the memory in the controller 1 in advance.
[0080] If YES in step S42, the controller 1 determines that the
pressure sensor cable 12 and discharge valve opening/closing cable
15 of the cryopump 2a are connected correctly, the discharge valve
8 operates normally, and the pressure on the secondary side of the
discharge valve 8 is equal to or less than the atmospheric pressure
(step S43). The controller 1 then turns off and closes the
discharge valve 8 of the cryopump 2a (step S44).
[0081] If NO in step S42, the pressure in the cryopump 2a has not
dropped by .DELTA.P3 or those in the other cryopumps 2b and 2c have
dropped by .DELTA.P3 within the timer time t4 (step S45). In this
case, the controller 1 determines that there is faulty wiring of
the pressure sensor cable 12 or discharge valve opening/closing
cable 15 of the cryopump 2a, the discharge valve 8 has broken down,
or the pressure on the secondary side of the discharge valve 8 is
more than the atmospheric pressure (step S46). The controller 1
then turns on the abnormal status A4 corresponding to the cryopump
2a in the abnormal status table shown in FIGS. 10A and 10B (step
S47), and the process shifts to step S44 described above.
[0082] In this manner, it is possible to confirm the following
details by monitoring, by the controller 1, a drop in the pressure
in the cryopump 2a detected by its pressure sensor 5. That is, it
is possible to confirm that the pressure sensor cable 12 and
discharge valve opening/closing cable 15 are connected to the same
cryopump 2a, the discharge valve 8 operates normally, and the
pressure on the secondary side of the discharge valve 8 is equal to
or less than the atmospheric pressure.
[0083] Referring to FIG. 7, the controller 1 stops the operation of
the cryopump 2a, and turns on the heater 4 and supplies an electric
current to the heater 4 via the heater cable 11 while measuring,
via the temperature sensor cable 10, the temperature in the
cryopump 2a detected by its temperature sensor 3 (step S51). At
this time, the controller 1 does not perform the same operation for
the other cryopumps 2b and 2c.
[0084] Next, the controller 1 checks whether the temperature in the
cryopump 2a alone rises by a preset temperature difference
.DELTA.T2 within a preset timer time t5 (step S52). Note that the
timer time t5 and temperature difference .DELTA.T2 are stored in,
for example, the memory in the controller 1 in advance.
[0085] If YES in step S52, the controller 1 determines that the
temperature sensor cable 10 and heater cable 11 of the cryopump 2a
are connected correctly, and the heater 4 operates normally (step
S53). The controller 1 then turns off and closes the heater 4 of
the cryopump 2a (step S54).
[0086] If NO in step S52, the temperature in the cryopump 2a has
not risen by .DELTA.T2 or those in the other cryopumps 2b and 2c
have risen by .DELTA.T2 within the timer time t5 (step S55). In
this case, the controller 1 determines that there is faulty wiring
of the temperature sensor cable 10 or heater cable 11 of the
cryopump 2a, or the heater 4 has broken down (step S56). The
controller 1 then turns on the abnormal status A5 corresponding to
the cryopump 2a in the abnormal status table shown in FIGS. 10A and
10B (step S57), and the process shifts to step S44 described
above.
[0087] In this manner, it is possible to confirm that the
temperature sensor cable 10 and heater cable 11 are connected to
the same cryopump 2a, and the heater 4 operates normally by
monitoring, by the controller 1, an increase in the measurement
value obtained by the temperature sensor 3.
[0088] Referring to FIG. 8, the controller 1 makes the internal
temperature of the cryopump 2a different from the temperature of
the environment in which the cryopump apparatus is installed by a
preset temperature difference .DELTA.T3 (step S61). The controller
1 then turns on and opens the roughing valve 7 while measuring the
temperature in the cryopump 2a detected by its temperature sensor 3
(step S62). At this time, the controller 1 does not perform the
same operation for the other cryopumps 2b and 2c.
[0089] Next, the controller 1 checks whether a change in the
temperature of the cryopump 2a within a preset timer time t6 is
equal to or less than a preset temperature difference .DELTA.T4
(step S63). Note that the timer time t6 and temperature difference
.DELTA.T4 are stored in, for example, the memory in the controller
1 in advance.
[0090] If YES in step S63, the controller 1 determines that the
roughing valve opening/closing cable 14 and temperature sensor
cable 10 of the cryopump 2a are connected correctly, the roughing
valve 7 operates normally, and the roughing vacuum pump 17 is
operating normally (step S64). The controller 1 then turns off and
closes the roughing valve 7 of the cryopump 2a (step S65).
[0091] If NO in step S63, the change in the temperature of the
cryopump 2a within the timer time t6 is more than .DELTA.T4 or the
change in the temperatures of the other cryopumps 2b and 2c within
the timer time t6 is equal to or less than .DELTA.T4 (step S66). In
this case, the controller 1 determines that there is faulty wiring
of the roughing valve opening/closing cable 14 or temperature
sensor cable 10 of the cryopump 2a, or the roughing valve 7 or
roughing vacuum pump 17 has broken down (step S67). The controller
1 then turns on the abnormal status A6 corresponding to the
cryopump 2a in the abnormal status table shown in FIGS. 10A and 10B
(step S68), and the process shifts to step S65 described above.
[0092] In this manner, it is possible to confirm the following
details by monitoring, by the controller 1, whether a change in
temperature subsequent to step S62 is fast or slow. That is, it is
possible to confirm again that the roughing valve opening/closing
cable 14 and temperature sensor cable 10 are connected to the same
cryopump 2a, the roughing valve 7 operates normally, and the
roughing vacuum pump 17 connected to the roughing valve 7 is
operating normally.
[0093] Referring to FIG. 9, the controller 1 makes the internal
temperature of the cryopump 2a different from the temperature of
the environment in which the cryopump apparatus is installed by a
preset temperature difference .DELTA.T3 (step S71). The controller
1 then turns on and opens the purge valve 6 while measuring the
temperature in the cryopump 2a detected by its temperature sensor 3
(step S72). At this time, the controller 1 does not perform the
same operation for the other cryopumps 2b and 2c.
[0094] Next, the controller 1 checks whether a change in the
temperature of the cryopump 2a within a preset timer time t7 is
equal to or more than a preset temperature difference .DELTA.T5
(step S73). Note that the timer time t7 and temperature difference
.DELTA.T5 are stored in, for example, the memory in the controller
1 in advance.
[0095] If YES in step S73, the controller 1 determines that the
purge valve opening/closing cable 13 and temperature sensor cable
10 of the cryopump 2a are connected correctly, the purge valve 6
operates normally, and a purge gas is being supplied to the primary
side of the purge valve 6 (step S74). The controller 1 then turns
off and closes the purge valve 6 of the cryopump 2a (step S75).
[0096] If NO in step S73, the change in the temperature of the
cryopump 2a within the timer time t7 is less than .DELTA.T5 or that
in those of the other cryopumps 2b and 2c within the timer time t7
is equal to or more than .DELTA.T5 (step S76). In this case, the
controller 1 determines that there is faulty wiring of the purge
valve opening/closing cable 13 or temperature sensor cable 10 of
the cryopump 2a, the purge valve 6 has broken down, or a purge gas
is not being supplied to the primary side of the purge valve 6
(step S77). The controller 1 then turns on the abnormal status A7
corresponding to the cryopump 2a in the abnormal status table shown
in FIGS. 10A and 10B (step S78), and the process shifts to step S75
described above.
[0097] In this manner, it is possible to confirm the following
details by monitoring, by the controller 1, whether a change in
temperature subsequent to step S72 is fast or slow. That is, it is
possible to confirm again that the purge valve opening/closing
cable 13 and temperature sensor cable 10 are connected to the same
cryopump 2a, the purge valve 6 operates normally, and a purge gas
is being supplied to the primary side of the purge valve 6.
[0098] Referring back to FIG. 2, the controller 1 mounted in the
cryopump apparatus performs the above-described operation for the
cryopumps 2a, 2b, and 2c without repeating the confirmation of the
same details (steps S2 to S4). After that, the controller 1
determines an abnormally on the basis of the obtained abnormal
status table (step S5).
[0099] FIGS. 10A and 10B show the detection states of the abnormal
statuses A1 to A7 of the cryopumps 2a, 2b, and 2c obtained by the
above-described operation (presence: ON; absence: -), and abnormal
points estimated from their combination patterns Nos. 1 to 19. The
details of patterns Nos. 1 to 19 will be explained
sequentially.
[0100] In case of No. 1, because the cryopumps 2a, 2b, and 2c are
detected to be in none of the abnormal statuses A1 to A7, the
overall system is estimated to have no abnormality.
[0101] In case of No. 2, because the cryopump 2a is detected to be
in the abnormal status A1, the temperature sensor 3, temperature
sensor cable 10, or refrigerator driving cable 16 of the cryopump
2a is estimated to have an abnormality.
[0102] In case of No. 3, because the cryopumps 2a and 2b are
detected to be in the abnormal status A1, the temperature sensor
cables 10 or refrigerator driving cables 16 of the cryopumps 2a and
2b are estimated to have faulty wiring.
[0103] In case of No. 4, because the cryopump 2a is detected to be
in the abnormal status A2, the pressure sensor 5, pressure sensor
cable 12, roughing valve opening/closing cable 14, or roughing
valve 7 of the cryopump 2a is estimated to have an abnormality.
[0104] In case of No. 5, because the cryopumps 2a and 2b are
detected to be in the abnormal status A2, the pressure sensor
cables 12 or roughing valve opening/closing cables 14 of the
cryopumps 2a and 2b are estimated to have faulty wiring.
[0105] In case of No. 6, because the cryopumps 2a, 2b, and 2c are
detected to be in the abnormal status A2, their roughing vacuum
pumps 17 are estimated to have broken down.
[0106] In case of No. 7, because the cryopump 2a is detected to be
in the abnormal status A3, the pressure sensor 5, pressure sensor
cable 12, purge valve opening/closing cable 13, or purge valve 6 of
the cryopump 2a is estimated to have an abnormality.
[0107] In case of No. 8, because the cryopumps 2a and 2b are
detected to be in the abnormal status A3, the pressure sensor
cables 12 or purge valve opening/closing cables 13 of the cryopumps
2a and 2b are estimated to have faulty wiring.
[0108] In case of No. 9, because the cryopumps 2a, 2b, and 2c are
detected to be in the abnormal status A3, it is estimated that a
purge gas is not being supplied to the primary sides of their purge
valves 6.
[0109] In case of No. 10, because the cryopump 2a is detected to be
in the abnormal status A4, the pressure sensor 5, pressure sensor
cable 12, discharge valve opening/closing cable 15, or discharge
valve 8 of the cryopump 2a is estimated to have an abnormality.
[0110] In case of No. 11, because the cryopumps 2a and 2b are
detected to be in the abnormal status A4, the pressure sensor
cables 12 or discharge valve opening/closing cables 15 of the
cryopumps 2a and 2b are estimated to have faulty wiring.
[0111] In case of No. 12, because the cryopumps 2a, 2b, and 2c are
detected to be in the abnormal status A4, it is estimated that the
pressures on the secondary sides of their discharge valves 8 are
more than the atmospheric pressure.
[0112] In case of No. 13, because the cryopump 2a is detected to be
in the abnormal status A5, the heater 4, heater cable 11,
temperature sensor 3, or temperature sensor cable 10 of the
cryopump 2a is estimated to have an abnormality.
[0113] In case of No. 14, because the cryopumps 2a and 2b are
detected to be in the abnormal status A5, the heater cables 11 or
temperature sensor cables 10 of the cryopumps 2a and 2b are
estimated to have faulty wiring.
[0114] In case of No. 15, because the cryopump 2a is detected to be
in the abnormal status A6, the temperature sensor 3, temperature
sensor cable 10, roughing valve opening/closing cable 14, or
roughing valve 7 of the cryopump 2a is estimated to have an
abnormality.
[0115] In case of No. 16, because the cryopumps 2a and 2b are
detected to be in the abnormal status A6, the temperature sensor
cables 10 or roughing valve opening/closing cables 14 of the
cryopumps 2a and 2b are estimated to have faulty wiring.
[0116] In case of No. 17, because the cryopump 2a is detected to be
in the abnormal status A7, the temperature sensor 3, temperature
sensor cable 10, purge valve opening/closing cable 13, or purge
valve 6 of the cryopump 2a is estimated to have an abnormality.
[0117] In case of No. 18, because the cryopumps 2a and 2b are
detected to be in the abnormal status A7, the temperature sensor
cables 10 or purge valve opening/closing cables 13 of the cryopump
2a are estimated to have faulty wiring.
[0118] In case of No. 19, because the cryopumps 2a, 2b, and 2c are
detected to be in the abnormal status A7, it is estimated that a
purge gas is not being supplied to the primary sides of their purge
valves 6.
[0119] The use of the above-described abnormal status table allows
the controller 1 to narrow down the type of abnormality by
determining, for example, which cables have faulty wiring or
whether there is any faulty wiring or breakdown, depending on which
abnormality status is ON. This makes it possible to determine the
presence/absence of any faulty wiring and device abnormality of a
cryopump apparatus including a plurality of cryopumps and a
controller, thus preventing any operation failure and breakdown of
each cryopump.
[0120] Note that the above-described abnormal statuses A1 to A7 and
their combination patterns Nos. 1 to 19 are merely an example, and
may be changed as needed in accordance with, for example, the
configuration of a cryopump apparatus used actually.
[0121] Also, although this embodiment has exemplified a
configuration in which the controller 1 can determine the
presence/absence of faulty wiring of the cables 10 to 16 and
abnormalities of controlled devices connected to them, the present
invention is not particularly limited to this. In short, the
present invention is applicable to any configuration as long as the
cryopump apparatus can determine the connection states between the
plurality of cryopumps and the controller by detecting a change in
at least one of the temperature and pressure in each cryopump by
the detection means.
[0122] The controller may have the following function.
[0123] First, the controller operates the refrigerator of one
cryopump to make its internal temperature different from the
temperature of the environment in which the cryopump apparatus is
installed by a certain degree. After that, the controller opens the
roughing valve or purge valve.
[0124] The controller then detects that a subsequent change in
temperature is slow if the roughing valve is opened, and that a
subsequent change in temperature is fast if the purge valve is
opened. With this operation, the controller confirms that the
roughing valve opening/closing cable or purge valve opening/closing
cable and the temperature sensor cable are connected to the same
cryopump. The controller eventually confirms that all of the
refrigerator driving cable, temperature sensor cable, roughing
valve opening/closing cable, purge valve opening/closing cable, and
pressure sensor cable are connected to the same cryopump. This
operation is performed for a plurality of cryopumps one by one.
With this operation, the controller confirms that the refrigerator
driving cables, temperature sensor cables, roughing valve
opening/closing cables, purge valve opening/closing cables, and
pressure sensor cables are connected between the controller and the
plurality of cryopumps without any errors.
[0125] Alternatively, the controller may have the following
function.
[0126] First, the controller heats the heater of one cryopump to
make its internal temperature higher than the temperature of the
environment in which the cryopump apparatus is installed. At this
time, the controller opens the roughing valve or purge valve.
[0127] The controller then detects that a subsequent change in
temperature is slow if the roughing valve is opened, and that a
subsequent change in temperature is fast if the purge valve is
opened. With this operation, the controller confirms that the
roughing valve opening/closing cable or purge valve opening/closing
cable and the temperature sensor cable are connected to the same
cryopump. The controller eventually confirms that all of the
refrigerator driving cable, heater cable, temperature sensor cable,
purge valve opening/closing cable, and pressure sensor cable are
connected to the same cryopump. The same operation is performed for
a plurality of cryopumps one by one.
[0128] With this operation, the controller confirms that the
refrigerator driving cables, temperature sensor cables, roughing
valve opening/closing cables, purge valve opening/closing cables,
and pressure sensor cables are connected between the controller and
the plurality of cryopumps without any errors.
[0129] As has been described above, the present invention can be
used for a cryopump apparatus having a plurality of cryopumps and a
controller, and an operation method therefor. The present invention
can also be used for a vacuum exhaust system having a cryotrap and
a controller, and an operation method therefor.
[0130] While the present invention has been described with
reference to exemplary embodiments, it is to be understood that the
invention is not limited to the disclosed exemplary embodiments.
The scope of the following claims is to be accorded the broadest
interpretation so as to encompass all such modifications and
equivalent structures and functions.
[0131] This application claims the benefit of Japanese Patent
Application No. 2007-285230, filed Nov. 1, 2007, which is hereby
incorporated by reference herein in its entirety.
* * * * *