U.S. patent application number 12/352495 was filed with the patent office on 2009-05-14 for antistatic treatment agent, and antistatic film, coated article and pattern forming method using the agent.
This patent application is currently assigned to SHOWA DENKO K.K.. Invention is credited to Takashi OHKUBO, Yoshihiro Saida.
Application Number | 20090123771 12/352495 |
Document ID | / |
Family ID | 38156784 |
Filed Date | 2009-05-14 |
United States Patent
Application |
20090123771 |
Kind Code |
A1 |
OHKUBO; Takashi ; et
al. |
May 14, 2009 |
ANTISTATIC TREATMENT AGENT, AND ANTISTATIC FILM, COATED ARTICLE AND
PATTERN FORMING METHOD USING THE AGENT
Abstract
The invention provides an antistatic treatment agent having an
ability of preventing resist film thinning phenomenon in a
chemically amplified resist, an antistatic film, a coated article
and a pattern forming method using such antistatic treatment agent,
in particular, the invention provides an antistatic treatment agent
comprising an aqueous solvent-soluble electroconductive polymer, a
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound and an anionic surfactant, an antistatic film, a coated
article and a pattern forming method using such antistatic
treatment agent. As the aqueous solvent-soluble electroconductive
polymer, a .pi.-conjugated electroconductive polymer having a
Bronsted acid group is a sulfonic acid group is preferred and it is
preferable that the amount of the diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound be from 0.1 to 75 mol % based
on the total number of moles of the basic compounds.
Inventors: |
OHKUBO; Takashi; (Chiba,
JP) ; Saida; Yoshihiro; (Nagano, JP) |
Correspondence
Address: |
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W., SUITE 800
WASHINGTON
DC
20037
US
|
Assignee: |
SHOWA DENKO K.K.
Tokyo
JP
|
Family ID: |
38156784 |
Appl. No.: |
12/352495 |
Filed: |
January 12, 2009 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11663199 |
Mar 19, 2007 |
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PCT/JP05/17909 |
Sep 21, 2005 |
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12352495 |
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60618569 |
Oct 15, 2004 |
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60618571 |
Oct 15, 2004 |
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60618608 |
Oct 15, 2004 |
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Current U.S.
Class: |
428/500 ;
252/500; 528/380; 528/391 |
Current CPC
Class: |
G03F 7/093 20130101;
C08G 2261/312 20130101; C09K 3/16 20130101; Y10T 428/31855
20150401 |
Class at
Publication: |
428/500 ;
528/380; 252/500; 528/391 |
International
Class: |
B32B 27/00 20060101
B32B027/00; H01B 1/12 20060101 H01B001/12; C08G 75/24 20060101
C08G075/24 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 22, 2004 |
JP |
2004-276069 |
Sep 22, 2004 |
JP |
2004-276070 |
Sep 22, 2004 |
JP |
2004-276071 |
Claims
1-29. (canceled)
30. An antistatic treatment agent comprising an aqueous
solvent-soluble electroconductive polymer having a Bronsted acid
group and a diamine or polyamine aliphatic basic compound, wherein
the aqueous solvent-soluble electroconductive polymer includes a
chemical structure represented by formula (3): ##STR00009## in the
formula, R.sup.5 represents a hydrogen atom, a linear or branched,
saturated or unsaturated hydrocarbon group having 1 to 20 carbon
atoms, a linear or branched, saturated or unsaturated alkoxy group
having 1 to 20 carbon atoms, a hydroxyl group, a halogen atom, a
nitro group, a cyano group, a trihalomethyl group, a phenyl group,
a substituted phenyl group or a --B--SO.sub.3.sup.-M.sup.+ group; B
represents --(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in
which p represents 0 or an integer of 1 to 3, and q and r each
independently represents an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion, or a quaternary
ammonium ion.
31. The antistatic treatment agent as claimed in claim 30, wherein
the number of moles of the basic group contained in the diamine or
polyamine aliphatic basic compound is within a range of 0.05 to 50
mol % based on the number of moles of the Bronsted acid group
contained in the aqueous solvent-soluble electroconductive
polymer.
32. The antistatic treatment agent as claimed in claim 30, which is
an aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine or polyamine aliphatic basic compound and 0.1 to 20 mass %
of the volatile basic compound, provided that the entire amount of
the antistatic treatment agent is 100 mass %.
33. The antistatic treatment agent as claimed in claim 30, further
comprising a surfactant.
34. The antistatic treatment agent as claimed in claim 33, wherein
the surfactant is an anionic surfactant, an amphoteric surfactant
or a mixture thereof.
35. The antistatic treatment agent as claimed in claim 33, wherein
the surfactant is an anionic surfactant.
36. The antistatic treatment agent as claimed in claim 35, which is
an aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine or polyamine aliphatic basic compound, 0.1 to 20 mass % of
a volatile basic compound and 0.001 to 1 mass % of an amphoteric
surfactant provided that the entire amount of the antistatic
treatment agent is 100 mass %.
37. An antistatic film obtained by using the antistatic treatment
agent as described in claim 30.
38. A coated article coated with the antistatic film as claimed in
claim 37.
39. A coated article described in claim 38, wherein the antistatic
film is formed on a photosensitive composition or a charged
particle-sensitive composition coated on a base substrate.
40. The pattern forming method using the antistatic film as claimed
in claim 37.
41. An antistatic treatment agent comprising an aqueous
solvent-soluble electroconductive polymer having a Bronsted acid
group and a diamine or polyamine aliphatic basic compound, wherein
the aqueous solvent-soluble electroconductive polymer includes a
chemical structure represented by formula (4): ##STR00010## in the
formula, R.sup.6 to R.sup.8 each independently represents a
hydrogen atom, a linear or branched, saturated or unsaturated
hydrocarbon group having 1 to 20 carbon atoms, a linear or
branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group, a substituted
phenyl group or a SO.sub.3.sup.-M.sup.+ group; R.sup.9 represents a
hydrogen atom or a monovalent group selected from a group of a
linear or branched, saturated or unsaturated hydrocarbon group
having 1 to 20 carbon atoms, a phenyl group and a substituted
phenyl group; B represents
--(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in which p
represents 0 or an integer of 1 to 3, and q and r each
independently represents an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion, or a quaternary
ammonium ion.
42. The antistatic treatment agent as claimed in claim 41, wherein
the number of moles of the basic group contained in the diamine or
polyamine aliphatic basic compound is within a range of 0.05 to 50
mol % based on the number of moles of the Bronsted acid group
contained in the aqueous solvent-soluble electroconductive
polymer.
43. The antistatic treatment agent as claimed in claim 41, which is
an aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine or polyamine aliphatic basic compound and 0.1 to 20 mass %
of the volatile basic compound, provided that the entire amount of
the antistatic treatment agent is 100 mass %.
44. The antistatic treatment agent as claimed in claim 41, further
comprising a surfactant.
45. The antistatic treatment agent as claimed in claim 44, wherein
the surfactant is an anionic surfactant, an amphoteric surfactant
or a mixture thereof.
46. The antistatic treatment agent as claimed in claim 44, wherein
the surfactant is an anionic surfactant.
47. The antistatic treatment agent as claimed in claim 46, which is
an aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine or polyamine aliphatic basic compound, 0.1 to 20 mass % of
a volatile basic compound and 0.001 to 1 mass % of an amphoteric
surfactant provided that the entire amount of the antistatic
treatment agent is 100 mass %.
48. An antistatic film obtained by using the antistatic treatment
agent as described in claim 41.
49. A coated article coated with the antistatic film as claimed in
claim 48.
50. A coated article described in claim 49, wherein the antistatic
film is formed on a photosensitive composition or a charged
particle-sensitive composition coated on a base substrate.
51. The pattern forming method using the antistatic film as claimed
in claim 48.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This is a Continuation of application Ser. No. 11/663,199
filed Mar. 19, 2007 which is a National Stage Application filed
under .sctn.371 of PCT Application No. PCT/JP2005/017909 filed Sep.
21, 2005, which claims benefit of U.S. Provisional Application No.
60/618,569 filed Oct. 15, 2004, U.S. Provisional Application No.
60/618,571 filed Oct. 15, 2004 and U.S. Provisional Application No.
60/618,608 filed Oct. 15, 2004. The above-noted applications are
incorporated herein by reference in their entirety.
TECHNICAL FIELD
[0002] The present invention relates to an antistatic treatment
agent containing an aqueous solvent-soluble electroconductive
polymer and a diamine (divalent) or polyamine (polyvalent)
aliphatic basic compound. More specifically, it relates to an
antistatic treatment agent, which hardly forms a mixing layer with
a chemically amplified resist employed in semiconductor
microprocessing process while maintaining its antistatic property.
Even more specifically, it relates to an antistatic treatment agent
which exhibits an excellent wettability with a chemically amplified
resist. Further, the present invention relates to an antistatic
film, a coated article and a pattern forming method using the
antistatic treatment agent.
BACKGROUND ART
[0003] A self-doping type electroconductive polymer is generally
soluble in water and has characteristics of being easily formed in
an arbitrary shape, formed in a film or positioned, and is
therefore characterized with its extremely excellent workability in
preparation of a large-area film or in an electrical device
requiring microfabrication technology.
[0004] A charge-up preventing technology utilizing such
characteristics in a lithographic process employing charged
particle beams such as electron beams or ion beams is disclosed
(JP-A No. 4-32848) and is being widely employed recently.
[0005] A chemically amplified resist, which is an essential
material in common technology for lithography utilizing light or
charged particle beams such as electron beams or ion beams, is a
resist which is easily influenced by the use environment and is
difficult to handle.
[0006] In case of coating a surface of the chemically amplified
resist with an electroconductive composition, it is already known
that a slight acid component in the coating material can have a
significant influence on the sensitivity of the resist. That is,
phenomenons that under a certain hydrogen ion concentration (pH)
range, acid generated by exposure is neutralized by the coating
material and that acid supplied from the coating material makes an
unexposed part fall in the same state as an exposed part are
observed. Such a phenomenon appears as a film thickness loss in
case of a positive type resist, while in case of a negative type
resist, such a phenomenon appears as formation of a hardly soluble
layer or an insoluble layer.
[0007] For suppressing a pH change in an aqueous solution of an
aqueous solvent-soluble electroconductive polymer, there is
disclosed a method of eliminating oxygen dissolved in the solution
(JP-A No. 8-259673) and a method of suppressing a pH decrease by
using a buffer solution containing a weak acid and an amine (JP-A
No. 11-189746).
[0008] Recently there is encountered a problem of resist collapse,
caused by reduction in the minimum circuit line width of a
semiconductor device, and attempts are being made to select an
appropriate aspect ratio in order to avoid such phenomenon, whereby
resist film thickness tends to become smaller. A resist patterned
through a developing step is subsequently used for a pattern
transfer to a substrate by a dry etching step, and dry-etching
resistance of the resist in this process is becoming more
important, so that requirements for the prevention of a film
thickness loss phenomenon of the resist caused by a charge-up
preventing film and for the maintenance of a resist profile are
becoming stricter in recent years.
[0009] More specifically, in a process of forming an antistatic
treatment film on a resist surface, in case where a solvent having
a high affinity with water contained in the antistatic treatment
agent remains in the resist, the liquid components show mutual
penetration. As the aqueous solvent-soluble electroconductive
polymer also migrates with the penetration of the liquid
components, a mixing layer is formed at the interface between the
resist and the antistatic treatment film. When the concentration of
an acid component derived from the aqueous solvent-soluble
electroconductive polymer contained in the mixing layer exceeds the
concentration inducing a chemical change of the resist, there is
exhibited a film thickness loss phenomenon in case of a positive
chemically amplified resist, or formation of a hardly soluble layer
or eventually a fogging phenomenon in case of a negative chemically
amplified resist. Such an undesired chemical change at the
interface generates a profile called a bowing or a T-top in the
resist after patterning. In the process of transferring such
pattern onto a substrate such as a silicon wafer, the development
of such profile detrimentally affects control of variation in the
line width and the depth and shape of etching, thus constituting a
serious problem in fine patterning.
[0010] It is known that since chemical amplification resists are
mostly oil-soluble and a coated film thereof is not easily mixed
with water, in case of coating a resist surface with an
electroconductive composition, a surfactant is added to the
electroconductive composition for the purpose of improving a
wettability. However conventional surfactants that have been
employed often cause an influence on the resist profile such as
film thickness loss of the resist, while decrease in the amount of
the surfactant reduces the wettability, thus affecting the coating
property. On the other hand, since the surfactant also has an
influence on the resist, there is disclosed a method of utilizing a
water-soluble polymer having a surfactant effect (JP-A No.
2002-226721).
DISCLOSURE OF INVENTION
[0011] An object of the present invention is to provide an
antistatic treatment agent having an ability of preventing resist
film thinning phenomenon in a chemically amplified resist. Also
another object is to provide an antistatic treatment agent having
not only an ability of preventing resist film thinning phenomenon
but also good coatability. Further, still another object of the
present invention is to provide an antistatic film, a coated
article and a pattern forming method using such antistatic
treatment agent.
[0012] The present inventors, as a result of intensive
investigations, have found that an antistatic treatment agent
containing an aqueous solvent-soluble electroconductive polymer and
a diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound has an excellent ability for preventing film-thinning in a
chemically amplified resist and have thus reached the present
invention. The present inventors have further found out that if
surfactant is added to the agent, the agent can maintain the
ability of preventing film-thinning and exhibits excellent
wettability, and have thus completed the present invention.
[0013] Thus the present invention relates to a following antistatic
treatment agent, a pattern forming method utilizing an antistatic
film using the agent, and various substrate products obtained by
utilizing the antistatic film and the pattern forming method.
1. An antistatic treatment agent comprising an aqueous
solvent-soluble electroconductive polymer having a Bronsted acid
group and a diamine (divalent) or polyamine (polyvalent) aliphatic
basic compound. 2. The antistatic treatment agent as described in
item 1, further comprising a volatile basic compound. 3. The
antistatic treatment agent as described in item 1, wherein the
molar ratio of diamine (divalent) or polyamine (polyvalent)
aliphatic basic compound in the total mole number of the basic
compound is within a range of 0.1 to 75 mol. %. 4. The antistatic
treatment agent as described in item 1, wherein at least one kind
of the diamine (divalent) or polyamine (polyvalent) aliphatic basic
compounds has a boiling point of 80.degree. C. or higher. 5. The
antistatic treatment agent as described in item 1, wherein the
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound consists of one or more kinds selected from a group of a
diaminoalkane, a triaminoalkane, a polyaminoalkane and a
polyalkylimine. 6. The antistatic treatment agent as described in
item 5, wherein the diamine (divalent) or polyamine (polyvalent)
aliphatic basic compound consists of one or more kinds selected
from a group of ethylenediamine, diaminopropane, diaminobutane,
diaminopentane, diaminohexane, diaminooctane, diaminodecane and
polyethyleneimine. 7. The antistatic treatment agent as described
in item 1, wherein the aqueous solvent-soluble electroconductive
polymer is a .pi.-conjugated electroconductive polymer. 8. The
antistatic treatment agent as described in item 1, wherein the
Bronsted acid group is a sulfonic acid group. 9. The antistatic
treatment agent as described in item 1, wherein the number of moles
of the basic group contained in the diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound is within a range of 0.05 to
50 mol % based on the number of moles of the Bronsted acid group
contained in the aqueous solvent-soluble electroconductive polymer.
10. The antistatic treatment agent as described in item 2, which is
an aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound and 0.1 to 20 mass % of a volatile basic compound,
provided that the entire amount of the antistatic treatment agent
is 100 mass %. 11. The antistatic treatment agent as described in
item 1, further comprising a surfactant. 12. The antistatic
treatment agent as described in item 11, wherein the surfactant is
an anionic surfactant, an amphoteric surfactant or a mixture
thereof. 13. The antistatic treatment agent as described in item
11, wherein the surfactant is an anionic surfactant. 14. The
antistatic treatment agent as described in item 13, which is an
aqueous solution containing 0.1 to 10 mass % of an aqueous
solvent-soluble electroconductive polymer, 0.1 to 20 mass % of a
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound, 0.1 to 20 mass % of a volatile basic compound and 0.001
to 1 mass % of an amphoteric surfactant provided that the entire
amount of the antistatic treatment agent is 100 mass %. 15. The
antistatic treatment agent as described in item 1, wherein the
aqueous solvent-soluble electroconductive polymer includes a
chemical structure represented by formula (1):
##STR00001##
in the formula, m and n each independently represents 0 or 1; X
represents S, N--R.sup.1 or O; A represents an alkylene group or an
alkenylene group (that may have two or more double bonds) having 1
to 4 carbon atoms and having at least a substituent represented by
--B--SO.sub.3.sup.-M.sup.+, wherein the alkylene and alkenylene
group may be substituted with a linear or branched, saturated or
unsaturated hydrocarbon group having 1 to 20 carbon atoms, a linear
or branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group or a substituted
phenyl group; B represents
--(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in which p, q and
r independently represents 0 or an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion, or a quaternary
ammonium ion. 16. The antistatic treatment agent described in item
1, wherein the aqueous solvent-soluble electroconductive polymer
includes a chemical structure represented by formula (2):
##STR00002##
in the formula, R.sup.2 to R.sup.4 each independently represents a
hydrogen atom, a linear or branched, saturated or unsaturated
hydrocarbon group having 1 to 20 carbon atoms, a linear or
branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group, a substituted
phenyl group or a --B--SO.sub.3.sup.-M.sup.+ group; and B and M
represent the same meanings as described in item 15. 17. The
antistatic treatment agent as described in item 1, wherein the
aqueous solvent-soluble electroconductive polymer includes a
chemical structure represented by formula (3):
##STR00003##
in the formula, R.sup.5 represents a hydrogen atom, a linear or
branched, saturated or unsaturated hydrocarbon group having 1 to 20
carbon atoms, a linear or branched, saturated or unsaturated alkoxy
group having 1 to 20 carbon atoms, a hydroxyl group, a halogen
atom, a nitro group, a cyano group, a trihalomethyl group, a phenyl
group, a substituted phenyl group or a --B--SO.sub.3.sup.-M.sup.+
group; and B, p, q, r and M represent the same meanings as
described in item 10. 18. The antistatic treatment agent described
in item 1, wherein the aqueous solvent-soluble electroconductive
polymer includes a chemical structure represented by formula
(4):
##STR00004##
in the formula, R.sup.6 to R.sup.8 each independently represents a
hydrogen atom, a linear or branched, saturated or unsaturated
hydrocarbon group having 1 to 20 carbon atoms, a linear or
branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group, a substituted
phenyl group or a SO.sub.3.sup.-M.sup.+ group; R.sup.9 represents a
hydrogen atom or a monovalent group selected from a group of a
linear or branched, saturated or unsaturated hydrocarbon group
having 1 to 20 carbon atoms, a phenyl group and a substituted
phenyl group; and B and M represent the same meanings as described
in item 15. 19. The antistatic treatment agent as described in item
15 or 16, wherein the aqueous solvent-soluble electroconductive
polymer is a polymer including 5-sulfonisothianaphthene-1,3-diyl as
a chemical structure. 20. An antistatic film obtained by using the
antistatic treatment agent as described in any one of the items 1
to 19. 21. A coated article coated with the antistatic film as
described in item 20. 22. A coated article described in item 21,
wherein the antistatic film is formed on a photosensitive
composition or a charged particle-sensitive composition coated on a
base substrate. 23. The pattern forming method using the antistatic
film as described in item 20.
[0014] Moreover, the invention relates to a following aqueous
solution.
24. An aqueous solution for antistatic treatment agent comprising a
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound and an anionic surfactant. 25. An aqueous solution for
antistatic treatment agent comprising a diamine (divalent) or
polyamine (polyvalent) aliphatic basic compound, a volatile basic
compound and an anionic surfactant. 26. The aqueous solution for
antistatic treatment agent as described in item 24 or 25, wherein
the mole fraction of the diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound is within a range of 0.1 to
75 mol % based on the total number of moles of the basic compounds.
27. The aqueous solution for antistatic treatment agent as
described in any one of items 24 to 26, comprising at least one
kind of the diamine (divalent) or polyamine (polyvalent) aliphatic
basic compounds having a boiling point of 80.degree. C. or higher.
28. The aqueous solution for antistatic treatment agent as
described in any one of items 24 to 27, wherein the diamine
(divalent) or polyamine (polyvalent) aliphatic basic compound
consists of one or more kinds selected from a group of a
diaminoalkane, a triaminoalkane, a polyaminoalkane and a
polyalkylimine. 29. The aqueous solution for antistatic treatment
agent as described in any one of items 24 to 27, wherein the
diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound consists of one or more kinds selected from a group of
ethylenediamine, diaminopropane, diaminobutane, diaminopentane,
diaminohexane, diaminooctane, diaminodecane and
polyethyleneimine.
BEST MODE FOR CARRYING OUT THE INVENTION
[0015] The antistatic treatment agent contains an aqueous
solvent-soluble electroconductive polymer, and a coating film using
the agent and an article coated with the agent having
electroconductivity are used for antistatic purpose.
[0016] The antistatic treatment agent of the invention, if left
standing or dried after an application, loses its water content
through evaporation or the like, thereby becoming a semi-solid or a
solid without fluidity. The agent in such a state with no fluidity
is called "antistatic material", and the antistatic material in a
film state is called an "antistatic film". The present invention
will be further clarified in the following.
[0017] The aqueous solvent-soluble electroconductive polymer is
generally a .pi.-conjugated electroconductive polymer having a
Bronsted acid group, and is used in a state where a sulfonic acid
group or a carboxylic acid group derived from the Bronsted acid
group is neutralized with a basic compound. In the present
invention, the neutralization is conducted with a mixture
consisting of a diamine (divalent) or polyamine (polyvalent) basic
compound or another basic compound.
[0018] The aqueous solvent-soluble electroconductive polymer, after
being coated on a resist surface, forms an ionic bond with a basic
compound along with the evaporation of water, but does not lose
mobility completely. Also in case of employing a volatile basic
compound, when the base substrate is heated together with the
resist coated with antistatic film, the ionic bonds formed with the
volatile basic compound are partially decomposed to thereby allow
the base component to evaporate, thereby resulting in a drawback
that a Bronsted acid thus generated affects the resist.
[0019] The present inventors have found out that, by neutralizing
Bronsted acids in the aqueous solvent-soluble electroconductive
polymer with a diamine (divalent) or polyamine (polyvalent)
aliphatic basic compound, ionic bonds are formed between the
electroconductive polymer and the diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound in the antistatic film formed
on the surface of the resist film, thereby suppressing mobility of
the electroconductive polymer in the antistatic film to thereby
prevent mixing at the interface with the chemically amplified
resist and that it is effective for suppressing film thickness loss
and for maintaining the resist profile.
[0020] The diamine (divalent) or polyamine (polyvalent) aliphatic
basic compound to be employed in the invention is not particularly
restricted, and specific examples include ethylenediamine,
1,3-propanediamine, 1,2-propanediamine, 1,4-butanediamine,
1,5-pentanediamine, 1,6-hexanediamine, 1,2-cyclohexanediamine,
1,8-diaminooctane, 1,10-decanediamine, 2,3-butanediamine,
1,2-bismethylaminoethane, 1,2-bisethylaminoethane,
1,2-bispropylaminoethane, 1,2-bisisopropylaminoethane,
2-dimethylaminoethylamine, 2-ethylaminoethylamine,
2-isopropylaminoethylamine, 2-butylaminoethylamine,
2-propylaminoethylamine, 1,2-bisfurfurylaminoethane,
2-furfurylaminoethylamine, 1,2,3-triaminopropane,
3,3-diaminodipropylamine and polyethyleneimine, but, in case of
electron beam drawing, since the resist is generally subjected to
heating process, a volatile basic compound shows partial
decomposition of the ionic bonds. Therefore, it is preferable that
at least a diamine (divalent) or polyamine (polyvalent) aliphatic
basic compound having a boiling point of 80.degree. C. or higher be
contained. One kind of such diamine (divalent) or polyamine
(polyvalent) aliphatic basic compounds may be employed singly or a
mixture of two or more kinds may be used. Also it may be used in a
mixture with other basic compounds. Preferred examples of other
basic compounds include a volatile basic compound. The molar ratio
of the diamine (divalent) or polyamine (polyvalent) aliphatic basic
compound is preferably 0.01 to 75 mass % based on the entire basic
compounds. If the molar ratio is less than 0.01 mass %, an effect
of the present invention cannot be obtained. If the ratio exceeds
75 mass %, it may cause decrease in the conductivity and
insolubilization of the aqueous solvent-soluble electroconductive
polymer, and further, in cases where the agent is applied in a
chemically amplified resist, a quenching of acid generated by
irradiation of charged particle beams.
[0021] A volatile basic compound means a compound that is in a
gaseous state under the normal temperature and the normal pressure,
having a boiling point of 25.degree. C. or lower, and that is
normally handled in a solution state. Specific examples include
ammonia, methylamine, ethylamine and dimethylamine.
[0022] The chemically amplified resist, after generation of an acid
catalyst by exposure to light, is heated to accelerate reaction. In
a basic compound having a boiling point equal to or lower than the
heating temperature including the following basic compounds, like
in a volatile basic compound, ionic bonds between Bronsted acid
sites of the electroconductive polymer, the surfactant and the
basic compound are partially decomposed to allow the base component
to evaporate. Therefore, basic compounds having a boiling point
equal to or lower than the normal heating temperature of the
resist, such as isopropylamine, ethylmethylamine, t-butylamine,
n-propylamine, isopropylmethylamine, cyclopropylamine,
diethylamine, allylamine, isobutylamine or ethylpropylamine are
included as examples of volatile basic compounds.
[0023] The aqueous solvent-soluble electroconductive polymer to be
employed in the present invention basically requires to be a
.pi.-conjugated electroconductive polymer which has a Bronsted acid
group which is soluble in water. The electroconductive polymer is a
self-doping type electroconductive polymer where the Bronsted acid
group is substituted directly on the main chain of n-electron
conjugation or substituted via a spacer such as an alkylene side
chain or an oxyalkylene side chain, and the chemical structure is
not particularly restricted. Specific examples of the polymer
structure include copolymers comprising repeating units such as
poly(isothianaphthenesulfonic acid), poly(pyrrolealkylsulfonic
acid) and poly(anilinesulfonic acid), polymers having a salt
structure thereof and substituted derivatives thereof.
[0024] In the aforementioned copolymer, the repeating units having
a chemical structure containing a sulfonic acid group normally
account for 100 to 50 mol % based on the total repeating units
constituting the polymer, preferably 100 to 80 mol %. The polymer
may be a copolymer containing repeating units of other
.pi.-conjugate chemical structures or have a copolymer composition
constituted by 2 to 5 kinds of repeating units.
[0025] In the invention, "a copolymer containing a repeating unit"
is not necessarily limited to a copolymer containing the repeating
unit in continuous manner but includes a polymer containing the
repeating unit in irregular manner or discontinuous manner in the
.pi.-conjugate main chain such as a random copolymer, as long as a
desired electroconductivity can be exhibited based on the
.pi.-conjugate main chain.
[0026] Examples of particularly useful structures in the aqueous
solvent-soluble electroconductive polymer of the invention having
the Bronsted acid group include structures represented by formulas
(1), (2), (3) and (4). The electroconductive polymer may be a
polymer formed by a single structure of each of these general
formulas, or a copolymer including such a structure and other
structures.
##STR00005##
[0027] In the formula, m and n each independently represents 0 or
1; X represents S, N--R.sup.1 or O; A represents an alkylene group
or an alkenylene group (that may have two or more double bonds)
having 1 to 4 carbon atoms and having at least a substituent
represented by --B--SO.sub.3.sup.-M.sup.+, wherein the alkylene and
alkenylene group may be substituted with a linear or branched,
saturated or unsaturated hydrocarbon group having 1 to 20 carbon
atoms, a linear or branched, saturated or unsaturated alkoxy group
having 1 to 20 carbon atoms, a hydroxyl group, a halogen atom, a
nitro group, a cyano group, a trihalomethyl group, a phenyl group,
or a substituted phenyl group; B represents
--(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in which p, q and
r independently represents 0 or an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion, or a quaternary
ammonium ion.
##STR00006##
[0028] In the formula, R.sup.2 to R.sup.4 each independently
represents a hydrogen atom, a linear or branched, saturated or
unsaturated hydrocarbon group having 1 to 20 carbon atoms, a linear
or branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group, a substituted
phenyl group or a --B--SO.sub.3.sup.-M.sup.+ group. A chain of an
alkyl group, an alkoxy group or an alkyl ester group of R.sup.2,
R.sup.3 or R.sup.4 may arbitrarily include a carbonyl bond, an
ether bond, an ester bond, a sulfonate ester bond, an amide bond, a
sulfonamide bond, a sulfide bond, a sulfinyl bond, a sulfonyl bond,
or an imino bond. B represents
--(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in which p, q and
r independently represents 0 or an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion, or a quaternary
ammonium ion.
##STR00007##
[0029] In the formula, R.sup.5 represents a hydrogen atom, a linear
or branched, saturated or unsaturated hydrocarbon group having 1 to
20 carbon atoms, a linear or branched, saturated or unsaturated
alkoxy group having 1 to 20 carbon atoms, a hydroxyl group, a
halogen atom, a nitro group, a cyano group, a trihalomethyl group,
a phenyl group, a substituted phenyl group or a
--B--SO.sub.3.sup.-M.sup.+ group. A chain of the alkyl group, the
alkoxy group or the alkyl ester group of R.sup.5 may arbitrarily
include a carbonyl bond, an ether bond, an ester bond, a sulfonate
ester bond, an amide bond, a sulfonamide bond, a sulfide bond, a
sulfinyl bond, a sulfonyl bond, or an imino bond. B represents
--(CH.sub.2).sub.p--(O).sub.q--(CH.sub.2).sub.r-- in which p, q and
r independently represents 0 or an integer of 1 to 3; and M.sup.+
represents a hydrogen ion, an alkali metal ion or a quaternary
ammonium ion.
##STR00008##
[0030] In the formula, R.sup.6 to R.sup.8 each independently
represents a hydrogen atom, a linear or branched, saturated or
unsaturated hydrocarbon group having 1 to 20 carbon atoms, a linear
or branched, saturated or unsaturated alkoxy group having 1 to 20
carbon atoms, a hydroxyl group, a halogen atom, a nitro group, a
cyano group, a trihalomethyl group, a phenyl group, a substituted
phenyl group or a SO.sub.3.sup.-M.sup.+ group; and R.sup.9
represents a hydrogen atom or a monovalent group selected from a
group of a linear or branched, saturated or unsaturated hydrocarbon
group having 1 to 20 carbon atoms, a phenyl group and a substituted
phenyl group. A chain of the alkyl group, the alkoxy group or the
alkyl ester group of R.sup.6 to R.sup.8 may arbitrarily include a
carbonyl bond, an ether bond, an ester bond, a sulfonate ester
bond, an amide bond, a sulfonamide bond, a sulfide bond, a sulfinyl
bond, a sulfonyl bond or an imino bond. B represents
--(CH.sub.2).sub.p--(O).sub.q-- (CH.sub.2).sub.r-- in which p, q
and r independently represents 0 or an integer of 1 to 3; and
M.sup.+ represents a hydrogen ion, an alkali metal ion or a
quaternary ammonium ion.
[0031] Particularly useful examples for R.sup.2 to R.sup.8 in the
aforementioned formulae include a hydrogen atom, an alkyl group, an
alkoxy group, an alkyl ester group, a phenyl or substituted phenyl
group, and a sulfonic acid group. More specifically, examples of
such substituents include, as an alkyl group, methyl, ethyl,
propyl, allyl, isopropyl, butyl, 1-butenyl, pentyl, hexyl, heptyl,
octyl, nonyl, decyl, undecyl, dodecyl, tetradecyl, hexadecyl,
ethoxyethyl, methoxyethyl, methoxyethoxyethyl, acetonyl and
phenathyl; as an alkoxy group, methoxy, ethoxy, propoxy,
isopropoxy, butoxy, pentyloxy, hexyloxy, octyloxy, dodecyloxy,
methoxyethoxy and methoxyethoxyethoxy; as an alkyl ester group,
alkoxycarbonyl groups such as methoxycarbonyl, ethoxycarbonyl and
butoxycarbonyl, and acyloxy groups such as acetoxy and butyloyloxy;
and as a substituted phenyl group, fluorophenyl, chlorophenyl,
bromophenyl, methylphenyl and methoxyphenyl. A chain of the alkyl
group or the alkoxy group of R.sup.2 to R.sup.8 may arbitrarily
include a carbonyl bond, an ether bond, an ester bond, a sulfonate
ester bond, an amide bond, a sulfonamide bond, a sulfide bond, a
sulfinyl bond, a sulfonyl bond, or an imino bond.
[0032] Among the aforementioned substituents represented by R.sup.2
to R.sup.5 in formulas (2) and (3), a hydrogen atom, a linear or
branched alkyl or alkoxy group having 1 to 20 carbon atoms are
preferred, and a hydrogen atom and a linear or branched alkoxy
group having 1 to 20 carbon atoms are particularly preferred.
[0033] As a substituent represented by R.sup.6 to R.sup.8 in
formula (4), a hydrogen atom or a monovalent group selected from a
group of a linear or branched saturated or unsaturated hydrocarbon
group having 1 to 20 carbon atoms, a phenyl group and a substituted
phenyl group is preferred.
[0034] In formulas (1) to (4), B represents
--(CH.sub.2).sub.x--(O).sub.y--(CH.sub.2).sub.z-- in which x and z
independently represents 0 or an integer of 1 to 3, and y
represents 0 or 1; and in case where all of x, y and z are 0
(x=y=z=0), B does not exist and a sulfur atom otherwise to be
bonded to B is directly bonded to the bonding site at which B is
otherwise to be present.
[0035] Preferred examples of B include methylene, ethylene,
propylene, butylene, pentylene, hexylene, arylene, butadienylene,
oxymethylene, oxyethylene, oxypropylene, methyleneoxyethylene and
ethyleneoxyethylene.
[0036] In --(CH.sub.2).sub.x--(O).sub.y--(CH.sub.2).sub.z--
represented by B, there is particularly desired a case where x and
z each independently represents 0 or 1, y represents 0 or 1, and z
represents 1 in case where y is 1, and particularly preferable
examples of B include a case where B is absent and a sulfur atom is
directly bonded (--SO.sub.3.sup.-M.sup.+), and a case where B is
present and is methylene (--CH.sub.2--), dimethylene
(--CH.sub.2--CH.sub.2--), oxymethylene (--O--CH.sub.2--), or
methyleneoxymethylene (--CH.sub.2--O--CH.sub.2--).
[0037] In the formula, M.sup.+ represents a hydrogen ion, an alkali
metal ion or a quaternary ammonium ion, and there may be employed a
mixture containing one or more of such cations.
[0038] The alkali metal ion can be, for example, Na.sup.+, Li.sup.+
or K.sup.+.
[0039] The quaternary ammonium ion is represented by
N(R.sup.10)(R.sup.11)(R.sup.2)(R.sup.13).sup.+. In the formula,
R.sup.10 to R.sup.13 each independently represents a hydrogen atom,
a linear or branched substituted or non-substituted alkyl group
having 1 to 30 carbon atoms, or a substituted or non-substituted
aryl group, or it may also be an alkyl or aryl group including a
group containing an element other than carbon or hydrogen, such as
an alkoxy group, a hydroxyl group, an oxyalkylene group, a
thioalkylene group, an azo group, an azobenzene group or a
p-diphenyleneoxy group.
[0040] As a quaternary ammonium cation represented by
N(R.sup.10)(R.sup.11)(R.sup.12)(R.sup.13).sup.+, there is employed
a non-substituted, alkyl-substituted or aryl-substituted cation
such as NH.sub.4.sup.+, NH(CH.sub.3).sub.3.sup.+,
NH(C.sub.6H.sub.5).sub.3.sup.+,
N(CH.sub.3).sub.2(CH.sub.2OH)(CH.sub.2-Z).sup.+, wherein Z
represents an arbitrary substituent with a chemical formula amount
of 600 or less, such as a phenoxy group, a p-diophenyleneoxy group,
a p-alkoxydiphenyleneoxy group or a p-alkoxyphenylazophenoxy group.
Also for the purpose of converting to a specified cation, an
ordinary ion exchange resin may be used.
[0041] The following are examples usable as a constituent unit
containing a Bronsted acid and constituting the aqueous
solvent-soluble electroconductive polymer of the present invention.
Examples not corresponding to formulas (1), (2), (3) and (4)
include poly(carbazole-N-alkanesulfonic acid),
poly(phenylene-oxyalkanesulfonic acid),
poly(phenylenevinylene-alkanesulfonic acid),
poly(phenylenevinylene-oxyalkanesulfonic acid),
poly(aniline-N-alkanesulfonic acid), poly(thiophenealkylcarboxylic
acid), poly(thiopheneoxyalkylcarboxylic acid),
poly(polypyrrolealkylcarboxylic acid),
poly(pyrroleoxyalkylcarboxylic acid),
poly(carbazole-N-alkylcarboxylic acid),
poly(phenylene-oxyalkylcarboxylic acid),
poly(phenylenevinylene-alkylcarboxylic acid),
poly(phenylenevinylene-oxyalkylcarboxylic acid),
poly(aniline-N-alkylcarboxylic acid) and a substituted derivative
thereof, 6-sulfonaphtho[2,3-c]thiophene-1,3-diyl and a lithium
salt, a sodium salt, an ammonium salt, a methylammonium salt, an
ethylammonium salt, a dimethylammonium salt, a diethylammonium
salt, a trimethylammonium salt, a triethylammonium salt, a
tetramethylammonium salt and a tetraethylammonium salt thereof.
[0042] Preferred specific examples of the chemical structure
represented by formula (1), (2) or (3) include
5-(3'-propanesulfo)-4,7-dioxycyclohexa[2,3-c]thiophene-1,3-diyl,
5-(2'-ethanesulfo)-4,7-dioxycyclohexa[2,3-c]thiophene-1,3-diyl,
5-sulfoisothianaphthene-1,3-diyl, 4-sulfoisothianaphthene-1,3-diyl,
4-methyl-5-sulfoisothianaphthene-1,3-diyl,
6-methyl-5-sulfoisothianaphthene-1,3-diyl,
6-methyl-4-sulfoisothianaphthene-1,3-diyl,
5-methyl-4-sulfoisothianaphthene-1,3-diyl,
6-ethyl-5-sulfoisothianaphthene-1,3-diyl,
6-propyl-5-sulfoisothianaphthene-1,3-diyl,
6-butyl-5-sulfoisothianaphthene-1,3-diyl,
6-hexyl-5-sulfoisothianaphthene-1,3-diyl,
6-decyl-5-sulfoisothianaphthene-1,3-diyl,
6-methoxy-5-sulfoisothianaphthene-1,3-diyl,
6-ethoxy-5-sulfoisothianaphthene-1,3-diyl,
6-chloro-5-sulfoisothianaphthene-1,3-diyl,
6-bromo-5-sulfoisothianaphthene-1,3-diyl,
6-trifluoromethyl-5-sulfoisothianaphthene-1,3-diyl,
5-(sulfomethane)isothianaphthene-1,3-diyl,
5-(2'-sulfoethane)isothianaphthene-1,3-diyl,
5-(2'-sulfoethoxy)isothianaphthene-1,3-diyl,
5-(2'-(2''-sulfoethoxy)methane)isothianaphthene-1,3-diyl,
5-(2'-(2''-sulfoethoxy)ethane)isothianaphthene-1,3-diyl and a
lithium salt, a sodium salt, an ammonium salt, a methylammonium
salt, an ethylammonium salt, a dimethylammonium salt, a
diethylammonium salt, a trimethylammonium salt, a triethylammonium
salt, a tetramethylammonium salt and a tetraethylammonium salt
thereof.
[0043] Preferred specific examples of the chemical structure
represented by formula (4) include 2-sulfo-1,4-iminophenylene,
3-methyl-2-sulfo-1,4-iminophenylene,
5-methyl-2-sulfo-1,4-iminophenylene,
6-methyl-2-sulfo-1,4-iminophenylene,
5-ethyl-2-sulfo-1,4-iminophenylene,
5-hexyl-2-sulfo-1,4-iminophenylene,
3-methoxy-2-sulfo-1,4-iminophenylene,
5-methoxy-2-sulfo-1,4-iminophenylene,
6-methoxy-2-sulfo-1,4-iminophenylene,
5-ethoxy-2-sulfo-1,4-iminophenylene,
2-sulfo-N-methyl-1,4-iminophenylene and
2-sulfo-N-ethyl-1,4-iminophenylene and a lithium salt, a sodium
salt, an ammonium salt, a methylammonium salt, an ethylammonium
salt, a dimethylammonium salt, a diethylammonium salt, a
trimethylammonium salt, a triethylammonium salt, a
tetramethylammonium salt and a tetraethylammonium salt thereof.
[0044] Since the molecular weight of the self-doping type
electroconductive polymer to be employed in the present invention
depends on a chemical structure of the repeating unit constituting
the polymer, it cannot be flatly defined. However, the polymer may
have any molecular weight as far as the polymer meets the objects
of the present invention, and polymers having the number of
repeating unit constituting the main chain (polymerization degree)
within a range of 5 to 2,000 and preferably 10 to 1,000 can be
mentioned.
[0045] Particularly preferred examples of the .pi.-conjugated
electroconductive polymer having Bronsted acid group to be employed
in the invention include a polymer of
5-sulfoisothanaphthene-1,3-diyl, a random copolymer containing 80
mol % or more of 5-sulfoisothanaphthene-1,3-diyl,
poly(5-sulfoisothanaphthene-1,3-diyl-co-isothanaphthene-1,3-diyl),
poly(3-(3-thienyl)ethanesulfonic acid)),
poly(3-(3-thienyl)propanesulfonic acid)),
poly(2-(3-thienyl)oxyethanesulfonic acid)), a random copolymer
containing 50 mol % or more of 2-sulfo-1,4-iminophenylene, and
poly(2-sulfo-1,4-iminophenylene-co-1,4-iminophenylene), and a
lithium salt, a sodium salt, an ammonium salt and a
triethylammonium salt thereof.
[0046] The concentration of the aqueous solvent-soluble
electroconductive polymer differs depending on function desired in
the film. However, the concentration is normally from 0.001 to 30
mass % and preferably 0.01 to 10 mass %.
[0047] In the antistatic treatment agent of the invention, a
solvent miscible with water and not causing a dedoping of the
aqueous solvent-soluble electroconductive polymer may be employed.
Specific examples include ethers such as 1,4-dioxane and
tetrahydrofuran, carbonates such as dimethyl carbonate, diethyl
carbonate, ethylene carbonate and propylene carbonate, nitriles
such as acetonitrile and benzonitrile, alcohols such as methanol,
ethanol, propanol, and isopropanol, non-protonic polar solvents
such as N,N-dimethylformamide, dimethylsulfoxide and
N-methyl-2-pyrrolidone, mineral acids such as sulfuric acid and
organic acids such as acetic acid. These may be employed as a mixed
solvent of two or more kinds.
[0048] In the antistatic treatment agent of the present invention,
an appropriate amount of surfactant may be added for the purpose of
improving wettability and coatability. In particular, it is
preferable to use a surfactant in a case where the antistatic
treatment agent is applied onto a coating film of a resist having
low compatibility with water.
[0049] The surfactant employed in the present invention is not
particularly restricted and any one of anionic, cationic amphoteric
and nonionic surfactants may be used. Preferred among them are
anionic surfactant and amphoteric surfactant.
[0050] It is known that, in a case where anionic surfactant or
amphoteric surfactant is used, if the surfactant contains a
Bronsted acid in its molecule, it affects a chemically amplified
resist.
[0051] In the present invention, Bronsted acids present in anionic
surfactant and/or amphoteric surfactant, together with Bronsted
acids present in the aqueous solvent-soluble electroconductive
polymer, are neutralized by a diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound, and thereby
crosslinking-like ionic bonds are formed between arbitrary Bronsted
acid sites of the electroconductive polymer and the anionic
surfactant and the basic compound. As a result, the mobility of the
electroconductive polymer and the surfactant can be suppressed to
thereby exhibit an effect of preventing film thinning and also to
exhibit an unprecededly excellent wettability.
[0052] Specific examples of the anionic surfactant employed in the
present invention include an alkyl ethersulfonic acid, a linear
alkylbenzenesulfonic acid, an .alpha.-olefinsulfonic acid, an
alkane sulfonate, a dialkylsulfosuccinic acid, a
naphthalenesulfonic acid-formaldehyde condensate, an ester of
alkylsulfuric acid, an ester of polyoxyethylene alkyl ether
sulfuric acid, an ester of polyoxyethylene alkylphenyl ether
sulfuric acid, a higher alcohol phosphate ester, a higher
alcohol-ethylene oxide adduct phosphate ester, and an
acyl-N-methyltaurine.
[0053] Specific examples of the amphoteric surfactant employed in
the present invention include quaternary ammonium type surfactants
such as monoalkylammonium, dialkylammonim and ethoxylated ammonium,
alkyl amines, and guanidine group-containing compounds such as
lauroylamide guanidine, and also salts thereof may be used.
[0054] One of these anionic or amphoteric surfactants can be
employed singly or a mixture of two or more kinds may be employed,
and also these may be used in combination with a compound having a
surfactant effect such as a nonionic or cationic surfactant or a
water-soluble polymer.
[0055] The amount of the anionic surfactant to be added to the
antistatic treatment agent of the present invention is preferably
from 0.001 to 1 mass %, based on the entire antistatic treatment
agent as 100 mass %. If the blending amount is 0.001 mass % or
more, the effect of the invention can be obtained. If the blending
amount is 1% or less, the resist profile such as film thickness is
not affected. The same is true in a case of using an amphoteric
surfactant and the same effect can be obtained.
[0056] The antistatic treatment agent of the present invention may
be used for a non-chemically amplified resist or for a chemically
amplified resist.
[0057] For a non-chemically amplified resist, the antistatic
treatment agent of the present invention is effective as an
antistatic treatment agent with an excellent coating property. A
resin in the non-chemically amplified resist is not particularly
restricted. Examples thereof include phenolic resins such as
novolac resin, poly(methyl methacrylate) resin, acrylic resins such
as polyacrylate resin, and a copolymer of .alpha.-methylstyrene and
.alpha.-chloroacrylic acid, however, are not restricted
thereto.
[0058] For a chemically amplified resist, the present invention
prevents formation of a mixing layer at a contact surface between
the antistatic film of the invention and the chemically amplified
resist, and exhibits an effect of suppressing film thinning in case
of a positive type resist, and exhibits an effect of preventing
fogging in case of a negative type resist, and. Examples of
components in a composition of a chemically amplified resist
include a photosensitive resin based on phenolic resin, acrylic
resin or azide compound, or a charged particle beam-sensitive resin
based on polymethacrylate resin, polyvinylphenol,
polyhydroxystyrene or copolymer of .alpha.-methylstyrene and
.alpha.-chloroacrylic acid, and solvents. Also, as additives,
examples include a photosensitizer, azide compound, crosslinking
agent, dissolution inhibitor and acid generator. Compounds where
these additives are introduced in the main chain or side chain of
the polymer may be employed, however the components are not limited
thereto. Specifically, the compound described as an electron-beam
resist composition in JP-A 2001-281864.
[0059] The antistatic treatment agent of the present invention can
be regulated to an arbitrary pH value from acidic to alkaline
state, by varying an addition amount of an amine used for
neutralizing the Bronsted acid of the aqueous solvent-soluble
electroconductive polymer and the anionic surfactant contained in
the solution.
[0060] In the present invention, the number of moles of the basic
group contained in the diamine (divalent) or polyamine (polyvalent)
aliphatic basic compound preferably is from 0.05 to 50 mol % by
molar ratio, based on the number of moles of the Bronsted acid
group of the aqueous solvent-soluble electroconductive polymer. If
the number of moles is less than 0.05, an effect of the present
invention cannot be obtained. If it exceeds 50 mol %, it may cause
reduction in the conductivity and insolubilization of the aqueous
solvent-soluble electroconductive polymer.
[0061] As examples of method of forming an antistatic film on the
resist surface with the antistatic treatment agent, a spin coating
is principally employed, however various methods can be employed
according to the purpose of use, such as a dipping (immersion),
spraying onto an article, ink jet method, screen printing and bar
coating method. For the purpose of coating the antistatic treatment
agent of the invention on a resist surface with uniform thickness,
spin coating is particularly preferred.
[0062] An article coated with the antistatic film of the present
invention is a substrate on which an antistatic film and a resist
are laminated, and examples of materials for the substrate include
silicon wafer, compound semiconductor wafers such as gallium
arsenide wafer and indium phosphide wafer, quartz and magnetic
material, however, are not limited thereto. As such a laminated
substrate, substrates in a transitory state in electron beam
lithography including semiconductor manufacturing process or
manufacturing process of photomask, reticle or stencil mask are
included.
[0063] Coating the surface with the antistatic film suppresses
changes in the resist profile, such as fogging, film thinning,
T-top formation or bowing and thereby enables precise pattern
formation. Also, the effect of preventing charge-up of the
antistatic film can prevent misregistration in lithographic process
using charged particle beams, thereby enables pattern formation
with higher precision.
[0064] The present invention is applicable also to an electronic
device. The electronic device used here means an electronic device
having an antistatic film of the invention between electrodes, and
can for example be an organic light-emitting device.
[0065] Between the electrodes, there may be contained materials
other than the antistatic film of the present invention, and there
may be provided a laminate structure of an antistatic thin film and
thin films of other materials.
EXAMPLES
[0066] In the following, the present invention will be explained by
Examples and Comparative Examples, but the present invention is not
limited thereto.
[0067] The synthesizing method of the aqueous solvent-soluble
electroconductive polymer compound and instruments and methods
employed for measuring various physical properties in the following
examples are as follows.
1) Synthesis of Aqueous Solvent-Soluble Electroconductive Polymer
Compound
[0068] Poly(5-sulfoisothianaphthene-1,3-diyl) as the aqueous
solvent-soluble electroconductive polymer compound was synthesized
by referring to a method disclosed in JP-A No. 7-48436.
2) pH Measurement
[0069] The pH values of aqueous solutions were measured with a
hydrogen ion concentration meter of glass electrode type (pH METER
F-13, manufactured by Horiba Ltd.)
3) Method of Preparation of a Coated Film of the Antistatic
Treatment Agent and Measurement of Surface Resistance
[0070] With Spinner 1H-III (manufactured by Kyoei Semiconductor Co.
Ltd.), a coated film of antistatic treatment agent was prepared by
dropping 2 ml of a composition of an antistatic treatment agent on
a Corning #1737 glass plate of 60 mm.times.60 mm.times.1.1 mm and
then spin-coating at 1500 rpm.
[0071] The surface resistance of the coated film was measured with
a surface resistance measuring device MEGARESTER MODEL HT-301
(manufactured by SHISHIDO ELECTROSTATICS, LTD.). The upper limit of
measurement for this device was 1.times.10.sup.11 ohm/sq.
4) Contact Angle
[0072] The contact angle was measured with FACE CA-D manufactured
by Kyowa Hyomen Kagaku Co. LTD.
5) Film Thickness Loss of Chemical Amplification Electron Beam
Resist (Hereinafter Abbreviated as "Resist")
[0073] Film thickness loss amount of a resist was evaluated in the
following procedure.
[0074] (1) Resist film formation: On a square silicon wafer of 40
mm.times.40 mm, a chemically amplified resist FEP171, manufactured
by Fujifilm Arch Co. Ltd., was spin-coated for 60 seconds at 800
rpm, and then a solvent was eliminated by prebaking at 120.degree.
C. for 90 seconds.
[0075] (2) Measurement of Resist Film Thickness
[0076] Resist formed on the substrate was partially peeled off from
a part of the substrate surface, and then with the surface part as
reference position, the initial resist film thickness A (nm) was
measured by using a stylus-type surface profiler (Dektak-3030,
manufactured by ULVAC Corp.).
[0077] (3) Formation of Antistatic Film
[0078] On the surface coated with resist, 5 ml of an
electroconductive composition was dropped so as to cover the entire
surface of the substrate, and was spin-coated with a spin coater at
800 rpm for 60 seconds to obtain an antistatic film of a thickness
of 0.02 .mu.m.
[0079] (4) Baking Process
[0080] The substrate having the antistatic film and the resist
laminated thereon was heated, in an air atmosphere, for 90 seconds
on a hot plate in a reflow oven (manufactured by Sikama
International Inc.) by regulating the plate surface temperature at
120.degree. C. under actual measurement with a surface temperature
meter. Then the substrate of this state was let to stand for 30
minutes in the air at the normal temperature.
[0081] (5) Development
[0082] 2 ml of a developing solution of 2.38 mass % aqueous
solution of tetramethyl ammonium hydroxide (TMAH) was dropped on
the surface of the antistatic film. After standing for 60 seconds,
the developing solution was shaken off at 800 rpm, and the film was
dried by continuing the rotation for 60 seconds.
[0083] (6) Postbaking Process
[0084] The substrate was let to stand for 10 minutes in an oven
heated in advance to 90.degree. C., for drying.
[0085] (7) Resist film thickness B (nm) after development was
measured with a stylus-type surface profiler, with respect to the
part from which the resist had been peeled off in (2) above.
[0086] (8) Resist film thickness loss C(C=A-B) was calculated by
subtracting B from A.
6) Reference Film Thickness Loss
[0087] A resist has a film thickness loss (hereinafter called
reference film thickness loss) D (nm) inherent to each resist,
depending on a storage period of the coated film, after the
preparation of the resist coated film. Such film thickness loss D,
which is not attributable to the antistatic film, was measured in
advance by the following method.
[0088] (1) Resist Film Formation
[0089] On a square silicon wafer of 40 mm.times.40 mm, a chemically
amplified resist FEP171, manufactured by Fujifilm Arch Co., Ltd,
was spin-coated for 60 seconds at 800 rpm, and then a solvent was
eliminated by prebaking at 120.degree. C.
[0090] (2) Measurement of Resist Film Thickness
[0091] Resist formed on the substrate was partially peeled off from
a part of the substrate surface, and then with the surface part as
reference position, the initial resist film thickness E (nm) was
measured by using a stylus-type surface profiler.
[0092] (3) Development
[0093] 2 ml of a developing solution of 2.38 mass % aqueous
solution of TMAH was dropped on the surface of the antistatic film.
After standing for 60 seconds, the developing solution was shaken
off at 800 rpm, and the film was dried by continuing the rotation
for 60 seconds.
[0094] (4) Postbaking Process
[0095] The substrate was let to stand for 10 minutes in an oven
heated in advance to 90.degree. C., for drying.
[0096] (5) Resist film thickness F (nm) after development was
measured with a stylus-type surface profiler, with respect to the
part from which the resist had been peeled off in (2) above.
[0097] (6) Resist film thickness loss D (D=F-E) was calculated by
subtracting E from F.
[0098] It is preferable that the value obtained by subtracting film
thickness loss C (nm) from reference film thickness loss D (nm) be
less than 10 nm, particularly preferably less than 3 nm.
Example 1
[0099] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a mixed solution of basic compounds formed by 1
mol/l each of ammonia water and an aqueous solution of
1,4-diaminobutane with a ratio of 99% 1%, to thereby obtain
antistatic treatment agent 1. The antistatic treatment agent 1
showed, on a glass substrate, a surface resistivity of
4.8.times.10.sup.6 ohm/sq.
Example 2
[0100] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a mixed solution of basic compounds formed by of 1
mol/l each ammonia water and an aqueous solution of
1,4-diaminobutane with a ratio of 90% 10%, to thereby obtain
antistatic treatment agent 2. The antistatic treatment agent 2
showed, on a glass substrate, a surface resistivity of
6.4.times.10.sup.6 ohm/sq.
Example 3
[0101] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated at
4.5 by using a mixed solution of basic compounds formed by 1 mol/l
each of ammonia water and an aqueous solution of
1,6-hexamethylenediamine with a ratio of 99% 1%, to thereby obtain
antistatic treatment agent 3. The antistatic treatment agent 3
showed, on a glass substrate, a surface resistivity of
3.9.times.10.sup.6 ohm/sq.
Example 4
[0102] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a mixed solution of basic compounds formed by 1
mol/l each of ammonia water and an aqueous solution of
1,6-hexamethylenediamine with a ratio of 90%:10%, to thereby obtain
antistatic treatment agent 4. The antistatic treatment agent 4
showed, on a glass substrate, a surface resistivity of
5.1.times.10.sup.6 ohm/sq.
Comparative Example 1
[0103] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a 1 mol/l aqueous solution of ammonia, to thereby
obtain antistatic treatment agent 5. The antistatic treatment agent
5 showed, on a glass substrate, a surface resistivity of
3.3.times.10.sup.6 ohm/sq.
Comparative Example 2
[0104] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a mixed solution of basic compounds formed by 1
mol/l each of ammonia water and an aqueous solution of ethanolamine
with a ratio of 50%:50%, to thereby obtain antistatic treatment
agent 6. The antistatic treatment agent 6 showed, on a glass
substrate, a surface resistivity of 4.3.times.10.sup.6 ohm/sq.
[0105] Results of measurements of a film thickness loss on the
antistatic treatment agents of examples 1 tp 4 and comparative
examples 1 and 2 are shown in Table 1.
TABLE-US-00001 TABLE 1 Composition of neutralizing agent film
thickness loss (mol. ratio) (nm) Example 1 NH.sub.3 99% DAB 1% 1
Example 2 90% 10% 3 Example 3 99% HMDA 1% 2 Example 4 90% 10% -1
Comp. Ex. 1 100% -- -- 7 Comp. Ex. 2 50% EA 50% 10 * NH.sub.3:
ammonia water (manufactured by Kanto Chemical Co., Inc.) DAB:
1,4-diaminobutane (manufactured by Acros Organics) HMDA:
hexamethylenediamine (manufactured by Kanto Chemical Co., Inc.) EA:
ethanolamine (manufactured by Kanto Chemical Co., Inc.)
[0106] As shown in Table 1, it was confirmed that the antistatic
treatment agents containing the diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound (Examples 1 to 4) showed
almost no film thickness loss, but the antistatic treatment agents
utilizing other basic compounds (Comparative Examples 1 and 2)
showed film thickness losses.
Examples 5 to 14
[0107] Into 100 ml of a 0.8 mass % aqueous solution of
poly(5-sulfoisothianaphthene-1,3-diyl), 0.1 mass % of
dodecylbenzenesulfonic acid was added and the pH was regulated to
be 4.5 by using a mixed solution of basic compounds formed by 1
mol/l each of ammonia water and diamine (divalent) or polyamine
(polyvalent) basic compounds with a molar ratio shown in Table 2,
to thereby obtain antistatic treatment agents.
[0108] Results of measurement of contact angle of the antistatic
treatment agents are shown in Table 2.
TABLE-US-00002 TABLE 2 neutralizing agent composition contact angle
(mol. ratio) (.degree.) Example 3 NH.sub.3 99% HMDA 1% 29.8 Example
5 95% 5% 22.5 Example 4 90% 10% 16.3 Example 6 80% 20% 14.8 Example
1 99% DAB 1% 31.4 Example 7 95% 5% 26.5 Example 2 90% 10% 22.0
Example 8 80% 20% 17.0 Example 9 95% DAPe 5% 19.7 Example 10 90%
10% 16.0 Example 11 95% DADPA 5% 24.1 Example 12 90% 10% 20.1
Example 13 95% DAPr 5% 29.0 Example 14 90% 10% 24.9 Comp. Ex. 1
100% -- -- 33.4 Comp. Ex. 2 50% EA 50% 34.6 * NH.sub.3: ammonia
water (manufactured by Kanto Chemical Co., Inc.) HMDA:
hexamethylenediamine (manufactured by Kanto Chemical Co., Inc.)
DAB: 1,4-diaminobutane (manufactured by Acros Organics) DAPe:
1,3-diaminopentane (manufactured by Tokyo Kasei Kogyo Co., Ltd.)
DADPA: 3,3'-diaminodipropylamine (manufactured by Acros Organics)
DAPr: 1,3-diaminopropane (manufactured by Kanto Chemical Co., Inc)
EA: ethanolamine (manufactured by Kanto Chemical Co., Inc.)
Examples 15 to 17
[0109] To 100 mL of aqueous solution, dodecylbenzenesulfonic acid
was added in the blending amount as described in Table 3. Then by
adding thereto a mixed solution of the basic compound where 1 mol/L
each of ammonia water and an aqueous solution of 1,4-diaminobutane
were mixed with the blending ratio of 80%:20%, a water-soluble
composition having a pH value of 4.5 was obtained. The contact
angle of the water-soluble composition for each of the Examples is
shown in Table 3.
Comparative Examples 3 to 5
[0110] To 100 mL of water, dodecylbenzenesulfonic acid was added
the blending amount as described in Table 3. Then, by adding
thereto 1 mol/L of an aqueous solution of ammonia, a water-soluble
composition having a pH value of 4.5 was obtained. The contact
angle of the water-soluble composition in each of the Comparative
Examples is shown in Table 3.
TABLE-US-00003 TABLE 3 Neutralizing agent composition Contact (mol
ratio) Additive angle NH.sub.3 DAB (ppm) (degree) Example 15 80%
20% 2000 18.1 Example 16 80% 20% 1000 21.1 Example 17 80% 20% 500
22.5 Comparative 100% -- 2000 41.5 Example 3 Comparative 100% --
1000 38.7 Example 4 Comparative 100% -- 500 38.9 Example 5 *
NH.sub.3: 1N-ammonia water (manufactured by kanto Chemical Co.,
Inc.) DAB: 1,4-diaminobutane (manufactured by ACROS ORGANICS)
[0111] As seen from the results shown in Table 3, the water-soluble
compositions of the present invention (Examples 15 to 17) are
excellent in wettability compared with the water-soluble
compositions of Comparative Examples (Comparative Examples 3 to
5).
Examples 18 to 24
[0112] To 100 mL of aqueous solution, n-dodecylbenzenesulfonic acid
(manufactured by kanto Chemical Co., Inc.) was added to be 2000
ppm. Then, by using a mixed solution of a basic compound where the
components were mixed in 1 mol/L each with the blending ratio as
shown in Table 4, a water-soluble composition having a pH value of
4.5 for each of Examples 18 to 24 was obtained. The contact angle
of each of the water-soluble compositions against a FEP171 resist
film is shown in Table 4.
Comparative Examples 6 and 7
[0113] To 100 mL of water, n-dodecylbenzenesulfonic acid
(manufactured by kanto KAGAKU) was added to be 2000 ppm. Then, a
mixed solution of 1 mol/L each of ammonia water (1N-ammonia water
manufactured by kanto Chemical, Inc.) and ethanolamine with the
ratio as shown in Table 4 was further added thereto to obtain a
water-soluble composition having a pH value of 4.5 for each of
Comparative Examples 6 and 7. The contact angle of each of the
water-soluble compositions of Comparative Examples 6 and 7 against
a FEP171 resist film is shown in Table 4.
TABLE-US-00004 TABLE 4 Contact Neutralizing agent composition
Additive angle (mol ratio) (ppm) (degree) Example 15 NH.sub.3 80%
DAB 20% 2000 18.1 Example 18 95% 5% 2000 32.4 Example 19 95% DAPr
5% 2000 36.2 Example 20 80% 20% 2000 28.0 Example 21 95% HMDA 5%
2000 34.7 Example 22 80% 20% 2000 26.7 Example 23 95% DAPe 5% 2000
34.7 Example 24 80% 20% 2000 24.5 Comparative 100% -- -- 2000 41.5
Example 3 Comparative 95% EA 5% 2000 38.0 Example 6 Comparative 80%
20% 2000 38.0 Example 7 * NH.sub.3: 1N-ammonia water (manufactured
by kanto CHEMICAL, INC.) DAB: 1,4-diaminobutane (manufactured by
ACROS ORGANICS) HMDA: hexamethylenediamine (manufactured by kanto
CHEMICAL, INC.) EA: ethanolamine (manufactured by kanto CHEMICAL,
INC.)
[0114] It was confirmed that the contact angle against a FEP171
resist film decreased by adding a diamine (divalent) or polyamine
(polyvalent) aliphatic basic compound to the anionic surfactant in
Examples 18 to 24, unlike in Comparative Examples 6 and 7.
* * * * *