| Patent | Date |
|---|
Method for figure control of optical surfaces
Grant 11,443,950 - Nelson September 13, 2 | 2022-09-13 |
Variable-zoom Imaging Apparatus
App 20220057599 - Truax; Bruce E. | 2022-02-24 |
Method Of Reducing Roughness And/or Defects On An Optical Surface And Mirror Formed By Same
App 20210158989 - Kincade; John Matthew | 2021-05-27 |
Method Of Mitigating Defects On An Optical Surface And Mirror Formed By Same
App 20210124270 - Kincade; John Matthew | 2021-04-29 |
Method and apparatus for optimizing the optical performance of interferometers
Grant 10,962,348 - Deck March 30, 2 | 2021-03-30 |
Interferometric method and apparatus using calibration information relating a focus setting to a test object position
Grant 10,890,428 - Deck January 12, 2 | 2021-01-12 |
Wavemeter using pairs of interferometric optical cavities
Grant 10,845,251 - Deck November 24, 2 | 2020-11-24 |
Method For Figure Control Of Optical Surfaces
App 20200279746 - Nelson; Andrew | 2020-09-03 |
Metrology of multi-layer stacks
Grant 10,591,284 - Deck , et al. | 2020-03-17 |
Wavemeter
App 20200003620 - Deck; Leslie L. | 2020-01-02 |
Method And Apparatus For Optimizing The Optical Performance Of Interferometers
App 20190346251 - Deck; Leslie L. | 2019-11-14 |
Surface topography apparatus and method
Grant 10,451,413 - de Groot , et al. Oc | 2019-10-22 |
Metrology Of Multi-layer Stacks
App 20190265023 - Deck; Leslie L. ; et al. | 2019-08-29 |
Method and apparatus for optimizing the optical performance of interferometers
Grant 10,267,617 - Deck | 2019-04-23 |
Precision positioning system using a wavelength tunable laser
Grant 10,190,871 - Deck Ja | 2019-01-29 |
Interferometric encoder systems having at least partially overlapping diffracted beams
Grant 10,066,974 - Liesener September 4, 2 | 2018-09-04 |
Surface Topography Apparatus And Method
App 20180180412 - de Groot; Peter J. ; et al. | 2018-06-28 |
Method And Apparatus For Optimizing The Optical Performance Of Interferometers
App 20180143002 - Deck; Leslie L. | 2018-05-24 |
Calibration of scanning interferometers
Grant 9,958,254 - de Groot , et al. May 1, 2 | 2018-05-01 |
Interferometric encoders using spectral analysis
Grant 9,891,078 - Deck , et al. February 13, 2 | 2018-02-13 |
Precision Positioning System Using A Wavelength Tunable Laser
App 20170356739 - Deck; Leslie L. | 2017-12-14 |
Displacement measurement of deformable bodies
Grant 9,823,061 - Badami November 21, 2 | 2017-11-21 |
Measuring topography of aspheric and other non-flat surfaces
Grant 9,798,130 - Dresel , et al. October 24, 2 | 2017-10-24 |
Double pass interferometric encoder system
Grant 9,746,348 - de Groot , et al. August 29, 2 | 2017-08-29 |
Interferometer with real-time fringe-free imaging
Grant 9,719,777 - Colonna de Lega , et al. August 1, 2 | 2017-08-01 |
Method And Apparatus For Optimizing The Optical Performance Of Interferometers
App 20170191821 - Deck; Leslie L. | 2017-07-06 |
Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portion
Grant 9,658,129 - Colonna de Lega , et al. May 23, 2 | 2017-05-23 |
Optical evaluation of lenses and lens molds
Grant 9,599,534 - Fay , et al. March 21, 2 | 2017-03-21 |
Surface topography interferometer with surface color
Grant 9,541,381 - Colonna de Lega January 10, 2 | 2017-01-10 |
Displacement Measurement Of Deformable Bodies
App 20160363439 - Badami; Vivek G. | 2016-12-15 |
Interferometer and method for measuring non-rotationally symmetric surface topography having unequal curvatures in two perpendicular principal meridians
Grant 9,435,640 - Dresel September 6, 2 | 2016-09-06 |
Photo-masks for lithography
Grant 9,411,222 - Tricard August 9, 2 | 2016-08-09 |
Interferometry employing refractive index dispersion broadening of interference signals
Grant 9,377,292 - de Groot June 28, 2 | 2016-06-28 |
Interferometric Encoder Systems
App 20160102999 - Liesener; Jan | 2016-04-14 |
Optical Evaluation Of Lenses And Lens Molds
App 20160047711 - Fay; Martin F. ; et al. | 2016-02-18 |
Optical Evaluation Of Lenses And Lens Molds
App 20160047712 - Colonna de Lega; Xavier ; et al. | 2016-02-18 |
Calibration Of Scanning Interferometers
App 20160047645 - de Groot; Peter J. ; et al. | 2016-02-18 |
Interferometric Encoders Using Spectral Analysis
App 20160011016 - Deck; Leslie L. ; et al. | 2016-01-14 |
In situ calibration of interferometers
Grant 9,234,739 - Sykora , et al. January 12, 2 | 2016-01-12 |
Thermally stable optical sensor mount
Grant 9,200,892 - Badami December 1, 2 | 2015-12-01 |
Compact encoder head for interferometric encoder system
Grant 9,201,313 - Liesener December 1, 2 | 2015-12-01 |
Monolithic optical components with integrated flexures
Grant 9,176,299 - Bremer November 3, 2 | 2015-11-03 |
Double Pass Interferometric Encoder System
App 20150292913 - de Groot; Peter J. ; et al. | 2015-10-15 |
Photo-masks For Lithography
App 20150286129 - Tricard; Marc | 2015-10-08 |
Non-harmonic cyclic error compensation in interferometric encoder systems
Grant 9,146,093 - Demarest September 29, 2 | 2015-09-29 |
Position monitoring system with reduced noise
Grant 9,115,975 - Liesener , et al. August 25, 2 | 2015-08-25 |
In situ calibration of interferometers
Grant 9,103,649 - Sykora , et al. August 11, 2 | 2015-08-11 |
Measuring Topography of Aspheric and Other Non-Flat Surfaces
App 20150192769 - Dresel; Thomas ; et al. | 2015-07-09 |
Interferometer And Method For Measuring Asymmetric Surface Topography
App 20150153163 - Dresel; Thomas | 2015-06-04 |
Interferometry for lateral metrology
Grant 9,025,162 - Colonna de Lega , et al. May 5, 2 | 2015-05-05 |
Double pass interferometric encoder system
Grant 9,025,161 - de Groot , et al. May 5, 2 | 2015-05-05 |
Interferometric encoder systems
Grant 8,988,690 - Deck , et al. March 24, 2 | 2015-03-24 |
In Situ Calibration Of Interferometers
App 20150055139 - Sykora; Daniel M. ; et al. | 2015-02-26 |
Interferometric Heterodyne Optical Encoder System
App 20150043005 - de Groot; Peter J. ; et al. | 2015-02-12 |
Interferometry Employing Refractive Index Dispersion
App 20150043006 - de Groot; Peter J. | 2015-02-12 |
Coherence Scanning Interferometry Using Phase Shifted Interferometrty Signals
App 20150002852 - de Groot; Peter J. ; et al. | 2015-01-01 |
Low coherence interferometry with scan error correction
Grant 8,902,431 - Liesener , et al. December 2, 2 | 2014-12-02 |
Interferometric heterodyne optical encoder system
Grant 8,885,172 - de Groot , et al. November 11, 2 | 2014-11-11 |
Interferometric methods for metrology of surfaces, films and underresolved structures
Grant 8,854,628 - Colonna de Lega , et al. October 7, 2 | 2014-10-07 |
Optical Defect Inspection System
App 20140268105 - Bills; Richard Earl ; et al. | 2014-09-18 |
Monolithic Optical Components With Integrated Flexures
App 20140226223 - Bremer; Mark | 2014-08-14 |
Surface Topography Interferometer With Surface Color
App 20140226150 - Colonna de Lega; Xavier | 2014-08-14 |
Interferometer with a virtual reference surface
Grant 8,797,537 - Freischlad August 5, 2 | 2014-08-05 |
Topographical profiling with coherence scanning interferometry
Grant 8,780,334 - De Groot July 15, 2 | 2014-07-15 |
Object thickness and surface profile measurements
Grant 8,698,891 - Turner , et al. April 15, 2 | 2014-04-15 |
Position Monitoring System With Reduced Noise
App 20140098375 - Liesener; Jan ; et al. | 2014-04-10 |
Interferometric encoder systems
Grant 8,670,127 - Deck , et al. March 11, 2 | 2014-03-11 |
Interferometric Encoder Systems
App 20140049782 - Deck; Leslie L. ; et al. | 2014-02-20 |
Non-contact surface characterization using modulated illumination
Grant 8,649,024 - Colonna de Lega February 11, 2 | 2014-02-11 |
Non-harmonic Cyclic Error Compensation In Interferometric Encoder Systems
App 20130278914 - Demarest; Frank C. | 2013-10-24 |
Low Coherence Interferometry With Scan Error Correction
App 20130155413 - Liesener; Jan ; et al. | 2013-06-20 |
Measurement of changes in surfaces of objects
Grant 8,456,644 - Evans , et al. June 4, 2 | 2013-06-04 |
Fiber Delivery for Metrology Systems Used in Lithography Tools
App 20130128249 - Redlitz; Kurt | 2013-05-23 |
Thermally Stable Optical Sensor Mount
App 20130128254 - Badami; Vivek G. | 2013-05-23 |
Double Pass Interferometric Encoder System
App 20130114061 - de Groot; Peter ; et al. | 2013-05-09 |
Low Coherence Interferometry Using Encoder Systems
App 20130114087 - Deck; Leslie L. | 2013-05-09 |
Compact Encoder Head For Interferometric Encoder System
App 20130114062 - Liesener; Jan | 2013-05-09 |
In Situ Calibration Of Interferometers
App 20130063730 - Sykora; Daniel M. ; et al. | 2013-03-14 |
Fiber-based interferometer system for monitoring an imaging interferometer
Grant 8,379,218 - Deck , et al. February 19, 2 | 2013-02-19 |
Interferometric encoder systems
Grant 8,300,233 - Deck , et al. October 30, 2 | 2012-10-30 |
Object Thickness And Surface Profile Measurements
App 20120229621 - Turner; Justin ; et al. | 2012-09-13 |
Interferometric Metrology Of Surfaces, Films And Underresolved Structures
App 20120224183 - Fay; Martin ; et al. | 2012-09-06 |
Interferometer for overlay measurements
Grant 8,248,617 - De Groot , et al. August 21, 2 | 2012-08-21 |
Interferometric Heterodyne Optical Encoder System
App 20120194824 - de Groot; Peter ; et al. | 2012-08-02 |
Interferometric Encoder Systems
App 20120170048 - Deck; Leslie L. ; et al. | 2012-07-05 |
Cyclic Error Compensation In Interferometric Encoder Systems
App 20120154780 - Demarest; Frank C. | 2012-06-21 |
Non-contact Surface Characterization Using Modulated Illumination
App 20120140243 - Colonna de Lega; Xavier M. | 2012-06-07 |
Interferometer for determining overlay errors
Grant 8,189,202 - Liesener , et al. May 29, 2 | 2012-05-29 |
Interferometer With A Virtual Reference Surface
App 20120120411 - Freischlad; Klaus | 2012-05-17 |
Data Interpolation Methods For Metrology Of Surfaces, Films And Underresolved Structures
App 20120089365 - Fay; Martin ; et al. | 2012-04-12 |
Interferometric Methods For Metrology Of Surfaces, Films And Underresolved Structures
App 20120069326 - Colonna de Lega; Xavier M. ; et al. | 2012-03-22 |
Configuring of lapping and polishing machines
Grant 8,123,593 - Hoon February 28, 2 | 2012-02-28 |
Analyzing surface structure using scanning interferometry
Grant 8,126,677 - De Groot , et al. February 28, 2 | 2012-02-28 |
Interferometric systems and methods featuring spectral analysis of unevenly sampled data
Grant 8,120,781 - Liesener , et al. February 21, 2 | 2012-02-21 |
Methods and systems for interferometric analysis of surfaces and related applications
Grant 8,107,085 - de Groot January 31, 2 | 2012-01-31 |
Interference microscope with scan motion detection using fringe motion in monitor patterns
Grant 8,107,084 - Davidson January 31, 2 | 2012-01-31 |
Interferometric analysis of under-resolved features
Grant 8,072,611 - De Groot December 6, 2 | 2011-12-06 |
Method and system for measuring the relief of an object
Grant RE42,899 - Coulombe , et al. November 8, 2 | 2011-11-08 |
Equal-path interferometer
Grant 8,045,175 - De Groot , et al. October 25, 2 | 2011-10-25 |
Interferometric Encoder Systems
App 20110255096 - Deck; Leslie L. ; et al. | 2011-10-20 |
Scan error correction in low coherence scanning interferometry
Grant 8,004,688 - Davidson , et al. August 23, 2 | 2011-08-23 |
Interferometer utilizing polarization scanning
Grant 7,978,337 - De Groot , et al. July 12, 2 | 2011-07-12 |
Compound reference interferometer
Grant 7,978,338 - De Groot , et al. July 12, 2 | 2011-07-12 |
Interferometer with multiple modes of operation for determining characteristics of an object surface
Grant 7,952,724 - De Lega , et al. May 31, 2 | 2011-05-31 |
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts
Grant 7,948,638 - Kuchel May 24, 2 | 2011-05-24 |
Interferometer and method for measuring characteristics of optically unresolved surface features
Grant 7,948,636 - De Groot , et al. May 24, 2 | 2011-05-24 |
Phase-shifting interferometry in the presence of vibration
Grant 7,948,639 - Deck May 24, 2 | 2011-05-24 |
Error compensation in phase shifting interferometry
Grant 7,948,637 - De Groot May 24, 2 | 2011-05-24 |
Sinusoidal phase shifting interferometry
Grant 7,933,025 - De Groot April 26, 2 | 2011-04-26 |
Apparatus and method for measuring characteristics of surface features
Grant 7,924,435 - Colonna De Lega , et al. April 12, 2 | 2011-04-12 |
Measurement of Changes in Surfaces of Objects
App 20110051147 - Evans; Christopher J. ; et al. | 2011-03-03 |
Multiple-degree of freedom interferometer with compensation for gas effects
Grant 7,894,075 - Hill February 22, 2 | 2011-02-22 |
Interferometry for lateral metrology
Grant 7,889,355 - De Lega , et al. February 15, 2 | 2011-02-15 |
Two grating lateral shearing wavefront sensor
Grant 7,889,356 - Kuchel February 15, 2 | 2011-02-15 |
Interferometer For Determining Overlay Errors
App 20110032535 - Liesener; Jan ; et al. | 2011-02-10 |
Interferometry for determining characteristics of an object surface, with spatially coherent illumination
Grant 7,884,947 - De Lega , et al. February 8, 2 | 2011-02-08 |
Equal-Path Interferometer
App 20110007323 - De Groot; Peter J. ; et al. | 2011-01-13 |
Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
Grant 7,869,057 - De Groot January 11, 2 | 2011-01-11 |
Interferometer system for monitoring an object
Grant 7,826,064 - de Groot , et al. November 2, 2 | 2010-11-02 |
Compensation of effects of atmospheric perturbations in optical metrology
Grant 7,826,063 - Hill November 2, 2 | 2010-11-02 |
Multiple-degree of freedom interferometer with compensation for gas effects
Grant 7,812,965 - Hill October 12, 2 | 2010-10-12 |
Distance measuring interferometer and encoder metrology systems for use in lithography tools
Grant 7,812,964 - Hill October 12, 2 | 2010-10-12 |
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Grant 7,812,963 - De Groot October 12, 2 | 2010-10-12 |
Error Compensation In Phase Shifting Interferometry
App 20100238455 - de Groot; Peter | 2010-09-23 |
Phase-shifting interferometry in the presence of vibration
Grant 7,796,273 - Deck September 14, 2 | 2010-09-14 |
Phase-shifting interferometry in the presence of vibration using phase bias
Grant 7,796,275 - Deck September 14, 2 | 2010-09-14 |
Interferometer With Scan Motion Detection
App 20100195112 - Davidson; Mark | 2010-08-05 |
Interference objective for annular test surfaces
Grant 7,751,064 - Liesener , et al. July 6, 2 | 2010-07-06 |
Scan Error Correction In Low Coherence Scanning Interferometry
App 20100128280 - Davidson; Mark ; et al. | 2010-05-27 |
Fiber-based Interferometer System For Monitoring An Imaging Interferometer
App 20100128278 - Deck; Leslie L. ; et al. | 2010-05-27 |
Interferometric Systems And Methods Featuring Spectral Analysis Of Unevenly Sampled Data
App 20100128283 - Liesener; Jan ; et al. | 2010-05-27 |
Compound Reference Interferometer
App 20100128276 - De Groot; Peter ; et al. | 2010-05-27 |
Vibration resistant interferometry
Grant 7,710,580 - Deck May 4, 2 | 2010-05-04 |
Interferometer System For Monitoring An Object
App 20100091296 - de Groot; Peter ; et al. | 2010-04-15 |
Apparatus for reducing wavefront errors in output beams of acousto-optic devices
Grant 7,697,195 - Hill April 13, 2 | 2010-04-13 |
Interferometer and method for measuring characteristics of optically unresolved surface features
Grant 7,684,049 - De Groot , et al. March 23, 2 | 2010-03-23 |
Interferometer system for monitoring an object
Grant 7,639,367 - Groot , et al. December 29, 2 | 2009-12-29 |
Interferometry method and system including spectral decomposition
Grant 7,636,168 - De Lega , et al. December 22, 2 | 2009-12-22 |
Interferometer system for monitoring an object
Grant 7,636,166 - De Groot , et al. December 22, 2 | 2009-12-22 |
Interferometry For Lateral Metrology
App 20090303493 - Colonna de Lega; Xavier ; et al. | 2009-12-10 |
Generating model signals for interferometry
Grant 7,619,746 - De Lega November 17, 2 | 2009-11-17 |
Cyclic error compensation in interferometry systems
Grant 7,616,322 - Hill , et al. November 10, 2 | 2009-11-10 |
Interferometer with multiple modes of operation for determining characteristics of an object surface
Grant 7,616,323 - De Lega , et al. November 10, 2 | 2009-11-10 |
Scanning interferometric methods and apparatus for measuring aspheric surfaces and wavefronts
Grant 7,612,893 - Kuchel November 3, 2 | 2009-11-03 |
Interferometer For Overlay Measurements
App 20090262362 - de Groot; Peter ; et al. | 2009-10-22 |
Methods and systems for interferometric analysis of surfaces and related applications
Grant 7,586,620 - De Groot September 8, 2 | 2009-09-08 |
Cyclic error compensation in interferometry systems
Grant 7,576,868 - Demarest August 18, 2 | 2009-08-18 |
Method and system for analyzing low-coherence interferometry signals for information about thin film structures
Grant 7,564,566 - de Groot July 21, 2 | 2009-07-21 |
Phase shifting interferometry with multiple accumulation
Grant 7,564,568 - De Groot , et al. July 21, 2 | 2009-07-21 |
Interferometer using integrated retarders to reduce physical volume
Grant 7,561,278 - Carlson July 14, 2 | 2009-07-14 |
Multi-axis interferometers and methods and systems using multi-axis interferometers
Grant 7,548,322 - Hill June 16, 2 | 2009-06-16 |
Interferometric Analysis Of Under-resolved Features
App 20090147268 - Groot; Peter De | 2009-06-11 |
Data age compensation with avalanche photodiode
Grant 7,542,147 - Demarest June 2, 2 | 2009-06-02 |
Angle interferometers
Grant 7,532,330 - Hill May 12, 2 | 2009-05-12 |
Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
Grant 7,528,961 - Hill May 5, 2 | 2009-05-05 |
Apparatus and methods for reducing non-cyclic non-linear errors in interferometry
Grant 7,528,962 - Hill May 5, 2 | 2009-05-05 |
Compensation of systematic effects in low coherence interferometry
Grant 7,522,288 - De Groot April 21, 2 | 2009-04-21 |
Beam shear reduction in interferometry systems
Grant 7,495,770 - Hill February 24, 2 | 2009-02-24 |
In situ determination of pixel mapping in interferometry
Grant 7,495,773 - Dresel February 24, 2 | 2009-02-24 |
Interferometry systems and methods using spatial carrier fringes
Grant 7,492,469 - De Groot February 17, 2 | 2009-02-17 |
Perimeter detection using fiber optic sensors
Grant 7,488,929 - Townley-Smith , et al. February 10, 2 | 2009-02-10 |
Error correction in interferometry systems
Grant 7,489,407 - Hill , et al. February 10, 2 | 2009-02-10 |
Generating Model Signals For Interferometry
App 20090021723 - De Lega; Xavier Colonna | 2009-01-22 |
Scanning interferometry for thin film thickness and surface measurements
Grant 7,468,799 - de Groot , et al. December 23, 2 | 2008-12-23 |
Profiling complex surface structures using scanning interferometry
Grant 7,466,429 - de Groot , et al. December 16, 2 | 2008-12-16 |
Cyclic Error Compensation In Interferometry Systems
App 20080304077 - Demarest; Frank C. | 2008-12-11 |
Methods and systems for interferometric analysis of surfaces and related applications
Grant 7,456,975 - De Groot November 25, 2 | 2008-11-25 |
Multiple-degree of freedom interferometer with compensation for gas effects
App 20080285051 - Hill; Henry A. | 2008-11-20 |
Methods And Systems For Determining Optical Propertis Using Low Coherence Interference Signals
App 20080278730 - De Lega; Xavier Colonna | 2008-11-13 |
Method and apparatus for tilt corrected lateral shear in a lateral shear plus rotational shear absolute flat test
Grant 7,446,883 - Evans , et al. November 4, 2 | 2008-11-04 |
Interferometer for determining characteristics of an object surface
Grant 7,446,882 - De Lega , et al. November 4, 2 | 2008-11-04 |
Multi-axis interferometer with procedure and data processing for mirror mapping
Grant 7,433,049 - Hill , et al. October 7, 2 | 2008-10-07 |
Interferometer for determining characteristics of an object surface, including processing and calibration
Grant 7,428,057 - De Lega , et al. September 23, 2 | 2008-09-23 |
Cyclic error compensation in interferometry systems
Grant 7,428,685 - Demarest , et al. September 23, 2 | 2008-09-23 |
Method And System For Analyzing Low-coherence Interferometry Signals For Information About Thin Film Structures
App 20080221837 - De Groot; Peter | 2008-09-11 |
Interferometry systems and methods
Grant 7,417,743 - De Groot August 26, 2 | 2008-08-26 |
Interferometry For Lateral Metrology
App 20080180685 - DE LEGA; XAVIER COLONNA ; et al. | 2008-07-31 |
Scanning Interferometry For Thin Film Thickness And Surface Measurements
App 20080180694 - de Groot; Peter J. ; et al. | 2008-07-31 |
Sinusoidal Phase Shifting Interferometry
App 20080180679 - de Groot; Peter | 2008-07-31 |
Method for calibration and removal of wavefront errors
Grant 7,405,833 - Smythe , et al. July 29, 2 | 2008-07-29 |
Apparatus And Method For Measuring Characteristics Of Surface Features
App 20080174784 - Colonna De Lega; Xavier ; et al. | 2008-07-24 |
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Grant 7,403,289 - de Groot July 22, 2 | 2008-07-22 |
Interferometer System For Monitoring An Object
App 20080165347 - Groot; Peter de ; et al. | 2008-07-10 |
Distance Measuring Interferometer and Encoder Metrology Systems for Use in Lithography Tools
App 20080165345 - Hill; Henry A. | 2008-07-10 |
Multiple-degree of freedom interferometer with compensation for gas effects
App 20080151229 - Hill; Henry A. | 2008-06-26 |
Coating for reflective optical components
Grant 7,382,466 - Hill June 3, 2 | 2008-06-03 |
Stage alignment in lithography tools
Grant 7,379,190 - Hill May 27, 2 | 2008-05-27 |
Multi-Axis Interferometers and Methods and Systems Using Multi-Axis Interferometers
App 20080117428 - Hill; Henry A. | 2008-05-22 |
Interferometry systems and methods of using interferometry systems
Grant 7,375,823 - Womack , et al. May 20, 2 | 2008-05-20 |
Precompensation of polarization errors in heterodyne interferometry
Grant 7,365,857 - Holmes , et al. April 29, 2 | 2008-04-29 |
Interferometry For Determining Characteristics Of An Object Surface, With Spatially Coherent Illumination
App 20080088849 - DE LEGA; XAVIER COLONNA ; et al. | 2008-04-17 |
Compensation Of Effects Of Atmospheric Perturbations In Optical Metrology
App 20080062405 - Hill; Henry A. | 2008-03-13 |
Multiple-Angle Multiple-Wavelength Interferometer Using High-NA Imaging and Spectral Analysis
App 20080049233 - De Groot; Peter | 2008-02-28 |
Compensation for geometric effects of beam misalignments in plane mirror interferometers
Grant 7,330,274 - Hill February 12, 2 | 2008-02-12 |
Compensation for effects of beam misalignments in interferometer metrology systems
Grant 7,327,465 - Hill February 5, 2 | 2008-02-05 |
Multi-corner retroreflector
Grant 7,327,466 - Carlson February 5, 2 | 2008-02-05 |
Method for compensating errors in interferometric surface metrology
Grant 7,327,469 - Deck February 5, 2 | 2008-02-05 |
Scanning interferometry for thin film thickness and surface measurements
Grant 7,324,210 - De Groot , et al. January 29, 2 | 2008-01-29 |
Interferometer and method for measuring characteristics of optically unresolved surface features
Grant 7,324,214 - De Groot , et al. January 29, 2 | 2008-01-29 |
Compensation Of Systematic Effects In Low Coherence Interferometry
App 20080018901 - Groot; Peter de | 2008-01-24 |
Vibration resistant interferometry
Grant 7,321,430 - Deck January 22, 2 | 2008-01-22 |
Measurement and compensation of errors in interferometers
Grant 7,321,432 - Hill January 22, 2 | 2008-01-22 |
Method and system for analyzing low-coherence interferometry signals for information about thin film structures
Grant 7,321,431 - De Groot January 22, 2 | 2008-01-22 |
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Grant 7,315,382 - De Groot January 1, 2 | 2008-01-01 |
Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies
Grant 7,310,152 - Carlson December 18, 2 | 2007-12-18 |
Methods and systems for determining optical properties using low-coherence interference signals
Grant 7,304,747 - De Lega December 4, 2 | 2007-12-04 |
Methods and systems for interferometric analysis of surfaces and related applications
Grant 7,298,494 - De Groot November 20, 2 | 2007-11-20 |
Interferometric optical assemblies and systems including interferometric optical assemblies
Grant 7,298,493 - Ranalli November 20, 2 | 2007-11-20 |
Triangulation methods and systems for profiling surfaces through a thin film coating
Grant 7,292,346 - De Groot , et al. November 6, 2 | 2007-11-06 |
Surface profiling using an interference pattern matching template
Grant 7,289,225 - De Groot October 30, 2 | 2007-10-30 |
Characterization and compensation of errors in multi-axis interferometry systems
Grant 7,289,226 - Hill October 30, 2 | 2007-10-30 |
Low coherence grazing incidence interferometry for profiling and tilt sensing
Grant 7,289,224 - De Lega , et al. October 30, 2 | 2007-10-30 |
Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems
Grant 7,286,240 - Hill October 23, 2 | 2007-10-23 |
Multi-axis interferometers and methods and systems using multi-axis interferometers
Grant 7,283,248 - Hill October 16, 2 | 2007-10-16 |
Interferometry systems and methods of using interferometry systems
Grant 7,280,224 - Hill , et al. October 9, 2 | 2007-10-09 |
Interferometry systems and methods of using interferometry systems
Grant 7,280,223 - Hill , et al. October 9, 2 | 2007-10-09 |
Optical connection for interferometry
Grant 7,277,180 - Townley-Smith , et al. October 2, 2 | 2007-10-02 |
Vibration resistant interferometry
Grant 7,277,183 - Deck October 2, 2 | 2007-10-02 |
Optical beam shearing apparatus
Grant 7,274,468 - Hill , et al. September 25, 2 | 2007-09-25 |
In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
Grant 7,274,462 - Hill September 25, 2 | 2007-09-25 |
Profiling complex surface structures using scanning interferometry
Grant 7,271,918 - De Groot , et al. September 18, 2 | 2007-09-18 |
Compensation of refractivity perturbations in an interferometer path
Grant 7,268,888 - Hill September 11, 2 | 2007-09-11 |
Compensation for errors in off-axis interferometric measurements
Grant 7,262,860 - Hill August 28, 2 | 2007-08-28 |
Spatial filtering in interferometry
Grant 7,251,041 - Hill July 31, 2 | 2007-07-31 |
Interferometer system for monitoring an object
App 20070171425 - De Groot; Peter ; et al. | 2007-07-26 |
Optical fiber connectors and systems including optical fiber connectors
Grant 7,245,799 - Shull , et al. July 17, 2 | 2007-07-17 |
Profiling complex surface structures using height scanning interferometry
Grant 7,239,398 - De Groot , et al. July 3, 2 | 2007-07-03 |
Method and apparatus for interferometric measurement of components with large aspect ratios
Grant 7,221,461 - Evans May 22, 2 | 2007-05-22 |
Scanning interferometer for aspheric surfaces and wavefronts
Grant 7,218,403 - Kuchel May 15, 2 | 2007-05-15 |
Interferometric microscopy using reflective optics for complex surface shapes
Grant 7,212,291 - De Lega , et al. May 1, 2 | 2007-05-01 |
Interferometer using integrated retarders to reduce physical volume
App 20070086016 - Carlson; Andrew Eric | 2007-04-19 |
Interferometry method and system including spectral decomposition
App 20070086013 - De Lega; Xavier Colonna ; et al. | 2007-04-19 |
Angle interferometers
App 20070064240 - Hill; Henry A. | 2007-03-22 |
Optical interferometry
Grant 7,193,726 - Hill March 20, 2 | 2007-03-20 |
Reduction of thermal non-cyclic error effects in interferometers
Grant 7,180,603 - Hill , et al. February 20, 2 | 2007-02-20 |
Beam shear reduction in interferometry systems
App 20070035742 - Hill; Henry A. | 2007-02-15 |
Stroboscopic interferometry with frequency domain analysis
Grant 7,177,029 - deGroot February 13, 2 | 2007-02-13 |
Apparatus and methods for reducing non-cyclic non-linear errors in interferometry
App 20070002330 - Hill; Henry A. | 2007-01-04 |
Precision surface measurement
Grant 7,158,914 - Kuhn January 2, 2 | 2007-01-02 |
Methods and systems for determining optical properties using low-coherence interference signals
Grant 7,142,311 - De Lega November 28, 2 | 2006-11-28 |
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Grant 7,139,081 - De Groot November 21, 2 | 2006-11-21 |
Interferometry systems involving a dynamic beam-steering assembly
Grant 7,139,080 - Hill , et al. November 21, 2 | 2006-11-21 |
Measurement of complex surface shapes using a spherical wavefront
Grant 7,126,698 - De Groot , et al. October 24, 2 | 2006-10-24 |
Profiling complex surface structures using scanning interferometry
Grant 7,106,454 - De Groot , et al. September 12, 2 | 2006-09-12 |
Scanning interferometry
Grant 7,102,761 - De Lega , et al. September 5, 2 | 2006-09-05 |
In-process correction of stage mirror deformations during a photolithography exposure cycle
Grant 7,075,619 - Hill July 11, 2 | 2006-07-11 |
Interferometry method and apparatus for producing lateral metrology images
Grant 7,068,376 - De Groot June 27, 2 | 2006-06-27 |
Separated beam multiple degree of freedom interferometer
Grant 7,057,739 - Hill June 6, 2 | 2006-06-06 |
Cyclic error reduction in average interferometric position measurements
Grant 7,057,736 - Hill June 6, 2 | 2006-06-06 |
Interferometric servo control system for stage metrology
Grant 7,046,367 - Hill May 16, 2 | 2006-05-16 |
Interferometer having a coupled cavity geometry for use with an extended source
Grant 7,046,371 - De Lega , et al. May 16, 2 | 2006-05-16 |
Interferometer with reduced shear
Grant 7,046,370 - Carlson May 16, 2 | 2006-05-16 |
Compensating for effects of non-isotropic gas mixtures in interferometers
Grant 7,042,574 - Hill May 9, 2 | 2006-05-09 |
Method and apparatus for absolute figure metrology
Grant 7,042,578 - Deck May 9, 2 | 2006-05-09 |
Optical fiber connectors and systems including optical fiber connectors
App 20050238289 - Shull, William A. ; et al. | 2005-10-27 |
Spatial filtering in interferometry
App 20050168755 - Hill, Henry A. | 2005-08-04 |
Compensation for errors in off-axis interferometric measurements
App 20050162664 - Hill, Henry A. | 2005-07-28 |
Stage alignment in lithography tools
App 20050151951 - Hill, Henry A. | 2005-07-14 |
Spatial filtering in interferometry
App 20050030549 - Hill, Henry A. | 2005-02-10 |
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