Zygo Corporation, a Delaware corporation
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zygo Corporation, a Delaware corporation.The latest application filed is for "interferometric servo control system for stage metrology".
- Zygo Corporation, a Delaware corporation -
| Patent | Date |
|---|---|
| Interferometric servo control system for stage metrology App 20050225772 - Hill, Henry A. | 2005-10-13 |
| Cyclic error reduction in average interferometric position measurements App 20050168754 - Hill, Henry A. | 2005-08-04 |
| Measurement of complex surface shapes using a spherical wavefront App 20040239947 - De Groot, Peter J. ; et al. | 2004-12-02 |
| Interferometric servo control system for stage metrology App 20040189998 - Hill, Henry A. | 2004-09-30 |
| Interferometric stage metrology system App 20040046965 - Hill, Henry A. | 2004-03-11 |
| Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam App 20010028461 - Hill, Henry A. ; et al. | 2001-10-11 |
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