Zupan; Peter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zupan; Peter.The latest application filed is for "ion implantation method, ion implantation apparatus and semiconductor device".

Company Profile

1.5.6

Zupan; Peter - Villach AT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ion implantation method, ion implantation apparatus and semiconductor device Grant 11,195,695 - Jelinek , et al. December 7, 2	2021-12-07
Ion Implantation Method, Ion Implantation Apparatus and Semiconductor Device App 20190066977 - Jelinek; Moriz ; et al.	2019-02-28
Thin substrate electrostatic chuck system and method Grant 10,096,507 - Wiltsche , et al. October 9, 2	2018-10-09
Thin Substrate Electrostatic Chuck System And Method App 20170148658 - Wiltsche; Ewald ; et al.	2017-05-25
Thin substrate electrostatic chuck system and method Grant 9,601,363 - Wiltsche , et al. March 21, 2	2017-03-21
Ion Source for Metal Implantation and Methods Thereof App 20160322198 - Wiltsche; Ewald ; et al.	2016-11-03
Thin Substrate Electrostatic Chuck System And Method App 20150318199 - Wiltsche; Ewald ; et al.	2015-11-05
Thin substrate electrostatic chuck system and method Grant 9,030,797 - Wiltsche , et al. May 12, 2	2015-05-12
Thin Substrate Electrostatic Chuck System And Method App 20130321973 - Wiltsche; Ewald ; et al.	2013-12-05

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