loadpatents
name:-0.0051779747009277
name:-0.019140958786011
name:-0.000701904296875
Zuniga; Steven Patent Filings

Zuniga; Steven

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zuniga; Steven.The latest application filed is for "closed-loop control of wafer polishing in a chemical mechanical polishing system".

Company Profile
0.16.3
  • Zuniga; Steven - Soquel CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Closed-loop control of wafer polishing in a chemical mechanical polishing system
Grant 7,018,275 - Zuniga , et al. March 28, 2
2006-03-28
Method of detecting a substrate in a carrier head
Grant 6,857,931 - Chen , et al. February 22, 2
2005-02-22
Closed-loop control of wafer polishing in a chemical mechanical polishing system
App 20050020185 - Zuniga, Steven ;   et al.
2005-01-27
Closed-loop control of wafer polishing in a chemical mechanical polishing system
Grant 6,776,692 - Zuniga , et al. August 17, 2
2004-08-17
Carrier head for chemical mechanical polishing
Grant 6,705,932 - Zuniga , et al. March 16, 2
2004-03-16
Method of detecting a substrate in a carrier head
App 20040033762 - Chen, Hung Chih ;   et al.
2004-02-19
Carrier head with a substrate detector
Grant 6,663,466 - Chen , et al. December 16, 2
2003-12-16
CMP polishing pad
Grant 6,575,825 - Tolles , et al. June 10, 2
2003-06-10
Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane
Grant 6,572,446 - Osterheld , et al. June 3, 2
2003-06-03
Carrier head for chemical mechanical polishing a substrate
Grant 6,514,124 - Zuniga , et al. February 4, 2
2003-02-04
Carrier head for chemical mechanical polishing
Grant 6,406,361 - Zuniga , et al. June 18, 2
2002-06-18
Method of chemical mechanical polishing with edge control
Grant 6,361,420 - Zuniga , et al. March 26, 2
2002-03-26
Carrier head with a flexible membrane for chemical mechanical polishing
Grant 6,277,014 - Chen , et al. August 21, 2
2001-08-21
CMP polishing pad
App 20010008830 - Tolles, Robert D. ;   et al.
2001-07-19
CMP polishing pad
Grant 6,217,426 - Tolles , et al. April 17, 2
2001-04-17
Carrier head for chemical mechanical polishing
Grant 6,165,058 - Zuniga , et al. December 26, 2
2000-12-26
Carrier head for chemical mechanical polishing
Grant 6,162,116 - Zuniga , et al. December 19, 2
2000-12-19
Carrier head for chemical mechanical polishing a substrate
Grant 6,159,079 - Zuniga , et al. December 12, 2
2000-12-12
Carrier head with edge control for chemical mechanical polishing
Grant 6,132,298 - Zuniga , et al. October 17, 2
2000-10-17

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