loadpatents
Patent applications and USPTO patent grants for Zuniga; Steven.The latest application filed is for "closed-loop control of wafer polishing in a chemical mechanical polishing system".
Patent | Date |
---|---|
Closed-loop control of wafer polishing in a chemical mechanical polishing system Grant 7,018,275 - Zuniga , et al. March 28, 2 | 2006-03-28 |
Method of detecting a substrate in a carrier head Grant 6,857,931 - Chen , et al. February 22, 2 | 2005-02-22 |
Closed-loop control of wafer polishing in a chemical mechanical polishing system App 20050020185 - Zuniga, Steven ;   et al. | 2005-01-27 |
Closed-loop control of wafer polishing in a chemical mechanical polishing system Grant 6,776,692 - Zuniga , et al. August 17, 2 | 2004-08-17 |
Carrier head for chemical mechanical polishing Grant 6,705,932 - Zuniga , et al. March 16, 2 | 2004-03-16 |
Method of detecting a substrate in a carrier head App 20040033762 - Chen, Hung Chih ;   et al. | 2004-02-19 |
Carrier head with a substrate detector Grant 6,663,466 - Chen , et al. December 16, 2 | 2003-12-16 |
CMP polishing pad Grant 6,575,825 - Tolles , et al. June 10, 2 | 2003-06-10 |
Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane Grant 6,572,446 - Osterheld , et al. June 3, 2 | 2003-06-03 |
Carrier head for chemical mechanical polishing a substrate Grant 6,514,124 - Zuniga , et al. February 4, 2 | 2003-02-04 |
Carrier head for chemical mechanical polishing Grant 6,406,361 - Zuniga , et al. June 18, 2 | 2002-06-18 |
Method of chemical mechanical polishing with edge control Grant 6,361,420 - Zuniga , et al. March 26, 2 | 2002-03-26 |
Carrier head with a flexible membrane for chemical mechanical polishing Grant 6,277,014 - Chen , et al. August 21, 2 | 2001-08-21 |
CMP polishing pad App 20010008830 - Tolles, Robert D. ;   et al. | 2001-07-19 |
CMP polishing pad Grant 6,217,426 - Tolles , et al. April 17, 2 | 2001-04-17 |
Carrier head for chemical mechanical polishing Grant 6,165,058 - Zuniga , et al. December 26, 2 | 2000-12-26 |
Carrier head for chemical mechanical polishing Grant 6,162,116 - Zuniga , et al. December 19, 2 | 2000-12-19 |
Carrier head for chemical mechanical polishing a substrate Grant 6,159,079 - Zuniga , et al. December 12, 2 | 2000-12-12 |
Carrier head with edge control for chemical mechanical polishing Grant 6,132,298 - Zuniga , et al. October 17, 2 | 2000-10-17 |
NCAGE Code | 62NX4 | ZUNIGA, STEVEN!DBA SHOE FIX AND PEDORTHIC CARE |
CAGE Code | 62NX4 | ZUNIGA, STEVEN SHOE FIX AND PEDORTHIC CARE |
S.A.M. Registration | 62NX4 [963400077] | ZUNIGA, STEVEN SHOE FIX AND PEDORTHIC CARE |
DUNS | 963400077 | ZUNIGA, STEVEN |
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