Patent | Date |
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Method of ionized physical vapor desposition sputter coating high aspect-ratio structures Grant 9,771,648 - Chistyakov , et al. September 26, 2 | 2017-09-26 |
Method Of Coating High Aspect Ratio Features App 20170029937 - Chistyakov; Roman ;   et al. | 2017-02-02 |
High Power Pulse Ionized Physical Vapor Deposition App 20170029936 - Chistyakov; Roman | 2017-02-02 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities App 20140238844 - Chistyakov; Roman | 2014-08-28 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 8,125,155 - Chistyakov February 28, 2 | 2012-02-28 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities App 20110133651 - Chistyakov; Roman ;   et al. | 2011-06-09 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 7,898,183 - Chistyakov , et al. March 1, 2 | 2011-03-01 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities App 20110019332 - Chistyakov; Roman | 2011-01-27 |
High Power Pulse Ionized Physical Vapor Deposition App 20100326815 - Chistyakov; Roman | 2010-12-30 |
High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches App 20100270144 - Chistyakov; Roman | 2010-10-28 |
High deposition rate sputtering Grant 7,811,421 - Chistyakov October 12, 2 | 2010-10-12 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 7,808,184 - Chistyakov October 5, 2 | 2010-10-05 |
High density plasma source Grant 7,750,575 - Chistyakov July 6, 2 | 2010-07-06 |
Methods and Apparatus for Generating Strongly-Ionized Plasmas with Ionizational Instabilities App 20100101935 - Chistyakov; Roman ;   et al. | 2010-04-29 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 7,663,319 - Chistyakov , et al. February 16, 2 | 2010-02-16 |
Method of Hard Coating a Blade App 20090321249 - Chistyakov; Roman ;   et al. | 2009-12-31 |
Methods and apparatus for generating high-density plasma Grant 7,604,716 - Chistyakov October 20, 2 | 2009-10-20 |
High Density Plasma Source App 20090032191 - Chistyakov; Roman | 2009-02-05 |
High-density plasma source Grant 7,446,479 - Chistyakov November 4, 2 | 2008-11-04 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 7,345,429 - Chistyakov March 18, 2 | 2008-03-18 |
Methods And Apparatus For Generating Strongly-ionized Plasmas With Ionizational Instabilities App 20070188104 - Chistyakov; Roman ;   et al. | 2007-08-16 |
Plasma Source With Segmented Magnetron App 20070181417 - Chistyakov; Roman ;   et al. | 2007-08-09 |
High-Power Pulsed Magnetron Sputtering App 20070119701 - Chistyakov; Roman | 2007-05-31 |
Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities App 20060279223 - Chistyakov; Roman | 2006-12-14 |
High-power pulsed magnetron sputtering Grant 7,147,759 - Chistyakov December 12, 2 | 2006-12-12 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities Grant 7,095,179 - Chistyakov August 22, 2 | 2006-08-22 |
Apparatus For Generating High Current Electrical Discharges App 20060066248 - Chistyakov; Roman | 2006-03-30 |
Methods and Apparatus for Generating Strongly-Ionized Plasmas with Ionizational Instabilities App 20050184669 - Chistyakov, Roman | 2005-08-25 |
Generation of uniformly-distributed plasma Grant 6,903,511 - Chistyakov June 7, 2 | 2005-06-07 |
High-power pulsed magnetically enhanced plasma processing Grant 6,896,775 - Chistyakov May 24, 2 | 2005-05-24 |
High deposition rate sputtering Grant 6,896,773 - Chistyakov May 24, 2 | 2005-05-24 |
Plasma Source With Segmented Magnetron Cathode App 20050103620 - Chistyakov, Roman | 2005-05-19 |
Methods and apparatus for generating high-density plasma Grant 6,853,142 - Chistyakov February 8, 2 | 2005-02-08 |
Generation of Uniformly-Distributed Plasma App 20040222745 - Chistyakov, Roman | 2004-11-11 |
High-density Plasma Source Using Excited Atoms App 20040212312 - Chistyakov, Roman | 2004-10-28 |
Plasma generation using multi-step ionization Grant 6,805,779 - Chistyakov October 19, 2 | 2004-10-19 |
High-density plasma source Grant 6,806,651 - Chistyakov October 19, 2 | 2004-10-19 |
High-density plasma source using excited atoms Grant 6,806,652 - Chistyakov October 19, 2 | 2004-10-19 |