Ziger; David H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ziger; David H..The latest application filed is for "calibration wafer for a stepper".

Company Profile

0.11.5

Ziger; David H. - San Antonio TX
Ziger; David H. - Altamonte Springs FL
Ziger; David H. - Lawrenceville NJ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Calibration wafer for a stepper Grant 7,054,007 - Leroux , et al. May 30, 2	2006-05-30
Calibration wafer for a stepper App 20060033917 - Leroux; Pierre ; et al.	2006-02-16
Method for improving substrate alignment Grant 6,716,649 - Ziger April 6, 2	2004-04-06
Method for improving substrate alignment Grant 6,613,589 - Ziger September 2, 2	2003-09-02
Apparatus and method for compensating critical dimension deviations across photomask App 20030157415 - Ziger, David H.	2003-08-21
Calibration wafer for a stepper App 20030152848 - Leroux, Pierre ; et al.	2003-08-14
Apparatus and method for forming photoresist pattern with target critical dimension Grant 6,590,219 - Ziger July 8, 2	2003-07-08
Method for improving substrate alignment App 20030104640 - Ziger, David H.	2003-06-05
Apparatus and method for compensating critical dimension deviations across photomask Grant 6,566,016 - Ziger May 20, 2	2003-05-20
Method for improving substrate alignment App 20030005405 - Ziger, David H.	2003-01-02
Method and arrangement for characterizing micro-size patterns Grant 5,607,800 - Ziger March 4, 1	1997-03-04
Method of etching silicon nitride Grant 5,472,562 - Ziger December 5, 1	1995-12-05
Method of integrated circuit fabrication including selective etching of silicon and silicon compounds Grant 5,310,457 - Ziger May 10, 1	1994-05-10
Spin coating apparatus having a horizontally linearly movable wafer holder Grant 5,205,867 - Ziger April 27, 1	1993-04-27
Semiconductor lithography methods using an ARC of organic material Grant 5,126,289 - Ziger June 30, 1	1992-06-30
Thermal processing of photoresist materials Grant 4,814,243 - Ziger March 21, 1	1989-03-21

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