loadpatents
Patent applications and USPTO patent grants for Zierath; Daniel J..The latest application filed is for "integrated circuit interconnects".
Patent | Date |
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Integrated circuit interconnects Grant 11,018,054 - Zierath , et al. May 25, 2 | 2021-05-25 |
Diffusion barriers Grant 10,651,082 - Zierath , et al. | 2020-05-12 |
Integrated Circuit Interconnects App 20200013673 - Zierath; Daniel J. ;   et al. | 2020-01-09 |
Metal Structures, Devices, And Methods App 20190393156 - Zierath; Daniel J. ;   et al. | 2019-12-26 |
Diffusion Barriers App 20190088538 - Zierath; Daniel J. ;   et al. | 2019-03-21 |
Cobalt based interconnects and methods of fabrication thereof Grant 9,514,983 - Jezewski , et al. December 6, 2 | 2016-12-06 |
Electroless Filled Conductive Structures App 20150371949 - Zierath; Daniel J. ;   et al. | 2015-12-24 |
Electroless filled conductive structures Grant 9,123,706 - Zierath , et al. September 1, 2 | 2015-09-01 |
Liner layers for metal interconnects Grant 8,779,589 - Simka , et al. July 15, 2 | 2014-07-15 |
Cobalt Based Interconnects And Methods Of Fabrication Thereof App 20140183738 - Jezewski; Christopher J. ;   et al. | 2014-07-03 |
Electroless Filled Conductive Structures App 20130270703 - Zierath; Daniel J. ;   et al. | 2013-10-17 |
Self Forming Metal Fluoride Barriers For Fluorinated Low-k Dielectrics App 20120258588 - Jezewski; Christopher J. ;   et al. | 2012-10-11 |
Liner Layers For Metal Interconnects App 20120153478 - Simka; Harsono S. ;   et al. | 2012-06-21 |
Barrierless Single-phase Interconnect App 20120153483 - Akolkar; Rohan N. ;   et al. | 2012-06-21 |
Self Forming Metal Fluoride Barriers for Fluorinated Low-K Dielectrics App 20100244252 - Jezewski; Christopher J. ;   et al. | 2010-09-30 |
Method of fabricating metal interconnects using a sacrificial layer to protect seed layer prior to gap fill App 20080113508 - Akolkar; Rohan N. ;   et al. | 2008-05-15 |
Modified electroplating solution components in a low-acid electrolyte solution Grant 7,371,311 - Zierath , et al. May 13, 2 | 2008-05-13 |
Apparatus having plating solution container with current applying anodes Grant 7,279,084 - Chalupa , et al. October 9, 2 | 2007-10-09 |
Methods for reducing protrusions and within die thickness variations on plated thin film App 20060091018 - Cao; Yang ;   et al. | 2006-05-04 |
Method for improving electroplating in sub-0.1um interconnects by adjusting immersion conditions App 20060006071 - Che; Guangli ;   et al. | 2006-01-12 |
Modified electroplating solution components in a low-acid electrolyte solution App 20050274619 - Zierath, Daniel J. ;   et al. | 2005-12-15 |
Apparatus having plating solution container with current applying anodes App 20050173241 - Chalupa, Radek P. ;   et al. | 2005-08-11 |
Modified electroplating solution components in a low-acid electrolyte solution App 20050077181 - Zierath, Daniel J. ;   et al. | 2005-04-14 |
Modified electroplating solution components in a high-acid electrolyte solution App 20050077180 - Zierath, Daniel J. ;   et al. | 2005-04-14 |
Method for improving electroplating in sub-0.1um interconnects by adjusting immersion conditions App 20040245107 - Che, Guangli ;   et al. | 2004-12-09 |
Methods for reducing protrusions and within die thickness variations on plated thin film App 20040188265 - Cao, Yang ;   et al. | 2004-09-30 |
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