Patent | Date |
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Method for producing an optical element comprising micro-optical structures, arrangement and membrane unit Grant 10,534,152 - Ziener Ja | 2020-01-14 |
Method For Producing An Optical Element Comprising Micro-optical Structures, Arrangement And Membrane Unit App 20170160510 - ZIENER; Christian | 2017-06-08 |
Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge Grant 8,008,595 - Hergenhan , et al. August 30, 2 | 2011-08-30 |
Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge Grant 7,812,542 - Hergenhan , et al. October 12, 2 | 2010-10-12 |
Arrangement for radiation generation by means of a gas discharge Grant 7,800,086 - Ziener , et al. September 21, 2 | 2010-09-21 |
Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated Grant 7,649,187 - Hergenhan , et al. January 19, 2 | 2010-01-19 |
Arrangement and method for the generation of extreme ultraviolet radiation Grant 7,531,820 - Hergenhan , et al. May 12, 2 | 2009-05-12 |
Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge Grant 7,477,673 - Ziener , et al. January 13, 2 | 2009-01-13 |
Arrangement And Method For The Generation Of Extreme Ultraviolet Radiation By Means Of An Electrically Operated Gas Discharge App 20080180029 - Hergenhan; Guido ;   et al. | 2008-07-31 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation Grant 7,405,413 - Hergenhan , et al. July 29, 2 | 2008-07-29 |
Arrangement For The Generation Of Extreme Ultraviolet Radiation By Means Of Electric Discharge At Electrodes Which Can Be Regenerated App 20080006783 - Hergenhan; Guido ;   et al. | 2008-01-10 |
Arrangement For Generating Extreme Ultraviolet Radiation Based On An Electrically Operated Gas Discharge App 20070228299 - Ziener; Christian ;   et al. | 2007-10-04 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma Grant 7,274,030 - Hergenhan , et al. September 25, 2 | 2007-09-25 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation Grant 7,250,621 - Gaebel , et al. July 31, 2 | 2007-07-31 |
Arrangement for the generation of a pulsed laser beam of high average output Grant 7,218,651 - Hergenhan , et al. May 15, 2 | 2007-05-15 |
Arrangement And Method For The Generation Of Extreme Ultraviolet Radiation App 20070085044 - Hergenhan; Guido ;   et al. | 2007-04-19 |
Arrangement For Radiation Generation By Means Of A Gas Discharge App 20070040511 - ZIENER; Christian ;   et al. | 2007-02-22 |
Method and arrangement for the plasma-based generation of soft x-radiation Grant 7,161,163 - Gaebel , et al. January 9, 2 | 2007-01-09 |
Arrangement for the stabilization of the radiation emission of a plasma Grant 7,122,814 - Hergenhan , et al. October 17, 2 | 2006-10-17 |
Method and arrangement for the efficient generation of short-wavelength radiation based on a laser-generated plasma App 20060215712 - Ziener; Christian ;   et al. | 2006-09-28 |
Arrangement for the generation of a pulsed laser beam of high average output App 20060140232 - Hergenhan; Guido ;   et al. | 2006-06-29 |
Arrangement for the generation of intensive short-wave radiation based on a plasma Grant 6,995,382 - Ziener , et al. February 7, 2 | 2006-02-07 |
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation App 20060024216 - Hergenhan; Guido ;   et al. | 2006-02-02 |
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma App 20050274912 - Hergenhan, Guido ;   et al. | 2005-12-15 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation App 20050258768 - Gaebel, Kai ;   et al. | 2005-11-24 |
Method and arrangement for the plasma-based generation of soft x-radiation App 20050169429 - Gaebel, Kai ;   et al. | 2005-08-04 |
Arrangement for the stabilization of the radiation emission of a plasma App 20040195529 - Hergenhan, Guido ;   et al. | 2004-10-07 |
Arrangement for the generation of intensive short-wave radiation based on a plasma App 20040159802 - Ziener, Christian ;   et al. | 2004-08-19 |