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Cleaning solution and method of cleaning wafer
Grant 11,456,170 - Zi , et al. September 27, 2 | 2022-09-27 |
Method Of Manufacturing A Semiconductor Device
App 20220291587 - Zi; An-Ren ; et al. | 2022-09-15 |
Photoresist Developer And Method Of Developing Photoresist
App 20220244639 - ZI; An-Ren ; et al. | 2022-08-04 |
Underlayer Material for Photoresist
App 20220187711 - ZI; An-Ren ; et al. | 2022-06-16 |
Humidity control in EUV lithography
Grant 11,307,504 - Zi , et al. April 19, 2 | 2022-04-19 |
Photoresist developer and method of developing photoresist
Grant 11,300,878 - Zi , et al. April 12, 2 | 2022-04-12 |
Photoresist composition and method of forming photoresist pattern
Grant 11,287,740 - Zi , et al. March 29, 2 | 2022-03-29 |
Underlayer material for photoresist
Grant 11,269,256 - Zi , et al. March 8, 2 | 2022-03-08 |
Method of cleaning extreme ultraviolet lithography collector
Grant 11,262,659 - Zi , et al. March 1, 2 | 2022-03-01 |
Photoresist, developer, and method of forming photoresist pattern
Grant 11,215,924 - Zi , et al. January 4, 2 | 2022-01-04 |
Photoresist Developer And Method Of Manufacturing A Semiconductor Device
App 20210364924 - LIU; Chen-Yu ; et al. | 2021-11-25 |
Method Of Manufacturing Semiconductor Devices And Pattern Formation Method
App 20210366711 - ZI; An-Ren ; et al. | 2021-11-25 |
Photoresist Under-layer And Method Of Forming Photoresist Pattern
App 20210349391 - ZI; An-Ren ; et al. | 2021-11-11 |
EUV Metallic Resist Performance Enhancement Via Additives
App 20210325782 - Zi; An-Ren ; et al. | 2021-10-21 |
Semiconductor method of protecting wafer from bevel contamination
Grant 11,137,685 - Zi , et al. October 5, 2 | 2021-10-05 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20210294212 - ZI; An-Ren ; et al. | 2021-09-23 |
Method For Forming Semiconductor Structure
App 20210286269 - WENG; Ming-Hui ; et al. | 2021-09-16 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20210278762 - ZI; An-Ren ; et al. | 2021-09-09 |
Photoresist Underlayer And Method Of Manufacturing A Semiconductor Device
App 20210271166 - ZI; An-Ren ; et al. | 2021-09-02 |
EUV metallic resist performance enhancement via additives
Grant 11,054,742 - Zi , et al. July 6, 2 | 2021-07-06 |
Method for forming semiconductor structure
Grant 11,036,137 - Zi , et al. June 15, 2 | 2021-06-15 |
Photoresist composition and method of forming photoresist pattern
Grant 11,029,602 - Zi , et al. June 8, 2 | 2021-06-08 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20210157233 - ZI; An-Ren ; et al. | 2021-05-27 |
Photoresist composition and method of forming photoresist pattern
Grant 11,016,386 - Zi , et al. May 25, 2 | 2021-05-25 |
Method for forming semiconductor structure
Grant 11,009,796 - Weng , et al. May 18, 2 | 2021-05-18 |
Photoresist Developer And Method Of Developing Photoresist
App 20210134589 - WENG; Ming-Hui ; et al. | 2021-05-06 |
Method for forming semiconductor structure
Grant 10,990,013 - Zi , et al. April 27, 2 | 2021-04-27 |
Extreme Ultraviolet Photolithography Method With Developer Composition
App 20210103213 - Zi; An-Ren ; et al. | 2021-04-08 |
Metal-Compound-Removing Solvent and Method in Lithography
App 20210103220 - Zi; An-Ren ; et al. | 2021-04-08 |
Method Of Manufacturing A Semiconductor Device
App 20210074538 - ZI; An-Ren ; et al. | 2021-03-11 |
EUV Photoresist With Low-Activation-Energy Ligands or High-Developer-Solubility Ligands
App 20210063876 - Zi; An-Ren ; et al. | 2021-03-04 |
Metal-compound-removing solvent and method in lithography
Grant 10,866,516 - Zi , et al. December 15, 2 | 2020-12-15 |
Extreme ultraviolet photolithography method with developer composition
Grant 10,866,511 - Zi , et al. December 15, 2 | 2020-12-15 |
Method For Forming Semiconductor Structure By Patterning Resist Layer Having Inorganic Material
App 20200365398 - ZI; An-Ren ; et al. | 2020-11-19 |
Priming material for organometallic resist
Grant 10,838,304 - Ho , et al. November 17, 2 | 2020-11-17 |
Underlayer Material for Photoresist
App 20200333710 - Zi; An-Ren ; et al. | 2020-10-22 |
Cleaning Solution And Method Of Cleaning Wafer
App 20200328075 - ZI; An-Ren ; et al. | 2020-10-15 |
Humidity Control in EUV Lithography
App 20200319565 - Zi; An-Ren ; et al. | 2020-10-08 |
Method For Forming Semiconductor Structure
App 20200301280 - ZI; An-Ren ; et al. | 2020-09-24 |
Multi-layer photoresist
Grant 10,777,681 - Zi , et al. Sept | 2020-09-15 |
Semiconductor Method of Protecting Wafer from Bevel Contamination
App 20200257203 - A1 | 2020-08-13 |
Material composition and methods thereof
Grant 10,741,410 - Zi , et al. A | 2020-08-11 |
Method for forming semiconductor structure by patterning resist layer having inorganic material
Grant 10,741,391 - Zi , et al. A | 2020-08-11 |
Underlayer material for photoresist
Grant 10,698,317 - Zi , et al. | 2020-06-30 |
Method for forming semiconductor structure by patterning assist layer having polymer
Grant 10,684,545 - Zi , et al. | 2020-06-16 |
Protective Composition And Method Of Forming Photoresist Pattern
App 20200135451 - ZI; An-Ren ; et al. | 2020-04-30 |
Semiconductor method of protecting wafer from bevel contamination
Grant 10,635,000 - Zi , et al. | 2020-04-28 |
Metal-compound-removing solvent and method in lithography
Grant 10,622,211 - Zi , et al. | 2020-04-14 |
Photosensitive Material and Method of Lithography
App 20200110338 - Zi; An-Ren ; et al. | 2020-04-09 |
Method Of Cleaning Extreme Ultraviolet Lithography Collector
App 20200073250 - ZI; An-Ren ; et al. | 2020-03-05 |
Photoresist, Developer, And Method Of Forming Photoresist Pattern
App 20200073238 - ZI; An-Ren ; et al. | 2020-03-05 |
Method and Apparatus of Patterning a Semiconductor Device
App 20200064740 - Zi; An-Ren ; et al. | 2020-02-27 |
Priming Material for Organometallic Resist
App 20200050109 - Ho; Chun-Chih ; et al. | 2020-02-13 |
Method For Forming Semiconductor Structure
App 20200013618 - WENG; Ming-Hui ; et al. | 2020-01-09 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190384170 - ZI; An-Ren ; et al. | 2019-12-19 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190384171 - ZI; An-Ren ; et al. | 2019-12-19 |
Euv Metallic Resist Performance Enhancement Via Additives
App 20190384173 - Zi; An-Ren ; et al. | 2019-12-19 |
Photosensitive material and method of lithography
Grant 10,503,070 - Zi , et al. Dec | 2019-12-10 |
Method and apparatus of patterning a semiconductor device
Grant 10,466,593 - Zi , et al. No | 2019-11-05 |
Multi-Layer Photoresist
App 20190334028 - Zi; An-Ren ; et al. | 2019-10-31 |
Underlayer Material for Photoresist
App 20190265590 - Zi; An-Ren ; et al. | 2019-08-29 |
Multi-layer photoresist
Grant 10,381,481 - Zi , et al. A | 2019-08-13 |
Method For Forming Semiconductor Structure
App 20190155156 - ZI; An-Ren ; et al. | 2019-05-23 |
Photoresist Composition And Method Of Forming Photoresist Pattern
App 20190146342 - ZI; An-Ren ; et al. | 2019-05-16 |
Photoresist Developer And Method Of Developing Photoresist
App 20190146337 - ZI; An-Ren ; et al. | 2019-05-16 |
Humidity control in EUV lithography
Grant 10,274,847 - Zi , et al. | 2019-04-30 |
Method For Forming Semiconductor Structure
App 20190122881 - ZI; An-Ren ; et al. | 2019-04-25 |
Humidity Control in EUV Lithography
App 20190094716 - Zi; An-Ren ; et al. | 2019-03-28 |
Method For Forming Semiconductor Structure
App 20190096675 - ZI; An-Ren ; et al. | 2019-03-28 |
Humidity Control In Euv Lithography
App 20190086818 - Zi; An-Ren ; et al. | 2019-03-21 |
Semiconductor Method of Protecting Wafer from Bevel Contamination
App 20190064669 - Zi; An-Ren ; et al. | 2019-02-28 |
Material Composition And Methods Thereof
App 20180315617 - ZI; An-Ren ; et al. | 2018-11-01 |
Semiconductor method of protecting wafer from bevel contamination
Grant 10,073,347 - Zi , et al. September 11, 2 | 2018-09-11 |
Extreme Ultraviolet Photolithography Method With Developer Composition
App 20180173096 - Zi; An-Ren ; et al. | 2018-06-21 |
Metal-compound-removing Solvent And Method In Lithography
App 20180040474 - Zi; An-Ren ; et al. | 2018-02-08 |
Metal-compound-removing Solvent And Method In Lithography
App 20180039182 - Zi; An-Ren ; et al. | 2018-02-08 |
Photoresist with Polar-Acid-Labile-Group
App 20170227852 - Zi; An-Ren ; et al. | 2017-08-10 |
Photosensitive Material And Method Of Lithography
App 20170168398 - Zi; An-Ren ; et al. | 2017-06-15 |
Method and Apparatus of Patterning A Semiconductor Device
App 20170032961 - Zi; An-Ren ; et al. | 2017-02-02 |
Method of preparing and using photosensitive material
Grant 9,529,265 - Zi , et al. December 27, 2 | 2016-12-27 |
Method of Preparing and Using Photosensitive Material
App 20150316846 - Zi; An-Ren ; et al. | 2015-11-05 |
Medical devices with color characteristics and use thereof
App 20080074643 - Chen; Sinn-Wen ; et al. | 2008-03-27 |
Soldering method and solder joints formed therein
App 20050269385 - Chen, Sinn-Wen ; et al. | 2005-12-08 |
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