Zhuang; Guorong Vera
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zhuang; Guorong Vera.The latest application filed is for "carbon as grazing incidence euv mirror and spectral purity filter".
- Zhuang; Guorong Vera - Santa Clara CA
- Zhuang; Guorong Vera - Campbell CA
| Patent | Date |
|---|---|
| Dynamically adjustable semiconductor metrology system Grant 9,228,943 - Wang , et al. January 5, 2 | 2016-01-05 |
| Carbon As Grazing Incidence Euv Mirror And Spectral Purity Filter App 20140168758 - Rose; Garry ; et al. | 2014-06-19 |
| Dynamically Adjustable Semiconductor Metrology System App 20130114085 - Wang; David Y. ; et al. | 2013-05-09 |
| Bright and dark field scatterometry systems for line roughness metrology Grant 8,045,179 - Zhuang , et al. October 25, 2 | 2011-10-25 |
| Combination of normal and oblique incidence polarimetry for the characterization of gratings Grant 6,713,753 - Rovira , et al. March 30, 2 | 2004-03-30 |
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