Zhuang; Guorong V.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zhuang; Guorong V..The latest application filed is for "mid-infrared spectroscopy for measurement of high aspect ratio structures".

Company Profile

1.19.8

Zhuang; Guorong V. - San Jose CA
Zhuang; Guorong V. - Santa Clara CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multi-environment polarized infrared reflectometer for semiconductor metrology Grant 11,231,362 - Zhuang , et al. January 25, 2	2022-01-25
Mid-infrared spectroscopy for measurement of high aspect ratio structures Grant 11,137,350 - Wang , et al. October 5, 2	2021-10-05
Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Structures App 20200240907 - Wang; David Y. ; et al.	2020-07-30
Confined illumination for small spot size metrology Grant 10,006,865 - Shaughnessy , et al. June 26, 2	2018-06-26
Optical metrology with reduced focus error sensitivity Grant 9,970,863 - Krishnan , et al. May 15, 2	2018-05-15
Small-angle scattering X-ray metrology systems and methods Grant 9,846,132 - Bakeman , et al. December 19, 2	2017-12-19
Confined illumination for small spot size metrology Grant 9,719,932 - Shaughnessy , et al. August 1, 2	2017-08-01
High brightness liquid droplet X-ray source for semiconductor metrology Grant 9,693,439 - Zhuang , et al. June 27, 2	2017-06-27
Optical metrology with reduced sensitivity to grating anomalies Grant 9,470,639 - Zhuang , et al. October 18, 2	2016-10-18
Optical Metrology With Reduced Focus Error Sensitivity App 20160245741 - Krishnan; Shankar ; et al.	2016-08-25
Selectably configurable multiple mode spectroscopic ellipsometry Grant 9,404,872 - Wang , et al. August 2, 2	2016-08-02
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation Grant 9,156,068 - Klebanoff , et al. October 13, 2	2015-10-13
Light source tracking in optical metrology system Grant 9,146,156 - Zhuang , et al. September 29, 2	2015-09-29
Small-angle Scattering X-ray Metrology Systems And Methods App 20150110249 - Bakeman; Michael S. ; et al.	2015-04-23
Methods And Apparatus For Cleaning Objects In A Chamber Of An Optical Instrument By Generating Reactive Ions Using Photon Radiation App 20140374619 - Klebanoff; Leonard E. ; et al.	2014-12-25
Apparatus for purifying a controlled-pressure environment Grant 8,790,603 - Zhuang , et al. July 29, 2	2014-07-29
Optical Component With Blocking Surface And Method Thereof App 20140158914 - Klebanoff; Leonard E. ; et al.	2014-06-12
Apparatus For Purifying A Controlled-pressure Environment App 20140004025 - Zhuang; Guorong V. ; et al.	2014-01-02
Optical system polarizer calibration Grant 8,570,514 - de Veer , et al. October 29, 2	2013-10-29
Light Source Tracking In Optical Metrology System App 20130033704 - Zhuang; Guorong V. ; et al.	2013-02-07
High brightness X-ray metrology Grant 7,929,667 - Zhuang , et al. April 19, 2	2011-04-19
Infrared metrology Grant 7,928,390 - Zhuang , et al. April 19, 2	2011-04-19
Systems and methods for near-field heterodyne spectroscopy Grant 7,760,364 - Zhuang , et al. July 20, 2	2010-07-20

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.