Zhu; Wen H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zhu; Wen H..The latest application filed is for "oxide-like seasoning for dielectric low k films".

Company Profile

0.4.7

Zhu; Wen H. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Oxide-like seasoning for dielectric low k films Grant 7,700,486 - Park , et al. April 20, 2	2010-04-20
Multi step ebeam process for modifying dielectric materials Grant 7,588,803 - Demos , et al. September 15, 2	2009-09-15
Oxide-like Seasoning For Dielectric Low K Films App 20060219175 - Park; Sohyun ; et al.	2006-10-05
Oxide-like seasoning for dielectric low k films Grant 7,115,508 - Park , et al. October 3, 2	2006-10-03
Multi step ebeam process for modifying dielectric materials App 20060171653 - Demos; Alexandros T. ; et al.	2006-08-03
Oxide-like seasoning for dielectric low k films App 20050227499 - Park, Sohyun ; et al.	2005-10-13
Method for curing low dielectric constant film by electron beam App 20040101632 - Zhu, Wen H. ; et al.	2004-05-27
Method for depositing a low k dielectric film (K>3.5) for hard mask application Grant 6,699,784 - Xia , et al. March 2, 2	2004-03-02
Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric App 20030211244 - Li, Lihua ; et al.	2003-11-13
Crosslink cyclo-siloxane compound with linear bridging group to form ultra low k dielectric App 20030194495 - Li, Lihua ; et al.	2003-10-16
Method for depositing a low k dielectric film (k<3.5) for hard mask application App 20030113995 - Xia, Li-Qun ; et al.	2003-06-19

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