ZHOU; Zili

Patent Applications and Registrations

Patent applications and USPTO patent grants for ZHOU; Zili.The latest application filed is for "method and metrology tool for determining information about a target structure, and cantilever probe".

Company Profile

11.10.11

ZHOU; Zili - Veldhoven NL
Zhou; Zili - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And Metrology Tool For Determining Information About A Target Structure, And Cantilever Probe App 20220283122 - ZHOU; Zili ; et al.	2022-09-08
Metrology method, patterning device, apparatus and computer program Grant 11,385,553 - Zhou , et al. July 12, 2	2022-07-12
Metrology Method, Patterning Device, Apparatus And Computer Program App 20210255553 - ZHOU; Zili ; et al.	2021-08-19
Measurement apparatus and method of measuring a target Grant 11,042,100 - Lian , et al. June 22, 2	2021-06-22
Metrology method, patterning device, apparatus and computer program Grant 10,996,570 - Zhou , et al. May 4, 2	2021-05-04
Method and apparatus for measuring a parameter of interest using image plane detection techniques Grant 10,983,445 - Pandey , et al. April 20, 2	2021-04-20
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method Grant 10,795,269 - Zhou , et al. October 6, 2	2020-10-06
Method of measuring a target, metrology apparatus, polarizer assembly Grant 10,747,124 - Pandey , et al. A	2020-08-18
Metrology Method, Patterning Device, Apparatus and Computer Program App 20200110342 - ZHOU; Zili ; et al.	2020-04-09
Metrology apparatus, lithographic system, and method of measuring a structure Grant 10,599,047 - Ravensbergen , et al.	2020-03-24
Measurement Apparatus and Method of Measuring a Target App 20190369505 - LIAN; Jin ; et al.	2019-12-05
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly App 20190294054 - PANDEY; Nitesh ; et al.	2019-09-26
Metrology method and apparatus, computer program and lithographic system Grant 10,423,077 - Pandey , et al. Sept	2019-09-24
Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques App 20190250094 - PANDEY; Nitesh ; et al.	2019-08-15
Method of measuring a target, metrology apparatus, polarizer assembly Grant 10,353,298 - Pandey , et al. July 16, 2	2019-07-16
Metrology Method and Apparatus, Computer Program and Lithographic System App 20190146356 - Pandey; Nitesh ; et al.	2019-05-16
Method Of Determining A Value Of A Parameter Of Interest, Method Of Cleaning A Signal Containing Information About A Parameter Of Interest, Device Manufacturing Method App 20190129316 - ZHOU; Zili ; et al.	2019-05-02
Metrology method and apparatus, computer program and lithographic system Grant 10,191,391 - Pandey , et al. Ja	2019-01-29
Metrology Apparatus, Lithographic System, And Method Of Measuring A Structure App 20180348645 - Ravensbergen; Janneke ; et al.	2018-12-06
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly App 20180157180 - Pandey; Nitesh ; et al.	2018-06-07
Metrology Method and Apparatus, Computer Program and Lithographic System App 20170097575 - PANDEY; Nitesh ; et al.	2017-04-06

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