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Wafer Susceptor Apparatus With Thermal Insulation And Method For Manufacturing The Same App 20200161166 - Arami; Junichi ;   et al. | 2020-05-21 |
Load lock chamber and the cluster tool system using the same Grant 10,497,591 - Zhou , et al. De | 2019-12-03 |
Waffer Pedestal With Heating Mechanism And Reaction Chamber Including The Same App 20190341280 - ARAMI; JUNICHI ;   et al. | 2019-11-07 |
Waffer pedestal and support structure thereof Grant 10,410,909 - Zhou , et al. Sept | 2019-09-10 |
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Load Lock Chamber And The Cluster Tool System Using The Same App 20170271187 - ZHOU; Ren ;   et al. | 2017-09-21 |
Method for preparing sulfuric acid by using hydrogen sulfide Grant 9,108,846 - Zhou , et al. August 18, 2 | 2015-08-18 |
Secure and efficacious therapy delivery for a pacing engine Grant 9,101,772 - Kleckner , et al. August 11, 2 | 2015-08-11 |
Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch Grant 8,789,493 - Ren , et al. July 29, 2 | 2014-07-29 |
Method For Preparing Sulfuric Acid By Using Hydrogen Sulfide App 20140205534 - Zhou; Ren ;   et al. | 2014-07-24 |
Secure And Efficacious Therapy Delivery For A Pacing Engine App 20120303084 - Kleckner; Karen J. ;   et al. | 2012-11-29 |
Traction Control System And Method App 20120116617 - Schaffler; Bernard ;   et al. | 2012-05-10 |
Secure And Efficacious Therapy Delivery For A Pacing Engine App 20100152804 - Kleckner; Karen J. ;   et al. | 2010-06-17 |
Secure and Efficacious Therapy Delivery for a Pacing Engine App 20070299477 - Kleckner; Karen J. ;   et al. | 2007-12-27 |
Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch App 20070187038 - Ren; Daxing ;   et al. | 2007-08-16 |
Secure and efficacious therapy delivery for an extra-systolic stimulation pacing engine Grant 7,233,824 - Kleckner , et al. June 19, 2 | 2007-06-19 |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system Grant 7,054,719 - Pham , et al. May 30, 2 | 2006-05-30 |
Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing Grant 7,040,954 - McClatchie , et al. May 9, 2 | 2006-05-09 |
Apparatus and method for distributing a polishing fluid Grant 7,040,970 - McClatchie , et al. May 9, 2 | 2006-05-09 |
Apparatus and method for distributing a polishing fluid App 20060014478 - McClatchie; Simon ;   et al. | 2006-01-19 |
Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization Grant 6,953,750 - Wu , et al. October 11, 2 | 2005-10-11 |
Method and apparatus for heating polishing pad Grant 6,896,586 - Pham , et al. May 24, 2 | 2005-05-24 |
Secure and efficacious therapy delivery for an extra-systolic stimulation pacing engine App 20050101998 - Kleckner, Karen J. ;   et al. | 2005-05-12 |
System, Method And Apparatus For Applying Liquid To A Cmp Polishing Pad App 20050070212 - Pham, Xuyen ;   et al. | 2005-03-31 |
System, method and apparatus for applying liquid to a CMP polishing pad Grant 6,872,128 - Pham , et al. March 29, 2 | 2005-03-29 |
Carrier head having location optimized vacuum holes Grant 6,821,195 - Pham , et al. November 23, 2 | 2004-11-23 |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system App 20040199293 - Pham, Xuyen ;   et al. | 2004-10-07 |
Chemical mechanical polishing atomizing rinse system App 20040162007 - Phan, Ky ;   et al. | 2004-08-19 |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system Grant 6,732,017 - Pham , et al. May 4, 2 | 2004-05-04 |
Method and apparatus for heating polishing pad App 20030186623 - Pham, Xuyen ;   et al. | 2003-10-02 |
System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system App 20030158630 - Pham, Xuyen ;   et al. | 2003-08-21 |
Method for automatically adjusting the sensitivity of cardiac sense amplifiers Grant 6,112,119 - Schuelke , et al. August 29, 2 | 2000-08-29 |
Method and apparatus for diagnosis and treatment of arrhythmias Grant 5,893,882 - Peterson , et al. April 13, 1 | 1999-04-13 |
Apparatus for diagnosis and treatment of arrhythmias Grant 5,846,263 - Peterson , et al. December 8, 1 | 1998-12-08 |