Patent | Date |
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MTJ device performance by adding stress modulation layer to MTJ device structure Grant 11,430,945 - Haq , et al. August 30, 2 | 2022-08-30 |
MTJ Device Performance by Controlling Device Shape App 20210193915 - Haq; Jesmin ;   et al. | 2021-06-24 |
Etching and Encapsulation Scheme for Magnetic Tunnel Junction Fabrication App 20210143322 - Sundar; Vignesh ;   et al. | 2021-05-13 |
Novel Integration Scheme for Three Terminal Spin-Orbit-Torque (SOT) Switching Devices App 20210104663 - Haq; Jesmin ;   et al. | 2021-04-08 |
STT-MRAM Heat Sink and Magnetic Shield Structure Design for More Robust Read/Write Performance App 20210083172 - Zhong; Tom ;   et al. | 2021-03-18 |
MTJ device performance by controlling device shape Grant 10,944,049 - Haq , et al. March 9, 2 | 2021-03-09 |
Critical Dimension (CD) Uniformity of Photoresist Island Patterns Using Alternating Phase Shifting Mask App 20210055659 - Haq; Jesmin ;   et al. | 2021-02-25 |
Multiple hard mask patterning to fabricate 20nm and below MRAM devices Grant 10,868,244 - Yang , et al. December 15, 2 | 2020-12-15 |
STT-MRAM heat sink and magnetic shield structure design for more robust read/write performance Grant 10,854,809 - Zhong , et al. December 1, 2 | 2020-12-01 |
Critical dimension (CD) uniformity of photoresist island patterns using alternating phase shifting mask Grant 10,831,104 - Haq , et al. November 10, 2 | 2020-11-10 |
Critical Dimension (CD) Uniformity of Photoresist Island Patterns Using Alternating Phase Shifting Mask App 20200142313 - Haq; Jesmin ;   et al. | 2020-05-07 |
Gemcitabine Derivatives for Cancer Therapy App 20200108089 - Lu; Patrick Y. ;   et al. | 2020-04-09 |
MTJ Device Performance by Adding Stress Modulation Layer to MTJ Device Structure App 20200075844 - Haq; Jesmin ;   et al. | 2020-03-05 |
Multiple Hard Mask Patterning to Fabricate 20nm and Below MRAM Devices App 20200044147 - Yang; Yi ;   et al. | 2020-02-06 |
Critical dimension (CD) uniformity of photoresist island patterns using alternating phase shifting mask Grant 10,520,818 - Haq , et al. Dec | 2019-12-31 |
Method for fabricating a magnetic tunneling junction (MTJ) structure Grant 10,475,987 - Haq , et al. Nov | 2019-11-12 |
Method For Fabricating A Magnetic Tunneling Junction (mtj) Structure App 20190341542 - Haq; Jesmin ;   et al. | 2019-11-07 |
Multiple hard mask patterning to fabricate 20nm and below MRAM devices Grant 10,446,741 - Yang , et al. Oc | 2019-10-15 |
STT-MRAM Heat Sink and Magnetic Shield Structure Design for More Robust Read/Write Performance App 20190207083 - Zhong; Tom ;   et al. | 2019-07-04 |
MTJ Device Performance by Controlling Device Shape App 20190148630 - Haq; Jesmin ;   et al. | 2019-05-16 |
Multiple Hard Mask Patterning to Fabricate 20nm and Below MRAM Devices App 20190123267 - Yang; Yi ;   et al. | 2019-04-25 |
Method to remove sidewall damage after MTJ etching Grant 10,103,322 - Teng , et al. October 16, 2 | 2018-10-16 |
Method to Remove Sidewall Damage After MTJ Etching App 20180277751 - Teng; Zhongjian ;   et al. | 2018-09-27 |
Memory structure having a magnetic tunnel junction (MTJ) self-aligned to a T-shaped bottom electrode, and method of manufacturing the same Grant 10,069,064 - Haq , et al. September 4, 2 | 2018-09-04 |
MTJ device process/integration method with pre-patterned seed layer Grant 9,972,777 - Haq , et al. May 15, 2 | 2018-05-15 |
Surface treatment method for dielectric anti-reflective coating (DARC) to shrink photoresist critical dimension (CD) Grant 9,880,473 - Haq , et al. January 30, 2 | 2018-01-30 |
New Surface Treatment Method for Dielectric Anti-Reflective Coating (DARC) to Shrink Photoresist Critical Dimension (CD) App 20170371247 - Haq; Jesmin ;   et al. | 2017-12-28 |
Hybrid metallic hard mask stack for MTJ etching Grant 9,608,200 - Shen , et al. March 28, 2 | 2017-03-28 |
Hybrid Metallic Hard Mask Stack for MTJ Etching App 20160284985 - Shen; Dongna ;   et al. | 2016-09-29 |
Method of high density memory fabrication Grant 9,343,463 - Zhong , et al. May 17, 2 | 2016-05-17 |
Bottom electrode for MRAM device Grant 8,969,982 - Xiao , et al. March 3, 2 | 2015-03-03 |
Method to reduce magnetic film stress for better yield Grant 8,933,542 - Zhong , et al. January 13, 2 | 2015-01-13 |
Method To Reduce Magnetic Film Stress For Better Yield App 20140349414 - Zhong; Tom ;   et al. | 2014-11-27 |
Method to reduce magnetic film stress for better yield Grant 8,803,293 - Zhong , et al. August 12, 2 | 2014-08-12 |
Fabrication method for embedded magnetic memory Grant 8,772,051 - Zhong , et al. July 8, 2 | 2014-07-08 |
Composite hard mask with upper sacrificial dielectric layer for the patterning and etching of nanometer size MRAM devices Grant 8,722,543 - Belen , et al. May 13, 2 | 2014-05-13 |
Metal Protection Layer over SiN Encapsulation for Spin-Torque MRAM Device Applications App 20140061827 - Huang; Kenlin ;   et al. | 2014-03-06 |
Process for MEMS scanning mirror with mass remove from mirror backside Grant 8,636,911 - Chen , et al. January 28, 2 | 2014-01-28 |
Method to Reduce Magnetic Film Stress for Better Yield App 20130302912 - Zhong; Tom ;   et al. | 2013-11-14 |
Method to connect a magnetic device to a CMOS transistor Grant 8,524,511 - Zhong , et al. September 3, 2 | 2013-09-03 |
High density spin-transfer torque MRAM process Grant 8,324,698 - Zhong , et al. December 4, 2 | 2012-12-04 |
Process to fabricate bottom electrode for MRAM device Grant 8,273,666 - Xiao , et al. September 25, 2 | 2012-09-25 |
High density spin-transfer torque MRAM process Grant 8,183,061 - Zhong , et al. May 22, 2 | 2012-05-22 |
Novel process for MEMS scanning mirror with mass remove from mirror backside App 20120085728 - Chen; Jun ;   et al. | 2012-04-12 |
Method of magnetic tunneling layer processes for spin-transfer torque MRAM Grant 8,133,745 - Zhong , et al. March 13, 2 | 2012-03-13 |
Bi-layer hard mask for the patterning and etching of nanometer size MRAM devices App 20120028373 - Belen; Rodolfo ;   et al. | 2012-02-02 |
Use of CMP to contact a MTJ structure without forming a via Grant 8,105,948 - Zhong , et al. January 31, 2 | 2012-01-31 |
Bottom electrode for MRAM device App 20110133300 - Xiao; Rongfu ;   et al. | 2011-06-09 |
High density spin-transfer torque MRAM process App 20110129946 - Zhong; Tom ;   et al. | 2011-06-02 |
High density spin-transfer torque MRAM process App 20110101478 - Zhong; Tom ;   et al. | 2011-05-05 |
Method of MRAM fabrication with zero electrical shorting Grant 7,936,027 - Xiao , et al. May 3, 2 | 2011-05-03 |
Method of high density field induced MRAM process Grant 7,919,407 - Zhong , et al. April 5, 2 | 2011-04-05 |
Process to fabricate bottom electrode for MRAM device App 20110076785 - Xiao; Rongfu ;   et al. | 2011-03-31 |
Method of high density memory fabrication App 20110073917 - Zhong; Tom ;   et al. | 2011-03-31 |
High density spin-transfer torque MRAM process Grant 7,884,433 - Zhong , et al. February 8, 2 | 2011-02-08 |
Method of double patterning and etching magnetic tunnel junction structures for spin-transfer torque MRAM devices Grant 7,863,060 - Belen , et al. January 4, 2 | 2011-01-04 |
Bottom electrode for MRAM device and method to fabricate it Grant 7,838,436 - Xiao , et al. November 23, 2 | 2010-11-23 |
Bottom electrode mask design for ultra-thin interlayer dielectric approach in MRAM device fabrication Grant 7,804,706 - Zhong , et al. September 28, 2 | 2010-09-28 |
Method of double patterning and etching magnetic tunnel junction structures for spin-transfer torque MRAM devices App 20100240151 - Belen; Rodolfo ;   et al. | 2010-09-23 |
Bottom electrode mask design for ultra-thin interlayer dielectric approach in MRAM device fabrication App 20100123207 - Zhong; Tom ;   et al. | 2010-05-20 |
High density spin-transfer torque MRAM process App 20100109106 - Zhong; Tom ;   et al. | 2010-05-06 |
Use of CMP to contact a MTJ structure without forming a via App 20090209102 - Zhong; Adam ;   et al. | 2009-08-20 |
Method of MRAM fabrication with zero electrical shorting App 20090173977 - Xiao; Rongfu ;   et al. | 2009-07-09 |
Method of magnetic tunneling layer processes for spin-transfer torque MRAM App 20090104718 - Zhong; Tom ;   et al. | 2009-04-23 |
Composite hard mask for the etching of nanometer size magnetic multilayer based device App 20090078927 - Xiao; Rongfu ;   et al. | 2009-03-26 |
Method of magnetic tunneling junction pattern layout for magnetic random access memory Grant 7,508,700 - Zhong , et al. March 24, 2 | 2009-03-24 |
MRAM cell structure and method of fabrication Grant 7,476,919 - Hong , et al. January 13, 2 | 2009-01-13 |
Method of magnetic tunneling junction pattern layout for magnetic random access memory App 20080225576 - Zhong; Tom ;   et al. | 2008-09-18 |
Bottom electrode for MRAM device and method to fabricate it App 20080090307 - Xiao; Rongfu ;   et al. | 2008-04-17 |
Method of fabricating contact pad for magnetic random access memory Grant 7,122,386 - Torng , et al. October 17, 2 | 2006-10-17 |
MRAM cell structure and method of fabrication App 20060209591 - Hong; Liubo ;   et al. | 2006-09-21 |
MRAM cell structure and method of fabrication Grant 7,045,368 - Hong , et al. May 16, 2 | 2006-05-16 |
Method of uniformly coating a substrate Grant 7,030,039 - Gurer , et al. April 18, 2 | 2006-04-18 |
Method of uniformly coating a substrate Grant 7,018,943 - Emir , et al. March 28, 2 | 2006-03-28 |
Method of uniformly coating a substrate Grant 6,977,098 - Gurer , et al. December 20, 2 | 2005-12-20 |
MRAM cell structure and method of fabrication App 20050260773 - Hong, Liubo ;   et al. | 2005-11-24 |
Environment exchange control for material on a wafer surface Grant 6,911,091 - Gurer , et al. June 28, 2 | 2005-06-28 |
Environment exchange control for material on a wafer surface Grant 6,844,027 - Gurer , et al. January 18, 2 | 2005-01-18 |
Environment exchange control for material on a wafer surface Grant 6,780,461 - Gurer , et al. August 24, 2 | 2004-08-24 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process Grant 6,662,466 - Gurer , et al. December 16, 2 | 2003-12-16 |
Environment exchange control for material on a wafer surface App 20030190427 - Gurer, Emir ;   et al. | 2003-10-09 |
Environment exchange control for material on a wafer surface App 20030010289 - Gurer, Emir ;   et al. | 2003-01-16 |
Method of uniformly coating a substrate App 20020127334 - Gurer, Emir ;   et al. | 2002-09-12 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process App 20020112370 - Gurer, Emir ;   et al. | 2002-08-22 |
Method of uniformly coating a substrate App 20020098283 - Gurer, Emir ;   et al. | 2002-07-25 |
Method of uniformly coating a substrate App 20020004100 - Gurer, Emir ;   et al. | 2002-01-10 |
Method for two dimensional adaptive process control of critical dimensions during spin coating process Grant 6,327,793 - Gurer , et al. December 11, 2 | 2001-12-11 |
Environment exchange control for material on a wafer surface Grant 6,254,936 - Gurer , et al. July 3, 2 | 2001-07-03 |