| Patent | Date |
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Process To Reduce Plasma Induced Damage
App 20220293793 - LI; Jianheng ; et al. | 2022-09-15 |
Process to reduce plasma induced damage
Grant 11,380,801 - Li , et al. July 5, 2 | 2022-07-05 |
High-k Dielectric Materials Comprising Zirconium Oxide Utilized In Display Devices
App 20220130873 - RUI; Xiangxin ; et al. | 2022-04-28 |
High-k dielectric materials comprising zirconium oxide utilized in display devices
Grant 11,239,258 - Rui , et al. February 1, 2 | 2022-02-01 |
Hybrid High-k Dielectric Material Film Stacks Comprising Zirconium Oxide Utilized In Display Devices
App 20220013547 - RUI; Xiangxin ; et al. | 2022-01-13 |
Thin Film Transistor With Small Storage Capacitor With Metal Oxide Switch
App 20210376032 - KIM; Jung Bae ; et al. | 2021-12-02 |
Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices
Grant 11,145,683 - Rui , et al. October 12, 2 | 2021-10-12 |
Method of removal of sharp corners from diffuser plate
Grant 11,123,837 - Hong , et al. September 21, 2 | 2021-09-21 |
Layer Stack For Display Applications
App 20210288084 - RUI; Xiangxin ; et al. | 2021-09-16 |
Thin film transistor with small storage capacitor with metal oxide switch
Grant 11,101,338 - Kim , et al. August 24, 2 | 2021-08-24 |
Layer stack for display applications
Grant 11,049,887 - Rui , et al. June 29, 2 | 2021-06-29 |
Gas diffuser support structure for reduced particle generation
Grant 10,927,461 - Lau , et al. February 23, 2 | 2021-02-23 |
Chamber liner
Grant 10,923,327 - Li , et al. February 16, 2 | 2021-02-16 |
Gas diffuser mounting plate for reduced particle generation
Grant 10,883,174 - Lau , et al. January 5, 2 | 2021-01-05 |
Process To Reduce Plasma Induced Damage
App 20200395485 - Li; Jianheng ; et al. | 2020-12-17 |
Process to reduce plasma induced damage
Grant 10,804,408 - Li , et al. October 13, 2 | 2020-10-13 |
Methods for improved silicon nitride passivation films
Grant 10,748,759 - Li , et al. A | 2020-08-18 |
High-k Dielectric Materials Comprising Zirconium Oxide Utilized In Display Devices
App 20200258918 - A1 | 2020-08-13 |
Methods For Improved Silicon Nitride Passivation Films
App 20200227249 - LI; Jianheng ; et al. | 2020-07-16 |
Corner spoiler for improving profile uniformity
Grant 10,697,063 - Zhao , et al. | 2020-06-30 |
Gas Diffuser Mounting Plate For Reduced Particle Generation
App 20200165726 - LAU; Allen K. ; et al. | 2020-05-28 |
Heat Conductive Spacer For Plasma Processing Chamber
App 20200098549 - PARK; Beom Soo ; et al. | 2020-03-26 |
High-k Gate Insulator For A Thin-film Transistor
App 20200083052 - ZHAI; Yujia ; et al. | 2020-03-12 |
Gas Diffuser Support Structure For Reduced Particle Generation
App 20200071833 - LAU; Allen K. ; et al. | 2020-03-05 |
Chamber Liner
App 20200043706 - LI; Jianheng ; et al. | 2020-02-06 |
Thin Film Transistor With Small Storage Capacitor With Metal Oxide Switch
App 20190214447 - KIM; Jung Bae ; et al. | 2019-07-11 |
High-k Gate Insulator For A Thin-film Transistor
App 20190206691 - ZHAI; Yujia ; et al. | 2019-07-04 |
Method Of Removal Of Sharp Corners From Diffuser Plate
App 20190193233 - HONG; Ilyoung ; et al. | 2019-06-27 |
Layer Stack For Display Applications
App 20190148416 - RUI; Xiangxin ; et al. | 2019-05-16 |
Process To Reduce Plasma Induced Damage
App 20190115475 - LI; Jianheng ; et al. | 2019-04-18 |
Selective In-situ Cleaning Of High-k Films From Processing Chamber Using Reactive Gas Precursor
App 20180345330 - ZHAI; Yujia ; et al. | 2018-12-06 |
Selective In-situ Cleaning Of High-k Films From Processing Chamber Using Reactive Gas Precursor
App 20180347037 - ZHAI; Yujia ; et al. | 2018-12-06 |
Selective In-situ Cleaning Of High-k Films From Processing Chamber Using Reactive Gas Precursor
App 20180350571 - ZHAI; Yujia ; et al. | 2018-12-06 |
Diffuser For Uniformity Improvement In Display Pecvd Applications
App 20180340257 - ACHARY; Umesha ; et al. | 2018-11-29 |
Diffuser With Corner HCG
App 20180090300 - ZHAO; Lai ; et al. | 2018-03-29 |
Hybrid High-k Dielectric Material Film Stacks Comprising Zirconium Oxide Utilized In Display Devices
App 20180026054 - RUI; Xiangxin ; et al. | 2018-01-25 |
Hybrid High-k Dielectric Material Film Stacks Comprising Zirconium Oxide Utilized In Display Devices
App 20180026055 - RUI; Xiangxin ; et al. | 2018-01-25 |
Amorphous silicon thickness uniformity improved by process diluted with hydrogen and argon gas mixture
Grant 9,818,606 - Wang , et al. November 14, 2 | 2017-11-14 |
Methods For Forming A Silicon Containing Dielectric Film Using A Gas Mixture With Ar Gas Dilusion
App 20170092492 - ZHAO; Lai ; et al. | 2017-03-30 |
Run-to-run stability of film deposition
Grant 9,299,558 - Zhao , et al. March 29, 2 | 2016-03-29 |
Run-to-run Stability Of Film Deposition
App 20150270107 - ZHAO; Lai ; et al. | 2015-09-24 |
Gas Confiner Assembly For Eliminating Shadow Frame
App 20150211121 - ZHAO; Lai ; et al. | 2015-07-30 |
Corner Spoiler For Improving Profile Uniformity
App 20150211120 - ZHAO; Lai ; et al. | 2015-07-30 |
Multi-layer amorphous silicon structure with improved poly-silicon quality after excimer laser anneal
Grant 9,048,099 - Wang , et al. June 2, 2 | 2015-06-02 |
Amorphous Silicon Thickness Uniformity Improved By Process Diluted With Hydrogen And Argon Gas Mixture
App 20140357065 - WANG; Qunhua ; et al. | 2014-12-04 |
Multi-layer Amorphous Silicon Structure With Improved Poly-silicon Quality After Excimer Laser Anneal
App 20140335680 - WANG; Qunhua ; et al. | 2014-11-13 |
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