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Patent applications and USPTO patent grants for Zhang; Pallavi.The latest application filed is for "process kit erosion and service life prediction".
Patent | Date |
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Process kit erosion and service life prediction Grant 10,770,321 - Chiang , et al. Sep | 2020-09-08 |
Method and system for balancing the electrostatic chucking force on a substrate Grant 10,541,169 - Jiang , et al. Ja | 2020-01-21 |
Transparent electrostatic carrier Grant 10,332,773 - Lee , et al. | 2019-06-25 |
Process Kit Erosion And Service Life Prediction App 20190148194 - CHIANG; Kang-Lie ;   et al. | 2019-05-16 |
Process kit erosion and service life prediction Grant 10,177,018 - Chiang , et al. J | 2019-01-08 |
Method And System For Balancing The Electrostatic Chucking Force On A Substrate App 20180330977 - JIANG; Chong ;   et al. | 2018-11-15 |
Process Kit Erosion And Service Life Prediction App 20180047599 - CHIANG; Kang-Lie ;   et al. | 2018-02-15 |
Transparent Electrostatic Carrier App 20160358803 - LEE; Leung Kway ;   et al. | 2016-12-08 |
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