loadpatents
name:-0.0097060203552246
name:-0.0073180198669434
name:-0.02066707611084
Zhang; Pallavi Patent Filings

Zhang; Pallavi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zhang; Pallavi.The latest application filed is for "process kit erosion and service life prediction".

Company Profile
4.4.4
  • Zhang; Pallavi - San Jose CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Process kit erosion and service life prediction
Grant 10,770,321 - Chiang , et al. Sep
2020-09-08
Method and system for balancing the electrostatic chucking force on a substrate
Grant 10,541,169 - Jiang , et al. Ja
2020-01-21
Transparent electrostatic carrier
Grant 10,332,773 - Lee , et al.
2019-06-25
Process Kit Erosion And Service Life Prediction
App 20190148194 - CHIANG; Kang-Lie ;   et al.
2019-05-16
Process kit erosion and service life prediction
Grant 10,177,018 - Chiang , et al. J
2019-01-08
Method And System For Balancing The Electrostatic Chucking Force On A Substrate
App 20180330977 - JIANG; Chong ;   et al.
2018-11-15
Process Kit Erosion And Service Life Prediction
App 20180047599 - CHIANG; Kang-Lie ;   et al.
2018-02-15
Transparent Electrostatic Carrier
App 20160358803 - LEE; Leung Kway ;   et al.
2016-12-08

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