ZHANG; Jingchun
Patent Applications and Registrations
Patent applications and USPTO patent grants for ZHANG; Jingchun.The latest application filed is for "spot lamp".
Company Profile
4.42.42
- ZHANG; Jingchun - Suzhou City CN
- Zhang; Jingchun - Cupertino CA
- Zhang; Jingchun - Milpitas CA
- Zhang; Jingchun - San Jose CA
- - San Jose CA US
- ZHANG; Jingchun - Shanghai CN
Patent Activity
| Patent | Date |
|---|---|
| Spot Lamp App 20220082220 - WANG; Yueping ; et al. | 2022-03-17 |
| Methods and systems to enhance process uniformity Grant 11,239,061 - Singh , et al. February 1, 2 | 2022-02-01 |
| Systems and methods for improved performance in semiconductor processing Grant 10,892,198 - Rodrigo , et al. January 12, 2 | 2021-01-12 |
| Systems And Methods For Improved Performance In Semiconductor Processing App 20200091018 - Rodrigo; Chirantha P. ; et al. | 2020-03-19 |
| Semiconductor Chamber Coatings And Processes App 20190304756 - Kalita; Laksheswar ; et al. | 2019-10-03 |
| Methods for etch of metal and metal-oxide films Grant 10,062,578 - Zhang , et al. August 28, 2 | 2018-08-28 |
| Hydrogen plasma based cleaning process for etch hardware Grant 10,026,597 - Rodrigo , et al. July 17, 2 | 2018-07-17 |
| Differential silicon oxide etch Grant 9,887,096 - Park , et al. February 6, 2 | 2018-02-06 |
| Silicon selective removal Grant 9,881,805 - Li , et al. January 30, 2 | 2018-01-30 |
| Methods for etch of SiN films Grant 9,842,744 - Zhang , et al. December 12, 2 | 2017-12-12 |
| Selective etch for silicon films Grant 9,754,800 - Zhang , et al. September 5, 2 | 2017-09-05 |
| Methods And Systems To Enhance Process Uniformity App 20170229291 - Singh; Saravjeet ; et al. | 2017-08-10 |
| Hydrogen Plasma Based Cleaning Process For Etch Hardware App 20170200590 - RODRIGO; Chirantha ; et al. | 2017-07-13 |
| Etch suppression with germanium Grant 9,576,809 - Korolik , et al. February 21, 2 | 2017-02-21 |
| Silicon-selective removal Grant 9,564,338 - Zhang , et al. February 7, 2 | 2017-02-07 |
| Procedure for etch rate consistency Grant 9,472,412 - Zhang , et al. October 18, 2 | 2016-10-18 |
| Selective titanium nitride etching Grant 9,449,845 - Liu , et al. September 20, 2 | 2016-09-20 |
| Methods For Etch Of Sin Films App 20160260619 - Zhang; Jingchun ; et al. | 2016-09-08 |
| Silicon Selective Removal App 20160260616 - Li; Zihui ; et al. | 2016-09-08 |
| Radical-component oxide etch Grant 9,437,451 - Chen , et al. September 6, 2 | 2016-09-06 |
| Selective Etch For Silicon Films App 20160240389 - Zhang; Jingchun ; et al. | 2016-08-18 |
| Selective etch of silicon by way of metastable hydrogen termination Grant 9,418,858 - Wang , et al. August 16, 2 | 2016-08-16 |
| Silicon-carbon-nitride selective etch Grant 9,390,937 - Chen , et al. July 12, 2 | 2016-07-12 |
| Methods And Systems To Enhance Process Uniformity App 20160148821 - Singh; Saravjeet ; et al. | 2016-05-26 |
| Methods for etch of sin films Grant 9,343,327 - Zhang , et al. May 17, 2 | 2016-05-17 |
| Selective etch for silicon films Grant 9,324,576 - Zhang , et al. April 26, 2 | 2016-04-26 |
| Procedure For Etch Rate Consistency App 20160086808 - Zhang; Jingchun ; et al. | 2016-03-24 |
| Procedure for etch rate consistency Grant 9,245,762 - Zhang , et al. January 26, 2 | 2016-01-26 |
| Dry-etch for silicon-and-carbon-containing films Grant 9,236,266 - Zhang , et al. January 12, 2 | 2016-01-12 |
| Methods For Etch Of Metal And Metal-oxide Films App 20150318186 - Zhang; Jingchun ; et al. | 2015-11-05 |
| Differential Silicon Oxide Etch App 20150249018 - Park; Seung H. ; et al. | 2015-09-03 |
| Radical-component Oxide Etch App 20150235863 - Chen; Zhijun ; et al. | 2015-08-20 |
| Methods For Etch Of Sin Films App 20150214067 - Zhang; Jingchun ; et al. | 2015-07-30 |
| Conformal oxide dry etch Grant 9,093,390 - Wang , et al. July 28, 2 | 2015-07-28 |
| Methods for etch of metal and metal-oxide films Grant 9,064,815 - Zhang , et al. June 23, 2 | 2015-06-23 |
| Procedure For Etch Rate Consistency App 20150155177 - Zhang; Jingchun ; et al. | 2015-06-04 |
| Differential silicon oxide etch Grant 9,034,770 - Park , et al. May 19, 2 | 2015-05-19 |
| Etch Suppression With Germanium App 20150126039 - Korolik; Mikhail ; et al. | 2015-05-07 |
| Radical-component oxide etch Grant 9,023,734 - Chen , et al. May 5, 2 | 2015-05-05 |
| Selective Titanium Nitride Etching App 20150118857 - Liu; Jie ; et al. | 2015-04-30 |
| Methods for etch of sin films Grant 8,999,856 - Zhang , et al. April 7, 2 | 2015-04-07 |
| Selective titanium nitride etching Grant 8,921,234 - Liu , et al. December 30, 2 | 2014-12-30 |
| Selective titanium nitride etching Grant 08921234 - | 2014-12-30 |
| Selective Etch Of Silicon By Way Of Metastable Hydrogen Termination App 20140308816 - Wang; Anchuan ; et al. | 2014-10-16 |
| Conformal Oxide Dry Etch App 20140308818 - Wang; Anchuan ; et al. | 2014-10-16 |
| Dry-etch For Silicon-and-carbon-containing Films App 20140273491 - Zhang; Jingchun ; et al. | 2014-09-18 |
| Selective etch of silicon by way of metastable hydrogen termination Grant 8,808,563 - Wang , et al. August 19, 2 | 2014-08-19 |
| Conformal oxide dry etch Grant 8,801,952 - Wang , et al. August 12, 2 | 2014-08-12 |
| Dry-etch for silicon-and-carbon-containing films Grant 8,771,536 - Zhang , et al. July 8, 2 | 2014-07-08 |
| Remotely-excited fluorine and water vapor etch Grant 8,771,539 - Zhang , et al. July 8, 2 | 2014-07-08 |
| Dry etch process Grant 8,765,574 - Zhang , et al. July 1, 2 | 2014-07-01 |
| Selective Titanium Nitride Etching App 20140179111 - Liu; Jie ; et al. | 2014-06-26 |
| Dry Etch Process App 20140134842 - Zhang; Jingchun ; et al. | 2014-05-15 |
| Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Grant 8,679,983 - Wang , et al. March 25, 2 | 2014-03-25 |
| Selective suppression of dry-etch rate of materials containing both silicon and oxygen Grant 8,679,982 - Wang , et al. March 25, 2 | 2014-03-25 |
| Differential Silicon Oxide Etch App 20140080309 - Park; Seung H. ; et al. | 2014-03-20 |
| Silicon-carbon-nitride Selective Etch App 20140080310 - Chen; Zhijun ; et al. | 2014-03-20 |
| Radical-component Oxide Etch App 20140080308 - Chen; Zhijun ; et al. | 2014-03-20 |
| Dry-etch for silicon-and-nitrogen-containing films Grant 8,642,481 - Wang , et al. February 4, 2 | 2014-02-04 |
| Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Grant 8,541,312 - Wang , et al. September 24, 2 | 2013-09-24 |
| Method And Model For Monitoring Pretreatment Process Of Low-k Block Layer App 20130138415 - GU; Meimei ; et al. | 2013-05-30 |
| Dry-etch For Silicon-and-nitrogen-containing Films App 20130130507 - Wang; Yunyu ; et al. | 2013-05-23 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Nitrogen App 20130130506 - Wang; Yunyu ; et al. | 2013-05-23 |
| Selective Etch Of Silicon By Way Of Metastable Hydrogen Termination App 20130089988 - Wang; Anchuan ; et al. | 2013-04-11 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Nitrogen App 20130059440 - Wang; Yunyu ; et al. | 2013-03-07 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Oxygen App 20130052827 - Wang; Yunyu ; et al. | 2013-02-28 |
| Dry-etch For Silicon-and-nitrogen-containing Films App 20130045605 - Wang; Yunyu ; et al. | 2013-02-21 |
| Dry-etch For Silicon-and-carbon-containing Films App 20130034968 - Zhang; Jingchun ; et al. | 2013-02-07 |
| Methods For Etch Of Sin Films App 20120238102 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Methods For Etch Of Metal And Metal-oxide Films App 20120238103 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Remotely-excited Fluorine And Water Vapor Etch App 20120211462 - Zhang; Jingchun ; et al. | 2012-08-23 |
| Selective Etch For Silicon Films App 20110294300 - Zhang; Jingchun ; et al. | 2011-12-01 |
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