Zenzinger; Markus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zenzinger; Markus.The latest application filed is for "optical system for generating a light beam for treating a substrate".

Company Profile

0.4.7

Zenzinger; Markus - Ulm N/A DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 8,767,181 - Gruner , et al. July 1, 2	2014-07-01
Optical System For Generating A Light Beam For Treating A Substrate App 20120153189 - Wangler; Johannes ; et al.	2012-06-21
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20110069296 - GRUNER; Toralf ; et al.	2011-03-24
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,847,921 - Gruner , et al. December 7, 2	2010-12-07
Microlithographic Exposure Method As Well As A Projection Exposure System For Carrying Out The Method App 20090040496 - GRUNER; Toralf ; et al.	2009-02-12
Microlithographic exposure method as well as a projection exposure system for carrying out the method Grant 7,408,616 - Gruner , et al. August 5, 2	2008-08-05
Illumination System for a Microlithography Projection Exposure Installation App 20070263199 - Fiolka; Damian ; et al.	2007-11-15
Method for improving the optical polarization properties of a microlithographic projection exposure apparatus App 20060204204 - Zenzinger; Markus ; et al.	2006-09-14
Microlithographic exposure method as well as a projection exposure system for carrying out the method App 20050146704 - Gruner, Toralf ; et al.	2005-07-07
Retardation element made from cubic crystal and an optical system therewith App 20040218271 - Hartmaier, Juergen ; et al.	2004-11-04

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