Zawalski; Wade
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zawalski; Wade.The latest application filed is for "method for providing pulsed plasma during a portion of a semiconductor wafer process".
- Zawalski; Wade - Sunnyvale CA
- ZAWALSKI, WADE - SAN FRANCISCO CA
| Patent | Date |
|---|---|
| Plasma energy control by inducing plasma instability Grant 6,558,564 - Loewenhardt , et al. May 6, 2 | 2003-05-06 |
| Method For Providing Pulsed Plasma During A Portion Of A Semiconductor Wafer Process App 20020052111 - PATERSON, ALEX ; et al. | 2002-05-02 |
| Plasma assisted processing chamber with separate control of species density Grant 6,352,049 - Yin , et al. March 5, 2 | 2002-03-05 |
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