Zarowin; Charles B.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Zarowin; Charles B..The latest application filed is for "system for improving the total thickness variation of a wafer".

Company Profile

0.12.0

Zarowin; Charles B. - Studio City CA
Zarowin; Charles B. - Pacific Palisades CA
Zarowin; Charles B. - Rowayton CT
Zarowin; Charles B. - Tarrytown NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System for improving the total thickness variation of a wafer Grant 6,379,490 - Bollinger , et al. April 30, 2	2002-04-30
Plasma assisted chemical transport method and apparatus Grant 5,811,021 - Zarowin , et al. September 22, 1	1998-09-22
Method and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substrates Grant 5,376,224 - Zarowin December 27, 1	1994-12-27
Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and films Grant 5,336,355 - Zarowin , et al. August 9, 1	1994-08-09
Electrode assembly useful in confined plasma assisted chemical etching Grant 5,298,103 - Steinberg , et al. March 29, 1	1994-03-29
Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films Grant 5,290,382 - Zarowin , et al. March 1, 1	1994-03-01
Method to determine tool paths for thinning and correcting errors in thickness profiles of films Grant 5,291,415 - Zarowin , et al. March 1, 1	1994-03-01
Method and apparatus for removal of subsurface damage in semiconductor materials by plasma etching Grant 5,238,532 - Zarowin , et al. August 24, 1	1993-08-24
Optical figuring by plasma assisted chemical transport and etching apparatus therefor Grant 4,668,366 - Zarowin May 26, 1	1987-05-26
Diamond-like carbon films and process for production thereof Grant 4,647,512 - Venkataramanan , et al. March 3, 1	1987-03-03
Inductively coupled discharge for plasma etching and resist stripping Grant 4,431,898 - Reinberg , et al. February 14, 1	1984-02-14
Metal Vapor Discharge Tube Using Metal And Semi-metal Compounds In A Discharge Tube Grant 3,720,877 - Zarowin March 13, 1	1973-03-13

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