loadpatents
name:-0.046482086181641
name:-0.011559009552002
name:-0.00077414512634277
ZAO NIKON CO., LTD. Patent Filings

ZAO NIKON CO., LTD.

Patent Applications and Registrations

Patent applications and USPTO patent grants for ZAO NIKON CO., LTD..The latest application filed is for "substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method".

Company Profile
0.7.9
  • ZAO NIKON CO., LTD. - Katta-gun, Miyagi-ken N/A JP
  • Zao Nikon Co., Ltd. - Katta-gun JP
  • Zao Nikon Co., Ltd - Katta-Gun JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
Grant 9,097,986 - Ohta , et al. August 4, 2
2015-08-04
Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
Grant 8,755,025 - Tanno , et al. June 17, 2
2014-06-17
Substrate Conveyance Device And Substrate Conveyance Method, Exposure Apparatus And Exposure Method, Device Manufacturing Method
App 20130094006 - OHTA; Atsushi ;   et al.
2013-04-18
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
Grant 8,345,216 - Ohta , et al. January 1, 2
2013-01-01
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
Grant 8,107,055 - Ohta , et al. January 31, 2
2012-01-31
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
Grant 7,995,186 - Ohta , et al. August 9, 2
2011-08-09
Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
App 20110122393 - Tanno; Nobuyoshi ;   et al.
2011-05-26
Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
Grant 7,898,645 - Tanno , et al. March 1, 2
2011-03-01
Substrate carrying apparatus, exposure apparatus, and device manufacturing method
Grant 7,515,249 - Sato , et al. April 7, 2
2009-04-07
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
App 20070296940 - Ohta; Atsushi ;   et al.
2007-12-27
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
App 20070110916 - Ohta; Atsushi ;   et al.
2007-05-17
Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
App 20070052942 - Tanno; Nobuyoshi ;   et al.
2007-03-08
Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
App 20060256316 - Tanno; Nobuyoshi ;   et al.
2006-11-16
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
App 20060257553 - Ohta; Atsushi ;   et al.
2006-11-16
Substrate carrying apparatus, exposure apparatus, and device manufacturing method
App 20060250602 - Sato; Kei ;   et al.
2006-11-09

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