Patent | Date |
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Interferometer system for monitoring an object Grant 7,639,367 - Groot , et al. December 29, 2 | 2009-12-29 |
Interferometer System For Monitoring An Object App 20080165347 - Groot; Peter de ;   et al. | 2008-07-10 |
Apparatus and methods for high accuracy metrology and positioning of a body Grant 6,876,452 - Evans , et al. April 5, 2 | 2005-04-05 |
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere Grant 6,816,267 - Evans , et al. November 9, 2 | 2004-11-09 |
Apparatus and method for measuring aspherical optical surfaces and wavefronts Grant 6,771,375 - Zanoni August 3, 2 | 2004-08-03 |
Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry Grant 6,724,486 - Shull , et al. April 20, 2 | 2004-04-20 |
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer Grant 6,643,024 - Deck , et al. November 4, 2 | 2003-11-04 |
Apparatus and methods for high accuracy metrology and positioning of a body App 20030112445 - Evans, Christopher James ;   et al. | 2003-06-19 |
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere App 20030090798 - Evans, Christopher James ;   et al. | 2003-05-15 |
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer App 20030043380 - Deck, Leslie L. ;   et al. | 2003-03-06 |
Apparatus and method for measuring aspherical optical surfaces and wavefronts App 20030002048 - Zanoni, Carl A. | 2003-01-02 |
Interferometry system having reduced cyclic errors Grant 6,181,420 - Badami , et al. January 30, 2 | 2001-01-30 |
Dual high stability interferometer Grant 4,883,357 - Zanoni , et al. November 28, 1 | 1989-11-28 |
Linear and angular displacement measuring interferometer Grant 4,881,816 - Zanoni November 21, 1 | 1989-11-21 |
Method and apparatus for interference fringe center sensing Grant 4,169,980 - Zanoni October 2, 1 | 1979-10-02 |
Apparatus and method for measuring interference patterns and interferograms Grant 4,159,522 - Zanoni June 26, 1 | 1979-06-26 |
Scanning differential photoelectric autocollimator Grant 3,977,789 - Hunter , et al. August 31, 1 | 1976-08-31 |
Scanning photoelectric autocollimator Grant 3,975,102 - Rosenfeld , et al. * August 17, 1 | 1976-08-17 |
Apparatus for producing a scanning laser beam of constant linear velocity Grant 3,961,838 - Zanoni * June 8, 1 | 1976-06-08 |
Edge-sensing with a scanning laser beam Grant 3,907,439 - Zanoni September 23, 1 | 1975-09-23 |
Noncontact surface profilometer Grant 3,885,875 - Rosenfeld , et al. May 27, 1 | 1975-05-27 |
Optical Noncontacting Gauge Grant 3,856,412 - Zanoni December 24, 1 | 1974-12-24 |
Optical Noncontacting Diameter Gauge Grant 3,856,411 - Zanoni December 24, 1 | 1974-12-24 |
Differential Optical Noncontacting Diameter Gauge Utilizing A Pair Of Linearly Scanning Light Beams Sequentially Scanning The Test Piece Grant 3,853,406 - Zanoni December 10, 1 | 1974-12-10 |
Detecting The Position Of A Surface By Focus Modulating The Illuminating Beam Grant 3,768,910 - Zanoni October 30, 1 | 1973-10-30 |