Zalubovsky; Sergey
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zalubovsky; Sergey.The latest application filed is for "full beam metrology for x-ray scatterometry systems".
- Zalubovsky; Sergey - San Jose CA
| Patent | Date |
|---|---|
| Full Beam Metrology For X-Ray Scatterometry Systems App 20220268714 - Gellineau; Antonio Arion ; et al. | 2022-08-25 |
| Full beam metrology for x-ray scatterometry systems Grant 11,313,816 - Gellineau , et al. April 26, 2 | 2022-04-26 |
| Transmission Small-Angle X-Ray Scattering Metrology System App 20210088325 - Shchegrov; Andrei V. ; et al. | 2021-03-25 |
| Full Beam Metrology For X-Ray Scatterometry Systems App 20200300790 - Gellineau; Antonio Arion ; et al. | 2020-09-24 |
| Full beam metrology for X-ray scatterometry systems Grant 10,775,323 - Gellineau , et al. Sept | 2020-09-15 |
| Transmission small-angle X-ray scattering metrology system Grant 10,767,978 - Shchegrov , et al. Sep | 2020-09-08 |
| Liquid metal rotating anode X-ray source for semiconductor metrology Grant 10,748,736 - Zalubovsky A | 2020-08-18 |
| Liquid Metal Rotating Anode X-Ray Source For Semiconductor Metrology App 20190115184 - Zalubovsky; Sergey | 2019-04-18 |
| Transmission Small-Angle X-Ray Scattering Metrology System App 20180299259 - Shchegrov; Andrei V. ; et al. | 2018-10-18 |
| Full Beam Metrology For X-Ray Scatterometry Systems App 20180106735 - Gellineau; Antonio Arion ; et al. | 2018-04-19 |
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