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Patent applications and USPTO patent grants for Zagwijn; Peter.The latest application filed is for "cyclic aluminum nitride deposition in a batch reactor".
Patent | Date |
---|---|
Cyclic aluminum nitride deposition in a batch reactor Grant 9,552,979 - Knaepen , et al. January 24, 2 | 2017-01-24 |
Cyclic Aluminum Nitride Deposition In A Batch Reactor App 20140357090 - Knaepen; Werner ;   et al. | 2014-12-04 |
Method for forming a silicon dioxide/metal oxide-nanolaminate with a desired wet etch rate Grant 8,242,029 - Zagwijn , et al. August 14, 2 | 2012-08-14 |
Method For Forming A Silicon Dioxide/metal Oxide-nanolaminate With A Desired Wet Etch Rate App 20110121430 - Zagwijn; Peter ;   et al. | 2011-05-26 |
Deposition of complex nitride films Grant 7,691,757 - Haukka , et al. April 6, 2 | 2010-04-06 |
In Situ Deposition Of Different Metal-containing Films Using Cyclopentadienyl Metal Precursors App 20090035946 - Pierreux; Dieter ;   et al. | 2009-02-05 |
Deposition Of Complex Nitride Films App 20080003838 - Haukka; Suvi P. ;   et al. | 2008-01-03 |
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