| Patent | Date |
|---|
Reflective Optical Element
App 20210132269 - FORCHT; Konstantin ; et al. | 2021-05-06 |
Optical Element and Method of Making an Optical Element
App 20200278480 - Beder; Christian ; et al. | 2020-09-03 |
Optical element and method of making an optical element
Grant 10,698,135 - Beder , et al. | 2020-06-30 |
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,578,976 - Bleidistel , et al. | 2020-03-03 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20190101832 - Bleidistel; Sascha ; et al. | 2019-04-04 |
Catadioptric projection objective including a reflective optical component and a measuring device
Grant 10,146,137 - Bleidistel , et al. De | 2018-12-04 |
EUV mirror and optical system comprising EUV mirror
Grant 9,915,876 - Schicketanz , et al. March 13, 2 | 2018-03-13 |
Optical Element And Method Of Making An Optical Element
App 20170351007 - Beder; Christian ; et al. | 2017-12-07 |
Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element
Grant 9,684,252 - Zaczek , et al. June 20, 2 | 2017-06-20 |
Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective
Grant 9,494,718 - Muellender , et al. November 15, 2 | 2016-11-15 |
Euv Mirror And Optical System Comprising Euv Mirror
App 20160195648 - Schicketanz; Thomas ; et al. | 2016-07-07 |
Reflective optical imaging system
Grant 9,188,771 - Dodoc , et al. November 17, 2 | 2015-11-17 |
Projection exposure system and projection exposure method
Grant 9,146,475 - Graupner , et al. September 29, 2 | 2015-09-29 |
Optical system for EUV lithography with a charged-particle source
Grant 8,546,776 - Ehm , et al. October 1, 2 | 2013-10-01 |
Projection Exposure System and Projection Exposure Method
App 20130182234 - Graupner; Paul ; et al. | 2013-07-18 |
Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same
Grant 8,488,103 - Pazidis , et al. July 16, 2 | 2013-07-16 |
Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus
Grant 8,435,726 - Pazidis , et al. May 7, 2 | 2013-05-07 |
Optical System For Euv Lithography With A Charged-particle Source
App 20130099132 - EHM; Dirk Heinrich ; et al. | 2013-04-25 |
Mirror For The Euv Wavelength Range, Substrate For Such A Mirror, Projection Objective For Microlithography Comprising Such A Mirror Or Such A Substrate, And Projection Exposure Apparatus For Microlithography Comprising Such A Projection Objective
App 20130038929 - MUELLENDER; Stephan ; et al. | 2013-02-14 |
Reflective Optical Imaging System
App 20120224160 - Dodoc; Aurelian ; et al. | 2012-09-06 |
Catadioptric Projection Objective Including A Reflective Optical Component And A Measuring Device
App 20120218536 - Bleidistel; Sascha ; et al. | 2012-08-30 |
Mirror For The Euv Wavelength Range, Projection Objective For Microlithography Cromprising Such A Mirror, And Projection Exposure Apparatus For Microlithography Comprising Such A Projection Objective
App 20120212810 - Paul; Hans-Jochen ; et al. | 2012-08-23 |
Mirror For Euv Wavelengths, Projection Objective For Microlithography Having Such Mirror And Projection Exposure Apparatus Having Such Projection Objective
App 20120134015 - PAUL; Hans-Jochen ; et al. | 2012-05-31 |
Optical Element With An Antireflection Coating, Projection Objective, And Exposure Apparatus Comprising Such An Element
App 20120038897 - ZACZEK; Christoph ; et al. | 2012-02-16 |
Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element
Grant 8,049,964 - Zaczek , et al. November 1, 2 | 2011-11-01 |
Optical Element For Reflection Of Uv Radiation, Method For Manufacturing The Same And Projection Exposure Apparatus Comprising The Same
App 20100290021 - PAZIDIS; Alexandra ; et al. | 2010-11-18 |
Methods For Producing An Antireflection Surface On An Optical Element, Optical Element And Associated Optical Arrangement
App 20100149510 - ZACZEK; Christoph ; et al. | 2010-06-17 |
Devices and methods for inspecting optical elements with a view to contamination
Grant 7,659,976 - Kaller , et al. February 9, 2 | 2010-02-09 |
Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the same
Grant 7,583,443 - Zaczek September 1, 2 | 2009-09-01 |
Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the same
App 20090128894 - Zaczek; Christoph | 2009-05-21 |
Microlithographic exposure apparatus
Grant 7,518,797 - Pazidis , et al. April 14, 2 | 2009-04-14 |
Method Of Processing An Optical Element And An Optical Element, In Particular For A Microlithographic Projection Exposure Apparatus
App 20080309905 - PAZIDIS; Alexandra ; et al. | 2008-12-18 |
Projection Objective For Immersion Lithography
App 20080297745 - WEISSENRIEDER; Karl-Stefan ; et al. | 2008-12-04 |
Projection objective for immersion lithography
Grant 7,460,206 - Weissenrieder , et al. December 2, 2 | 2008-12-02 |
Projection Objective For Immersion Lithography
App 20080291419 - Weissenrieder; Karl-Stefan ; et al. | 2008-11-27 |
Optical Element with an Antireflection Coating, Projection Objective, and Exposure Apparatus Comprising Such an Element
App 20080192335 - Zaczek; Christoph ; et al. | 2008-08-14 |
Objective with crystal lenses
App 20070242250 - Goehnermeier; Aksel ; et al. | 2007-10-18 |
Objective with crystal lenses
Grant 7,239,447 - Goehnermeier , et al. July 3, 2 | 2007-07-03 |
Devices and methods for inspecting optical elements with a view to contamination
App 20070132989 - Kaller; Julian ; et al. | 2007-06-14 |
Microlithographic exposure apparatus
App 20070128453 - Pazidis; Alexandra ; et al. | 2007-06-07 |
Imaging System For A Microlithographic Projection Exposure System
App 20070024982 - Stickel; Franz Josef ; et al. | 2007-02-01 |
Optical element, in particular for an objective or an illumination system of a microlithographic projection exposure apparatus
App 20070007491 - Mueller; Ralf ; et al. | 2007-01-11 |
Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the same
App 20060262389 - Zaczek; Christoph | 2006-11-23 |
Optical component and coating system for coating substrates for optical components
Grant 7,093,937 - Bauer , et al. August 22, 2 | 2006-08-22 |
Objective with fluoride crystal lenses
App 20060171020 - Krahmer; Daniel ; et al. | 2006-08-03 |
Method for making an optical system with coated optical components and optical system made by the method
App 20060132917 - Zaczek; Christoph ; et al. | 2006-06-22 |
Projection objective for microlithography
App 20050264884 - Zaczek, Christoph ; et al. | 2005-12-01 |
Optical imaging system, in particular catadioptric reduction objective
App 20050254120 - Zaczek, Christoph ; et al. | 2005-11-17 |
Catadioptric reduction objective having a polarization beamsplitter
App 20050243435 - Zaczek, Christoph ; et al. | 2005-11-03 |
Projection objective for immersion lithography
App 20050225737 - Weissenrieder, Karl-Stefan ; et al. | 2005-10-13 |
Objective with crystal lenses
App 20050157401 - Goehnermeier, Aksel ; et al. | 2005-07-21 |
Optical component and coating system for coating substrates for optical components
App 20050146683 - Bauer, Harry ; et al. | 2005-07-07 |
Objective with fluoride crystal lenses
App 20050122594 - Krahmer, Daniel ; et al. | 2005-06-09 |
Method and coating system for coating substrates for optical components
Grant 6,863,398 - Bauer , et al. March 8, 2 | 2005-03-08 |
Catadioptric objective
Grant 6,842,294 - Holderer , et al. January 11, 2 | 2005-01-11 |
Objective with fluoride crystal lenses
App 20040190151 - Krahmer, Daniel ; et al. | 2004-09-30 |
Objective with fluoride crystal lenses
App 20040105170 - Krahmer, Daniel ; et al. | 2004-06-03 |
Method and coating system for coating substrates for optical components
App 20030082298 - Bauer, Harry ; et al. | 2003-05-01 |
| 