ZAAL; Koen Jacobus Johannes Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for ZAAL; Koen Jacobus Johannes Maria.The latest application filed is for "lithographic apparatus and device manufacturing method".

Company Profile

6.61.40

ZAAL; Koen Jacobus Johannes Maria - Eindhoven NL
Zaal; Koen Jacobus Johannes Maria - Veldhoven NL
- Eindhoven NL
Zaal; Koen Jacobus Johannes Maria - Eindoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic Apparatus And Device Manufacturing Method App 20220197154 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2022-06-23
Lithographic apparatus and device manufacturing method Grant 11,275,316 - Zaal , et al. March 15, 2	2022-03-15
Projection system and mirror and radiation source for a lithographic apparatus Grant 11,150,560 - Van De Kerkhof , et al. October 19, 2	2021-10-19
Lithographic Apparatus And Device Manufacturing Method App 20200393768 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2020-12-17
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20200285155 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2020-09-10
Lithographic apparatus and device manufacturing method Grant 10,761,433 - Zaal , et al. Sep	2020-09-01
Projection system and mirror and radiation source for a lithographic apparatus Grant 10,732,511 - Van De Kerkhof , et al.	2020-08-04
Lithographic Apparatus And Device Manufacturing Method App 20190196342 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2019-06-27
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20190171109 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2019-06-06
Lithographic apparatus and device manufacturing method Grant 10,222,711 - Zaal , et al.	2019-03-05
Projection system and minor and radiation source for a lithographic apparatus Grant 10,216,093 - Van De Kerkhof , et al. Feb	2019-02-26
Lithographic Apparatus And Device Manufacturing Method App 20180113388 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2018-04-26
Lithographic apparatus and device manufacturing method Grant 9,851,644 - Zaal , et al. December 26, 2	2017-12-26
Stage system and lithographic apparatus comprising such stage system Grant 9,785,060 - Beerens , et al. October 10, 2	2017-10-10
Lithographic apparatus and device manufacturing method Grant 9,618,859 - Koevoets , et al. April 11, 2	2017-04-11
Lithographic apparatus and device manufacturing method Grant 9,581,916 - Ottens , et al. February 28, 2	2017-02-28
Lithographic Apparatus And Device Manufacturing Method App 20160349629 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2016-12-01
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2	2016-11-15
Support, lithographic apparatus and device manufacturing method Grant 9,470,969 - Cadee , et al. October 18, 2	2016-10-18
Lithographic apparatus and device manufacturing method Grant 9,436,096 - Zaal , et al. September 6, 2	2016-09-06
Lithographic apparatus comprising a support for holding an object, and a support for use therein Grant 9,195,150 - Cadee , et al. November 24, 2	2015-11-24
Lithographic apparatus and device manufacturing method Grant 9,188,882 - Ottens , et al. November 17, 2	2015-11-17
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20150323872 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2015-11-12
Stage System And Lithographic Apparatus Comprising Such Stage System App 20150227060 - Beerens; Ruud Antonius Catharina Maria ; et al.	2015-08-13
Lithographic Apparatus And Device Manufacturing Method App 20150116676 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2015-04-30
Rotatable Frame For a Lithographic Apparatus App 20150034788 - Bleeker; Arno Jan ; et al.	2015-02-05
Lithographic apparatus and device manufacturing method Grant 8,947,631 - Zaal , et al. February 3, 2	2015-02-03
Lithographic apparatus, device manufacturing method, and substrate exchanging method Grant 8,947,636 - Cadee , et al. February 3, 2	2015-02-03
Lithographic apparatus and device manufacturing method Grant 8,941,810 - Zaal , et al. January 27, 2	2015-01-27
Lithographic Apparatus Comprising a Support for Holding an Object, and a Support for Use therein App 20150002832 - Cadee; Theodorus Petrus Maria ; et al.	2015-01-01
Lithographic Apparatus and Device Manufacturing Method App 20140340659 - Van Schoot; Jan Bernard Plechelmus ; et al.	2014-11-20
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ; et al.	2014-11-20
Lithographic apparatus and device manufacturing method Grant 8,749,754 - Streefkerk , et al. June 10, 2	2014-06-10
Lithographic apparatus and device manufacturing method Grant 8,743,339 - Zaal , et al. June 3, 2	2014-06-03
Apparatus and method for contactless handling of an object Grant 8,616,598 - Cadee , et al. December 31, 2	2013-12-31
Apparatus and method for contactless handling of an object Grant 08616598 -	2013-12-31
Lithographic apparatus and device manufacturing method Grant 8,553,201 - Streefkerk , et al. October 8, 2	2013-10-08
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2	2013-08-20
Support, Lithographic Apparatus and Device Manufacturing Method App 20130164688 - CADEE; Theodorus Petrus Maria ; et al.	2013-06-27
Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object Grant 8,457,385 - Van Der Wijst , et al. June 4, 2	2013-06-04
Apparatus And Method For Contactless Handling Of An Object App 20110280703 - CADEE; Theodorus Petrus Maria ; et al.	2011-11-17
Lithographic Apparatus, Device Manufacturing Method, And Substrate Exchanging Method App 20110242518 - Cadee; Theodorus Petrus Maria ; et al.	2011-10-06
Lithographic Apparatus And Device Manufacturing Method App 20110241259 - OTTENS; Joost Jeroen ; et al.	2011-10-06
Lithographic Apparatus And Device Manufacturing Method App 20110222036 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2011-09-15
Lithographic Apparatus And Device Manufacturing Method App 20110222035 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2011-09-15
Measurement System and Lithographic Apparatus for Measuring a Position Dependent Signal of a Movable Object App 20110141447 - VAN DER WIJST; Marc Wilhelmus Maria ; et al.	2011-06-16
Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object Grant 7,903,866 - Van Der Wijst , et al. March 8, 2	2011-03-08
Lithographic Apparatus App 20100302518 - VAN EIJK; Jan ; et al.	2010-12-02
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method Grant 7,804,582 - Zaal , et al. September 28, 2	2010-09-28
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus Grant 7,746,447 - Zaal , et al. June 29, 2	2010-06-29
Lithographic Apparatus And Device Manufacturing Method App 20100073650 - ZAAL; Koen Jacobus Johannes Maria ; et al.	2010-03-25
Lithographic apparatus and device manufacturing method Grant 7,649,611 - Zaal , et al. January 19, 2	2010-01-19
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,528,935 - Zaal , et al. May 5, 2	2009-05-05
Lithographic apparatus and device manufacturing method Grant 7,492,440 - Zaal , et al. February 17, 2	2009-02-17
Lithographic apparatus and device manufacturing method Grant 7,486,381 - Streefkerk , et al. February 3, 2	2009-02-03
Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object App 20080240501 - Van Der Wijst; Marc Wilhelmus Maria ; et al.	2008-10-02
Method of calibrating a lithographic apparatus and device manufacturing method Grant 7,426,011 - Zaal , et al. September 16, 2	2008-09-16
Lithographic method Grant 7,423,725 - Zaal , et al. September 9, 2	2008-09-09
Lithographic apparatus and device manufacturing method Grant 7,411,657 - Ottens , et al. August 12, 2	2008-08-12
Lithographic apparatus and device manufacturing method Grant 7,327,439 - Zaal , et al. February 5, 2	2008-02-05
Lithographic apparatus and device manufacturing method Grant 7,327,437 - Cox , et al. February 5, 2	2008-02-05
Lithographic apparatus and method of a manufacturing device Grant 7,327,438 - Zaal , et al. February 5, 2	2008-02-05
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method App 20080024748 - Zaal; Koen Jacobus Johannes Maria ; et al.	2008-01-31
Using unflatness information of the substrate table or mask table for decreasing overlay Grant 7,239,368 - Oesterholt , et al. July 3, 2	2007-07-03
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus App 20070146664 - Zaal; Koen Jacobus Johannes Maria ; et al.	2007-06-28
Movable carriage for a lithographic apparatus and device manufacturing method Grant 7,230,254 - Terken , et al. June 12, 2	2007-06-12
Lithographic apparatus and device manufacturing method Grant 7,227,619 - Zaal , et al. June 5, 2	2007-06-05
Method of calibrating a lithographic apparatus and device manufacturing method App 20070058152 - Zaal; Koen Jacobus Johannes Maria ; et al.	2007-03-15
Lithographic method App 20070052940 - Zaal; Koen Jacobus Johannes Maria ; et al.	2007-03-08
Electrostatic clamp assembly for a lithographic apparatus Grant 7,187,433 - Ottens , et al. March 6, 2	2007-03-06
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,161,662 - Ottens , et al. January 9, 2	2007-01-09
Lithographic apparatus, article support member, and method Grant 7,133,120 - Zaal , et al. November 7, 2	2006-11-07
Lithographic apparatus and device manufacturing method Grant 7,119,885 - Ottens , et al. October 10, 2	2006-10-10
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,113,262 - Van Empel , et al. September 26, 2	2006-09-26
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,110,091 - Zaal , et al. September 19, 2	2006-09-19
Lithographic apparatus, substrate holder and method of manufacturing Grant 7,110,085 - Zaal , et al. September 19, 2	2006-09-19
Using unflatness information of the substrate table or mask table for decreasing overlay App 20060114436 - Oesterholt; Rene ; et al.	2006-06-01
Lithographic apparatus and device manufacturing method Grant 7,027,132 - Ottens , et al. April 11, 2	2006-04-11
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,019,816 - Ottens , et al. March 28, 2	2006-03-28
Lithographic apparatus and device manufacturing method Grant 7,019,820 - Ottens , et al. March 28, 2	2006-03-28
Movable carriage for a lithographic apparatus and device manufacturing method App 20060011855 - Terken; Martinus Arnoldus Henricus ; et al.	2006-01-19
Lithographic apparatus and device manufacturing method App 20050259233 - Streefkerk, Bob ; et al.	2005-11-24
Lithographic apparatus, article support member, and method App 20050248746 - Zaal, Koen Jacobus Johannes Maria ; et al.	2005-11-10
Electrostatic clamp assembly for a lithographic apparatus App 20050174555 - Ottens, Joost Jeroen ; et al.	2005-08-11
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050134829 - Ottens, Joost Jeroen ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050128444 - Ottens, Joost Jeroen ; et al.	2005-06-16
Lithographic Apparatus And Device Manufacturing Method App 20050128463 - Ottens, Joost Jeroen ; et al.	2005-06-16
Lithographic apparatus and device manufacturing method App 20050117141 - Ottens, Joost Jeroen ; et al.	2005-06-02
Lithographic apparatus and device manufacturing method Grant 6,897,945 - Ottens , et al. May 24, 2	2005-05-24
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050030515 - Ottens, Joost Jeroen ; et al.	2005-02-10
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050024620 - Van Empel, Tjarko Adriaan Rudolf ; et al.	2005-02-03
Lithographic apparatus and method of a manufacturing device App 20050002010 - Zaal, Koen Jacobus Johannes Maria ; et al.	2005-01-06