Yung; Karmen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yung; Karmen.The latest application filed is for "process for fabrication of alternating phase shift masks".
- Yung; Karmen - Sunnyvale CA US
- Yung; Karmen - Santa Clara CA
| Patent | Date |
|---|---|
| Advanced mask patterning with patterning layer Grant 8,734,660 - Ma , et al. May 27, 2 | 2014-05-27 |
| Process for fabrication of alternating phase shift masks App 20090098469 - Chakravorty; Kishore K. ; et al. | 2009-04-16 |
| Advanced Mask Patterning With Patterning Layer App 20080308527 - MA; JIAN ; et al. | 2008-12-18 |
| Advanced mask patterning with patterning layer Grant 7,460,209 - Ma , et al. December 2, 2 | 2008-12-02 |
| Alternating phase shift masking App 20070231712 - Pang; Song ; et al. | 2007-10-04 |
| Advanced mask patterning with patterning layer App 20060215135 - Ma; Jian ; et al. | 2006-09-28 |
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