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Patent applications and USPTO patent grants for Yun; Ilgu.The latest application filed is for "apparatus for optical emission spectroscopy and plasma treatment apparatus".
Patent | Date |
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Apparatus for optical emission spectroscopy Grant 10,408,680 - Yun , et al. Sept | 2019-09-10 |
Tube-type lens, optical emission spectroscopy (OES) apparatus including the tube-type lens, plasma monitoring system including the OES apparatus, and method of manufacturing semiconductor device by using the plasma monitoring system Grant 10,107,681 - Kim , et al. October 23, 2 | 2018-10-23 |
Apparatus For Optical Emission Spectroscopy And Plasma Treatment Apparatus App 20160300699 - KIM; In-Joong ;   et al. | 2016-10-13 |
Apparatus For Optical Emission Spectroscopy App 20160216155 - YUN; Ilgu ;   et al. | 2016-07-28 |
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