Yun; Henry
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yun; Henry.The latest application filed is for "use of soft adhesive to attach pellicle to reticle".
- Yun; Henry - San Jose CA
- Yun; Henry - Sunnyvale CA
| Patent | Date |
|---|---|
| Use of soft adhesive to attach pellicle to reticle Grant 7,901,847 - Mushell , et al. March 8, 2 | 2011-03-08 |
| Low stress pellicle frames and reticle pellicle assemblies Grant 7,851,109 - Chakravorty , et al. December 14, 2 | 2010-12-14 |
| Removal of ionic residues or oxides and prevention of photo-induced defects, ionic crystal or oxide growth on photolithographic surfaces Grant 7,763,399 - Sengupta , et al. July 27, 2 | 2010-07-27 |
| Use of soft adhesive to attach pellicle to reticle App 20100143829 - Mushell; David ; et al. | 2010-06-10 |
| Low stress pellicle frames and reticle pellicle assemblies App 20090246644 - Chakravorty; Kishore K. ; et al. | 2009-10-01 |
| Process for fabrication of alternating phase shift masks App 20090098469 - Chakravorty; Kishore K. ; et al. | 2009-04-16 |
| Removal Of Ionic Residues Or Oxides And Prevention Of Photo-induced Defects, Ionic Crystal Or Oxide Growth On Photolithographic Surfaces App 20090061327 - Sengupta; Archita ; et al. | 2009-03-05 |
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