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Wiring structures including spacers and an airgap defined thereby, and methods of manufacturing the same
Grant 9,343,355 - Lim , et al. May 17, 2 | 2016-05-17 |
Semiconductor device and method of forming the same
Grant 9,184,091 - Song , et al. November 10, 2 | 2015-11-10 |
Semiconductor device
Grant 8,987,860 - Song , et al. March 24, 2 | 2015-03-24 |
Method of manufacturing a semiconductor device
Grant 8,946,077 - Lee , et al. February 3, 2 | 2015-02-03 |
Wiring Structures, Methods Of Manufacturing The Same, And Methods Of Manufacturing Semiconductor Devices Having The Same
App 20140264953 - LIM; Chae-Ho ; et al. | 2014-09-18 |
Semiconductor Device And Method Of Forming The Same
App 20140231892 - SONG; Bo-Young ; et al. | 2014-08-21 |
Method Of Manufacturing A Semiconductor Device
App 20140206186 - Lee; Hyeon-Kyu ; et al. | 2014-07-24 |
Semiconductor Device
App 20140159194 - SONG; Bo-young ; et al. | 2014-06-12 |
Semiconductor device having storage nodes and its method of fabrication
Grant 7,691,719 - Yun , et al. April 6, 2 | 2010-04-06 |
Dynamic random access memory device
Grant 7,557,410 - Lee , et al. July 7, 2 | 2009-07-07 |
Semiconductor devices having elongated contact plugs
Grant 7,547,938 - Yun , et al. June 16, 2 | 2009-06-16 |
Method of fabricating a semiconductor device
Grant 7,488,644 - Lee , et al. February 10, 2 | 2009-02-10 |
Semiconductor device and method of manufacturing the same
Grant 7,482,222 - Lee , et al. January 27, 2 | 2009-01-27 |
Semiconductor device including storage node and method of manufacturing the same
Grant 7,476,585 - Cho , et al. January 13, 2 | 2009-01-13 |
Self-Aligned buried contact pair
Grant 7,388,243 - Yun , et al. June 17, 2 | 2008-06-17 |
Semiconductor Devices Having Elongated Contact Plugs
App 20080088025 - Yun; Cheol-ju ; et al. | 2008-04-17 |
Methods of manufacturing semiconductor devices having elongated contact plugs
Grant 7,326,613 - Yun , et al. February 5, 2 | 2008-02-05 |
DRAM memory cell and method of manufacturing the same
Grant 7,321,146 - Yun , et al. January 22, 2 | 2008-01-22 |
Semiconductor Device And Method Of Manufacturing The Same
App 20080014695 - Lee; Jin-Woo ; et al. | 2008-01-17 |
Semiconductor device
Grant 7,307,305 - Lee , et al. December 11, 2 | 2007-12-11 |
Semiconductor Device And Method Of Manufacturing The Same
App 20070278548 - Lee; Jin-Woo ; et al. | 2007-12-06 |
Semiconductor Device And Method Of Manufacturing The Same
App 20070264769 - Lee; Jin-Woo ; et al. | 2007-11-15 |
Semiconductor Device
App 20070218682 - LEE; Jae-Goo ; et al. | 2007-09-20 |
Method of manufacturing a semiconductor memory device including a transistor
Grant 7,247,541 - Lee , et al. July 24, 2 | 2007-07-24 |
Semiconductor Device Including Storage Node And Method Of Manufacturing The Same
App 20070111437 - CHO; Chang-Hyun ; et al. | 2007-05-17 |
Method of forming a self-aligned contact structure using a sacrificial mask layer
Grant 7,205,232 - Yun , et al. April 17, 2 | 2007-04-17 |
Semiconductor device including storage node and method of manufacturing the same
Grant 7,180,118 - Cho , et al. February 20, 2 | 2007-02-20 |
Semiconductor device and method for forming same using multi-layered hard mask
Grant 7,166,507 - Yun January 23, 2 | 2007-01-23 |
Semiconductor Device Having Storage Nodes And Its Method Of Fabrication
App 20070015362 - YUN; Cheol-Ju ; et al. | 2007-01-18 |
Self-aligned buried contact pair
App 20060205147 - Yun; Cheol-Ju ; et al. | 2006-09-14 |
Storage node contact forming method and structure for use in semiconductor memory
Grant 7,078,292 - Park , et al. July 18, 2 | 2006-07-18 |
Dram memory cell and method of manufacturing the same
App 20060124979 - Yun; Cheol-ju ; et al. | 2006-06-15 |
Self-aligned buried contact pair and method of forming the same
Grant 7,056,786 - Yun , et al. June 6, 2 | 2006-06-06 |
DRAM memory cell and method of manufacturing the same
Grant 7,030,439 - Yun , et al. April 18, 2 | 2006-04-18 |
Method of cleaning semiconductor substrates after forming tungsten patterns
Grant 7,026,246 - Yun April 11, 2 | 2006-04-11 |
Methods of forming fuses using selective etching of capping layers
App 20060057783 - Yun; Cheol-ju ; et al. | 2006-03-16 |
Semiconductor device and method of manufacturing the same
App 20060006410 - Lee; Jin-Woo ; et al. | 2006-01-12 |
Method of forming self-aligned contact and method of manufacturing semiconductor memory device by using the same
App 20050272250 - Yun, Cheol-Ju ; et al. | 2005-12-08 |
Method of forming self-aligned contact in fabricating semiconductor device
Grant 6,967,150 - Yun , et al. November 22, 2 | 2005-11-22 |
Semiconductor device and method of manufacturing the same
App 20050218439 - Lee, Jae-Goo ; et al. | 2005-10-06 |
Semiconductor devices having elongated contact plugs and methods of manufacturing the same
App 20050218408 - Yun, Cheol-ju ; et al. | 2005-10-06 |
Semiconductor devices having plug contact holes extending downward from a main surface of a semiconductor substrate and methods of forming the same
App 20050186732 - Yun, Cheol-Ju | 2005-08-25 |
Method Of Forming Self-aligned Contact In Fabricating Semiconductor Device
App 20050186733 - Yun, Cheol-Ju ; et al. | 2005-08-25 |
Semiconductor device and method of manufacturing the same
Grant 6,916,738 - Lee , et al. July 12, 2 | 2005-07-12 |
Self-aligned buried contact pair and method of forming the same
App 20050046048 - Yun, Cheol-Ju ; et al. | 2005-03-03 |
Method of forming contacts in semiconductor device
App 20040266170 - Yun, Cheol-Ju | 2004-12-30 |
Storage node contact forming method and structure for use in semiconductor memory
App 20040266101 - Park, Je-Min ; et al. | 2004-12-30 |
Method of forming a self-aligned contact structure using a sacrificial mask layer
App 20040241974 - Yun, Cheol-Ju ; et al. | 2004-12-02 |
Semiconductor device including storage node and method of manufacturing the same
App 20040217407 - Cho, Chang-Hyun ; et al. | 2004-11-04 |
DRAM memory cell and method of manufacturing the same
App 20040178433 - Yun, Cheol-ju ; et al. | 2004-09-16 |
Semiconductor device and method of manufacturing the same
App 20040164328 - Lee, Jae-Goo ; et al. | 2004-08-26 |
Semiconductor device and method for forming same using multi-layered hard mask
App 20040161918 - Yun, Cheol-ju | 2004-08-19 |
Polishing head and chemical mechanical polishing apparatus including the same
Grant 6,773,338 - Yun , et al. August 10, 2 | 2004-08-10 |
Method of manufacturing semiconductor device
Grant 6,635,582 - Yun , et al. October 21, 2 | 2003-10-21 |
Polishing head and chemical mechanical polishing apparatus including the same
App 20030148718 - Yun, Cheol-Ju ; et al. | 2003-08-07 |
Methods of forming semiconductor devices
App 20030109145 - Yun, Cheol-Ju | 2003-06-12 |
Method Of Manufacturing Semiconductor Device
App 20010041455 - YUN, CHEOL-JU ; et al. | 2001-11-15 |
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