Yulin; Sergiy
Patent Applications and Registrations
Patent applications and USPTO patent grants for Yulin; Sergiy.The latest application filed is for "multilayer mirror for reflecting euv radiation and method for producing the same".
- Yulin; Sergiy - Jena DE
| Patent | Date |
|---|---|
| Multilayer Mirror for Reflecting EUV Radiation and Method for Producing the Same App 20190235141 - Naujok; Philipp ; et al. | 2019-08-01 |
| Thermally stable multilayer mirror for the EUV spectral range Grant 7,986,455 - Feigl , et al. July 26, 2 | 2011-07-26 |
| Thermally stable multilayer mirror for the EUV spectral region Grant 7,920,323 - Benoit , et al. April 5, 2 | 2011-04-05 |
| Thermally Stable Multilayer Mirror for the EUV Spectral Range App 20090009858 - Feigl; Torsten ; et al. | 2009-01-08 |
| Thermally Stable Multilayer Mirror for the Euv Spectral Region App 20080088916 - Benoit; Nicolas ; et al. | 2008-04-17 |
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